公开(公告)号：EP3033613A4

公开(公告)日：2017-06-14

申请号：EP14835869

申请日：2014-08-08

Applicant: SWINBURNE UNIV OF TECH

Inventor： JUODKAZIS SAULIUS ,  GERVINSKAS GEDIMINAS ,  SENIUTINAS GEDIMINAS

IPC: G01N23/225 ,  B82Y40/00 ,  G03F7/20 ,  G21K1/00 ,  G21K5/00 ,  H01J37/26 ,  H01J37/28 ,  H01J37/30

CPC classification number: H01J37/265 ,  B82Y40/00 ,  G01N23/225 ,  G01N2223/073 ,  G01N2223/351 ,  G01N2223/611 ,  G21K5/00 ,  H01J37/00 ,  H01J37/263 ,  H01J37/28 ,  H01J37/3002 ,  H01J2237/004 ,  H01J2237/0047 ,  H01J2237/28

Abstract: An apparatus for imaging or fabrication using charged particles, the apparatus including: a charged particle source configured to generate a charged particle beam of ions or electrons; a sample holder mounted relative to the charged particle source to hold a sample in the charged particle beam for the imaging or fabrication; and an optical source system configured to generate an optical beam, wherein the optical source system is mounted relative to the sample holder to direct the optical beam onto the sample to modify an electric charge of the sample during the imaging or fabrication to improve spatial resolution of the imaging or fabrication.

Abstract translation: 一种使用带电粒子进行成像或制造的设备，所述设备包括：带电粒子源，其被配置为产生离子或电子的带电粒子束; 相对于带电粒子源安装的样品架，以将样品保持在带电粒子束中用于成像或制造; 以及配置成产生光束的光源系统，其中所述光源系统相对于所述样本保持器安装以将所述光束引导到所述样本上以在所述成像或制造期间修改所述样本的电荷以改善 成像或制造。