IMAGE SENSOR USING BACKSIDE ILLUMINATION PHOTODIODE AND METHOD FOR MANUFACTURING THE SAME
    2.
    发明申请
    IMAGE SENSOR USING BACKSIDE ILLUMINATION PHOTODIODE AND METHOD FOR MANUFACTURING THE SAME 有权
    使用背景照明光电的图像传感器及其制造方法

    公开(公告)号:US20150115330A1

    公开(公告)日:2015-04-30

    申请号:US14529783

    申请日:2014-10-31

    CPC classification number: H01L27/14636 H01L27/14634 H01L27/1464 H01L27/1469

    Abstract: A technology capable of simplifying a process and securing a misalignment margin when bonding two wafers to manufacture an image sensor using backside illumination photodiodes. When manufacturing an image sensor through a 3D CIS (CMOS image sensor) manufacturing process, two wafers, that is, a first wafer and a second wafer are electrically connected using the vias of one wafer and the bonding pads of the other wafer. Also, when manufacturing an image sensor through a 3D CIS manufacturing process, two wafers are electrically connected using the vias of both the two wafers.

    Abstract translation: 这种技术能够简化工艺并且在使用背面照明光电二极管接合两个晶片以制造图像传感器时确保不对准裕度。 当通过3D CIS(CMOS图像传感器)制造工艺制造图像传感器时,使用一个晶片的通孔和另一个晶片的焊盘来电连接两个晶片,即第一晶片和第二晶片。 此外,当通过3D CIS制造工艺制造图像传感器时,两个晶片使用两个晶片的通孔电连接。

    Image sensor using backside illumination photodiode and method for manufacturing the same
    3.
    发明授权
    Image sensor using backside illumination photodiode and method for manufacturing the same 有权
    使用背面照明光电二极管的图像传感器及其制造方法

    公开(公告)号:US09553120B2

    公开(公告)日:2017-01-24

    申请号:US14529783

    申请日:2014-10-31

    CPC classification number: H01L27/14636 H01L27/14634 H01L27/1464 H01L27/1469

    Abstract: A technology capable of simplifying a process and securing a misalignment margin when bonding two wafers to manufacture an image sensor using backside illumination photodiodes. When manufacturing an image sensor through a 3D CIS (CMOS image sensor) manufacturing process, two wafers, that is, a first wafer and a second wafer are electrically connected using the vias of one wafer and the bonding pads of the other wafer. Also, when manufacturing an image sensor through a 3D CIS manufacturing process, two wafers are electrically connected using the vias of both the two wafers.

    Abstract translation: 这种技术能够简化工艺并且在使用背面照明光电二极管接合两个晶片以制造图像传感器时确保不对准裕度。 当通过3D CIS(CMOS图像传感器)制造工艺制造图像传感器时,使用一个晶片的通孔和另一个晶片的焊盘来电连接两个晶片,即第一晶片和第二晶片。 此外,当通过3D CIS制造工艺制造图像传感器时,两个晶片使用两个晶片的通孔电连接。

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