Optical switch controllable by vertical motion MEMS structure

    公开(公告)号:US11237335B1

    公开(公告)日:2022-02-01

    申请号:US16586249

    申请日:2019-09-27

    Abstract: MEMS-actuated optical switches can be implemented on photonic chips. These switches are compact, essentially planar, simple to implement and include only one moving MEMS component per switch. The switches exhibit low optical loss, require low power to operate, and are simple to control and easy to integrate with other optical devices. Each switch has two optical waveguides that are optically coupled in an ON switch state and not coupled in an OFF switch state. An end or a medial section of one of the two waveguides may translate between the ON and OFF states to affect the coupling. Alternatively, a coupling frustrator may translate between the ON and OFF states to affect the coupling.

    WHOLE ANGLE MEMS GYROSCOPE
    6.
    发明申请
    WHOLE ANGLE MEMS GYROSCOPE 审中-公开
    全角度MEMS陀螺仪

    公开(公告)号:US20160341551A1

    公开(公告)日:2016-11-24

    申请号:US15160421

    申请日:2016-05-20

    CPC classification number: G01C19/5726 G01C19/5684 G01C19/5733

    Abstract: According to one aspect, embodiments herein provide a gyroscope comprising a central anchor, a plurality of internal flexures, a plurality of masses, each mass coupled to the central anchor via at least one of the plurality of internal flexures and configured to translate in a plane of the gyroscope, and a plurality of mass-to-mass couplers, each mass-to-mass coupler coupled between two adjacent masses of the plurality of masses, and a plurality of transducers, each configured to perform at least one of driving and sensing motion of a corresponding one of the plurality of masses, wherein the plurality of transducers is configured to drive the plurality of masses in at least a first vibratory mode and a second vibratory mode.

    Abstract translation: 根据一个方面,本文的实施例提供了一种陀螺仪,其包括中心锚固体,多个内部挠曲件,多个质量块,每个质量块通过所述多个内部挠曲件中的至少一个连接到所述中心锚固件并且构造成在平面中平移 以及多个质量对质量耦合器,每个质量对质量耦合器耦合在所述多个质量块的两个相邻质量块之间,以及多个换能器,每个换能器被配置为执行驱动和感测中的至少一个 所述多个传感器中的相应一个质量块的运动被配置成以至少第一振动模式和第二振动模式驱动所述多个质量块。

    Atom and ion sources and sinks, and methods of fabricating the same

    公开(公告)号:US10334714B2

    公开(公告)日:2019-06-25

    申请号:US15724906

    申请日:2017-10-04

    Abstract: A bi-directional device for generating or absorbing atoms or ions. In some embodiments, the device comprises a solid-phase ion-conducting material, a first electrode positioned on a first surface of the solid-phase ion-conducting material, and a second electrode positioned on a second surface of the solid-phase ion-conducting material. The first electrode includes a plurality of triple phase boundaries, each located at an interface between the solid-phase ion-conducting material and the first electrode. A density of the triple phase boundaries is in the range of about 104 m/m2 to about 2×107 m/m2 on the first surface of the ion-conducting material. A method of operating the bi-directional device and a method of fabricating a bi-directional device are also provided.

    Whole angle MEMS gyroscope
    9.
    发明授权

    公开(公告)号:US10113873B2

    公开(公告)日:2018-10-30

    申请号:US15160421

    申请日:2016-05-20

    Abstract: According to one aspect, embodiments herein provide a gyroscope comprising a central anchor, a plurality of internal flexures, a plurality of masses, each mass coupled to the central anchor via at least one of the plurality of internal flexures and configured to translate in a plane of the gyroscope, and a plurality of mass-to-mass couplers, each mass-to-mass coupler coupled between two adjacent masses of the plurality of masses, and a plurality of transducers, each configured to perform at least one of driving and sensing motion of a corresponding one of the plurality of masses, wherein the plurality of transducers is configured to drive the plurality of masses in at least a first vibratory mode and a second vibratory mode.

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