公开(公告)号：WO2016022906A1

公开(公告)日：2016-02-11

申请号：PCT/US2015/044185

申请日：2015-08-07

Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

Inventor： DAYEH, Shadi A. ,  AZZAZY, Farid ,  LEE, Sang Heon

IPC: A61B5/04

CPC classification number: A61B5/0478 ,  B81B1/00 ,  B81B2201/0292 ,  B81B2203/0361 ,  B81B2203/04 ,  B81C1/00111 ,  B81C2201/013

Abstract: A preferred conformal penetrating multi electrode array includes a plastic substrate that is flexible enough to conform to cortical tissue. A plurality of penetrating semiconductor micro electrodes extend away from a surface of the flexible substrate and are stiff enough to penetrate cortical tissue. Electrode lines are encapsulated at least partially within the flexible substrate and electrically connected to the plurality of penetrating semiconductor microelectrodes. The penetrating semiconductor electrodes preferably include pointed metal tips. A preferred method of fabrication permits forming stiff penetrating electrodes on a substrate that is very flexible, and providing electrical connection to electrode lines within the substrate.

Abstract translation: 优选的共形穿透性多电极阵列包括足够柔性以符合皮质组织的塑料基底。 多个穿透半导体微电极远离柔性基底的表面延伸并且足够硬以穿透皮质组织。 电极线至少部分地封装在柔性基板内并电连接到多个穿透半导体微电极。 穿透半导体电极优选地包括尖锐的金属尖端。 优选的制造方法允许在非常柔性的基底上形成刚性穿透电极，并且提供与衬底内的电极线的电连接。

公开(公告)号：WO2017127551A1

公开(公告)日：2017-07-27

申请号：PCT/US2017/014143

申请日：2017-01-19

Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

Inventor： DAYEH, Shadi A. ,  CHEN, Renjie ,  LEE, Sang Heon ,  LIU, Ren ,  RO, Yun Goo ,  TANAKA, Atsunori ,  HWANG, Yoontae

IPC: B82B3/00 ,  B82B1/00 ,  B82Y5/00 ,  B82Y15/00 ,  A61B5/042 ,  A61B5/04

CPC classification number: A61B5/04001 ,  A61B2562/0285 ,  A61B2562/046 ,  A61B2562/125 ,  B81B2201/055 ,  B81C1/00111 ,  B82Y15/00

Abstract: A nanowire probe sensor array including a substrate with a metal pattern thereon. An array of semiconductor vertical nanowire probes extends away from the substrate, and at least some of probes, and preferably all, are individually electrically addressed through the metal pattern. The metal pattern is insulated with dielectric, and base and stem portions of the nanowires are also preferably insulated. A fabrication process patterns metal connections on a substrate. A semiconductor substrate is bonded to the metal pattern. The semiconductor substrate is etched to form the neural nanowire probes that are bonded to the metal pattern. Dielectric is then deposited to insulate the metal pattern.

Abstract translation: 纳米线探针传感器阵列，包括其上具有金属图案的衬底。 半导体垂直纳米线探针的阵列从衬底延伸出来，并且探针中的至少一些，并且优选地全部通过金属图案单独电寻址。 金属图案用电介质绝缘，并且纳米线的基部和杆部也优选地绝缘。 制造工艺在衬底上图案化金属连接。 半导体衬底结合到金属图案。 蚀刻半导体衬底以形成结合到金属图案的神经纳米线探针。 然后沉积电介质以绝缘金属图案。