公开(公告)号：WO2016145220A1

公开(公告)日：2016-09-15

申请号：PCT/US2016/021814

申请日：2016-03-10

Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

Inventor： DAYEH, Shadi A. ,  RO, Yun Goo ,  PARK, Namseok ,  TANAKA, Atsunori ,  VISHNIAKOU, Siarhei ,  YOUSSEF, Ahmed ,  BUCKWALTER, James ,  LEVY, Cooper

IPC: A61B5/04 ,  A61B5/0408 ,  H01L21/8238 ,  H01L27/142

CPC classification number: H01L27/142 ,  A61B5/0402 ,  A61B5/0476 ,  A61B5/0488 ,  A61B5/6802 ,  A61B2560/0214 ,  A61B2562/028 ,  A61B2562/125 ,  A61B2562/164 ,  B81B2201/0214 ,  B81C1/00238 ,  B81C2203/0792 ,  H01L31/042 ,  H02S40/44

Abstract: Methods and devices that monolithically integrate thin film elements/devices, e.g., environmental sensors, batteries and biosensors, with high performance integrated circuits, i.e., integrated circuits formed in a high quality device layer. Preferred embodiments further monolithically integrate a solar cell array. Preferred embodiments provide pin-size and integrated solar powered wearable electronic, ionic, molecular, radiation, etc. sensors and circuits.

Abstract translation: 将诸如环境传感器，电池和生物传感器的薄膜元件/器件单片集成到具有高性能集成电路，即在高质量器件层中形成的集成电路的方法和装置。 优选的实施例进一步整合了太阳能电池阵列。 优选实施例提供引脚尺寸和集成的太阳能驱动的可佩戴的电子，离子，分子，辐射等传感器和电路。

公开(公告)号：WO2017127551A1

公开(公告)日：2017-07-27

申请号：PCT/US2017/014143

申请日：2017-01-19

Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

Inventor： DAYEH, Shadi A. ,  CHEN, Renjie ,  LEE, Sang Heon ,  LIU, Ren ,  RO, Yun Goo ,  TANAKA, Atsunori ,  HWANG, Yoontae

IPC: B82B3/00 ,  B82B1/00 ,  B82Y5/00 ,  B82Y15/00 ,  A61B5/042 ,  A61B5/04

CPC classification number: A61B5/04001 ,  A61B2562/0285 ,  A61B2562/046 ,  A61B2562/125 ,  B81B2201/055 ,  B81C1/00111 ,  B82Y15/00

Abstract: A nanowire probe sensor array including a substrate with a metal pattern thereon. An array of semiconductor vertical nanowire probes extends away from the substrate, and at least some of probes, and preferably all, are individually electrically addressed through the metal pattern. The metal pattern is insulated with dielectric, and base and stem portions of the nanowires are also preferably insulated. A fabrication process patterns metal connections on a substrate. A semiconductor substrate is bonded to the metal pattern. The semiconductor substrate is etched to form the neural nanowire probes that are bonded to the metal pattern. Dielectric is then deposited to insulate the metal pattern.

Abstract translation: 纳米线探针传感器阵列，包括其上具有金属图案的衬底。 半导体垂直纳米线探针的阵列从衬底延伸出来，并且探针中的至少一些，并且优选地全部通过金属图案单独电寻址。 金属图案用电介质绝缘，并且纳米线的基部和杆部也优选地绝缘。 制造工艺在衬底上图案化金属连接。 半导体衬底结合到金属图案。 蚀刻半导体衬底以形成结合到金属图案的神经纳米线探针。 然后沉积电介质以绝缘金属图案。