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    PRESSURE SENSOR
    9.
    发明专利
    PRESSURE SENSOR 失效

    公开(公告)号：JPH0363537A

    公开(公告)日：1991-03-19

    申请号：JP19905289

    申请日：1989-07-31

    Applicant: SMC CORP ,  TORAY INDUSTRIES

    Inventor： TOCHIHARA TAKESHIGE ,  MINEGISHI KEIICHI ,  SHIMONO MASARU ,  KUWAJIMA HIROSHI

    IPC: G01L9/04

    Abstract: PURPOSE:To obtain excellent resistance to heat, water and corrosion by providing a diaphragm consisting of a ceramics sheet and strain gages consisting of ceramics resistors formed on this diaphragm. CONSTITUTION:The strain gages 3 consisting of the ceramics resistors are formed on the ceramics diaphragm 2, by which the strain gages 3 are formed of the ceramics over the entire part thereof. The durability to thermal high and low cycles by temp. changes is increased if the strain gages 3 are formed of the resistors 5 consisting of ruthenium oxide having the coefft. of thermal expansion appoximate to the coefft. of thermal expansion of the ceramics diaphragm 12. The adhesiveness to the resistors 5 is enhanced without increasing the internal strain of the diaphragm 2 by further subjecting the positions where the resistors 5 are formed to a chemical erosion treatment.

    CARBON DIOXIDE SENSOR
    10.
    发明专利
    CARBON DIOXIDE SENSOR 失效

    公开(公告)号：JPH0299854A

    公开(公告)日：1990-04-11

    申请号：JP25210888

    申请日：1988-10-07

    Applicant: TORAY INDUSTRIES

    Inventor： MATSUDA YOSHIO ,  SHIMONO MASARU ,  JINNO SHIGERU

    IPC: G01N27/406 ,  G01N27/416

    Abstract: PURPOSE:To enable the realization of a small and inexpensive sensor by measuring the concentration of carbon dioxide to be inspected using an Na conducting solid electrolyte by a direct interpolation formula to secure a high accuracy and a high stability. CONSTITUTION:An electrically insulating material 1 is a tubular body with both ends thereof opened and a heating element 6 is arranged on an outer surface thereof while an anode electrode 4 on the inner surface thereof. A block of an Na conducting solid electrolyte is inserted into a hollow part of the insulating material so as not to contact the inner surface thereof directly. The electrolyte 2 has a cathode electrode 3 formed at one end 2b thereof and a layer 5 of Na2CO3 is provided to bridge between the other end thereof and the electrode 4. When a gas to be inspected having carbon dioxide contacts this sensor, an electromotive force is generated between the electrodes 3 and 4 in proportion to the concentration of the carbon dioxide (partial pressure). If a relationship between the gas and the electromotive force is prepared by a calibration curve, the concentration of carbon dioxide in the gas to be inspected can be learned from the electromotive force when the sensor is inserted into the gas to be inspected. Thus, the electrolyte 2 and the electrode 4 are so arranged as not to contact each other directly, thereby achieving a higher accuracy and stability.

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