公开(公告)号：JP2001273856A

公开(公告)日：2001-10-05

申请号：JP2000085362

申请日：2000-03-24

Applicant: TOSHIBA CORP

Inventor： ITO YOSHIAKI ,  NAKAGAWA SHINICHIRO ,  MURAI TAKASHI ,  INOUE MASACHIKA

IPC: H01J29/07

Abstract: PROBLEM TO BE SOLVED: To provide a color cathode ray tube in which the displacement of a mask body to a panel and a mask frame can be reduced and display quality can be enhanced. SOLUTION: The shadow mask of this color cathode ray tube has a rectangular mask body 34 consisting of a nearly rectangular main plane 38 and a skirt 40 formed by bending around the main plane, and a rectangular mask frame 35 which is attached to the outside of the skirt. The skirt has an opening edge extending almost in parallel to the periphery of the main plane, plural snicks 44 extending from each opening edge towards the periphery of the main plane, and plural tabs 50 which are defined between adjacent two snicks and fixed to the inside of the mask frame, and near the upper edge of the snicks, recesses 52a, 52b extending in the direction crossing the snicks are formed the mask frame side as concave.

公开(公告)号：JPH1167118A

公开(公告)日：1999-03-09

申请号：JP21639097

申请日：1997-08-11

Applicant: TOSHIBA CORP

Inventor： SHIMIZU NORIO ,  NAKAGAWA SHINICHIRO ,  INOUE MASACHIKA

IPC: H01J29/07 ,  H01J31/20

Abstract: PROBLEM TO BE SOLVED: To provide a color picture tube which eliminates the deterioration of beam landing without decreasing the strength, even if a mask frame is made light-weight. SOLUTION: This picture tube is constituted to support a shadow mask 30 by a stud pin 22 installed in a panel 3 and an elastic support 21 which is installed on a mask frame 36. A differential step part 38 which is projected outward on at least one place of the mask frame 36 installed on the circumferential part of a mask main body 33, and at least one bead part 39 which is projected inward are formed. One of the bead parts 39 is arranged near the differential step part 38 to take a position located closer to the center side of a sidewall part than to the differential step part 38.

公开(公告)号：JPH10334822A

公开(公告)日：1998-12-18

申请号：JP14135097

申请日：1997-05-30

Applicant: TOSHIBA CORP

Inventor： SHIMIZU NORIO ,  NAKAGAWA SHINICHIRO ,  INOUE MASACHIKA

IPC: H01J29/07 ,  H01J31/20

Abstract: PROBLEM TO BE SOLVED: To provide a shadow mask with a structure for which of howling, deformations and partial domings hardly occur by giving the sizes different from each other before and after the mounting of a mask frame, to a space between the opening edges of the opposite skirt part near at least a minor axis in the minor axis and a major axis of a mask body. SOLUTION: A curved surface of a mask body 32 before it is combined with a mask frame, has a large curvature near a center. A skirt part 36a near a minor axis of the mask body 32 is cut and raised, a space Lss of the opening edges of the cut and risen skirt part 36a, satisfies Lsf

公开(公告)号：JPH10199436A

公开(公告)日：1998-07-31

申请号：JP363297

申请日：1997-01-13

Applicant: TOSHIBA CORP

Inventor： OHAMA SHINJI ,  SHIMIZU NORIO ,  NAKAGAWA SHINICHIRO ,  INOUE MASACHIKA

IPC: H01J9/14 ,  H01J29/07 ,  H01J31/20

Abstract: PROBLEM TO BE SOLVED: To provide a color picture tube having sufficient curved surface holding strength even if a shadow mask is flattened, and a manufacturing method therefor. SOLUTION: In this color picture tube, a substantially rectangular shadow mask is arranged on the inside of a panel having a substantially rectangular effective part, and this shadow mask comprises a substantially rectangular frame and a substantially rectangular mask body where a large number of electron beam passing holes are formed in an effective surface composed of a curved surface opposed to the effective part and a peripheral part of this effective surface is fixed to the frame. In this case, the effective surface 23 of the mask body 21 is formed in a cylindrical curved surface on which a radius of curvature in the major axis direction is set almost infinite and a radius of curvature in the minor axis direction is set almost constant.

公开(公告)号：JP2012064791A

公开(公告)日：2012-03-29

申请号：JP2010208158

申请日：2010-09-16

Applicant: Toshiba Corp ,  株式会社東芝

Inventor： NAKAGAWA SHINICHIRO

IPC: H01L21/027 ,  G03F1/70

Abstract: PROBLEM TO BE SOLVED: To provide an exposure method, an exposure device, and a manufacturing method of a semiconductor device, capable of supplying an optimal exposure amount distribution on a wafer even if a dimensional error exists between a device pattern and an exposure amount adjustment test pattern.SOLUTION: The exposure method includes: placing a photo mask having a mask pattern including the device pattern and the exposure amount adjustment test pattern; acquiring relation information between the exposure amount and the dimension variation amount of a resist pattern on the wafer, using the test pattern of the photo mask; measuring the dimensional error between the device pattern and the test pattern; setting exposure amount distribution information on the mask pattern, based on the relation information and the dimensional error; and exposing the resist on the wafer based on the exposure amount distribution information to transfer the mask pattern to the resist.

Abstract translation: 要解决的问题：为了提供能够在晶片上提供最佳曝光量分布的曝光方法，曝光装置和制造方法，即使在器件图案和 曝光量调整测试图案。 曝光方法包括：放置具有包括装置图案和曝光量调整测试图案的掩模图案的光掩模; 使用所述光掩模的测试图案来获取所述曝光量和所述晶片上的抗蚀剂图案的尺寸变化量之间的关系信息; 测量设备图案和测试图案之间的尺寸误差; 基于所述关系信息和所述尺寸误差来设置所述掩模图案上的曝光量分布信息; 并且基于曝光量分布信息将抗蚀剂曝光在晶片上，以将掩模图案转印到抗蚀剂上。 版权所有（C）2012，JPO＆INPIT

公开(公告)号：JP2009293953A

公开(公告)日：2009-12-17

申请号：JP2008144922

申请日：2008-06-02

Applicant: Toshiba Corp ,  株式会社東芝

Inventor： NAKAGAWA SHINICHIRO

IPC: G01N21/956

Abstract: PROBLEM TO BE SOLVED: To provide a foreign matter inspection device and a foreign matter inspection method capable of detecting foreign matter with appropriate sensitivity.
SOLUTION: The foreign matter inspection device includes: a foreign matter detection section for detecting foreign matter on a photomask with prescribed sensitivity; a detection sensitivity information acquisition section for acquiring detection sensitivity information according to usage conditions of an aligner; and a sensitivity change section for changing the sensitivity of the foreign matter detection section, based on the detection sensitivity information.
COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：提供能够以适当的灵敏度检测异物的异物检查装置和异物检查方法。 异物检查装置包括：用于以规定的灵敏度检测光掩模上的异物的异物检测部; 检测灵敏度信息获取部分，用于根据对准器的使用条件获取检测灵敏度信息; 以及用于根据检测灵敏度信息改变异物检测部分的灵敏度的灵敏度变化部分。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：JP2007266378A

公开(公告)日：2007-10-11

申请号：JP2006090424

申请日：2006-03-29

Applicant: Toshiba Corp ,  株式会社東芝

Inventor： FUKUHARA KAZUYA ,  NAKAGAWA SHINICHIRO ,  SHIOBARA HIDESHI ,  KAWAMURA DAISUKE

IPC: H01L21/027 ,  G03F7/20

Abstract: PROBLEM TO BE SOLVED: To provide an exposure apparatus with which a focus error at the time of exposure is avoided and an improvement of yield of the semiconductor device can be achieved, and to provide a manufacturing method of a semiconductor device. SOLUTION: The exposure apparatus is equipped with: a substrate holding part 10 which holds a semiconductor substrate presented to a pattern exposure; an imaging part 12 which images pickup at least a part of a front surface of the substrate holding part 10; a data holder 14 which holds a reference image data which is imaged pickup by the imaging part 12 when the front surface of the substrate holding part 10 is pure; and a data processing part 16 which computes a difference between an inspection image data imaged by the imaging part 12 and the reference image data and judges based on the difference whether the substrate holding part 10 needs to be cleaned. COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：提供一种避免曝光时的聚焦误差并能够提高半导体器件的产量的曝光装置，并提供半导体器件的制造方法。 解决方案：曝光装置配备有：保持呈现为图案曝光的半导体衬底的衬底保持部10; 摄像部12，其摄像基板保持部10的前表面的至少一部分; 数据保持器14，当基板保持部10的前表面是纯净时，保持由成像部12拍摄的基准图像数据; 以及数据处理部分16，其计算由成像部分12成像的检查图像数据与参考图像数据之间的差异，并且基于是否需要清洁基板保持部分10的差异来判断。 版权所有（C）2008，JPO＆INPIT

公开(公告)号：JPH11329303A

公开(公告)日：1999-11-30

申请号：JP4285999

申请日：1999-02-22

Applicant: TOSHIBA CORP

Inventor： MASHITA TAKUYA ,  SHIMIZU NORIO ,  NAKAGAWA SHINICHIRO ,  INOUE MASACHIKA

IPC: H01J29/02 ,  H01J29/87

Abstract: PROBLEM TO BE SOLVED: To construct a color image receiving tube which decreases dispersion of a beam landing caused by dispersion of a compression stress of a reinforcing band and turbulence of an image caused by a resonance of a shadow mask. SOLUTION: In a color image receiving tube which is tightly fastened at the outer periphery of a skirt part of a substantially rectangular panel 22 by a reinforcing band 25, the band is arranged so as to establish a relation of b>=2.0a, where (a) is a distance from a point 39 at which a plane including a seal edge crosses a tube axis to a point 41 at which an axis 40 of a stud pin 31 crosses the tube axis, and (b) is a distance from a point at which the plane including the seal edge crosses the tube axis to a point 43 at which a vertical line crosses extending downward to the tube axis from an opposite edge of a phosphor screen 27 of the band 25.

公开(公告)号：JPH11238475A

公开(公告)日：1999-08-31

申请号：JP4058398

申请日：1998-02-23

Applicant: TOSHIBA CORP

Inventor： NAKAGAWA SHINICHIRO ,  SHIMIZU NORIO ,  MASHITA TAKUYA ,  INOUE MASACHIKA

IPC: H01J29/32 ,  H01J29/86

Abstract: PROBLEM TO BE SOLVED: To provide a color image receiving tube of such a structure that the external surface of the main surface part of a substantially rectangular panel is approximately a plane and the internal surface has a curvature in the short axis direction at least near the shorter edge member, wherein the flatness of an image screen drawn on a phosphor screen furnished on the internal surface of the main surface part is enhanced. SOLUTION: A color image receiving tube comprises a panel 12 structured so that the external surface of the main surface part 10 of substantially rectangular shape is approximately a plane or has a minor curvature and the internal surface has a curvature in the short axis direction near the shorter edge member, and a phosphor screen 14 which is formed on the inner surface of the main surface part and has an effective part of a substantially rectangular shape, wherein the shorter edge member of the periphery of the screen effective part is shaped convex toward the center of the effective part. Thereby the flatness of an image displayed in the effective part of the phosphor screen can be enhanced.