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公开(公告)号：JP2005174847A
公开(公告)日：2005-06-30
申请号：JP2003416168
申请日：2003-12-15
Applicant: Toshiba Corp , 株式会社東芝
Inventor： SATO KAZUYA , SATO ASAKO , SHIMURA NAO , TANAKA HIROMASA
CPC classification number: Y02E60/122
Abstract: PROBLEM TO BE SOLVED: To provide an electrode wherein capacity degradation caused by being exposed to an ambient atmosphere containing water is suppressed.
SOLUTION: Lithium cobalt containing composite oxide particles and lithium nickel cobalt containing composite oxide particles are contained in a weight ratio of 5:5 to 8:2. And the ratio of nickel atoms to the total number of all atoms of the surface measured by EDX is 5.5 mol% or less.
COPYRIGHT: (C)2005,JPO&NCIPIAbstract translation: 要解决的问题：提供一种电极，其中抑制了暴露于含有水的环境气氛引起的容量降低。 解决方案：含钴钴复合氧化物颗粒和含锂镍钴复合氧化物颗粒的重量比为5:5至8:2。 并且通过EDX测定的镍原子与表面全部原子总数的比例为5.5摩尔％以下。 版权所有（C）2005，JPO＆NCIPI
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公开(公告)号：JPH11237310A
公开(公告)日：1999-08-31
申请号：JP3747398
申请日：1998-02-19
Applicant: TOSHIBA CORP
Inventor： NOMURA HIROSHI , SATO KAZUYA
IPC: G01M11/00 , G01M11/02 , G03F7/20 , G03F9/00 , H01L21/027
Abstract: PROBLEM TO BE SOLVED: To precisely perform the absolute evaluation of a lens aberration. SOLUTION: An evaluation pattern is composed of a 1st pattern 72 consisting of a periodic pattern which is transferred onto a substrate in cycles meeting the condition of λ/(NA(1-σ))
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公开(公告)号：JP2005135826A
公开(公告)日：2005-05-26
申请号：JP2003372449
申请日：2003-10-31
Applicant: Toshiba Corp , 株式会社東芝
Inventor： HATANAKA CHIZURU , SATO ASAKO , MATSUMOTO KOICHI , ENDO SHOTA , SATO KAZUYA
CPC classification number: Y02E60/122
Abstract: PROBLEM TO BE SOLVED: To provide a nonaqueous electrolyte secondary battery with high capacity and a long charging/discharging cycle life at high temperature.
SOLUTION: The nonaqueous electrolyte secondary battery comprises a positive electrode 6, a negative electrode 4, and nonaqueous electrolyte. The negative electrode has a current collector made of copper foil with a ten-point average surface roughness R
z of 1 to 2 μm and a thickness of 6 to 12μm.
COPYRIGHT: (C)2005,JPO&NCIPIAbstract translation: 要解决的问题：提供一种在高温下具有高容量和长的充放电循环寿命的非水电解质二次电池。 解决方案：非水电解质二次电池包括正极6，负极4和非水电解质。 该负极具有由1〜2μm的十点平均表面粗糙度R
Z 铜箔形成的集电体，厚度为6〜12μm的集电体。 版权所有（C）2005，JPO＆NCIPI -
公开(公告)号：JP2000269119A
公开(公告)日：2000-09-29
申请号：JP7349499
申请日：1999-03-18
Applicant: TOSHIBA CORP
Inventor： SATO KAZUYA , INOUE SOICHI
IPC: H01L21/027 , G03F7/20
Abstract: PROBLEM TO BE SOLVED: To simply measure numerical aperture NA on the wafer side in an aligner. SOLUTION: A method for measuring NA of an aligner, which measures an actual numerical aperture NA on the wafer side of a projection optical system in an aligner, in which the light emitted from a light source is introduced to an optical part by an illumination optical system, and the optical image of the optical part is focused on a wafer by an projection optical system. An optical part is placed on a reticle plane, and patterns thereon are exposed on a wafer, wherein the patterns contain a plurality of basic patterns, each having at least two periods or more of a line-and-space pattern consisting of a shielding part 1 and a translucent part 2, arranged at least in one direction on the optical part, and the periods of the patterns contain periods p1 and p2 satisfying p1
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公开(公告)号：JP2000021732A
公开(公告)日：2000-01-21
申请号：JP18762498
申请日：1998-07-02
Applicant: TOSHIBA CORP
Inventor： SATO KAZUYA , TANAKA SATOSHI , FUJISAWA TADAHITO , INOUE SOICHI
IPC: G03F7/20 , H01L21/027
Abstract: PROBLEM TO BE SOLVED: To test an aligner promptly in a simple way, without disassembling the aligner. SOLUTION: In this testing method, an aligner consists of a light source, a lighting optical system 1 for conducting the light from the light source to a photo mask, and a projection optical system 3 for transferring a reduced image onto a wafer 5. The testing method is user for testing the configuration of light source of the aligner, a configuration of a pupil 4 in the projection optical system 3, and a degree of concentricity between the light source configuration and the pupil 4. The light from the light source is irradiated the reticle 2 with lattice pattern, in which light transmitting and shielding parts are repeated in a finite cycle. Then, an outer edge of the pupil 4 in the projection optical system 3 is irradiated with light with first or higher orders of diffraction, and at the same time, a pattern image of the reticle 2 in a defocused state is exposed on the wafer 5.
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Patent Agency Ranking
公开(公告)号：JP2005327527A
公开(公告)日：2005-11-24
申请号：JP2004143204
申请日：2004-05-13
Applicant: Toshiba Corp , 株式会社東芝
Inventor： ENDO SHOTA , HOSOBUCHI KAORU , MATSUMOTO KOICHI , SATO ASAKO , SATO KAZUYA
CPC classification number: Y02E60/122
Abstract: PROBLEM TO BE SOLVED: To provide a nonaqueous electrolyte secondary battery having excellent discharge load characteristics.
SOLUTION: The nonaqueous electrolyte secondary battery is equipped with a positive electrode 6, a negative electrode 4 containing a negative active material containing graphite particles, and a nonaqueous electrolyte, and recessed parts not formed by pore forming treatment are present on the surface of the negative electrode 4.
COPYRIGHT: (C)2006,JPO&NCIPIAbstract translation: 要解决的问题：提供具有优异的放电负荷特性的非水电解质二次电池。 解决方案：非水电解质二次电池配备有正极6，含有含有石墨颗粒的负极活性物质的负极4和非水电解质，并且在表面上存在未形成孔的凹部 的负极4.版权所有（C）2006，JPO＆NCIPI
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公开(公告)号：JP2005310662A
公开(公告)日：2005-11-04
申请号：JP2004128614
申请日：2004-04-23
Applicant: Toshiba Corp , 株式会社東芝
Inventor： MATSUMOTO KOICHI , ENDO SHOTA , SATO ASAKO , SATO KAZUYA
CPC classification number: Y02E60/122
Abstract: PROBLEM TO BE SOLVED: To provide a nonaqueous electrolyte secondary battery having a large initial capacity and a long charge/discharge cycle lifetime.
SOLUTION: In this nonaqueous electrolyte battery having a positive electrode, a negative electrode containing a mesophase pitch graphite material, and a nonaqueous electrolyte. The negative electrode satisfies the following formula 1 (0.001 ≤ A
1 /B
1 ≤0.003) and has a density of 1.3-1.75 g/cm
3 . In this formula, A
1 represents a negative electrode density increased quantity (g/cm
3 ) when the line pressure of a room temperature press using a roll with a diameter of 180 cm is increased from 20 to 180 Kg/cm step by step, while B
1 is 160 kg/cm as the line pressure change quantity of the room-temperature press.
COPYRIGHT: (C)2006,JPO&NCIPIAbstract translation: 解决的问题：提供具有大的初始容量和长的充放电循环寿命的非水电解质二次电池。 解决方案：在具有正极的非水电解质电池中，含有中间相沥青石墨材料的负极和非水电解质。 负极满足下式1（0.001≤A
1 / B 1 ≤0.003），密度为1.3-1.75g / cm 3 SP>。 在该式中，当使用直径为180°的辊进行室温加压的管线压力时，A 1 表示负极密度增加量（g / cm 3 SP 3） cm作为室温压机的管路压力变化量，分别从20kg / cm 2增加到180kg / cm 2，而SB <1> SB = 160kg / cm 2。 版权所有（C）2006，JPO＆NCIPI -
公开(公告)号：JP2005032549A
公开(公告)日：2005-02-03
申请号：JP2003195977
申请日：2003-07-11
Applicant: Toshiba Corp , 株式会社東芝
Inventor： INADA SHUSUKE , YAJIMA TORU , FUKUI MEIKO , SATO ASAKO , MATSUMOTO KOICHI , ENDO SHOTA , SATO KAZUYA
CPC classification number: Y02E60/122
Abstract: PROBLEM TO BE SOLVED: To provide a nonaqueous electrolyte secondary battery in which a uniform initial charging is possible even in the case of increase of an active material and realization of high density of an electrode have been carried out, and in which charge and discharge cycle life is long. SOLUTION: This nonaqueous electrolyte secondary battery is provided with a positive electrode 3, a negative electrode 4, and a nonaqueous electrolytic solution, and the negative electrode 4 contains 0.2-3 pts. wt. of at least either one of polyethylene glycol (PEG) of number average molecular weight 5,000-1,000,000 or polyethylene oxide (PEO) of number average molecular weight 5,000-1,000,000 as against 100 pts. wt. of the nonaqueous electrolytic solution. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract translation: 要解决的问题：为了提供即使在活性材料增加的情况下也能够均匀地进行初始充电并且实现电极的高密度的非水电解质二次电池，并且其中电荷 放电循环寿命长。 解决方案：该非水电解质二次电池设置有正极3，负极4和非水电解液，负极4包含0.2-3个点。 重量。 的数均分子量为5,000-1,000,000的聚乙二醇（PEG）或数均分子量为5,000-1,000,000的聚环氧乙烷（PEO）中的至少一种为100个。 重量。 的非水电解液。 版权所有（C）2005，JPO＆NCIPI
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公开(公告)号：JP2002329653A
公开(公告)日：2002-11-15
申请号：JP2001133298
申请日：2001-04-27
Applicant: TOSHIBA CORP
Inventor： SATO KAZUYA , INOUE SOICHI , TANAKA SATOSHI
Abstract: PROBLEM TO BE SOLVED: To restrain illuminance irregularities inside a batch exposure region of a projection aligner. SOLUTION: In an aligner constituted of an illuminating optical system 1 and a projection optical system 4, the average of transmittances of all the paths, which beam flux relating to imaging of arbitrary one point inside a limited region on a photosensitive substrate passes, is calculated each in a plurality of points of a limited region on the photosensitive substrate, and illuminance irregularities inside the limited region on the photosensitive substrate is obtained.
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公开(公告)号：JP2001230179A
公开(公告)日：2001-08-24
申请号：JP2000036690
申请日：2000-02-15
Applicant: TOSHIBA CORP
Inventor： SATO KAZUYA , INOUE SOICHI
IPC: H01L21/027 , G01N21/956 , G03F7/20
Abstract: PROBLEM TO BE SOLVED: To specify the change in light transmission of a projection optical system depending upon the route of light. SOLUTION: A light radiated from an illumination optical system 1 is repeated by a transparent part and a shielding part in a limited period, introduced to a photomask 3 formed of a pattern by an optical member having a light transmission pattern shielded by a shielding region at the periphery by a diffraction grating pattern in which a plurality of ratios of the transparent parts and the shielding parts are given. Then, a diffracted light passed through the mask 3 is radiated to the projection optical system 4 to transfer the pattern onto a wafer 5. Thus, a change in the transmission depending on the route of the light of the system 4 is measured based on the pattern image of the diffracted light transferred onto the wafer 5. In this case, the mask 3 and the wafer 5 are pattern transferred in a non-conjugate state with respect to the system 4.
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