公开(公告)号：EP0805614A4

公开(公告)日：1998-11-25

申请号：EP96938496

申请日：1996-11-18

Applicant: TOSHIBA KK

Inventor： SASAOKA KENJI ,  ODAIRA HIROSHI ,  FUJIWARA MADOKA ,  IKEGAYA FUMITOSHI ,  MORI TAKAHIRO

IPC: H01L21/48 ,  H01L23/538 ,  H05K1/09 ,  H05K1/11 ,  H05K3/40 ,  H05K3/46 ,  H01L23/48

CPC classification number: H01L24/16 ,  H01L21/4857 ,  H01L21/486 ,  H01L23/5383 ,  H01L23/5384 ,  H01L24/17 ,  H01L2224/05568 ,  H01L2224/05573 ,  H01L2224/13099 ,  H01L2224/16 ,  H01L2224/16235 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/01029 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01058 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01087 ,  H01L2924/01322 ,  H01L2924/014 ,  H01L2924/19041 ,  H01L2924/351 ,  H05K1/095 ,  H05K1/116 ,  H05K3/4069 ,  H05K3/4614 ,  H05K3/4647 ,  H05K3/4652 ,  H05K2201/0355 ,  H05K2201/09454 ,  H05K2201/0969 ,  H05K2201/09863 ,  H05K2203/1189 ,  H05K2203/1572 ,  Y10S428/901 ,  Y10T428/24917 ,  H01L2924/00

Abstract: A multilayered wiring board using conductive pillars for the interconnection of wiring layers. Since through holes are bored in the via lands of the wiring layers of the multilayered wiring board, the stress applied between the conductive pillars and wiring layers can be released at the time of connecting the conductive pillars to the via lands. Since the external side face of each conductive pillar smoothly continues to the surface of the via land at the contact section between the conductive pillar and the via land, the notch effect is relieved. Therefore, the reliability of the interconnection is secured even when a stress is applied to the connections during the manufacturing of the multilayered wiring board, and the mounting of electronic parts, etc.