公开(公告)号：JP2786734B2

公开(公告)日：1998-08-13

申请号：JP25905690

申请日：1990-09-28

Applicant: TOSHIBA KK

Inventor： MORI MIKI ,  SAITO MASAYUKI ,  KAO MIN TAI ,  SAKAMOTO TSUGIO ,  AZUMA MICHA

IPC: H01L21/60

公开(公告)号：JP2892117B2

公开(公告)日：1999-05-17

申请号：JP20454190

申请日：1990-08-01

Applicant: TOSHIBA KK

Inventor： MORI MIKI ,  SAITO MASAYUKI ,  KAO MIN TAI ,  SAKAMOTO TSUGIO ,  AZUMA MICHA

IPC: H01L21/56

公开(公告)号：JPS60182146A

公开(公告)日：1985-09-17

申请号：JP3712884

申请日：1984-02-28

Applicant: TOSHIBA KK

Inventor： CHIBA KOUICHI ,  SAKAMOTO TSUGIO ,  TERASAKA YOSHIO

IPC: H01L21/603 ,  H01L21/60

Abstract: PURPOSE:To automatically set the off-center quantity in a short period by a method wherein the position of a ball is determined by performing a pattern recognition, and the center corresponding to the bonding position of an optical readout part is coincided with the position of the ball. CONSTITUTION:In the case of a pattern recognition device 12, an optical leading part 15 reads out a picture pattern, a pattern discriminating part 16 distinguishes the pattern of a gold ball, and the position of the gold ball is computed by a position recognizing part 17 taking into consideration of the distance of movement of an X-Y table device 10 and the position of the picture pattern in visual field. The distance between said position of the gold ball and the center part corresponding to the bonding position of the optical reading part 15 which was set in advance in calculated, the optical reading part 15 is shifted in the amount of the above-mentioned distance by the X-Y table device 10, and its center part is coincided with the position of the gold ball. The off-center quantity is set by an off-center quantity setting device 13.