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1.发明授权
公开(公告)号：EP3065161B1
公开(公告)日：2018-11-21
申请号：EP15778595.7
申请日：2015-01-09
Inventor： SATO, Takashi
CPC classification number: H01J37/065 , B22F3/1055 , B22F2003/1056 , B22F2003/1057 , B22F2999/00 , B33Y30/00 , H01J3/08 , H01J3/12 , H01J37/06 , H01J37/304 , H01J2237/06308 , H01J2237/0653 , Y02P10/295 , B22F2203/03 , B22F2202/06 , B22F2202/11
Abstract: When an emission current is changed, a decrease in brightness of an electron beam is prevented. An electron gun includes a cathode that emits thermoelectrons, a Wehnelt electrode that focuses the thermoelectrons, a control electrode that extracts the thermoelectrons from a distal end of said cathode, an anode that accelerates the thermoelectrons and irradiates a powder with the thermoelectrons as an electron beam, and an optimum condition collection controller that changes at least one of a bias voltage to be applied to the Wehnelt electrode and a control electrode voltage to be applied to the control electrode, and decides a combination of the bias voltage and the control electrode voltage at which the brightness of the electron beam reaches a peak.
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2.发明公开ELECTRON GUN, ELECTRON GUN CONTROL METHOD AND CONTROL PROGRAM, AND THREE-DIMENSIONAL SCULPTING DEVICE 审中-公开ELEKTRONENKANONE，ELEKTRONENKANONENSTEUERUNGSVERFAHREN UND-TEUERUNGSPROGRAMM UND VORRICHTUNG ZUR DREIDIMENSIONALEN FORMUNG
公开(公告)号：EP3065161A1
公开(公告)日：2016-09-07
申请号：EP15778595.7
申请日：2015-01-09
Inventor： SATO, Takashi
CPC classification number: H01J37/065 , B22F3/1055 , B22F2003/1056 , B22F2003/1057 , B22F2999/00 , B33Y30/00 , H01J3/08 , H01J3/12 , H01J37/06 , H01J37/304 , H01J2237/06308 , H01J2237/0653 , Y02P10/295 , B22F2203/03 , B22F2202/06 , B22F2202/11
Abstract: When an emission current is changed, a decrease in brightness of an electron beam is prevented. An electron gun includes a cathode that emits thermoelectrons, a Wehnelt electrode that focuses the thermoelectrons, a control electrode that extracts the thermoelectrons from a distal end of said cathode, an anode that accelerates the thermoelectrons and irradiates a powder with the thermoelectrons as an electron beam, and an optimum condition collection controller that changes at least one of a bias voltage to be applied to the Wehnelt electrode and a control electrode voltage to be applied to the control electrode, and decides a combination of the bias voltage and the control electrode voltage at which the brightness of the electron beam reaches a peak.
Abstract translation: 当发射电流改变时，防止电子束的亮度降低。 电子枪包括发射热电子的阴极，聚焦热电子的Wehnelt电极，从所述阴极的远端提取热电子的控制电极，加热热电子并用热电子照射粉末作为电子束的阳极 以及最佳条件收集控制器，其改变要施加到所述Wehnelt电极的偏置电压和要施加到所述控制电极的控制电极电压中的至少一个，并且将所述偏置电压和所述控制电极电压的组合 电子束的亮度达到峰值。
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