公开(公告)号：WO1995003540A1

公开(公告)日：1995-02-02

申请号：PCT/US1993009526

申请日：1993-10-05

Applicant: TENCOR INSTRUMENTS

Inventor： TENCOR INSTRUMENTS ,  WELLS, Keith, B. ,  NGUYEN, Hung ,  JOHNSON, Ralph, T. ,  LESLIE, Brian, C.

IPC: G01N21/88

CPC classification number: G01N21/94 ,  G01N21/95607

Abstract: A method of locating particle and defect features on a periodically patterned surface (16) uses multiple threshold intensity levels to identify features in the data stream produced by scanning the surface with a light beam (12) and detecting the light scattered (22) from the surface. High thresholds are assigned to regions of the surface with high background scatter, while low thresholds are assigned to regions of the surface with low background scatter. The scattered light (22) is detected with a wide dynamic range detector producing high resolution 12-bit pixel data capable of resolving the smallest particles and defects of interest in low scatter regions, while avoiding saturation in high scatter regions. Periodic pattern features (56) are removed from the data by mapping features from a plurality of periodically repeating die on the surface to a single die map and looking for overlapping features.

Abstract translation: 在周期性图案化表面（16）上定位颗粒和缺陷特征的方法使用多个阈值强度水平来识别通过用光束（12）扫描表面而产生的数据流中的特征，并且从 表面。 高阈值被分配给具有高背景散射的表面的区域，而低阈值被分配给具有低背景散射的表面的区域。 通过宽动态范围检测器检测散射光（22），产生高分辨率的12位像素数据，能够解析低散射区域中最小的粒子和感兴趣的缺陷，同时避免高散射区域的饱和。 通过将表面上的多个周期性重复的模具的特征映射到单个管芯图并查找重叠特征，从数据中去除周期性图案特征（56）。

公开(公告)号：WO1997046865A1

公开(公告)日：1997-12-11

申请号：PCT/US1997009650

申请日：1997-06-03

Applicant: TENCOR INSTRUMENTS

Inventor： TENCOR INSTRUMENTS ,  LESLIE, Brian, C. ,  NIKOONAHAD, Mehrdad ,  WELLS, Keith, B.

IPC: G01N21/00

CPC classification number: G01N21/95607 ,  G01N21/94 ,  G01N21/9501

Abstract: In an optical scanning system (200) for detecting particles and pattern defects on a sample surface (240), a light beam (238) is focused to an illuminated spot on the surface and the spot is scanned across a scan line. A detector (11b) is positioned adjacent to the surface to collect scattered light from the spot where the detector includes a one- or two-dimensional array of sensors. Light scattered from the illuminated spot at each of a plurality of positions along the scan line is focused onto a corresponding sensor in the array. A plurality of detectors symmetrically placed with respect to the illuminating beam detect laterally and forward scattered light from the spot.

Abstract translation: 在用于检测样品表面（240）上的颗粒和图案缺陷的光学扫描系统（200）中，将光束（238）聚焦到表面上的照明点，并且扫描线上扫描光点。 检测器（11b）位于与表面相邻的位置，以收集来自检测器包括传感器的一维或二维阵列的点的散射光。 沿着扫描线的多个位置中的每一个处从照明点散射的光被聚焦到阵列中的对应的传感器上。 相对于照明光束对称放置的多个检测器检测来自光斑的横向和前向散射光。

公开(公告)号：EP0979398A1

公开(公告)日：2000-02-16

申请号：EP97929786.8

申请日：1997-06-03

Applicant: Tencor Instruments

Inventor： LESLIE, Brian, C. ,  NIKOONAHAD, Mehrdad ,  WELLS, Keith, B.

IPC: G01N21/00 ,  G01N21/88

CPC classification number: G01N21/95607 ,  G01N21/94 ,  G01N21/9501

Abstract: In an optical scanning system (200) for detecting particles and pattern defects on a sample surface (240), a light beam (238) is focused to an illuminated spot on the surface and the spot is scanned across a scan line. A detector (11b) is positioned adjacent to the surface to collect scattered light from the spot where the detector includes a one- or two-dimensional array of sensors. Light scattered from the illuminated spot at each of a plurality of positions along the scan line is focused onto a corresponding sensor in the array. A plurality of detectors symmetrically placed with respect to the illuminating beam detect laterally and forward scattered light from the spot.