-
公开(公告)号：WO1997046865A1
公开(公告)日：1997-12-11
申请号：PCT/US1997009650
申请日：1997-06-03
Applicant: TENCOR INSTRUMENTS
Inventor： TENCOR INSTRUMENTS , LESLIE, Brian, C. , NIKOONAHAD, Mehrdad , WELLS, Keith, B.
IPC: G01N21/00
CPC classification number: G01N21/95607 , G01N21/94 , G01N21/9501
Abstract: In an optical scanning system (200) for detecting particles and pattern defects on a sample surface (240), a light beam (238) is focused to an illuminated spot on the surface and the spot is scanned across a scan line. A detector (11b) is positioned adjacent to the surface to collect scattered light from the spot where the detector includes a one- or two-dimensional array of sensors. Light scattered from the illuminated spot at each of a plurality of positions along the scan line is focused onto a corresponding sensor in the array. A plurality of detectors symmetrically placed with respect to the illuminating beam detect laterally and forward scattered light from the spot.
Abstract translation: 在用于检测样品表面（240）上的颗粒和图案缺陷的光学扫描系统（200）中，将光束（238）聚焦到表面上的照明点，并且扫描线上扫描光点。 检测器（11b）位于与表面相邻的位置，以收集来自检测器包括传感器的一维或二维阵列的点的散射光。 沿着扫描线的多个位置中的每一个处从照明点散射的光被聚焦到阵列中的对应的传感器上。 相对于照明光束对称放置的多个检测器检测来自光斑的横向和前向散射光。
-
公开(公告)号：EP0797763A1
公开(公告)日：1997-10-01
申请号：EP95943768.0
申请日：1995-12-08
Applicant: Tencor Instruments
Inventor： NIKOONAHAD, Mehrdad , STOKOWSKI, Stanley, E.
CPC classification number: G01N21/95623 , G01N21/94 , G01N21/9501 , G01N21/956 , G01N21/95607 , G01N2021/8825 , G01R31/2831 , G01R31/308 , H01L22/12 , H01L2924/0002 , H01L2924/00
Abstract: A high sensitivity and high throughput surface inspection system directs a focused beam of light (38) at a grazing angle towards the surface to be inspected (40). Relative motion is caused between the beam (38) and the surface (40) so that the beam (38) scans a scan path covering substantially the entire surface and light scattered along the path is collected for detecting anomalies. The scan path comprises a plurality of arrays of straight scan path segments. The focused beam of light (38) illuminates an area of the surface between 5-15 microns in width and this system is capable of inspecting in excess of about 40 wafers per hour for 150 millimeter diameter wafers (6-inch wafers), in excess of about 20 wafers per hour for 200 millimeter diameter wafers (8-inch wafers) and in excess of about 10 wafers per hour for 300 millimeter diameter wafers (12-inch wafers).
-
公开(公告)号：WO1996019722A1
公开(公告)日：1996-06-27
申请号：PCT/US1995004614
申请日：1995-04-13
Applicant: TENCOR INSTRUMENTS
Inventor： TENCOR INSTRUMENTS , NIKOONAHAD, Mehrdad
IPC: G01N21/00
CPC classification number: G03F7/70641 , G01N21/95623 , G02F1/113
Abstract: An apparatus for both deflecting a beam of light illuminating a spot on a surface and varying the size of the spot, electronically, without changing any system components. The apparatus includes an acousto-optic deflector (10) driven with a linear FM signal produced by a chirp signal generator (16). The linear FM signal is characterized with a dispersion rate, and the chirp signal generator includes a chirp dispersion selector to vary the dispension rate. A beam of collimated light (13) passes through the acousto-optic deflector (10) and appropriate focusing optics (14, 15) image the beam onto a spot in a nominal focal plane (17). The chirp dispension selector (17) sets the dispension rate in accord to a nominal rate, resulting in the beam illuminating a spot (18) in the focal plane (17). Generally, the focal plane coincides with a wafer surface (24), of the type having periodic (27b) and non-periodic (27c) features on it.
Abstract translation: 一种用于在不改变任何系统部件的情况下电子地偏转照射光斑的光束并且改变光斑的大小的装置。 该装置包括由啁啾信号发生器（16）产生的线性FM信号驱动的声光偏转器（10）。 线性FM信号的特征在于色散速率，并且啁啾信号发生器包括啁啾分散选择器以改变调节速率。 准直光束（13）通过声光偏转器（10）并且适当的聚焦光学器件（14,15）将光束成像到标称焦平面（17）上的光斑上。 啁啾调节选择器（17）根据标称速率设定调节速率，导致光束照射焦平面（17）中的光点（18）。 通常，焦平面与其上具有周期性（27b）和非周期（27c）特征的晶片表面（24）重合。
-
公开(公告)号：WO1996019711A1
公开(公告)日：1996-06-27
申请号：PCT/US1995004556
申请日：1995-04-13
Applicant: TENCOR INSTRUMENTS
Inventor： TENCOR INSTRUMENTS , NIKOONAHAD, Mehrdad , RIGG, Philip, R. , WELLS, Keith, B. , CALHOUN, David, S.
IPC: G01B11/00
CPC classification number: G01N21/9501 , G01N21/94 , G01N21/956
Abstract: A surface height detection and positioning device for use in a surface inspection system. A light beam (25) impinges obliquely upon the surface (22), and a position detector (38) with a mechanical window (45) defining an aperture (46) receives specularly reflected light (33) producing a plurality of electrical signals. The aperture's width (46), along a scan direction, is of sufficient size to create a train of signals from each of the plurality of signals, having a frequency equal to the scan frequency. These signals carry information responsive to the position of the reflected beam (33) impinging on the detector and the beam's intensity. To abrogate information responsive to intensity variations at the detector, an electronic circuit (100) determines the sum and the difference of the plurality of signals, producing a summed signal and a difference signal, respectively. The difference signal is divided by the summed signal, thereby producing a normalized signal which represents the height of the surface.
Abstract translation: 一种用于表面检测系统的表面高度检测和定位装置。 光束（25）倾斜地撞击在表面（22）上，并且具有限定孔径（46）的机械窗口（45）的位置检测器（38）接收产生多个电信号的镜面反射光（33）。 沿着扫描方向的孔径宽度（46）具有足够的尺寸以产生具有等于扫描频率的频率的来自多个信号中的每一个的信号序列。 这些信号响应于入射在检测器上的反射光束（33）的位置和光束的强度而携带信息。 为了消除响应于检测器处的强度变化的信息，电子电路（100）分别确定多个信号的和和差，产生加和信号和差分信号。 差分信号除以相加信号，从而产生表示表面高度的归一化信号。
-
公开(公告)号：WO1996018094A1
公开(公告)日：1996-06-13
申请号：PCT/US1995016278
申请日：1995-12-08
Applicant: TENCOR INSTRUMENTS
Inventor： TENCOR INSTRUMENTS , JORDON, John, R., III , NIKOONAHAD, Mehrdad , WELLS, Keith, B.
IPC: G01N21/00
CPC classification number: G01N21/95623 , G01N21/94 , G01N21/9501 , G01N21/956 , G01N21/95607 , G01N2021/8825 , G01R31/2831 , G01R31/308 , H01L22/12 , H01L2924/0002 , H01L2924/00
Abstract: A high throughput surface inspection system with enhanced detection sensitivity is described. The acquired data is processed in real time at a high rate of below 50 MHZ thereby reducing the cost for data processing. Anomalies are detected and verified by comparing adjacent repeating patterns and the height of the surface (40) is monitored and corrected dynamically to reduce misregistration errors between adjacent repeating patterns. Local thresholds employing neighborhood information are used for detecting and verifying the presence of anomalies. The sampled point spread function of the combined illumination (22) and collection system (90, 92, 111b) is exploited for anomaly detection and verification.
Abstract translation: 描述了具有增强检测灵敏度的高通量表面检测系统。 所获取的数据以低于50MHZ的高速率实时处理，从而降低了数据处理的成本。 通过比较相邻的重复图案来检测和验证异常，并且动态地监视和校正表面的高度（40）以减少相邻重复图案之间的对准错误。 使用邻域信息的本地阈值用于检测和验证异常的存在。 组合照明（22）和采集系统（90,92,111b）的采样点扩散函数被用于异常检测和验证。
-
Patent Agency Ranking
公开(公告)号：EP0804713A1
公开(公告)日：1997-11-05
申请号：EP95916365.0
申请日：1995-04-13
Applicant: Tencor Instruments
Inventor： NIKOONAHAD, Mehrdad , RIGG, Philip, R. , WELLS, Keith, B. , CALHOUN, David, S.
CPC classification number: G01N21/9501 , G01N21/94 , G01N21/956
Abstract: A surface height detection and positioning device for use in a surface inspection system. A light beam (25) impinges obliquely upon the surface (22), and a position detector (38) with a mechanical window (45) defining an aperture (46) receives specularly reflected light (33) producing a plurality of electrical signals. The aperture's width (46), along a scan direction, is of sufficient size to create a train of signals from each of the plurality of signals, having a frequency equal to the scan frequency. These signals carry information responsive to the position of the reflected beam (33) impinging on the detector and the beam's intensity. To abrogate information responsive to intensity variations at the detector, an electronic circuit (100) determines the sum and the difference of the plurality of signals, producing a summed signal and a difference signal, respectively. The difference signal is divided by the summed signal, thereby producing a normalized signal which represents the height of the surface.
-
公开(公告)号：EP0979398A1
公开(公告)日：2000-02-16
申请号：EP97929786.8
申请日：1997-06-03
Applicant: Tencor Instruments
Inventor： LESLIE, Brian, C. , NIKOONAHAD, Mehrdad , WELLS, Keith, B.
CPC classification number: G01N21/95607 , G01N21/94 , G01N21/9501
Abstract: In an optical scanning system (200) for detecting particles and pattern defects on a sample surface (240), a light beam (238) is focused to an illuminated spot on the surface and the spot is scanned across a scan line. A detector (11b) is positioned adjacent to the surface to collect scattered light from the spot where the detector includes a one- or two-dimensional array of sensors. Light scattered from the illuminated spot at each of a plurality of positions along the scan line is focused onto a corresponding sensor in the array. A plurality of detectors symmetrically placed with respect to the illuminating beam detect laterally and forward scattered light from the spot.
-
公开(公告)号：EP0870188A1
公开(公告)日：1998-10-14
申请号：EP95916391.0
申请日：1995-04-13
Applicant: Tencor Instruments
Inventor： NIKOONAHAD, Mehrdad
CPC classification number: G03F7/70641 , G01N21/95623 , G02F1/113
Abstract: An apparatus for both deflecting a beam of light illuminating a spot on a surface and varying the size of the spot, electronically, without changing any system components. The apparatus includes an acousto-optic deflector (10) driven with a linear FM signal produced by a chirp signal generator (16). The linear FM signal is characterized with a dispersion rate, and the chirp signal generator includes a chirp dispersion selector to vary the dispension rate. A beam of collimated light (13) passes through the acousto-optic deflector (10) and appropriate focusing optics (14, 15) image the beam onto a spot in a nominal focal plane (17). The chirp dispension selector (17) sets the dispension rate in accord to a nominal rate, resulting in the beam illuminating a spot (18) in the focal plane (17). Generally, the focal plane coincides with a wafer surface (24), of the type having periodic (27b) and non-periodic (27c) features on it.
-
公开(公告)号：EP0804722A1
公开(公告)日：1997-11-05
申请号：EP95943798.0
申请日：1995-12-08
Applicant: Tencor Instruments
Inventor： JORDON, John, R., III , NIKOONAHAD, Mehrdad , WELLS, Keith, B.
CPC classification number: G01N21/95623 , G01N21/94 , G01N21/9501 , G01N21/956 , G01N21/95607 , G01N2021/8825 , G01R31/2831 , G01R31/308 , H01L22/12 , H01L2924/0002 , H01L2924/00
Abstract: A high throughput surface inspection system with enhanced detection sensitivity is described. The acquired data is processed in real time at a high rate of below 50 MHZ thereby reducing the cost for data processing. Anomalies are detected and verified by comparing adjacent repeating patterns and the height of the surface (40) is monitored and corrected dynamically to reduce misregistration errors between adjacent repeating patterns. Local thresholds employing neighborhood information are used for detecting and verifying the presence of anomalies. The sampled point spread function of the combined illumination (22) and collection system (90, 92, 111b) is exploited for anomaly detection and verification.
Abstract translation: 一种用于检测表面（40）上的异常（例如颗粒或图案缺陷）的光学系统，包括：光学器件（22,26,34,36），其布置成提供以倾斜角照射表面的辐射束（38） ; 至少两个检测器（110a，110b，111a，111b）; 布置成收集从表面散射的辐射的至少两个光学元件（110a，110b，111a，111b），每个光学元件布置成将所收集的散射辐射引导到相应的一个检测器，使得检测器提供输出信号 响应于此，其中光学元件被定位成使得每个检测器感测从表面沿不同方向散射的辐射; 一种装置，包括使所述梁和所述表面之间相对运动的移动台（124）; 以及处理器（200）处理来自所述检测器输出信号的信息，所述信号涉及从所述检测器的不同方向从所述表面的不同部分散射的辐射，并且被布置为识别异常; 所述装置还包括声光偏转器（30），使得每个移动台和声光偏转器引起光束和表面之间的相对运动，使得光束扫描覆盖基本上整个表面的扫描路径，所述扫描路径 所述扫描路径段包括扫描路径段（50,50'，50“，50”）的多个阵列，其中所述扫描路径段中的至少一些具有比所述表面（40）的尺寸短的跨度，并且因此 使光束照射表面的不同部分，并且使得检测器响应于由光束照射的表面的不同部分的辐射而提供输出信号。
-
公开(公告)号：EP0870188B1
公开(公告)日：2005-12-21
申请号：EP95916391.6
申请日：1995-04-13
Applicant: TENCOR INSTRUMENTS
Inventor： NIKOONAHAD, Mehrdad
CPC classification number: G03F7/70641 , G01N21/95623 , G02F1/113
-
-
-
-
-
-
-
-
-
Search Results
10
records
(took 0.026 seconds)
