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公开(公告)号：EP2157601A4
公开(公告)日：2011-05-18
申请号：EP08764810
申请日：2008-05-28
Applicant: ULVAC INC
Inventor： UEDA MASAHISA , KOKAZE YUTAKA , ENDOU MITSUHIRO , SUU KOUKOU
IPC: H01L21/3065 , H01L21/8246 , H01L27/105 , H01L41/187 , H01L41/22
CPC classification number: H01J37/32091 , H01J37/321 , H01J37/32862 , Y10S428/905
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2.发明公开PLASMA-PROCESSING DEVICE AND METHOD OF MANUFACTURING ADHESION-PREVENTING MEMBER 有权等离子体处理装置及方法进行生产分子防止体
公开(公告)号：EP2151855A4
公开(公告)日：2011-05-25
申请号：EP08752721
申请日：2008-05-14
Applicant: ULVAC INC
Inventor： KOKAZE YUTAKA , UEDA MASAHISA , ENDOU MITSUHIRO , SUU KOUKOU , MIYAZAKI TOSHIYA , SAKATA GENJI , NAKAMURA TOSHIYUKI
IPC: H01L21/3065 , H05H1/46
CPC classification number: H01J37/32467 , H01J37/32009 , H01J37/321 , H01J37/32568
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公开(公告)号：EP2149899A4
公开(公告)日：2010-05-26
申请号：EP08777376
申请日：2008-06-19
Applicant: ULVAC INC
Inventor： KOKAZE YUTAKA , ENDOU MITSUHIRO , UEDA MASAHISA , SUU KOUKOU , MIYAZAKI TOSHIYA , NAKAMURA TOSHIYUKI
IPC: H01L21/3065 , C23F4/00 , H01L21/683 , H01L21/8246 , H01L27/105
CPC classification number: H01L21/68735 , C23F4/00 , G11C11/22 , H01J37/321 , H01J37/32568 , H01J37/32642 , H01J37/3266 , H01J2237/022 , H01J2237/2001 , H01L21/31122 , H01L21/32136 , H01L21/67069 , H01L27/11507 , H01L27/1159
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