公开(公告)号：JPH0799034A

公开(公告)日：1995-04-11

申请号：JP26310893

申请日：1993-09-28

Applicant: UNIV KOBE

Inventor： KANEMOCHI TORU ,  HONGO SHOZO

IPC: H01J37/05 ,  G01L21/32 ,  G01L21/34 ,  H01J41/04 ,  H01J41/06

Abstract: PURPOSE:To provide an ionization gauge which can measure all the pressure from an ultra high vacuum area to a hyper vacuum area simply and highly accurately, by reducing the noise current such as an X-ray current or the secondary ion current extensively. CONSTITUTION:Electron guns 8 provided at one end of a cylindrical grid 6, and to inject electrons (e ) accelerated beforehand in the grid 6; an ion collecting electrode 10 provided at the center at the other end of the grid 6, and to collect the positive ions (+) generated by the electrons (e ) flying in the grid 6; and electron collecting electrodes 12 provided at the other end of the grid 6, and to collect the incident electrons (e ) from the other end of the grid 6, after contributing to generate the ions; are provided. And the electron collecting electrodes 12 are extended in a doughnut form around the ion collecting electrode 10, and the electron collecting electrodes 12 and the ion collecting electrode 10 are separated each other by shield members 14.