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    A SURFACE REFRACTIVE INDEX SCANNING SYSTEM AND METHOD
    8.
    发明公开
    A SURFACE REFRACTIVE INDEX SCANNING SYSTEM AND METHOD 有权
    一种表面折射率指数扫描系统和方法

    公开(公告)号：EP3140636A1

    公开(公告)日：2017-03-15

    申请号：EP15723825.4

    申请日：2015-05-08

    Applicant: Danmarks Tekniske Universitet

    Inventor： KRISTENSEN, Anders ,  VANNAHME, Christoph ,  DUFVA, Martin

    IPC: G01N21/77 ,  G02F1/39 ,  H01S3/06 ,  H01S3/08 ,  H01S3/16 ,  G01J3/02 ,  G01J3/06 ,  G01J3/18 ,  G01J3/28 ,  G02B6/122 ,  H01S5/00

    CPC classification number: G01N21/7743 ,  G01J3/0245 ,  G01J3/1895 ,  G01J3/2823 ,  G01J2003/064 ,  G01N21/4133 ,  G01N2021/7776 ,  G01N2021/7789 ,  G02B6/00 ,  G02B6/1225 ,  G02F1/39 ,  H01S3/0635 ,  H01S3/08009 ,  H01S3/168 ,  H01S3/2391

    Abstract: The invention relates to a surface refractive index scanning system for characterization of a sample. The system comprises a grating device for holding or receiving the sample, the device comprising at least a first grating region having a first grating width along a transverse direction, and a second grating region having a second grating width in the transverse direction. The first grating region and the second grating region are adjacent in the transverse direction, wherein the first grating region has a grating period Λ1 in a longitudinal direction, and the second grating region has a grating period Λ2 in the longitudinal direction, where the longitudinal direction is orthogonal to the transverse direction. A grating period spacing ΔΛ=Λ1-Λ2 is finite. Further, the first and second grating periods are chosen to provide optical resonances for light respectively in a first wavelength band and a second wavelength band, light is being emitted, transmitted, or reflected in an out-of-plane direction, wherein the first wavelength band and the second wavelength band are at least partially non-overlapping in wavelength. The system further comprises a light source for illuminating at least a part of the grating device with light at an illumination wavelength band. Additionally, the system comprises an imaging system for imaging the emitted, transmitted or reflected light from the grating device. The imaging system comprises an optical element, such as a cylindrical lens or a bended mirror, configured for focusing light in a transverse direction and for being invariant in an orthogonal transverse direction, the optical element being oriented such that the longitudinal direction of the grating device is oriented to coincide with the invariant direction of the optical element, and an imaging spectrometer comprising an entrance slit having a longitudinal direction oriented to coincide with the invariant direction of the optical element. The imaging spectrometer further comprises a 2-dimensional image sensor. The invention further relates to a method.

    Abstract translation: 本发明涉及用于表征样品的表面折射率扫描系统。 该系统包括用于保持或接收样本的光栅装置，该装置至少包括具有沿横向方向的第一光栅宽度的第一光栅区域和具有沿横向方向的第二光栅宽度的第二光栅区域。 第一光栅区域和第二光栅区域在横向方向上相邻，其中第一光栅区域在纵向方向上具有光栅周期Λ1，并且第二光栅区域在纵向方向上具有光栅周期Λ2，其中纵向方向 与横向方向正交。 光栅周期间隔ΔΛ=Λ1-Λ2是有限的。 此外，第一和第二光栅周期被选择为分别为第一波长带和第二波长带的光提供光共振，光在面外方向上发射，透射或反射，其中第一波长 波段和第二波长带在波长上至少部分不重叠。 该系统还包括用于用照明波长带处的光照射光栅装置的至少一部分的光源。 另外，该系统包括成像系统，用于对来自光栅装置的发射光，透射光或反射光进行成像。 成像系统包括光学元件，例如圆柱形透镜或弯曲镜，被配置用于在横向方向上聚焦光并且在正交横向方向上不变，光学元件被定向成使得光栅装置的纵向方向 定向成与光学元件的不变方向一致;以及成像光谱仪，其包括入射狭缝，该入射狭缝具有定向为与光学元件的不变方向一致的纵向方向。 成像光谱仪还包括二维图像传感器。 本发明还涉及一种方法。

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