中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

23 records (took 0.021 seconds)

    基于谐振频率的硅微谐振式加速度计在线温度补偿方法
    1.
    发明公开
    基于谐振频率的硅微谐振式加速度计在线温度补偿方法 有权

    公开(公告)号：CN107389979A

    公开(公告)日：2017-11-24

    申请号：CN201710505734.9

    申请日：2017-06-28

    Applicant: 东南大学

    Inventor： 李宏生 ,  张婷 ,  彭心悦 ,  黄丽斌

    IPC: G01P15/097

    CPC classification number: G01P15/097 ,  G01P2015/0865 ,  G01P2015/0868

    Abstract: 本发明公开了一种基于谐振频率的硅微谐振式加速度计在线温度补偿方法，在零加速度情况下标定出两谐振梁谐振频率平方和与其谐振频率差的单调变化关系曲线，然后在输入加速度情况下对两谐振梁谐振频率和谐振频率差进行测量，结合先前获得的关系曲线将温度引起的谐振频率差从测量得到的谐振频率差中减去，完成温度补偿工作。本发明提供的硅微谐振式加速度计温度补偿方法，克服了传统直接温度补偿方法中温度场分布的不确定性和热传导延迟给补偿结果带来较大偏差的缺陷，能够实现实时的、高精度的温度补偿。本发明方法的温度补偿成本低，该方案全部基于FPGA实现，不需要额外增加传感器和引入其它设备，仅利用已有电路器件即可实现。

    ROBUST INERTIAL SENSOR SELF-TEST
    4.
    发明公开
    ROBUST INERTIAL SENSOR SELF-TEST 审中-公开

    公开(公告)号：US20230183058A1

    公开(公告)日：2023-06-15

    申请号：US17546928

    申请日：2021-12-09

    Applicant: InvenSense, Inc.

    Inventor： Aurelio Pellegrini

    IPC: B81B3/00 ,  G01P15/08

    CPC classification number: B81B3/0051 ,  G01P15/08 ,  B81B2201/0235 ,  B81B2201/0242 ,  G01P2015/0868

    Abstract: An inertial sensor such as a MEMS accelerometer or gyroscope has a proof mass that is driven by a self-test signal, with the response of the proof mass to the self-test signal being used to determine whether the sensor is within specification. The self-test signal is provided as a non-periodic self-test pattern that does not correlate with noise such as environmental vibrations that are also experienced by the proof mass during the self-test procedure. The sense output signal corresponding to the proof mass is correlated with the non-periodic self-test signal, such that an output correlation value corresponds only to the proof mass response to the applied self-test signal.

    ACCELERATION SENSOR
    5.
    发明公开
    ACCELERATION SENSOR 审中-公开

    公开(公告)号：US20240061010A1

    公开(公告)日：2024-02-22

    申请号：US18488817

    申请日：2023-10-17

    Applicant: ROHM CO., LTD.

    Inventor： Hiroki MIYABUCHI

    IPC: G01P15/125 ,  G01P15/18

    CPC classification number: G01P15/125 ,  G01P15/18 ,  G01P2015/0868

    Abstract: An acceleration detecting portion that detects an acceleration in a predetermined direction and an offset detecting portion that detects an offset amount with respect to the acceleration detecting portion are included. The offset detecting portion includes a second semiconductor substrate with a second cavity formed in its interior, a second fixed structure including a second fixed electrode that is supported, in a state of floating with respect to the second cavity, by the second semiconductor substrate, a second movable structure including a second movable electrode that is supported, in a state of floating with respect to the second cavity, by the second semiconductor substrate, and a disabling structure that disables a function of the second movable electrode displacing with respect to the second fixed electrode.

    Differential mems device and methods
    7.
    发明授权
    Differential mems device and methods 有权

    公开(公告)号：US11892465B2

    公开(公告)日：2024-02-06

    申请号：US17667180

    申请日：2022-02-08

    Applicant: Movella Inc.

    Inventor： Sanjay Bhandari ,  Giovanni Bellusci

    IPC: G01P15/08 ,  G01P21/00 ,  B81B7/00 ,  G01P15/18 ,  B81B7/02

    CPC classification number: G01P15/08 ,  B81B7/008 ,  B81B7/02 ,  G01P15/18 ,  G01P21/00 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0264 ,  G01P2015/0868

    Abstract: A MEMS device includes a first MEMS sensor associated with a first spatial plane and a second MEMS sensor is associated with a spatial second plane not co-planar with the first spatial plane, wherein the first MEMS sensor is configured to provide a first interrupt and a first data in response to a physical perturbation, wherein the second MEMS sensor is configured to provide a second interrupt and second data in response to the physical perturbation, and a controller configured to receive the first interrupt at a first time and the second interrupt at a second time different from the first time, wherein the controller is configured to determine a latency between the first time and the second time, and wherein the controller is configured to determine motion data in response to the first data, to the second data, and to the latency.

    Accelerometer with Offset Compensation
    8.
    发明申请
    Accelerometer with Offset Compensation 有权
    带偏移补偿的加速度计

    公开(公告)号：US20150122024A1

    公开(公告)日：2015-05-07

    申请号：US14073160

    申请日：2013-11-06

    Applicant: Analog Devices, Inc.

    Inventor： William A. Clark

    IPC: G01P15/125

    CPC classification number: G01P15/125 ,  G01P21/00 ,  G01P2015/0814 ,  G01P2015/0868

    Abstract: An accelerometer has a movable mass suspended above a substrate, and a variable acceleration capacitor supported by the substrate. The movable mass has a mass anchor securing the mass to the substrate, while the acceleration capacitor has both a stationary finger extending from the substrate, and a movable finger extending from the movable mass. The accelerometer also has a variable stress capacitor, which also includes the stress finger, for determining movement of the mass anchor relative to the substrate.

    Abstract translation: 加速度计具有悬浮在基板上方的可移动质量块和由基板支撑的可变加速电容器。 可移动质量块具有将质量块固定到基板的质量锚，而加速电容器具有从基板延伸的固定指状物和从可移动块延伸的可移动指状物。 加速度计还具有可变应力电容器，其也包括应力指，用于确定质量锚相对于衬底的移动。

    Self test of mems accelerometer with asics integrated capacitors
    10.
    发明公开
    Self test of mems accelerometer with asics integrated capacitors 有权
    Selbsttest eines MEMS-Beschleunigungsmessers mit integrierten ASIC-Kondensatoren

    公开(公告)号：EP2648003A1

    公开(公告)日：2013-10-09

    申请号：EP13001696.7

    申请日：2013-04-03

    Applicant: Fairchild Semiconductor Corporation

    Inventor： Kleks, Jonathan Adam ,  Opris, Ion ,  Seng, Justin

    IPC: G01P15/125 ,  B81B3/00 ,  G01P21/00 ,  G01L1/14 ,  G01P15/08

    CPC classification number: G01R31/3187 ,  B81B7/008 ,  B81B2201/0235 ,  G01P15/125 ,  G01P21/00 ,  G01P2015/0868 ,  G01R27/2605 ,  G06F2101/00 ,  H01L21/00 ,  H01L2223/00

    Abstract: An apparatus comprises a micro-electromechanical system (MEMS) sensor including a first capacitive element and a second capacitive element and an integrated circuit (IC). The IC includes a switch network circuit and a capacitance measurement circuit. The switch network circuit is configured to electrically decouple the first capacitive element of the MEMS sensor from a first input of the IC and electrically couple the second capacitive element to a second input of the IC. The capacitance measurement circuit can be configured to measure capacitance of the second capacitive element of the MEMS sensor during application of a first electrical signal to the decoupled first capacitive element.

    Abstract translation: 一种装置包括包括第一电容元件和第二电容元件以及集成电路（IC）的微机电系统（MEMS）传感器。 IC包括开关网络电路和电容测量电路。 开关网络电路被配置为将MEMS传感器的第一电容元件与IC的第一输入电耦合，并将第二电容元件电耦合到IC的第二输入端。 电容测量电路可以被配置为在向解耦的第一电容元件施加第一电信号期间测量MEMS传感器的第二电容元件的电容。

Patent Agency Ranking