公开(公告)号：WO2021123305A

公开(公告)日：2021-06-24

申请号：PCT/EP2020/087220

申请日：2020-12-18

Applicant: UNIVERSIDAD REY JUAN CARLOS [ES]/[ES] ,  NANOMEGAS SPRL [BE]/[BE]

Inventor： CASABLANCA, Jesus Gonzalez ,  NICOLOPOULOS, Stavros

IPC: G01N23/2204 ,  H01J37/20 ,  G01N23/2251 ,  G01N23/046 ,  H01J37/28 ,  G01N2223/418 ,  H01J2237/2004 ,  H01J2237/2006 ,  H01J2237/2611 ,  H01J2237/2802

Abstract: Devices and methods are described for performing high angle tilting tomography on samples in a liquid medium using transmission electron beam instruments.

公开(公告)号：WO2021249872A1

公开(公告)日：2021-12-16

申请号：PCT/EP2021/064949

申请日：2021-06-03

Applicant: ASML NETHERLANDS B.V.

Inventor： OTTEN, Christiaan ,  CRANS, Peter-Paul ,  SMITS, Marc ,  DEL TIN, Laura ,  TEUNISSEN, Christan ,  HUANG, Yang-Shan ,  STEENBRINK, Stijn, Wilem, Herman, Karel ,  HU, Xuerang ,  XI, Qingpo ,  LUO, Xinan ,  LIU, Xuedong

IPC: H01J37/02 ,  H01J37/18 ,  H01J2237/184 ,  H01J2237/2006 ,  H01J2237/20214 ,  H01J2237/2817 ,  H01J37/023 ,  H01J37/14 ,  H01J37/1477 ,  H01J37/15 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28

Abstract: 2019P00380WO 68 ABSTRACT Disclosed herein is a module for supporting a device configured to manipulate charged particle paths in a charged particle apparatus, the module comprising: a support arrangement configured to support the device, wherein the device is configured to manipulate a charged particle path within the charged particle apparatus; and a support positioning system configured to move the 5 support arrangement within the module; wherein the module is arranged to be field replaceable in the charged particle apparatus. [FIG. 7]