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    FLOOD COLUMN AND CHARGED PARTICLEAPPARATUS
    1.
    发明申请
    FLOOD COLUMN AND CHARGED PARTICLEAPPARATUS 审中-公开

    公开(公告)号：WO2022194482A1

    公开(公告)日：2022-09-22

    申请号：PCT/EP2022/053966

    申请日：2022-02-17

    Applicant: ASML NETHERLANDS B.V.

    Inventor： OTTEN, Christiaan ,  TEUNISSEN, Christan ,  SCHEEPERS, Paul, Hendricus ,  MEIJER, Joseph, Reinier

    IPC: H01J37/02 ,  H01J37/10 ,  H01J37/28

    Abstract: Disclosed herein is a flood column for projecting a charged particle flooding beam along a beam path towards a sample to flood the sample with charged particles prior to assessment of the flooded sample using an assessment column, the flood column comprising: an anchor body arranged along the beam path; a lens arrangement arranged in a down-beam part of the flood column; and a lens support arranged between the anchor body and the lens arrangement; wherein the lens support is configured to position the lens arrangement and the anchor body relative to each other; the lens support comprises an electrical insulator; and the lens support is in the direct line of sight of at least a portion of the beam path in the down-beam part.

    APERTURE BODY, FLOOD COLUMN AND CHARGED PARTICLE TOOL
    2.
    发明申请
    APERTURE BODY, FLOOD COLUMN AND CHARGED PARTICLE TOOL 审中-公开

    公开(公告)号：WO2021180496A1

    公开(公告)日：2021-09-16

    申请号：PCT/EP2021/054983

    申请日：2021-03-01

    Applicant: ASML NETHERLANDS B.V.

    Inventor： VAN SOEST, Jurgen ,  VAN DER KROON, Boudewijn, Weijert, Herman, Jan ,  TEUNISSEN, Christan ,  OTTEN, Christiaan

    IPC: H01J37/09 ,  H01J37/04

    Abstract: Disclosed herein is an aperture body (500) for passing a portion of a charged particle beam propagating along a beam path comprising an axis, the aperture body comprising: an up-beam facing surface (510); a chamber portion (511) comprising an up-beam end, a down-beam end and an up-beam plate (509), wherein the up-beam plate extends radially inwards from the up-beam end and the up-beam plate is configured to define an entrance opening (501) around the beam path; wherein: the up-beam facing surface extends radially inwards from the down-beam end; the up-beam facing surface comprises an aperture portion (504) that is configured to define an opening around the beam path; and the opening defined by the aperture portion is smaller than the entrance opening.

    FLOOD COLUMN AND CHARGED PARTICLEAPPARATUS
    4.
    发明公开
    FLOOD COLUMN AND CHARGED PARTICLEAPPARATUS 审中-公开

    公开(公告)号：EP4060714A1

    公开(公告)日：2022-09-21

    申请号：EP21163522.2

    申请日：2021-03-18

    Applicant: ASML Netherlands B.V.

    Inventor： OTTEN, Christiaan ,  TEUNISSEN, Christan ,  SCHEEPERS, Paul, Hendricus ,  MEIJER, Joseph, Reinier

    IPC: H01J37/02 ,  H01J37/10 ,  H01J37/28

    Abstract: Disclosed herein is a flood column for projecting a charged particle flooding beam along a beam path towards a sample to flood the sample with charged particles prior to assessment of the flooded sample using an assessment column, the flood column comprising: an anchor body (503) arranged along the beam path; a lens arrangement (504, 505) arranged in a down-beam part of the flood column; and a lens support (502, 507) arranged between the anchor body and the lens arrangement; wherein the lens support is configured to position the lens arrangement and the anchor body relative to each other; the lens support comprises an electrical insulator; and the lens support is in the direct line of sight of at least a portion of the beam path in the down-beam part.

    ELECTRON-OPTICAL DEVICE
    6.
    发明公开
    ELECTRON-OPTICAL DEVICE 审中-公开

    公开(公告)号：EP4290550A1

    公开(公告)日：2023-12-13

    申请号：EP22178490.3

    申请日：2022-06-10

    Applicant: ASML Netherlands B.V.

    Inventor： OTTEN, Christiaan ,  SCHEFFERS, Paul, IJmert ,  TEUNISSEN, Christan ,  DAAN, Boris

    IPC: H01J37/09 ,  H01J37/02 ,  H01J37/15 ,  H01J37/28

    Abstract: A charged particle-optical device for projecting a plurality of charged particle beams along respective beam paths towards a sample location, the charged particle-optical device comprising: a charged particle-optical assembly configured to manipulate the charged particle beams, the charged particle-optical assembly comprising a first charged particle-optical element comprising a plate having one or more apertures around a beam path of the charged particle beams; and an electrical connector configured to electrically connect the plate of the first charged particle-optical element to an electrical power source, wherein the electrical connector: comprises a shield configured to define a field free region substantially free of electric fields; and is configured to be electrically connectable to a flexible coupling configured to electrically connect the plate of the first charged particle-optical element to the electrical power source, the flexible coupling located within the field free region.

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