Abstract:
Techniques for fabricating horizontally aligned nanochannels are provided. In one aspect, a method of forming a device having nanochannels is provided. The method includes: providing a SOI wafer having a SOI layer on a buried insulator; forming at least one nanowire and pads in the SOI layer, wherein the nanowire is attached at opposite ends thereof to the pads, and wherein the nanowire is suspended over the buried insulator; forming a mask over the pads, the mask having a gap therein where the nanowire is exposed between the pads; forming an alternating series of metal layers and insulator layers alongside one another within the gap and surrounding the nanowire; and removing the nanowire to form at least one of the nanochannels in the alternating series of the metal layers and insulator layers. A device having nanochannels is also provided.
Abstract:
Embodiments of methods for sealing a glass microstructure assembly comprise providing one or more side retainer members on a base plate adjacent the glass microstructure assembly, the side retainer members having a height less than an uncompressed height defined by the glass microstructure assembly. The methods also comprise compressing the glass microstructure assembly via a load bearing top plate in intimate contact with the top glass layer while heating the glass microstructure assembly and the top plate to a glass sealing temperature, the glass sealing temperature being a temperature sufficient to make glass viscous, wherein the glass microstructure assembly is compressed until the load bearing top plate contacts the side retainer members, and wherein the lower surface of the top plate maintains adhesion to the upper surface of the top glass layer at the glass sealing temperature while the load bearing plate is supported by the side retainer members.
Abstract:
A photostructurable ceramic is processed using photostructuring process steps for embedding devices within a photostructurable ceramic volume, the devices may include one or more of chemical, mechanical, electronic, electromagnetic, optical, and acoustic devices, all made in part by creating device material within the ceramic or by disposing a device material through surface ports of the ceramic volume, with the devices being interconnected using internal connections and surface interfaces.
Abstract:
A microfluidic device is formed from a cover member and a microfluidic precursor that is prepared from a photosensitive element. The photosensitive element is a solid layer of a photopolymerizable composition that includes at least a binder, a monomer, and a photoinitiator. A method for forming the microfluidic device from the photosensitive element includes imagewise exposing the photopolymerizable layer to actinic radiation through a mask and treating to form a relief surface having microstructures or features, such as one or more channels and one or more chambers, that are suitable for use in the microfluidic device. The method provides microstructures that can be formed to have different dimensions that provide particular advantages for a microfluidic device that is operated by degas-driven flow to transport a fluid through the microstructures.
Abstract:
It is an object of this invention to prevent a resistor material and an electrode material from diffusing and suppress variation in electric resistance. In a device including a plurality of metal layers of different compositions on a substrate and a second structure made of a material, such as glass paste, requiring a firing process at the time of formation, an intermediate layer is formed between a first metal layer and a second metal layer forming the first structure. The intermediate layer is of an intermetallic compound including one or more metallic elements in the first metal layer and one or more metallic elements in the second metal layer. The melting point of the intermetallic compound is higher than a firing temperature when the second structure is formed, and the intermetallic compound is produced at a temperature higher than the firing temperature for forming the second structure.
Abstract:
The invention concerns the production of segmented nanowires and components having said segmented nanowires.For the production of the nanowire structural element, a template based process is used preferably, wherein the electrochemical deposition of the nanowires in nanopores is carried out. In this manner, numerous nanowires are created in the template foil.For the electrochemical deposition of the nanowires, a reversed pulse procedure with an alternating sequence consisting of cathodic deposition pulses and anodic counter-pulses is carried out. By this means, segmented nanowires can be produced.
Abstract:
The present invention relates to a three dimensional (or 3D) microfluidic system comprising a plurality of layers stacked upon each other, characterised in that at least one of said layers consists of a 1st and at least one 2nd parts, distinct from each other, with the 2nd part being porous and wettable by a solution of interest, nesting into a recess of the 1st part being non-porous and/or non-wettable by said solution of interest, wherein said system can possibly have a built-in reservoir; a method for manufacturing the same and different uses thereof.
Abstract:
Embodiments of methods for sealing a glass microstructure assembly comprise providing one or more side retainer members on a base plate adjacent the glass microstructure assembly, the side retainer members having a height less than an uncompressed height defined by the glass microstructure assembly. The methods also comprise compressing the glass microstructure assembly via a load bearing top plate in intimate contact with the top glass layer while heating the glass microstructure assembly and the top plate to a glass sealing temperature, the glass sealing temperature being a temperature sufficient to make glass viscous, wherein the glass microstructure assembly is compressed until the load bearing top plate contacts the side retainer members, and wherein the lower surface of the top plate maintains adhesion to the upper surface of the top glass layer at the glass sealing temperature while the load bearing plate is supported by the side retainer members.
Abstract:
A micro rotary machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft comprises a horizontal shaft and is operable to be rotated by the micro actuator. A micro tool is coupled to the micro shaft and is operable to perform work in response to motion of the micro shaft.
Abstract:
The present invention relates to a channel structure for a bioreactor, biochemical reactor, chemical reactor or a reformer comprising a plurality of individual layers stacked on one another and having a respective plurality of openings which pass completely through the respective individual layer and which are characterized in that at least two directly adjacent individual layers each have at least one layer section whose openings are arranged in the form of a pattern respectively regular in two dimensions and in that at least two of the layer sections provided with such a pattern in this manner of directly adjacent individual layers overlap at least in part, wherein the openings of the two at least partly overlapping layer sections are rotated and/or offset with respect to one another in the overlap region.