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    Confocal Line Inspection Optical System
    93.
    发明申请
    Confocal Line Inspection Optical System 有权
    共焦线检测光学系统

    公开(公告)号：US20150369750A1

    公开(公告)日：2015-12-24

    申请号：US14691966

    申请日：2015-04-21

    Applicant: KLA-Tencor Corporation

    Inventor： Mark S. Wang ,  Chris Kirk ,  Andrey Kharisov

    IPC: G01N21/88 ,  G01N21/95 ,  G02B21/00

    CPC classification number: G01N21/8851 ,  G01N21/9501 ,  G01N2201/068 ,  G01N2201/10 ,  G01N2201/121 ,  G02B21/0028 ,  G02B21/0032 ,  G02B21/0072 ,  G02B21/365 ,  H01L22/12

    Abstract: A line scan wafer inspection system includes a confocal slit aperture filter to remove sidelobes and enhance resolution in the scanning direction. A position detector associated with the slit aperture filter monitors and corrects illumination line image positions relative to the slit aperture to keep image position variations within tolerable limits. Each detector measures a line position and then uses the line position signal to adjust optical, mechanical, and electronic components in the collection path in a feedback loop. The feedback loop may be employed in a runtime calibration process or during inspection to enhance stability.

    Abstract translation: 线扫描晶片检查系统包括共焦狭缝孔径滤光器以去除旁瓣并增强扫描方向上的分辨率。 与狭缝孔径滤波器相关联的位置检测器监测和校正相对于狭缝孔径的照明线图像位置，以将图像位置变化保持在可容许的极限内。 每个检测器测量线路位置，然后使用线路位置信号在反馈回路中调整收集路径中的光学，机械和电子部件。 反馈回路可用于运行时校准过程或检查期间以增强稳定性。

    LATENT FINGERPRINT DETECTORS AND FINGERPRINT SCANNERS THEREFROM
    96.
    发明申请
    LATENT FINGERPRINT DETECTORS AND FINGERPRINT SCANNERS THEREFROM 审中-公开
    最新的指纹识别器和指纹扫描器

    公开(公告)号：US20150227773A1

    公开(公告)日：2015-08-13

    申请号：US13888264

    申请日：2013-05-06

    Applicant: LOCKHEED MARTIN CORPORATION

    Inventor： Edward Miesak ,  V. Edward Gold, JR.

    IPC: G06K9/00 ,  G01N21/94

    CPC classification number: G06K9/00033 ,  G01N21/8851 ,  G01N21/94 ,  G01N2201/06113 ,  G01N2201/10 ,  G06K9/00013 ,  G06K9/2036

    Abstract: An automatic fingerprint system includes an optical sensor having a first light source that provides a collimated beam for interrogating a first sample surface, and a camera including a lens and a photodetector array having a camera field of view (FOVCAMERA)large enough to image the first sample surface. The camera is critical angle positioned relative to the first light source to receive specular reflection (glare) from the first sample surface to generate image data from the glare. The first light source and camera have substantially equal and opposite numerical apertures (NAs), A computer or processor that includes reference fingerprint templates receives a digitized form of the image data, and includes data processing software for (i) comparing the image data to reference fingerprint templates to determine whether the image data includes at least one fingerprint and (ii) for generating a fingerprint image if the fingerprint is determined to be present.

    Abstract translation: 自动指纹系统包括具有第一光源的光学传感器，该第一光源提供用于询问第一样品表面的准直光束，以及包括透镜的照相机和具有足够大的图像的摄像机视场（FOVCAMERA）的光电检测器阵列 样品表面。 相机是相对于第一光源定位的临界角，以从第一样品表面接收镜面反射（眩光），以从眩光产生图像数据。 第一光源和相机具有基本上相等和相对的数字孔径（NAs），包括参考指纹模板的计算机或处理器接收数字化形式的图像数据，并且包括数据处理软件，用于（i）将图像数据与参考 指纹模板以确定图像数据是否包括至少一个指纹，以及（ii）如果确定指纹存在，则用于生成指纹图像。

    Optical unit, fluorescence detection device, and fluorescence detection method
    97.
    发明授权
    Optical unit, fluorescence detection device, and fluorescence detection method 有权
    光学单元，荧光检测装置和荧光检测方法

    公开(公告)号：US09006687B2

    公开(公告)日：2015-04-14

    申请号：US14378674

    申请日：2013-02-20

    Applicant: Sharp Kabushiki Kaisha

    Inventor： Yukio Watanabe

    IPC: G01N21/64 ,  G02B13/18 ,  G02B21/00

    CPC classification number: G01N21/645 ,  G01N21/6456 ,  G01N21/6486 ,  G01N2021/6471 ,  G01N2021/6478 ,  G01N2201/06113 ,  G01N2201/10 ,  G01N2201/103 ,  G01N2201/105 ,  G02B19/0028 ,  G02B19/0076 ,  G02B19/008 ,  G02B19/0085 ,  G02B21/0076 ,  G02B2207/113

    Abstract: A first lens configured to convert light from the objective lens into parallel light includes a concave lens part having a concave curved face in a center portion of a flat face, and a convex lens part having a convex curved face around a flat face. Further, the first lens includes first and second regions configured to diverge light through the flat face and the concave curved face and a third region configured to collect light through the convex curved face and the concave curved face. When the sample is on a sample table and sealed in a two-dimensional electrophoresis substrate, light totally reflected by a side surface of the objective lens enters the second region. In contrast, when the sample is directly on the sample table, the light enters the third region.

    Abstract translation: 第一透镜被配置为将来自物镜的光转换为平行光，包括在平面的中心部分具有凹曲面的凹透镜部分和在平坦表面周围具有凸曲面的凸透镜部分。 此外，第一透镜包括被配置为使光通过平面和凹曲面发散的第一和第二区域和被配置为通过凸曲面和凹曲面收集光的第三区域。 当样品在样品台上并密封在二维电泳基质中时，由物镜的侧表面全反射的光进入第二区域。 相反，当样品直接在样品台上时，光进入第三区域。

    Peakforce photothermal-based detection of IR nanoabsorption
    98.
    发明授权
    Peakforce photothermal-based detection of IR nanoabsorption 有权
    峰值光热探测IR纳米吸收

    公开(公告)号：US08955161B2

    公开(公告)日：2015-02-10

    申请号：US14217099

    申请日：2014-03-17

    Applicant: Bruker Nano, Inc.

    Inventor： Gregory O. Andreev

    IPC: G01Q60/24 ,  G01Q60/04 ,  G01N13/16 ,  G01N21/35 ,  G01Q30/20

    CPC classification number: G01N21/171 ,  B82Y35/00 ,  G01N21/3563 ,  G01N2201/06113 ,  G01N2201/10 ,  G01N2201/12 ,  G01Q30/02 ,  G01Q30/20 ,  G01Q60/32

    Abstract: An apparatus and method of performing photothermal chemical nanoidentification of a sample includes positioning a tip of a probe at a region of interest of the sample, with the tip-sample separation being less than about 10 nm. Then, IR electromagnetic energy having a selected frequency, ω, is directed towards the tip. Using PFT mode AFM operation, absorption of the energy at the region of interest is identified. Calorimetry may also be performed with the photothermal PFT system.

    Abstract translation: 进行样品的光热化学纳米识别的装置和方法包括将探针的尖端定位在样品的感兴趣区域，尖端样品分离小于约10nm。 然后，具有选定频率ω的IR电磁能量指向尖端。 使用PFT模式AFM操作，识别感兴趣区域的能量的吸收。 光热法还可以用光热PFT系统进行。

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