System and method for miniaturization of synthetic jets

    公开(公告)号:US08418934B2

    公开(公告)日:2013-04-16

    申请号:US12198267

    申请日:2008-08-26

    Abstract: A micro-electromechanical (MEM) synthetic jet actuator includes a semiconductor substrate having a cavity extending therethrough, such that a first opening is formed in a first surface of the semiconductor substrate and such that a second opening is formed in a second surface of the semiconductor substrate. A first flexible membrane is formed on at least a portion of the front surface of the semiconductor substrate and extends over the first opening. The first flexible membrane also includes an orifice formed therein aligned with the first opening. The MEM synthetic jet actuator also includes a second flexible membrane that is formed on at least a portion of the second surface of the semiconductor substrate and that extends over the second opening, and a pair of actuator elements coupled to the flexible membranes and aligned with the cavity to selectively cause displacement of the first and second flexible membranes.

    MEMS integrated circuit comprising peristaltic microfluidic pump
    108.
    发明授权
    MEMS integrated circuit comprising peristaltic microfluidic pump 失效
    MEMS集成电路包括蠕动微流体泵

    公开(公告)号:US08075855B2

    公开(公告)日:2011-12-13

    申请号:US12142780

    申请日:2008-06-20

    Abstract: A MEMS integrated circuit comprising a peristaltic microfluidic pump and control circuitry for the pump. The pump comprises a pumping chamber positioned between an inlet and an outlet; a plurality of moveable fingers positioned in a wall of the pumping chamber, the fingers being arranged in a row along the wall; and a plurality of thermal bend actuators. Each actuator is associated with a respective finger such that actuation of the thermal bend actuator causes movement of the respective finger into the pumping chamber. The control circuitry controls actuation of the plurality of actuators. The control circuitry is configured to provide a peristaltic pumping action in each pumping chamber via peristaltic movement of the fingers.

    Abstract translation: 包括蠕动微流体泵和泵的控制电路的MEMS集成电路。 泵包括位于入口和出口之间的泵送室; 位于所述泵送室的壁中的多个可移动的指状物,所述指状物沿着所述壁布置成一排; 和多个热弯曲致动器。 每个致动器与相应的手指相关联,使得热弯曲致动器的致动导致相应手指进入泵送室的运动。 控制电路控制多个致动器的致动。 控制电路被配置为通过手指的蠕动运动在每个泵送室中提供蠕动泵送作用。

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