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    EUV lithography glass structures formed by extrusion consolidation process
    103.
    发明授权
    EUV lithography glass structures formed by extrusion consolidation process 有权
    通过挤压固化工艺形成的EUV光刻玻璃结构

    公开(公告)号：US06997015B2

    公开(公告)日：2006-02-14

    申请号：US10302364

    申请日：2002-11-22

    Applicant: Bradley F. Bowden ,  Seann Bishop ,  Kenneth E. Hrdina ,  John F. Wight, Jr.

    Inventor： Bradley F. Bowden ,  Seann Bishop ,  Kenneth E. Hrdina ,  John F. Wight, Jr.

    IPC: C03B19/06

    CPC classification number: C03B19/06 ,  C03B2201/42

    Abstract: The invention discloses a method for forming substantially striae-free glass substrates that are suitable for optical applications, including use in forming optical elements or structures such as mirrors and platen stage structures that can be used, for example, in EUV lithography. The method includes forming a mixture of silica soot, binder, lubricant and solvent. The homogenized mixture is then extruded through a slit die or mask into a flat planar pre-form, and the extruded pre-form is then consolidated by heating into a substantially full density, substantially striae-free lithography glass substrate structure. The consolidated perform has a substantially uniform coefficient of thermal expansion and is also substantially void free.

    Abstract translation: 本发明公开了一种用于形成适用于光学应用的基本无条纹玻璃基板的方法，包括用于形成光学元件或结构例如反射镜和压板台结构，其可以用于例如EUV光刻。 该方法包括形成二氧化硅烟灰，粘合剂，润滑剂和溶剂的混合物。 然后将匀化的混合物通过狭缝模具或掩模挤出成平坦的预成型体，然后通过加热将挤出的预成型体固化成基本上全密度，基本上无条纹的光刻玻璃基材结构。 固结性能具有基本均匀的热膨胀系数，并且也基本上无空隙。

    Optical fiber
    105.
    发明申请
    Optical fiber 有权
    光纤

    公开(公告)号：US20040086245A1

    公开(公告)日：2004-05-06

    申请号：US10619376

    申请日：2003-07-11

    Inventor： Julia A. Farroni ,  Adrian Carter ,  Kanishka Tankala

    IPC: G02B006/16 ,  G02B006/17

    CPC classification number: G02B6/02114 ,  C03B37/01217 ,  C03B37/01231 ,  C03B2201/10 ,  C03B2201/12 ,  C03B2201/28 ,  C03B2201/31 ,  C03B2201/34 ,  C03B2201/42 ,  C03B2203/23 ,  C03B2203/31 ,  G02B6/024

    Abstract: An optical fiber comprises a photosensitive core that includes a concentration of a first material that increases the refractive index of the core and a concentration of a second material that is other than boron and that reduces the refractive index of the core. A cladding is disposed about the core for tending to confine light to the core. The fiber also includes at least one longitudinally extending region having a thermal coefficient of expansion that is different from the thermal coefficient of expansion of the cladding. In another embodiment, the core includes a concentration of germanium and a concentration of boron. Also disclosed is a polarization-maintaining double-clad (PM DC) fiber comprising one or both of at least one circular axially extending stress inducing region(s) and an inner cladding comprising a circular outer perimeter. Fibers according to the invention can include a rare earth dopant for emitting light of a selected wavelength responsive to being pumped by pump light of a pump wavelength that is different than the selected wavelength.

    Abstract translation: 光纤包括感光芯，其包括提高芯的折射率的第一材料的浓度和不同于硼的第二材料的浓度，并降低芯的折射率。 围绕芯部布置包层以倾向于将光限制在芯部上。 纤维还包括具有不同于包层的热膨胀系数的热膨胀系数的至少一个纵向延伸区域。 在另一个实施方案中，芯包括锗的浓度和硼的浓度。 还公开了一种包括至少一个圆形轴向延伸的应力诱导区域和包含圆形外周边的内包层中的一个或两个的偏振保持双包层（PMDC）光纤。 根据本发明的纤维可以包括用于发射选定波长的光的稀土掺杂剂，其响应于通过不同于所选波长的泵浦波长的泵浦光泵浦。

    Solution doping method of making an optical amplifying fiber
    109.
    发明授权
    Solution doping method of making an optical amplifying fiber 失效
    制造光放大光纤的溶液掺杂方法

    公开(公告)号：US06408652B1

    公开(公告)日：2002-06-25

    申请号：US09299666

    申请日：1999-04-27

    Applicant: Koji Okamura ,  Keiko Takeda

    Inventor： Koji Okamura ,  Keiko Takeda

    IPC: C03B37027

    CPC classification number: G02B6/02042 ,  C03B37/01211 ,  C03B37/01807 ,  C03B37/01838 ,  C03B37/01861 ,  C03B2201/28 ,  C03B2201/30 ,  C03B2201/31 ,  C03B2201/34 ,  C03B2201/36 ,  C03B2201/42 ,  C03B2203/29 ,  C03C13/045 ,  H01S3/06708 ,  H01S3/06729

    Abstract: An optical amplifying fiber including a clad, a first core provided inside the clad and containing Ge, a second core provided inside the first core and containing Er and Al, and a third core provided inside the second core and containing Ge. The second core has a refractive index higher than that of the clad, and the first and third cores have refractive indexes each of which is higher than that of the second core. Since the third core having the high refractive index is provided at a central portion, it is possible to make smaller a mode field diameter and hence to improve a conversion efficiency of pumping light into signal light. Further, since the second core contains Al as an amplification band width increasing element, it is possible to sufficiently ensure a wide amplification band width.

    Abstract translation: 一种光学放大光纤，包括：包层，设置在所述包层内并包含Ge的第一芯，设置在所述第一芯内并包含Er和Al的第二芯和设置在所述第二芯内并且包含Ge的第三芯。 第二芯的折射率高于包层的折射率，第一和第三芯具有高于第二芯的折射率。 由于具有高折射率的第三纤芯设置在中心部分，所以可以使模场直径变小，从而提高泵浦光转换为信号光的转换效率。 此外，由于第二芯包含Al作为放大带宽增加元件，因此可以充分确保宽的放大带宽。

    Process for forming a titania-containing preform silica glass blank
    110.
    发明授权
    Process for forming a titania-containing preform silica glass blank 失效
    用于形成含二氧化钛的预制件二氧化硅玻璃坯料的方法

    公开(公告)号：US06189340B1

    公开(公告)日：2001-02-20

    申请号：US09171748

    申请日：1998-10-21

    Applicant: Gerald Eugene Burke ,  Carlton Maurice Truesdale

    Inventor： Gerald Eugene Burke ,  Carlton Maurice Truesdale

    IPC: C03C1302

    CPC classification number: C03B37/01413 ,  C03B37/01446 ,  C03B2201/42 ,  C03C13/045

    Abstract: Disclosed is an optical waveguide fiber having a compressive outer layer that includes TiO2 in the SiO2 matrix glass. The compressive outer layer includes crystalline structures containing TiO2 that are predominately rutile. Also disclosed is a method for making an optical waveguide fiber having a compressive outer layer. The compressive outer layer can contain an additional metal oxide that is preferentially lost from the outer layer, instead of the TiO2, during the drying and consolidation step.

    Abstract translation: 公开了一种在SiO 2基体玻璃中具有包含TiO 2的压缩外层的光波导纤维。 压缩外层包括主要为金红石的含有TiO 2的晶体结构。 还公开了制造具有压缩外层的光波导纤维的方法。 压缩外层可以含有另外的金属氧化物，其在干燥和固化步骤期间优先从外层而不是TiO 2损失。

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