Abstract:
A low-radiance infrared airborne calibration reference is an infrared imaging and calibration method. The method includes positioning a mirror perpendicular to an optical axis of a focal plane array in both an open-face position and a mirror-reading position. Temperatures of a lens, window, and the mirror are determined. In-band radiance and offset is calculated to generate an adjusted calibration curve.
Abstract:
An infrared sensor for temperature sensing comprises a cap covering a substrate; an IR-radiation filtering window in the cap transparent to IR radiation; a first sensing element comprising a set of N thermocouples on the substrate covered by the cap, whose hot junctions may receive radiation; a second sensing element comprising a set of N thermocouples on the substrate covered by the cap whose hot junctions may not receive radiation; first connection modules for connecting a number N1 of thermocouples of the first sensing element, second connection modules for connecting a number N2 of thermocouples of the second sensing; connecting means for connecting an output of the first connection modules of the first sensing element with an output of the second connection modules of the second sensing element, and an output of the combined outputs of the sensing elements.
Abstract:
An IR sensor system, an IR sensor module, a temperature detection module and a corresponding calibration method are provided. The IR sensor system has an IR sensor module including a pixelated IR detection area, which has a first control unit for controlling an IR measuring operation and a calibration operation, and a storage unit connected to it, and including a temperature detection module which is detectable in a pixel subarea of the IR detection area, the temperature detection module having a temperature sensor device and a second control unit connected to it. The geometric position of the pixel subarea on the IR detection area is storable in the storage unit.
Abstract:
A method for calculating power input to at least one thermal control element of an electrostatic chuck includes: setting the at least one thermal control element to a first predetermined power level; measuring a first temperature of the at least one thermal control element when the at least one thermal control element is powered at the first predetermined power level; setting the at least one thermal control element to a second predetermined power level; measuring a second temperature of the at least one thermal control element when the at least one thermal control element is powered at the second predetermined power level; calculating a difference between the first temperature and the second temperature; calculating a system response of the at least one thermal control element based on the difference; inverting the system response; and calibrating the at least one thermal control element based on the inverted system response.
Abstract:
The present invention provides a quantum theory correction method for improving the accuracy of temperature measurement of radiation thermometer and a radiation thermometer system. The invention is related to the radiation thermometer in the field of instrumentation. The present invention acquires parameters reflecting energy level structure by adopting effective physical model to process data and using keyboard input or data transmission. The temperature of the object to be measured is finally acquired and displayed on the displayer. The quantum theory correction method and radiation thermometer system effectively overcome the difficulty that the value of radiance ε(λ·T) cannot be accurately measured in the event that radiance correction method is used to improve the accuracy of radiation thermometer. Thus, the accuracy of thermometer is improved significantly.
Abstract:
A semiconductor integrated circuit includes an acquisition unit configured to acquire a value outputted from an infrared sensor in response to an infrared ray received from an object, and a value outputted from a temperature sensor as a function of measured temperature of the infrared sensor; a second-temperature identification circuit configured to identify a second temperature which is a temperature of the object when the temperature of the infrared sensor corresponding to a measured value which is the output value of the infrared sensor, is the first temperature, by referring to the correspondence; a third-temperature identification circuit configured to identify a third temperature which is the temperature of the infrared sensor in outputting the measured value; and a calculation circuit configured to calculate a fourth temperature which is a temperature of the object on the basis of the first temperature, the second temperature, and the third temperature.
Abstract:
An infrared sensor device includes a semiconductor substrate, at least one sensor element that is micromechanically formed in the semiconductor substrate, and at least one calibration element, which is micromechanically formed in the semiconductor substrate, for the sensor element. An absorber material is arranged on the semiconductor substrate in the area of the sensor element and the calibration element. One cavern each is formed in the semiconductor substrate substantially below the sensor element and substantially below the calibration element. The sensor element and the calibration element are thermally and electrically isolated from the rest of the semiconductor substrate by the caverns. The infrared sensor device has high sensitivity, calibration functionality for the sensor element, and a high signal-to-noise ratio.
Abstract:
A flame detector includes a medium wavelength infrared bolometer having an array of pixel elements disposed within a housing. Optics supported by the housing and disposed with respect to the bolometer direct infrared radiation from a flame to the pixel elements of the array and direct radiation from a separate background object to the pixel elements of the array. Electronics are coupled to receive signals from the bolometer and programmed to track an intensity of radiation from the background object to monitor transmission of radiation through the optics.
Abstract:
The present invention relates to a temperature-measuring system, comprising a temperature sensor and a reference body, wherein means for determining temperature changes of the reference body and/or for control of the temperature of the reference body are provided. When the temperature measuring-system is used in a vacuum, the reference body forms no substantial material thermal bridges to the temperature sensor and the reference body shields the temperature sensor with respect to the environment in such a way that only radiation that comes from the surfaces of the reference and from surfaces of which the temperature is to be determined reaches the surface of the temperature sensor.
Abstract:
An infrared sensor comprises: an electrical insulating film sheet; first and second temperature sensor devices which are provided on one side of the electrical insulating film sheet, and are located at a distance from each other; a pair of contact electrodes, with which the first and second temperature sensor devices are attached respectively, formed on one side of the electrical insulating film sheet; an infrared absorbing film provided on the other side of the electrical insulating film sheet opposite the first temperature sensor device; and an infrared reflector film provided on the same side as the infrared absorbing film opposite the second temperature sensor device. The first and second temperature sensor devices respectively comprise: a thermistor element; and a pair of electrode layers, in which one of them is in contact with the contact electrode, formed both on the upper and lower surfaces of the thermistor element.