公开(公告)号：US06822738B1

公开(公告)日：2004-11-23

申请号：US10034800

申请日：2001-12-28

Applicant: Blaine D. Johs ,  Craig M. Herzinger

Inventor： Blaine D. Johs ,  Craig M. Herzinger

IPC: G01N2100

CPC classification number: G01J3/447 ,  G01J3/0224 ,  G01J4/00 ,  G01J2003/2866 ,  G01N21/211

Abstract: Disclosed is a spectroscopic Ellipsometer having pseudo-achromatic compensator(s) having fast axes which vary with wavelength and which provide, a range of retardations, (that is, maximum retardance minus minimum retardance), of less than 90 degrees over a range of wavelengths, said range of retardations being bounded by a minimum of preferably at least 30 degrees, to a maximum of less than 135 degrees. Calibration is achieved by a Mathematical Regression based technique involving, where desirable, Parameterization of Calibration Parameters. Various Dimensional Data Set(s) obtained with the Spectroscopic Ellipsometer configured in a Sample, present” or in a Straight-through” configuration, are variously normalized to D.C., A.C. or combination D.C. and A.C. components. Sample analysis using a detector provided intensity signal simultaneously comprising 2&ohgr; and 4&ohgr; signals simultaneously, and use of un-normalized A.C. and/or D.C. signals in reflectance monitoring are also disclosed.

Abstract translation: 公开了一种光谱椭圆计，其具有伪波消除补偿器，其具有随波长变化的快轴，并且在波长范围内提供小于90度的延迟范围（即最大延迟减去最小延迟） 所述延迟范围由最小至少30度的最小值限制到最大不超过135度。 通过基于数学回归的技术实现校准，该技术涉及校准参数的参数化。 使用配置在样品中的“或”直通“配置的样品中的光谱椭圆计数器获得的各种尺寸数据集被不同地归一化为D.C.，A.C.或组合D.C.和A.C.组分。 还公开了使用检测器提供的同时包含2omega和4omega信号的强度信号的样本分析，并且还公开了在反射率监测中使用未归一化的交直流信号和/或直流信号。

公开(公告)号：US20040004715A1

公开(公告)日：2004-01-08

申请号：US10610481

申请日：2003-06-30

Inventor： David Tuschel ,  Patrick J. Treado ,  Joseph E. Demuth

IPC: G01J003/44

CPC classification number: G02B21/365 ,  C08K9/02 ,  C08K2201/014 ,  G01B11/2545 ,  G01J3/2823 ,  G01J3/44 ,  G01J3/447 ,  G01N21/3563 ,  G01N21/65 ,  G02B6/32 ,  G02B21/00 ,  G02B21/06 ,  G06K9/00013 ,  G06T5/50

Abstract: An ion implanted semiconductor surface is illuminated with a flood illumination of monochromatic radiation, and an image of the surface is taken using light which has been Raman scattered. The illumination and imaging system are calibrated by flood illuminating a uniformly Raman scattering surface.

Abstract translation: 用单色辐射的泛光照射照射离子注入的半导体表面，并且使用已经被拉曼散射的光进行表面的图像。 照明和成像系统通过泛光照射均匀的拉曼散射表面来校准。

公开(公告)号：US06674527B2

公开(公告)日：2004-01-06

申请号：US10085775

申请日：2002-02-27

Applicant: Clifford C. Hoyt

Inventor： Clifford C. Hoyt

IPC: G01J330

CPC classification number: G01N21/6445 ,  G01J3/44 ,  G01J3/4406 ,  G01J3/447 ,  G01N21/253

Abstract: A method in which a multiplicative ratio approach is used to remove the effects of the unwanted background fluorescence when making fluoroescence polarization (FP) measurements rather than the conventional subtractive approach, thus preserving both the precision and accuracy of the FP measurements, is disclosed. The method comprises selecting an appropriate multiplicative ratio, then calculating the selected multiplicative ratio using sample measurements. The calculated multiplicative ratio is multiplied by an appropriate value in a standard FP measurement equation or an appropriate value in an equation derived from a standard FP measurement equation. After this, the corrected FP measurement is calculated. When such multiplicative ratios are applied to the appropriate value or values in an FP measurement equation, the effects of background noise can be reduced without decreasing the precision of the FP measurements.

Abstract translation: 公开了一种方法，其中使用乘法比方法来消除在进行氟化偏振（FP）测量而不是传统的减法方法时不需要的背景荧光的影响，从而保持FP测量的精度和精度。 该方法包括选择合适的乘法比，然后使用样本测量来计算选择的乘法比。 计算的乘法比率乘以标准FP测量方程式中的适当值或从标准FP测量方程派生的方程式中的适当值。 之后，计算校正的FP测量值。 当将这种乘法比率应用于FP测量方程式中的适当值或值时，可以降低背景噪声的影响，而不降低FP测量的精度。

公开(公告)号：US06636306B2

公开(公告)日：2003-10-21

申请号：US09753673

申请日：2001-01-04

Applicant: Gang He ,  Daniel Gariépy ,  Gregory Walter Schinn

Inventor： Gang He ,  Daniel Gariépy ,  Gregory Walter Schinn

IPC: G01J328

CPC classification number: G01J3/447 ,  G01J3/12

Abstract: An optical spectrum analyzer comprises a diffraction grating (DG), a polarization decomposing unit (PDM) for decomposing the input light beam into first and second light beams having mutually-perpendicular linear states of polarization, and two output ports (FP2/1, FP2/2) each for receiving from the grating, substantially exclusively, a respective one of the polarized light beams (LT, LR) after diffraction by the diffraction grating (DG). Each of the linearly-polarized light beams is directed onto the diffraction grating with its linear state of polarization at any prescribed angle to a corresponding plane of diffraction of the diffraction grating The arrangement is such that the state of polarization of the light beams, at any particular wavelength within an operating band of the analyzer remains substantially unchanged with respect to time, The analyzer also may have a reflector (RAM) for reflecting the light beams leaving the diffraction grating after diffraction a first time so as to return them to the diffraction grating for diffraction a second time.

Abstract translation: 光谱分析仪包括衍射光栅（DG），用于将输入光束分解成具有相互垂直的极化状态的第一和第二光束的偏振分解单元（PDM）和两个输出端口（FP2 / 1，FP2 / 2），每个用于在衍射光栅（DG）衍射之后从光栅接收基本上仅相应的一个偏振光束（LT，LR）。 每个线性偏振光束以与其衍射光栅的相应衍射平面成任意规定角度的线性极化状态被引导到衍射光栅上。这种布置使得光束的偏振状态 分析仪的工作频带内的特定波长相对于时间保持基本不变。分析仪还可以具有用于在衍射之后第一次反射离开衍射光栅的光束的反射器（RAM），以便将它们返回到衍射光栅 用于衍射第二次。

公开(公告)号：US06618129B2

公开(公告)日：2003-09-09

申请号：US09828025

申请日：2001-04-06

Applicant: J. Christopher Dries ,  Marshall Cohen

Inventor： J. Christopher Dries ,  Marshall Cohen

IPC: G01N2100

CPC classification number: H04B10/07955 ,  G01J3/2803 ,  G01J3/447 ,  G01J4/04 ,  G02B6/29371 ,  G02B6/29385 ,  H04B10/077 ,  H04J14/02

Abstract: An apparatus for use in wave division multiplexing optical telecommunication systems includes a dual photodiode array which converts parallel and perpendicularly polarized light beams at given wavelengths to electrical signals which are digitized and used to rapidly and simultaneously determine all wavelengths and associated components of power and angle of polarization. This information can be displayed for monitoring purposes, or can be used to control signals travelling through optical fiber.

公开(公告)号：US20030067602A1

公开(公告)日：2003-04-10

申请号：US10146228

申请日：2002-05-14

Inventor： Jayantilal S. Patel ,  Zhizhong Zhuang ,  John A. Yeazell

IPC: G01J004/00

CPC classification number: G01J4/04 ,  G01J3/447 ,  G01J4/00 ,  G01M11/331

Abstract: Measurements at multiple distinct polarization measurement states are taken to define the polarization state of an input, for example to calculate a Stokes vector. High accuracy and/or capability of frequent recalibration are needed, due to the sensitivity of measurement to retardation of the input signal. A multiple measurement technique takes a set of spatially and/or temporally distinct intensity measurements through distinct waveplates and polarizers. These can be optimized as to orientation and retardation using initial choices and also using tunable elements, especially controllable birefringence elements. A device matrix defines the response of the device at each of the measurement states. The matrix can be corrected using an iterative technique to revise the device matrix, potentially by automated recalibration. Two input signals (or preferably the same signal before and after a polarization transform) that are known to have a common polarization attribute or other attribute relationship are measured and the common attribute and/or attribute relationship is derived for each and compared. The device matrix is revised, for example by iterative correction or by random search of candidates to improve the accuracy of the device matrix. Optional tunable spectral and temporal discrimination provide additional functions.

Abstract translation: 采用多个不同极化测量状态的测量来定义输入的偏振状态，例如计算斯托克斯矢量。 由于测量对输入信号的延迟的敏感性，需要高精度和/或频繁重新校准的能力。 多重测量技术通过不同的波片和偏振器采取一组空间和/或时间上不同的强度测量。 可以使用初始选择以及使用可调谐元件，特别是可控双折射元件来定向和延迟这些。 器件矩阵定义了器件在每个测量状态下的响应。 可以使用迭代技术校正矩阵，以便通过自动重新校准来修改器件矩阵。 测量已知具有共同极化属性或其他属性关系的两个输入信号（或优选地，在偏振变换之前和之后的相同信号），并且为每个并且进行比较导出公共属性和/或属性关系。 修改设备矩阵，例如通过迭代校正或通过随机搜索候选来改进设备矩阵的准确性。 可选的可调谐光谱和时间辨别提供附加功能。

公开(公告)号：US06510257B1

公开(公告)日：2003-01-21

申请号：US10092602

申请日：2002-03-08

Applicant: Andrzej Barwicz ,  Stephen William Roberts

Inventor： Andrzej Barwicz ,  Stephen William Roberts

IPC: G02B600

CPC classification number: H04B10/077 ,  G01J3/28 ,  G01J3/447 ,  G02B6/12021 ,  G02B6/12023 ,  G02B6/2713 ,  G02B6/2793 ,  G02B6/29326 ,  G02B6/4246 ,  H04B10/07955

Abstract: A multi-wavelength polarization monitor for use in optical networks is disclosed. A received light signal is beam split into first and second signal portions using a beam splitter having known optical characteristics. Each of the first and second signal portions is then dispersed onto a detector array using a first and second dispersive element having known polarization-dependent characteristics. The signal portions are dispersed other than as channelized data within known channels. The dispersed first and second signal portions are then detected using a first and a second detector array and electrical signals in dependence thereupon are provided for A/D conversion and digital signal processing. Using a processor the signals are spectrally augmented and the polarization of the light signal within each of the predetermined wavelength ranges corresponding to the known channels is determined in dependence upon the spectrally augmented signals and based on the known optical characteristics of the elements involved. The disclosed multi-wavelength polarization monitor is realised in a relatively simple manner and allows manufacturing of the same as a very compact integrated device at relatively low cost.

Abstract translation: 公开了一种用于光网络的多波长偏振监视器。 接收的光信号是使用具有已知光学特性的分束器将光束分割成第一和第二信号部分。 然后使用具有已知的偏振相关特性的第一和第二色散元件将第一和第二信号部分中的每一个分散到检测器阵列上。 信号部分除了作为已知信道内的信道化数据之外分散。 然后使用第一和第二检测器阵列检测分散的第一和第二信号部分，并且依赖于此提供用于A / D转换和数字信号处理的电信号。 使用处理器对信号进行光谱增强，并且根据频谱增强的信号并且基于所涉及的元件的已知光学特性来确定对应于已知信道的每个预定波长范围内的光信号的偏振。 所公开的多波长偏振监视器以相对简单的方式实现，并且允许以相对低的成本将其制造成非常紧凑的集成器件。

公开(公告)号：US06456376B1

公开(公告)日：2002-09-24

申请号：US09864840

申请日：2001-05-24

Applicant: Martin M. Liphardt ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He

Inventor： Martin M. Liphardt ,  Blaine D. Johs ,  Craig M. Herzinger ,  Ping He

IPC: G01J400

CPC classification number: G01J3/447 ,  G01J4/00 ,  G01J2003/2866 ,  G01N21/21 ,  G01N21/211 ,  G02B5/3058 ,  G02B5/3083 ,  G02B27/46

Abstract: Disclosed is the application of spatial filter(s) in rotating compensator ellipsometer systems prior to or after a sample system. The purpose is, for instance, to eliminate a radially outer annulus of a generally arbitrary Profile beam that presents with low intensity level irregular content, so that electromagnetic beam intensity is caused to quickly decay to zero as a function of radius.

Abstract translation: 公开了在采样系统之前或之后在旋转补偿器椭偏仪系统中应用空间滤波器。 目的是例如消除具有低强度水平不规则内容的大致任意轮廓波束的径向外环，使得使电磁波强度作为半径的函数快速衰减到零。

公开(公告)号：US06384916B1

公开(公告)日：2002-05-07

申请号：US09715921

申请日：2000-11-17

Applicant: Thomas E. Furtak

Inventor： Thomas E. Furtak

IPC: G01J404

CPC classification number: G01J4/04 ,  G01J3/447 ,  G01J4/00 ,  G01N21/211

Abstract: The parallel detecting spectroscopic ellipsometer/polarimeter sensor has no moving parts and operates in real-time for in-situ monitoring of the thin film surface properties of a sample within a processing chamber. It includes a multi-spectral source of radiation for producing a collimated beam of radiation directed towards the surface of the sample through a polarizer. The thus polarized collimated beam of radiation impacts and is reflected from the surface of the sample, thereby changing its polarization state due to the intrinsic material properties of the sample. The light reflected from the sample is separated into four separate polarized filtered beams, each having individual spectral intensities. Data about said four individual spectral intensities is collected within the processing chamber, and is transmitted into one or more spectrometers. The data of all four individual spectral intensities is then analyzed using transformation algorithms, in real-time.

Abstract translation: 平行检测光谱椭偏仪/偏振计传感器没有移动部件，可以实时地进行处理室内样品的薄膜表面性质的现场监测。 它包括用于产生通过偏振器指向样品表面的准直辐射束的多光谱辐射源。 这样偏振的准直辐射光束会从样品表面反射并反射，从而由于样品的固有材料特性而改变其偏振状态。 从样品反射的光被分离成四个分离的偏振滤光束，每个具有单独的光谱强度。 关于所述四个单个光谱强度的数​​据被收集在处理室内，并被传送到一个或多个光谱仪中。 然后使用变换算法实时分析所有四个单独光谱强度的数​​据。

公开(公告)号：US06177992B1

公开(公告)日：2001-01-23

申请号：US09160650

申请日：1998-09-25

Applicant: David M. Braun ,  Loren F. Stokes

Inventor： David M. Braun ,  Loren F. Stokes

IPC: G01J3447

CPC classification number: G01J3/02 ,  G01J3/0224 ,  G01J3/12 ,  G01J3/447

Abstract: An optical monochromator has high signal selectivity and low insertion loss, and is well-suited for characterizing a variety of optical signals, including closely-spaced optical channels within DWDM systems. The optical monochromator includes a bulk-optic polarization beam splitter that separates orthogonal polarization states of an applied optical signal into separate optical beams. Low insertion loss is achieved by reconciling the polarization states of the separate optical beams to an optimum polarization state that minimizes insertion loss when the optical beams are applied to a dispersive element. High signal selectivity is achieved using a multipass configuration and by illuminating large areas of the dispersive element, since large beam diameters are accommodated by the bulk-optic polarization beam splitter.

Abstract translation: 光学单色仪具有高信号选择性和低插入损耗，并且非常适用于表征各种光信号，包括DWDM系统内的紧密间隔的光通道。 光学单色仪包括将所施加的光信号的正交偏振状态分离为单独的光束的体光学偏振分束器。 通过将分离的光束的偏振状态协调到当将光束施加到色散元件时使插入损耗最小化的最佳偏振状态来实现低插入损耗。 通过使用多通道配置和照亮大面积的色散元件实现高信号选择性，因为大光束直径由体光学偏振分束器容纳。