公开(公告)号：US20050018189A1

公开(公告)日：2005-01-27

申请号：US10504796

申请日：2003-02-13

Applicant: D. Hampton ,  Shankar Krishnan ,  James Rix

Inventor： D. Hampton ,  Shankar Krishnan ,  James Rix

IPC: G01J3/447 ,  G01J4/04 ,  G01J4/00

CPC classification number: G01J4/04 ,  G01J3/447

Abstract: In a device for measuring the complete polarization state of light over a spectral bandwidth, an optical input signal (41) with wavelengths of light within a spectral band is incident on two or more diffraction gratings (42, 44, 46, 48), or incident from at least two directions on one or more diffraction gratings (72, 74), and the intensity is measured as a function of wavelength for at least four of the diffraction spectra produced by the grating(s). The polarization state of light is then calculated as a function of wavelength over the spectral bandwidth from the intensity measurements.

Abstract translation: 在用于在光谱带宽上测量光的完全偏振状态的装置中，光谱波段内的波长的光输入信号（41）入射到两个或更多个衍射光栅（42,44,46,48）上，或 在一个或多个衍射光栅（72,74）上从至少两个方向入射，并且对于由光栅产生的至少四个衍射光谱，测量强度作为波长的函数。 然后，根据强度测量，光的偏振状态被计算为光谱带宽上的波长的函数。

公开(公告)号：US20050002033A1

公开(公告)日：2005-01-06

申请号：US10893449

申请日：2004-07-16

Applicant: Martin Ebert ,  Li Chen

Inventor： Martin Ebert ,  Li Chen

IPC: G01B11/06 ,  G01J4/04 ,  G01N21/21 ,  G01N21/95 ,  G01J4/00

CPC classification number: G01N21/211 ,  G01J4/04

Abstract: An ellipsometric apparatus provides two impinging focused probe beams directed to reflect off the sample along two mutually distinct and preferably substantially perpendicular directions. A rotating stage rotates sections of the wafer into the travel area defined by two linear axes of two perpendicularly oriented linear stages. As a result, an entire wafer is accessed for measurement with the linear stages having a travel range of only half the wafer diameter. The reduced linear travel results in a small travel envelope occupied by the wafer and consequently in a small footprint of the apparatus. The use of two perpendicularly directed probe beams permits measurement of periodic structures along a preferred direction while permitting the use of a reduced motion stage.

Abstract translation: 椭圆仪器提供了两个撞击的聚焦探针光束，其被引导以沿两个相互不同的，优选地基本垂直的方向反射出样品。 旋转台将晶片的部分旋转到由两个垂直取向的线性级的两个线性轴限定的行进区域中。 结果，整个晶片被访问以进行测量，线性级的行程范围仅为晶片直径的一半。 减小的线性行程导致由晶片占据的小行程信封，因此在该设备的小占地面积内。 使用两个垂直定向的探针光束允许沿优选方向测量周期性结构，同时允许使用减小的运动级。

公开(公告)号：US20040265477A1

公开(公告)日：2004-12-30

申请号：US10488596

申请日：2004-08-25

Inventor： Nataliya Nabatova-Gabain ,  Yoko Wasai

IPC: B05D001/00

CPC classification number: G01J4/04 ,  G01B11/0641 ,  G01N21/211

Abstract: With extremely-thin-film and thin-film measurement, models are formed based upon a combination of film thickness, optical constants obtained using the dispersion formula, incident angle, etc., and the model and measured spectrums are fit by BLMC for a single layer of a structure with a certain number of iterations, obtaining information regarding the single layer. With thin-film multi-layer-structure measurement, models are formed for multiple layers of a thin-film multi-layer structure likewise, and fit by BLMC or EBLMC, obtaining information regarding the thin-film multi-layer structure. In either measurement, light is cast onto a thin film on a substrate to be measured while changing the wavelength as a parameter in order to obtain the spectrums nullE(nulli) and nullE(nulli) for each wavelength nulli, representing the change in polarization between the incident and reflected light. The measured spectrums are fit, obtaining the best model. The results are confirmed and stored, as necessary.

公开(公告)号：US20040165623A1

公开(公告)日：2004-08-26

申请号：US10477018

申请日：2003-11-07

Inventor： Masao Imaki ,  Yoshihito Hirano ,  Makoto Satou ,  Kenji Masuda ,  Akihiro Adachi ,  Shinichi Takagi ,  Yasunori Nishimura

IPC: H01S003/13

CPC classification number: G01J9/00 ,  G01J4/04 ,  H01S5/02252 ,  H01S5/0687

Abstract: An optical signal emitted from a semiconductor laser (1) is converged by a lens (2) and is then received by a single uniaxial birefringent crystal (3). The uniaxial birefringent crystal (3) has a C axis that is inclined at an angle other than 90 degrees against a laser optical axis that is the direction in-which the optical signal is traveling so as to output an optical signal having a polarized wave component of constant intensity corresponding to the wavelength of the optical signal regardless of temperature changes thereof. The optical signal passing through the uniaxial birefringent crystal (3) has an ordinary ray vibrating in a direction perpendicular to a plane including both the C axis and the laser optical axis, and an extraordinary ray vibrating in a direction perpendicular to both the ordinary ray and the laser optical axis. A polarizer (4) receives this optical signal and allows a p-polarized component of the optical signal to pass therethrough. A first main photo detector (5) detects the p-polarized component of the optical signal that has passed through the polarizer 4 and then detects the intensity of the received p-polarized component. A second photo detector (6) directly receives the optical signal converged by the lens 2. Therefore, the wavelength of the optical signal can be accurately monitored without being affected by temperature changes.

Abstract translation: 从半导体激光器（1）发射的光信号由透镜（2）会聚，然后由单个单轴双折射晶体（3）接收。 单轴双折射晶体（3）具有相对于作为光信号行进方向的激光光轴倾斜成90度以外的角度的C轴，以输出具有偏振波分量 对应于光信号的波长的恒定强度，不管其温度变化如何。 通过单轴双折射晶体（3）的光信号具有在与包括C轴和激光光轴两者的平面垂直的方向上振动的普通光线，以及在垂直于普通光线和 激光光轴。 偏振器（4）接收该光信号并允许光信号的p偏振分量通过。 第一主光检测器（5）检测已经通过偏振器4的光信号的p偏振分量，然后检测接收的p偏振分量的强度。 第二光检测器（6）直接接收由透镜2收敛的光信号。因此，可以精确地监视光信号的波长，而不受温度变化的影响。

公开(公告)号：US20040130717A1

公开(公告)日：2004-07-08

申请号：US10684361

申请日：2003-10-15

Inventor： Bernard Drevillon ,  Antonello De Martino

IPC: G01J004/00

CPC classification number: G01J4/04 ,  G01N21/211

Abstract: A liquid crystal based polarimetric system, a process for the calibration of this polarimetric system, and a polarimetric measurement process intended for measuring the representative parameters of a sample in which the polarimetric system contains an excitation section emitting a light beam that passes through a polarization state generator (PSG) and onto a sample. After reflection or transmission by the sample, the beam goes through an analysis section with a polarization state detector (PSD). The PSG and PSD each have a first and a second liquid crystal elements LCj (jnull1,2) having, for each LCj element of the PSG (respectively for each LCj element of the PSD), an extraordinary axis making an angle nullj (resp. nullnullj) with respect to the polarization direction (i), and a retardation nullj (resp (nullnullj) between its ordinary and extraordinary axes, the liquid crystals LCj elements being positioned in reverse order in the PSD with respect to the LCj elements of the PSG.

Abstract translation: 基于液晶的偏振系统，用于校准该偏振系统的方法和用于测量样品的代表性参数的偏振测量过程，其中偏振系统包含发射通过偏振状态的光束的激发部分 发电机（PSG）和样品。 在通过样品反射或透射之后，光束通过具有偏振状态检测器（PSD）的分析部分。 PSG和PSD各自具有第一和第二液晶元件LCj（j = 1,2），对于PSG的每个LCj元件（分别用于PSD的每个LCj元件），具有使得角度为 相对于偏振方向（i）和相对于偏振方向（i）的延迟偏差（相位差Δt'（resp（delta'j）），液晶LCj元件相对于PSD以相反的顺序相对于PSD PSG的LCj元素。

公开(公告)号：US06697157B2

公开(公告)日：2004-02-24

申请号：US10245477

申请日：2002-09-17

Applicant: Baoliang Wang ,  Theodore C. Oakberg ,  Paul Kadlec

Inventor： Baoliang Wang ,  Theodore C. Oakberg ,  Paul Kadlec

IPC: G01J400

CPC classification number: G01N21/23 ,  G01J4/04

Abstract: A practical system and method for precisely measuring low-level birefringence properties (retardance and fast axis orientation) of optical materials (26). The system permits multiple measurements to be taken across the area of a sample to detect and graphically display (100) variations in the birefringence properties across the sample area. In a preferred embodiment, the system incorporates a photoelastic modulator (24) for modulating polarized light that is then directed through a sample (26). The beam (“Bi”) propagating from the sample is separated into two parts, with one part (“B1”) having a polarization direction different than the polarization direction of the other beam part (“B2”). These separate beam parts are then processed as distinct channels. Detection mechanisms (32, 50) associated with each channel detect the time varying light intensity corresponding to each of the two parts of the beam. This information is combined for calculating a precise measure of the retardance induced by the sample, as well as the sample's fast axis orientation.

Abstract translation: 精确测量光学材料（26）的低水平双折射性（延迟和快轴取向）的实用系统和方法。 该系统允许在样品区域上进行多次测量，以检测和图形地显示横跨样品区域的双折射性质的变化（100）。 在优选实施例中，该系统包含用于调制偏振光的光弹性调制器（24），然后将其引导通过样品（26）。 从样品传播的光束（“Bi”）被分成两部分，其中一部分（“B1”）的偏振方向与另一光束部分（“B2”）的偏振方向不同。 然后将这些单独的光束部分作为不同的通道进行处理。 与每个通道相关联的检测机构（32,50）检测对应于梁的两个部分中的每一个的时变光强度。 该信息被组合用于计算样品诱导的延迟的精确测量以及样品的快轴取向。

公开(公告)号：US20040027571A1

公开(公告)日：2004-02-12

申请号：US10333416

申请日：2003-01-16

Inventor： Michel Luttmann

IPC: G01J004/00

CPC classification number: G01J4/04 ,  G01N21/211

Abstract: The invention concerns an ellipsometer comprising a source (S) supplying at least an infrared radiation, a sample-holder (PE), a sensor (D), a first optical system mounted between the source (S) and the sample-holder (PE), so as to illuminate a sample placed on the sample-holder, under oblique view with a polarised light beam and a second optical system mounted between the sample-holder (PE) and the sensor (D) for collecting the light reflected by the sample. The ellipsometer further comprises a blocking device (F2) mounted on the reflection path in the focal plane of the focusing device (M2) of the second optical system, and adapted to block parasite rays (RP) derived from the rear surface (FAR) of the sample and to allow through useful rays (RU) derived from the front surface (FAV) of the sample towards the sensor (D), thereby enabling to obtain a resolution with respect to the sample front and rear surfaces.

Abstract translation: 本发明涉及一种椭圆光度计，其包括至少提供红外辐射的光源（S），样品保持器（PE），传感器（D），安装在源（S）和样品保持器 ），以便在倾斜观察下照射放置在样品架上的样品，并且将偏振光束和安装在样品保持器（PE）和传感器（D）之间的第二光学系统收集由 样品。 椭偏仪还包括安装在第二光学系统的聚焦装置（M2）的焦平面中的反射路径上的阻​​挡装置（F2），并且适于阻挡从后表面（FAR）衍生的寄生射线（RP） 并且允许通过从样品的前表面（FAV）导出的有用射线（RU）朝向传感器（D），从而能够获得相对于样品前表面和后表面的分辨率。

公开(公告)号：US20040012783A1

公开(公告)日：2004-01-22

申请号：US10416200

申请日：2003-05-08

Inventor： Shigeru Morokawa ,  Takakazu Yano ,  Kenji Matsumoto ,  Hiroyuki Uematsu

IPC: G01J004/00

CPC classification number: A61B5/14558 ,  A61B5/0031 ,  A61B5/0088 ,  A61B5/411 ,  G01J4/04 ,  G01N21/21 ,  G01N21/211

Abstract: To measure the concentration of an optically active substance in a solution without contacting the solution, the concentration measuring apparatus of the present invention comprises: a light source for outputting linearly polarized light; a light intensity detecting element disposed opposite the light source with a sample placed therebetween; an optically active liquid crystal element placed between the light source and the light intensity detection circuit; a control circuit which controls the voltage to be applied to the optically active liquid crystal element so that an output value from the light intensity detecting element will in effect take an extreme value; and a concentration computing circuit for computing the concentration of an optically active substance in the sample, based on an output from the control circuit.

Abstract translation: 为了测量不接触溶液的溶液中光学活性物质的浓度，本发明的浓度测量装置包括：用于输出线偏振光的光源; 光源检测元件，设置在所述光源的相对的位置处; 放置在光源和光强检测电路之间的光学活性液晶元件; 控制电路，其控制施加到光学活性液晶元件的电压，使得来自光强度检测元件的输出值实际上将达到极限值; 以及浓度计算电路，用于基于来自控制电路的输出来计算样品中光学活性物质的浓度。

公开(公告)号：US20030223064A1

公开(公告)日：2003-12-04

申请号：US10160808

申请日：2002-05-31

Inventor： Michael Anderson ,  Qienyuan Zhou ,  William Papworth

IPC: G01J004/00

CPC classification number: A61B3/1005 ,  A61B3/14 ,  G01J4/04

Abstract: A polarimeter system that averages multiple retardant measurement samples to cancel the effects of system birefringence in the diagnostic path. The retardant measurement errors arising from system birefringence have a symmetry that repeats over each complete cycle of optical signal rotation cycle. This symmetry is such that averaging the four retardance measurements collected over one complete rotation cycle cancels the effects of system birefringence, leaving a mean retardance measurement free of residual polarization bias. Apparatus is provided for determining the birefringence, thickness, and fiber orientation of the nerve fiber layer at the fundus of the eye by measuring the polarization bias induced in a return beam of polarized light that is reflected at the ocular fundus from an incident beam of a known polarization state. A corneal polarization compensator cancels the birefringent effects of the cornea and other portions of the eye anterior to the fundus.

Abstract translation: 平衡多个阻燃测量样本以消除诊断路径中系统双折射的影响的偏振计系统。 系统双折射引起的阻滞测量误差具有在光信号旋转周期的每个完整周期上重复的对称性。 这种对称性使得在一个完整的旋转周期上收集的四个延迟测量的平均取消了系统双折射的影响，留下了没有残余偏振偏移的平均延迟测​​量。 提供了一种设备，用于通过测量在从眼睛的眼底反射的偏振光的反射光束中感应的偏振偏振，从眼睛的入射光束来测定神经纤维层在眼底的双折射，厚度和纤维取向 已知的极化状态。 角膜偏振补偿器抵消了角膜和眼底前部眼部的双折射效应。

公开(公告)号：US06654121B1

公开(公告)日：2003-11-25

申请号：US09913123

申请日：2001-08-08

Applicant: Ho Jin Jeong ,  Bong Wan Lee

Inventor： Ho Jin Jeong ,  Bong Wan Lee

IPC: G01J400

CPC classification number: G01J4/04

Abstract: An apparatus and method for detecting the state of polarization (SOP). The apparatus of the present invention includes a phase retarder and a polarizer which rotate with different speeds. In the method of the present invention, optical signals passed through the rotating phase retarder and the rotating polarizer are detected and their harmonic components related to rotating frequencies of phase retarder and polarizer are analyzed, which gives the Stokes parameters representing the state of polarization. According to the present invention, the amount of phase retardation at the phase retarder can be obtained together with the state of polarization using frequency component analysis, reducing measurement errors. The present invention has advantages in SOP measurement of wide wavelength range, increasing the measurement accuracy.

Abstract translation: 用于检测偏振状态（SOP）的装置和方法。 本发明的装置包括以不同速度旋转的相位延迟器和偏振器。 在本发明的方法中，检测通过旋转相位延迟器和旋转偏振器的光信号，并分析与相位延迟器和偏振器的旋转频率相关的谐波分量，这给出了表示极化状态的斯托克斯参数。 根据本发明，通过使用频率分量分析，可以与极化状态一起获得相位延迟器的相位延迟量，减少了测量误差。 本发明在宽波长范围的SOP测量中具有优点，提高了测量精度。