Defect inspection device and defect inspection method
    101.
    发明授权
    Defect inspection device and defect inspection method 有权
    缺陷检查装置和缺陷检查方法

    公开(公告)号:US09568439B2

    公开(公告)日:2017-02-14

    申请号:US15088673

    申请日:2016-04-01

    Abstract: To detect an infinitesimal defect, highly precisely measure the dimensions of the detect, a detect inspection device is configured to comprise: a irradiation unit which irradiate light in a linear region on a surface of a sample; a detection unit which detect light from the linear region; and a signal processing unit which processes a signal obtained by detecting light and detecting a defect. The detection unit includes: an optical assembly which diffuses the light from the sample in one direction and forms an image in a direction orthogonal to the one direction; and a detection assembly having an array sensor in which detection pixels are positioned two-dimensionally, which detects the light diffused in the one direction and imaged in the direction orthogonal to the one direction, adds output signals of each of the detection pixels aligned in the direction in which the light is diffused, and outputs same.

    Abstract translation: 为了检测无限小的缺陷,高度精确地测量检测器的尺寸,检测检查装置被配置为包括:照射单元,其照射样品表面上的线性区域中的光; 检测单元,其检测来自所述线性区域的光; 以及处理通过检测光而获得的信号并检测缺陷的信号处理单元。 检测单元包括:光学组件,其在一个方向上扩散来自样品的光并在与该一个方向正交的方向上形成图像; 以及检测组件,其具有阵列传感器,其中检测像素被二维地定位,其检测沿与所述一个方向正交的方向成像的沿所述一个方向扩散的光,并将每个所述检测像素的输出信号相加 光漫射的方向,并输出。

    Inspection Apparatus, Inspection Method, And Program
    105.
    发明申请
    Inspection Apparatus, Inspection Method, And Program 有权
    检验仪器,检验方法和程序

    公开(公告)号:US20170030839A1

    公开(公告)日:2017-02-02

    申请号:US15290020

    申请日:2016-10-11

    Inventor: Hajime Matsuda

    Abstract: To facilitate adjusting of a distance from an inspection target to an illumination section by providing a movable illumination section that is movable independently of the imaging section. An illumination apparatus has a plurality of LEDs arranged in a substantially annular form, a light diffusion member for diffusing light emitted from the plurality of LEDs, and a lighting control part for lighting the plurality of light sources in accordance with a predetermined lighting pattern when designated to start lighting. In particular, the illumination apparatus moves independently of a camera to adjust a distance to a workpiece.

    Abstract translation: 通过提供可独立于成像部分移动的可移动照明部分,便于调整从检查对象到照明部分的距离。 照明装置具有以大致环状形式配置的多个LED,用于扩散从多个LED发射的光的光漫射构件,以及用于在指定时根据预定的照明模式点亮多个光源的照明控制部 开始照明 特别地,照明装置独立于相机移动以调整到工件的距离。

    MICROSCOPE AND MICROSCOPY METHOD
    107.
    发明申请
    MICROSCOPE AND MICROSCOPY METHOD 审中-公开
    微观和微观方法

    公开(公告)号:US20170010453A1

    公开(公告)日:2017-01-12

    申请号:US15275359

    申请日:2016-09-24

    Abstract: Provided is a microscope provided with: a scanner that scans an excitation beam coming from a light source; an objective optical system that focuses the scanned excitation beam onto a sample and that collects fluorescence generated at individual scanning positions in the sample; a detector that detects the collected fluorescence; a light blocking member that is disposed between the detector and the system and that partially blocks the collected fluorescence; a switching portion that switches the positional relationship between the member and a light-focusing point of the excitation beam in the sample between an optically conjugate positional relationship, in which an in-focus fluorescence generated at the light-focusing point passes through the member, and a non-conjugate positional relationship, in which the in-focus fluorescence is blocked by the member; and a computing portion that computes a difference between fluorescence signals acquired by the detector in the two positional relationships.

    Abstract translation: 提供了一种显微镜,其具有:扫描来自光源的激发光束的扫描仪; 物镜光学系统,其将扫描的激发光束聚焦到样品上并且收集样品中各个扫描位置产生的荧光; 检测所收集的荧光的检测器; 光阻挡构件,其设置在所述检测器和所述系统之间并部分阻挡所述收集的荧光; 切换部,其以在所述光聚合点处产生的聚焦荧光透过所述构件的光学共轭位置关系之间切换所述构件与所述样品中的所述激发光束的聚光点之间的位置关系, 以及非共轭位置关系,其中聚焦荧光被构件阻挡; 以及计算部分,其计算由两个位置关系中的检测器获取的荧光信号之间的差异。

    Method of simultaneously analyzing amount of nutritional component in various foods having different physicochemical properties and compositions by near-infrared reflectance spectroscopy
    108.
    发明申请
    Method of simultaneously analyzing amount of nutritional component in various foods having different physicochemical properties and compositions by near-infrared reflectance spectroscopy 审中-公开
    通过近红外反射光谱法同时分析具有不同物理化学性质和组成的各种食品中营养成分的量的方法

    公开(公告)号:US20170010210A1

    公开(公告)日:2017-01-12

    申请号:US15272696

    申请日:2016-09-22

    Abstract: A method is for simultaneously analyzing nutritional component content in a plurality of various foods or agricultural sources having different ingredients and forms, that is, different physicochemical properties and compositions distributed in Korea by near-infrared reflectance spectroscopy. In particular, a method is for rapidly and accurately measuring nutritional component content in a plurality of various foods or agricultural sources having different ingredients and forms, that is, different physicochemical properties and compositions distributed in Korea by near-infrared reflectance spectroscopy.

    Abstract translation: 一种方法是同时分析具有不同成分和形式的多种各种食品或农业来源的营养成分含量,即通过近红外反射光谱法分散在韩国的不同的理化性质和组成。 特别地,一种方法是通过近红外线反射光谱法快速,准确地测量多种具有不同成分和形式的各种食品或农业来源的营养成分含量,即分散在韩国的不同的物理化学性质和组成。

    Inspection system
    110.
    发明授权
    Inspection system 有权
    检验系统

    公开(公告)号:US09535009B2

    公开(公告)日:2017-01-03

    申请号:US14401455

    申请日:2013-04-01

    Abstract: To improve sensitivity of a defect inspection, it is required to decrease influence of excessive diffraction from a spatial filter. Further, it is preferable to secure signal intensity from defects and particles as much as possible, while the influence of the excessive diffraction is decreased as much as possible. The present invention is characterized in setting a width of a spatial filter surface such that an unnecessary image caused by diffraction, that is, an intensity of the excessive diffraction is sufficiently small with respect to an intensity of a desired image. In the present invention, an SN ratio that is an index for deciding a width of the spatial filter is calculated from a region subjected to the influence of the excessive diffraction in an inspection image, and a width of a shield unit of the spatial filter is set so as to maximize the SN ratio.

    Abstract translation: 为了提高缺陷检查的灵敏度,需要减小空间滤波器过度衍射的影响。 此外,尽可能地尽可能地减少来自缺陷和颗粒的信号强度,同时尽可能地减少过度衍射的影响。 本发明的特征在于设置空间滤波器表面的宽度,使得由衍射引起的不需要的图像,即过度衍射的强度相对于期望的图像的强度足够小。 在本发明中,作为用于决定空间滤波器的宽度的指标的SN比是从检查图像中受到过度衍射的影响的区域算出的,空间滤波器的屏蔽单位的宽度为 设置为最大化SN比。

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