公开(公告)号：US20070001541A1

公开(公告)日：2007-01-04

申请号：US11173080

申请日：2005-06-30

Applicant: Robert Baker

Inventor： Robert Baker

IPC: B64D45/00 ,  G21H1/00

CPC classification number: B64G1/409 ,  F03H99/00 ,  G21K2201/06

Abstract: A gravitational wave generating device comprising an energizing means such as magnetrons, which act upon energizable elements such as film bulk acoustic resonators or FBARs. A computer that controls the magnetrons' phase. A gravitational wave generation device that exhibits directivity and forms a gravitational-wave beam. The utilization of a medium in which the gravitational wave speed is reduced in order to effect refraction of the gravitational wave and be a gravitational wave lens. A gravitational wave generator device that can be directed in order to propel an object by its momentum or by changing the gravitational field nearby the object to urge it in a preferred direction and be a propulsion means.

Abstract translation: 引力波发生装置包括诸如磁控管的激励装置，其作用在诸如薄膜体声共振器或FBAR之类的可激励元件上。 控制磁控管相位的计算机。 一种显示方向性并形成重力波束的引力波发生装置。 利用其中引力波速度降低的介质来实现引力波的折射，并且是重力波透镜。 引力波发生器装置，其可以被引导以通过其动量来推动物体，或者通过改变物体附近的重力场以推动其在优选的方向上并且是推进装置。

公开(公告)号：US20060262435A1

公开(公告)日：2006-11-23

申请号：US11132783

申请日：2005-05-19

Applicant: Paul Denham

Inventor： Paul Denham

IPC: G02B7/182

CPC classification number: G02B7/1821 ,  G02B5/0891 ,  G02B26/101 ,  G03F7/70058 ,  G03F7/701 ,  G03F7/702 ,  G03F7/70825 ,  G03F7/70841 ,  G21K2201/06

Abstract: A compact and vacuum compatible magnetic-coil driven tiltable stage that is equipped with a high efficiency reflective coating can be employed as a scanner in EUV applications. The drive electronics for the scanner is fully in situ programmable and rapidly switchable.

Abstract translation: 具有高效率反射涂层的紧凑且真空兼容的电磁线圈驱动可倾斜平台可用作EUV应用中的扫描仪。 扫描仪的驱动电子设备完全可原地编程并可快速切换。

公开(公告)号：US20060193438A1

公开(公告)日：2006-08-31

申请号：US11347668

申请日：2006-02-03

Applicant: Ian Radley ,  Michael Moore ,  Mark Fitzgerald

Inventor： Ian Radley ,  Michael Moore ,  Mark Fitzgerald

IPC: H05G2/00 ,  G21G4/00 ,  H01J35/00

CPC classification number: H05G1/36 ,  G21K2201/06 ,  H01J2235/1291 ,  H05G1/025

Abstract: An x-ray source assembly includes an anode having a spot upon which electrons impinge based on power level supplied to the assembly, and an optic coupled to receive divergent x-rays generated at the spot and transmit output x-rays from the assembly. A control system is provided for maintaining intensity of the output x-rays dynamically during operation of the x-ray source assembly, notwithstanding a change in at least one operating condition of the x-ray source assembly, by changing the power level supplied to the assembly. The control system may include at least one actuator for effecting the change in the power level supplied to the assembly, by, e.g., controlling a power supply associated with the assembly. The control system may also change the temperature and/or the position of the anode to maintain the output intensity.

Abstract translation: x射线源组件包括阳极，阳极基于提供给组件的功率电平而撞击电子的点，以及光耦合以接收在该点处产生的发散的x射线，并从组件传输输出x射线。 提供了一种控制系统，用于在x射线源组件的操作期间动态地保持输出x射线的强度，尽管通过改变提供给X射线源组件的功率电平，尽管x射线源组件的至少一个操作状态发生变化 部件。 控制系统可以包括至少一个致动器，用于通过例如控制与组件相关联的电源来实现提供给组件的功率水平的变化。 控制系统还可以改变阳极的温度和/或位置以维持输出强度。

公开(公告)号：US20060141168A1

公开(公告)日：2006-06-29

申请号：US11357663

申请日：2006-02-16

Applicant: Takahiro Okura ,  Kazuya Shimizu ,  Masakazu Takei

Inventor： Takahiro Okura ,  Kazuya Shimizu ,  Masakazu Takei

IPC: C23C8/00

CPC classification number: C23C14/081 ,  C23C14/0021 ,  C23C14/0694 ,  C23C14/08 ,  C23C14/083 ,  C23C14/10 ,  C23C14/14 ,  C23C14/32 ,  C30B23/02 ,  C30B29/02 ,  G02B5/0858 ,  G21K1/06 ,  G21K2201/06 ,  Y10T428/12174 ,  Y10T428/12736 ,  Y10T428/12896 ,  Y10T428/12993 ,  Y10T428/31678

Abstract: The metal film of the present invention is a dense film of a single crystal that has very low surface roughness and very good crystal orientation because an arithmetic mean roughness of the surface is not larger than 2 nm and a (111) peak intensity of X-ray diffraction is not less than 20 times the sum of all other peaks. Also the metal oxide film of the present invention is a dense film that includes less oxygen defects and almost no voids therein because a content of a non-oxidized metal is not higher than 1 mole % of a metal component that constitutes the metal oxide and a packing density is 0.98.or higher.

Abstract translation: 本发明的金属膜是具有非常低的表面粗糙度和非常好的晶体取向的单晶的致密膜，因为表面的算术平均粗糙度不大于2nm，并且（111）的X-射线衍射峰强度， X射线衍射不小于所有其他峰的总和的20倍。 另外，本发明的金属氧化物膜是由于非氧化金属的含量不高于构成金属氧化物的金属成分的1摩尔％而含有氧缺陷少，几乎无空隙的致密膜， 包装密度为0.98或更高。

公开(公告)号：US06754304B1

公开(公告)日：2004-06-22

申请号：US09937286

申请日：2001-09-25

Applicant: Muradin Abubekirovich Kumakhov

Inventor： Muradin Abubekirovich Kumakhov

IPC: G01N2322

CPC classification number: G01N23/223 ,  G01N2223/076 ,  G21K2201/06

Abstract: A method and device for producing visually sensed images of the internal structure of, particularly, a biological object. When used for diagnostic purposes in medicine the x-ray dosage of tissues surrounding the spot that is being examined is decreased.

Abstract translation: 一种用于产生特别是生物体的内部结构的视觉感测图像的方法和装置。 当用于医学诊断时，减少正在检查的斑点周围组织的x射线剂量。

公开(公告)号：US06469827B1

公开(公告)日：2002-10-22

申请号：US09631617

申请日：2000-08-04

Applicant: William C. Sweatt ,  Daniel A. Tichenor ,  Luis J. Bernardez

Inventor： William C. Sweatt ,  Daniel A. Tichenor ,  Luis J. Bernardez

IPC: G02B508

CPC classification number: G03F7/70158 ,  G02B27/30 ,  G03F7/70066 ,  G03F7/70191 ,  G03F7/702 ,  G03F7/70575 ,  G03F7/70875 ,  G21K1/06 ,  G21K1/10 ,  G21K2201/06 ,  G21K2201/064 ,  G21K2201/067

Abstract: A condenser system for generating a beam of radiation includes a source of radiation light that generates a continuous spectrum of radiation light; a condenser comprising one or more first optical elements for collecting radiation from the source of radiation light and for generating a beam of radiation; and a diffractive spectral filter for separating first radiation light having a particular wavelength from the continuous spectrum of radiation light. Cooling devices can be employed to remove heat generated. The condenser system can be used with a ringfield camera in projection lithography.

Abstract translation: 用于产生辐射束的聚光器系统包括产生连续的辐射光谱的辐射光源; 冷凝器，包括用于收集来自辐射源的辐射并用于产生辐射束的一个或多个第一光学元件; 以及用于将具有特定波长的第一辐射光与辐射光的连续光谱分离的衍射光谱滤波器。 可以使用冷却装置来除去产生的热量。 冷凝器系统可与投影光刻中的环形相机一起使用。

公开(公告)号：US20180011035A1

公开(公告)日：2018-01-11

申请号：US15712799

申请日：2017-09-22

Applicant: RIGAKU CORPORATION

Inventor： Naoki KAWAHARA

IPC: G01N23/207 ,  G21K1/06

CPC classification number: G01N23/223 ,  G01N23/207 ,  G01N23/22 ,  G01N2223/315 ,  G21K1/06 ,  G21K1/062 ,  G21K1/067 ,  G21K2201/06 ,  G21K2201/061 ,  G21K2201/062 ,  G21K2201/064 ,  G21K2201/067

Abstract: A doubly bent X-ray spectroscopic device (1) according to the present invention includes: a glass plate (3) which is deformed into a shape having a doubly bent surface by being sandwiched between a doubly curved convex surface (21a) of a convex forming die (21) and a doubly curved concave surface (22a), of a concave forming die (22), that matches the doubly curved convex surface (21a), and being heated to a temperature of 400° C. to 600° C.; and a reflection coating (5) configured to reflect X-rays, which is formed on a concave surface (3a) of the deformed glass plate (3 ).

公开(公告)号：US09640291B2

公开(公告)日：2017-05-02

申请号：US14068322

申请日：2013-10-31

Applicant: Carl Zeiss X-ray Microscopy, Inc.

Inventor： Michael Feser ,  Alan Francis Lyon

IPC: G21K1/00 ,  G21K1/06 ,  G21K7/00

CPC classification number: G21K1/00 ,  G21K1/06 ,  G21K7/00 ,  G21K2201/06 ,  G21K2201/067

Abstract: A compound x-ray lens and method of fabricating these lenses are disclosed. These compound lenses use multiple zone plate stacking to achieve a pitch frequency increase for the resulting combined zone plate. The compound equivalent zone plate includes a first zone plate having an initial pitch frequency stacked onto a second zone plate to form an equivalent compound zone plate. The equivalent zone plate has a pitch frequency that is at least twice the initial pitch frequency. Also, in one example, the equivalent zone plate has a mark-to-space ratio of 1:1.

公开(公告)号：US09484187B2

公开(公告)日：2016-11-01

申请号：US14805509

申请日：2015-07-22

Applicant: MAPPER LITHOGRAPHY IP B.V.

Inventor： Pieter Kruit ,  Marc Smits

IPC: H01J37/00 ,  H01J37/317 ,  H01J37/30 ,  G03F7/20 ,  H01J37/32 ,  B82Y10/00 ,  B82Y40/00 ,  F15D1/02 ,  H01J9/38

CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  F15D1/025 ,  G03F7/70925 ,  G21K2201/06 ,  H01J9/38 ,  H01J37/3007 ,  H01J37/3177 ,  H01J37/32862 ,  H01J2237/006 ,  H01J2237/022 ,  H01J2237/327 ,  Y10T137/2082 ,  Y10T137/87571

Abstract: The invention relates to an arrangement for transporting radicals. An electron beam system is presented comprising a beamlet generator; a beamlet manipulator (204) comprising an array of apertures; a plasma generator comprising a chamber for forming a plasma, an inlet receiving input gas and outlets removing plasma or radicals created therein, the plasma generator further comprising outlets in flow connection with the plasma chamber outlets; and a hollow guiding body (309b) guiding radicals formed in the plasma towards the array of apertures for removing contaminant deposition. The hollow guiding body (309b) is removably connectable to an extended portion (307b) of the plasma generator outlet. A cover (400) can be placed over a connection between the hollow guiding body (309b) and the extended portion (307b). The extended portion (307b) of the plasma generator outlet and the hollow guiding body (309b) can be similarly formed as a slit.

公开(公告)号：US09235137B2

公开(公告)日：2016-01-12

申请号：US13370829

申请日：2012-02-10

Applicant: Damian Fiolka ,  Ralf Stuetzle

Inventor： Damian Fiolka ,  Ralf Stuetzle

IPC: G03B27/72 ,  G03F7/20 ,  G02B27/09 ,  G21K1/06 ,  G21K1/16

CPC classification number: G03F7/70233 ,  G02B27/0905 ,  G02B27/0977 ,  G03F7/70075 ,  G03F7/70116 ,  G03F7/70175 ,  G03F7/702 ,  G03F7/70566 ,  G21K1/06 ,  G21K1/16 ,  G21K2201/06 ,  G21K2201/064 ,  G21K2201/067

Abstract: An illumination optical unit includes a collector mirror which produces a polarization distribution that is applied to the first faceted optical element during the operation of the illumination optical unit. There are at least two first facet elements to which radiation having a differing polarization is applied. The first faceted optical element has at least one first state in which the normal vectors of the reflective surfaces of the first facet elements are selected so that a first predetermined polarization distribution results at the location of the object field during the operation of the illumination optical unit.

Abstract translation: 照明光学单元包括集光镜，其在照明光学单元的操作期间产生施加到第一刻面光学元件的偏振分布。 存在施加具有不同极化的辐射的至少两个第一小面元件。 第一刻面光学元件具有至少一个第一状态，其中第一面元件的反射表面的法向矢量被选择为使得在照明光学单元的操作期间在物场的位置处产生第一预定偏振分布 。