Abstract:
According to an embodiment, a winding apparatus includes a winding core and an air flow controller. The winding core winds a belt-shaped structure comprising a substrate and an edge-coating part that covers an edge of a substrate in a width direction, the edge-coating part being coated with a material liquid on a surface of the substrate. The air flow controller has a nozzle that performs at least either ejection or suction of a gas, and adjusts an air flow in the vicinity of the edge-coating part of the film of the belt-shaped structure, which is wound by a winding core.
Abstract:
A substrate processing apparatus includes a periphery removal unit configured to remove a peripheral portion of a film formed on a surface of a substrate; a profile acquisition unit configured to acquire a removal width profile indicating a relationship between a position in a circumferential direction of the substrate and a width of a portion of the substrate from which the film is removed; and a factor estimation unit configured to output factor information indicating a factor of an error in the width based on the removal width profile.
Abstract:
An apparatus for supplying chemical liquid may include a gantry, a chemical liquid supply member providing a chemical liquid onto a substrate, and a moving device supporting the chemical liquid supply member and moving along the gantry. The moving device may include a moving member, load supporting members and absorbing members. The moving member may support one side of the chemical liquid supply member and may run over the gantry. The moving member may cover an upper face, a first side and a second side of the gantry. The load supporting members may support a load applied to the moving member and the gantry while maintaining a substantially constant distance between the moving member and the gantry. The absorbing members may absorb an impulsive load or an impulsive force applied to the moving member and/or the gantry when the moving member deviates from a moving path provided by the gantry.
Abstract:
Provided are a cleaning cavity series for extrusion type coating, and a cleaning method. The cleaning cavity series for extrusion type coating includes a plurality of cleaning cavities, where the plurality of cleaning cavities form the cleaning cavity series, each of the plurality of cleaning cavities is provided with an inner cavity body, a cleaning cavity opening portion in communication with the inner cavity body is disposed on a side portion of each of the plurality of cleaning cavities, and cross-section outlines of the inner cavity bodies of the plurality of cleaning cavities are a series of curves with an equal chord length. The cleaning method includes: S1: evaluating an envelope line of a slurry that overflows from a lip portion of a coating head, and selecting one cleaning cavity from a cleaning cavity series to ensure that an enveloped area of the envelope line accounts for 30%-70% of the sectional area of an inner cavity body of the selected cleaning cavity; and S2: selecting a static cleaning method or a dynamic cleaning method to perform a cleaning operation on the coating head using the selected cleaning cavity from the cleaning cavity series. The cleaning cavity series for extrusion type coating, and the cleaning method using same have the advantages of having a simple structure, being convenient to apply, being low in implementation cost, and improving the cleaning effect, the coating quality and the production efficiency.
Abstract:
An apparatus and a method performing work free from variations among a plurality of work heads having individual differences. A working apparatus includes a number n (a natural number 2 or greater) of work heads, a stage retaining a work object, drive devices moving the stage and the work heads relative to each other in three directions, a work amount measurement device measuring a work amount of each work head, and a control device, wherein the first-direction drive device enables the number n of work heads to be independently moved in a first direction, and the second-direction drive device includes a second-direction main drive device moving the number n of work heads simultaneously in a second direction, and a second-direction auxiliary drive device moving n−1 work heads among the number n of work heads independently in the second direction. A working method is carried out using the working apparatus.
Abstract:
An autonomous machine for the application of paint to a targeted application area. The autonomous machine operates with complete autonomy to paint a room without guidance or intervention. The autonomous machine includes a propulsion system to generate movement along a surface, a sensor system that generate signals representative of conditions during the painting to a targeted application area, and a control system that is in communication with the propulsion system and applicator system. In operation the autonomous machine automatically moves to and along walls that need to be painted. The autonomous machine detects the boundaries of the walls. A sensor head on the autonomous machine scans the walls, detecting and accommodating for any obstacles such as windows and windows trim present on the walls. Pressurized paint is then moved from a reservoir in the autonomous machine to the applicator and the applicator begins applying paint to the targeted application area.
Abstract:
An underlayer is formed to cover the upper surface of a substrate and a guide pattern is formed on the underlayer. A DSA film constituted by two types of polymers is formed in a region on the underlayer where the guide pattern is not formed. Thermal processing is performed while a solvent is supplied to the DSA film on the substrate. Thus, a microphase separation of the DSA film occurs. As a result, patterns made of the one polymer and patterns made of another polymer are formed. Exposure processing and development processing are performed in this order on the DSA film after the microphase separation such that the patterns made of another polymer are removed.
Abstract:
An adhesive melter and a method for operating the adhesive melter enables predictive maintenance of an exhaust air filter used to remove pressurized air flow that delivers solid adhesive particulate from a fill system into the melter. To this end, the fill system repeatedly actuates to refill a receiving space, and a controller monitors a duration of each fill system cycle. When changes in a calculated average duration of a plurality of fill system cycles exceed a maintenance threshold, an alert is emitted at a user interface to prompt maintenance or replacement of the exhaust air filter before a complete shutdown of the fill system is caused by clogging of the exhaust air filter. Consequently, unplanned downtimes caused by clogged exhaust air filters in the adhesive melter can be minimized, regardless of any variable conditions occurring at the melter.
Abstract:
An adhesive melter and a method for operating the melter enables predictive maintenance of an exhaust air filter used to remove pressurized air flow that delivers solid adhesive particulate from a fill system into the melter. To this end, the fill system repeatedly actuates to refill a receiving space, and a controller monitors a duration of each fill system cycle. When changes in a calculated average duration of a plurality of fill system cycles exceed a maintenance threshold, an alert is emitted at a user interface to prompt maintenance or replacement of the exhaust air filter before a complete shutdown of the fill system is caused by clogging of the exhaust air filter. Consequently, unplanned downtimes caused by clogged exhaust air filters in the adhesive melter can be minimized, regardless of any variable conditions occurring at the melter.