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公开(公告)号：US09239222B2
公开(公告)日：2016-01-19
申请号：US14236966
申请日：2011-08-09
Applicant: Katsutoshi Narita
Inventor： Katsutoshi Narita
CPC classification number: G01B7/14 , B81B3/0086 , B81B2201/033 , G01C19/5733
Abstract: The displacement amount monitoring electrode structure includes a fixed electrode and a movable electrode each having a comb-teeth shape including a base part and electrode fingers extending from the base part in a direction parallel to a substrate. The fixed electrode and the movable electrode face each other such that the electrode fingers are meshed together. The fixed electrode is fixed to the substrate and the movable electrode can be displaced in the direction. The displacement amount monitoring electrode structure monitors a displacement amount of a detection mass to be driven at a target amplitude based on a change amount of a capacitance between the fixed electrode and the movable electrode. A change sensitivity of the change amount of the capacitance with respect to a displacement amount of the movable electrode, becomes larger after the displacement of the movable electrode reaches a target amount corresponding to the target amplitude.
Abstract translation: 位移量监视电极结构包括固定电极和可动电极，每个固定电极和可动电极具有梳状形状，其包括基底部分和电极指，该电极指沿平行于基底的方向从基部延伸。 固定电极和可动电极彼此面对，使得电极指彼此啮合。 固定电极固定在基板上，可动电极可以向该方向移位。 位移量监视电极结构基于固定电极和可动电极之间的电容的变化量来监视要以目标振幅驱动的检测质量的位移量。 电容变化量相对于可动电极的位移量的变化灵敏度在可动电极的位移达到与目标振幅对应的目标量后变大。
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公开(公告)号：US09148075B2
公开(公告)日：2015-09-29
申请号：US14479615
申请日：2014-09-08
Applicant: STMicroelectronics International N.V.
Inventor： Sason Sourani , Moshe Medina
CPC classification number: H02N1/006 , B81B3/0043 , B81B7/00 , B81B7/008 , B81B2201/033 , B81B2201/034 , B81B2201/042 , B81B2203/0109 , B81B2203/0181 , B81B2203/058 , G02B7/1821 , G02B26/0841 , H02N1/008
Abstract: A Micro Electro Mechanical Systems (MEMS) device includes a rotor having first rotor teeth and second rotor teeth formed in at least two layers of silicon-on-insulator (SOI) substrate. Each rotor tooth belonging to the first rotor teeth is formed in a first layer and each rotor tooth belonging of the second rotor teeth is formed in a second layer. A stator includes first stator teeth and second stator teeth formed in at least two layers of SOI substrate. Each stator tooth belonging to the first stator teeth is formed in a first layer and each stator tooth belonging to the second stator teeth is formed in a second layer.
Abstract translation: 微机电系统（MEMS）装置包括具有形成在至少两层绝缘体上硅（SOI）衬底上的第一转子齿和第二转子齿的转子。 属于第一转子齿的每个转子齿形成在第一层中，并且属于第二转子齿的每个转子齿形成在第二层中。 定子包括形成在至少两层SOI衬底中的第一定子齿和第二定子齿。 属于第一定子齿的每个定子齿形成在第一层中，并且属于第二定子齿的每个定子齿形成在第二层中。
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公开(公告)号：US20150012230A1
公开(公告)日：2015-01-08
申请号：US14324363
申请日：2014-07-07
Applicant: Jason Vaughn Clark
Inventor： Jason Vaughn Clark
IPC: G01N27/22
CPC classification number: G01N27/22 , B81B2201/033 , B81C99/003
Abstract: This invention is a novel methodology for precision metrology, sensing, and actuation at the micro- and nano-scale. It is well-suited for micro- and nano-scale because it leverages off the electromechanical benefits of the scale. The invention makes use of electrical measurands of micro- or nano-scale devices to measure and characterize themselves, other devices, and whatever the devices subsequently interact with. By electronically measuring the change in capacitance, change in voltage, and/or resonance frequency of one or more test structures, a multitude of geometric, dynamic, and material properties may be extracted with a much higher accuracy and precision than conventional methods.
Abstract translation: 本发明是用于精密计量，感测和在微尺度和纳米尺度下的致动的新颖方法。 它非常适合微型和纳米级，因为它利用了刻度尺的机电效益。 本发明利用微尺度或纳米级装置的电测量来测量和表征其本身，其他装置以及随后的装置与之相互作用的任何装置。 通过电子测量一个或多个测试结构的电容变化，电压变化和/或谐振频率，可以以比常规方法更高的精度和精度提取多个几何，动态和材料特性。
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公开(公告)号：US20150002916A1
公开(公告)日：2015-01-01
申请号：US14479615
申请日：2014-09-08
Applicant: STMicroelectronics International N.V.
Inventor： Sason Sourani , Moshe Medina
CPC classification number: H02N1/006 , B81B3/0043 , B81B7/00 , B81B7/008 , B81B2201/033 , B81B2201/034 , B81B2201/042 , B81B2203/0109 , B81B2203/0181 , B81B2203/058 , G02B7/1821 , G02B26/0841 , H02N1/008
Abstract: A Micro Electro Mechanical Systems (MEMS) device includes a rotor having first rotor teeth and second rotor teeth formed in at least two layers of silicon-on-insulator (SOI) substrate. Each rotor tooth belonging to the first rotor teeth is formed in a first layer and each rotor tooth belonging of the second rotor teeth is formed in a second layer. A stator includes first stator teeth and second stator teeth formed in at least two layers of SOI substrate. Each stator tooth belonging to the first stator teeth is formed in a first layer and each stator tooth belonging to the second stator teeth is formed in a second layer.
Abstract translation: 微机电系统（MEMS）装置包括具有形成在至少两层绝缘体上硅（SOI）衬底上的第一转子齿和第二转子齿的转子。 属于第一转子齿的每个转子齿形成在第一层中，并且属于第二转子齿的每个转子齿形成在第二层中。 定子包括形成在至少两层SOI衬底中的第一定子齿和第二定子齿。 属于第一定子齿的每个定子齿形成在第一层中，并且属于第二定子齿的每个定子齿形成在第二层中。
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公开(公告)号：US08353600B1
公开(公告)日：2013-01-15
申请号：US12822180
申请日：2010-06-23
Applicant: Yee-Chung Fu
Inventor： Yee-Chung Fu
IPC: G02B5/08
CPC classification number: G02B6/3518 , B81B3/0021 , B81B2201/033 , B81B2201/045 , G02B6/357 , G02B26/0833 , G02B26/101
Abstract: A micro-electro-mechanical system (MEMS) actuator assembly includes a mirror and four actuators. Each actuator includes a lever pivotable about a fulcrum axis. The inner end of each lever is coupled to one side of the mirror. Force is applied to one outer end of the levers to move one side of the mirror, which positions the mirror in one of four positions. Force is applied to two outer ends of the levers to move two sides of the mirror, which positions the mirror in one of four additional positions.
Abstract translation: 微机电系统（MEMS）致动器组件包括反射镜和四个致动器。 每个致动器包括可围绕支点轴线枢转的杆。 每个杠杆的内端连接到镜子的一侧。 将力施加到杆的一个外端以移动镜的一侧，其将镜定位在四个位置之一中。 将力施加到杠杆的两个外端以移动镜的两侧，其将镜定位在四个附加位置之一中。
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Patent Agency Ranking
116.发明申请MICROMECHANICAL COMPONENT AND PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT 审中-公开微生物组分的微生物组分和生产方法公开(公告)号：US20120133242A1
公开(公告)日：2012-05-31
申请号：US13320712
申请日：2010-05-18
Applicant: Frederic Njikam Njimonzie , Joerg Muchow , Zoltan Lestyan , Wolfram Schock
Inventor： Frederic Njikam Njimonzie , Joerg Muchow , Zoltan Lestyan , Wolfram Schock
CPC classification number: G02B26/0841 , B81B3/0021 , B81B2201/033 , B81B2201/042 , Y10T29/49002
Abstract: A micromechanical component has an outer stator electrode component and an outer actuator electrode component which is connected to a holder via at least one outer spring, an adjustable element being adjustable about a first rotation axis by application of a first voltage between the outer actuator electrode component and the outer stator electrode component, and having an inner stator electrode component and an inner actuator electrode component having a first web with at least one electrode finger disposed thereon, the adjustable element being adjustable about a second rotation axis by application of a second voltage between the at least one electrode finger of the inner actuator electrode component and the inner stator electrode component, and the inner actuator electrode component being connected to the outer actuator electrode component via an intermediate spring which is oriented along the second rotation axis. Also described is a production method for a micromechanical component.
Abstract translation: 微机械部件具有外部定子电极部件和外部致动器电极部件，其经由至少一个外部弹簧连接到保持器，可调节元件可围绕第一旋转轴线调节，通过在外部致动器电极部件 和外部定子电极部件，并且具有内部定子电极部件和内部致动器电极部件，所述内部致动器电极部件具有设置在其上的至少一个电极指的第一网状物，所述可调节元件可围绕第二旋转轴线调节， 内部致动器电极部件的至少一个电极指和内部定子电极部件，内部致动器电极部件通过沿着第二旋转轴线取向的中间弹簧连接到外部致动器电极部件。 还描述了一种用于微机械部件的制造方法。
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公开(公告)号：US20110090551A1
公开(公告)日：2011-04-21
申请号：US12893778
申请日：2010-09-29
Applicant: Tjalf PIRK , Stefan Pinter , Joachim Fritz , Christoph Friese
Inventor： Tjalf PIRK , Stefan Pinter , Joachim Fritz , Christoph Friese
CPC classification number: G02B26/0841 , B81B3/0059 , B81B2201/033 , B81B2201/042 , B81B2203/0136 , B81B2203/053 , H02N1/008
Abstract: A micromechanical assembly having a mounting, at least one stator electrode comb, which is fixedly placed on the mounting, having at least two stator electrode fingers, whose central longitudinal axes are on a central plane of the stator electrode comb, at least one actuator electrode comb having at least two actuator electrode fingers, and a displaceable component, which is coupled to the at least one actuator electrode comb so that the displaceable component is displaceable in relation to the mounting at least in one first displacement direction using a nonzero operating voltage, which is applied between the at least two stator electrode fingers and the at least two actuator electrode fingers, the first displacement direction having one first nonzero directional component perpendicular to the central plane.
Abstract translation: 具有固定地放置在所述安装件上的至少一个定子电极梳的安装的至少一个定子电极梳的微机械组件具有至少两个定子电极指，其中心纵向轴线位于所述定子电极梳的中心平面上，至少一个致动器电极 梳具具有至少两个致动器电极指，以及可移位部件，其连接到所述至少一个致动器电极梳，使得所述可移位部件可使用非零工作电压至少在一个第一位移方向上相对于所述安装而移位， 其施加在所述至少两个定子电极指和所述至少两个致动器电极指之间，所述第一位移方向具有垂直于所述中心平面的一个第一非零方向分量。
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118.发明申请公开(公告)号：US20110089503A1
公开(公告)日：2011-04-21
申请号：US12907252
申请日：2010-10-19
Applicant: Toma Fujita , Hironobu Kawauchi , Haruhiko Nishikage
Inventor： Toma Fujita , Hironobu Kawauchi , Haruhiko Nishikage
CPC classification number: B81B3/0086 , B81B2201/0235 , B81B2201/033 , G01P15/0802 , G01P15/125 , G01P2015/0814 , H01L29/84
Abstract: To provide a semiconductor device prevented from giving a limitation on the sensitivity of HEMS devices due to isolation regions thereof and a method of fabricating the same. The semiconductor device includes: a semiconductor substrate with a recess portion formed in an upper surface; a supporting body provided around the recess portion on the semiconductor substrate; a beam-type movable portion which includes a movable electrode provided above the recess portion and is fixed to the supporting body at a position away from the movable electrode; a beam-type fixed electrode provided above the recess portion to be opposed to the movable electrode and fixed to the supporting body; and isolation regions each including a separation column made of a semiconductor and a separation insulating film provided on a side surface of the separation column, the isolation regions being provided between the movable electrode and the supporting body and between the fixed electrode and the supporting body to electrically separate the movable and fixed electrodes from the supporting body.
Abstract translation: 提供一种半导体器件及其制造方法，防止了HEMS器件的隔离区域的灵敏度受到限制。 半导体器件包括：具有形成在上表面的凹部的半导体衬底; 设置在所述半导体衬底上的所述凹部周围的支撑体; 梁状可动部，其包括设置在所述凹部上方的可动电极，并且在远离所述可动电极的位置固定于所述支撑体; 设置在与所述可动电极相对并固定在所述支撑体上的所述凹部的上方的光束型固定电极， 以及隔离区域，每个隔离区域包括由半导体制成的分离柱和设置在分离柱的侧表面上的分离绝缘膜，隔离区域设置在可动电极和支撑体之间以及固定电极和支撑体之间， 将可移动和固定的电极与支撑体电分离。
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公开(公告)号：US20100067078A1
公开(公告)日：2010-03-18
申请号：US12447503
申请日：2007-12-03
Applicant: Hiroshi Obi , Hironori Tomita , Akira Kurozuka
Inventor： Hiroshi Obi , Hironori Tomita , Akira Kurozuka
IPC: G02B26/10 , H02N1/00 , G02B26/08 , H01L21/302
CPC classification number: G02B26/0841 , B81B3/007 , B81B2201/033 , B81B2201/042 , B81B2203/0136 , B81B2203/058 , B81B2207/07 , H02N1/006 , H04N1/113 , H04N2201/0082
Abstract: The present invention is directed to a bi-axial pivoting type actuator having a first movable section, a second movable section supporting the first movable section, and backlining. A first conductive portion and a second conductive portion for independently applying a driving voltage to each of the first movable section and the second movable section are provided on the second movable section, in a state of being split by isolation trenches and being stabilized by the backlining provided under the second movable section. By providing such backlining, mutual stabilization of the first conductive portion and the second conductive portion in an electrically isolated state, and simplification of the production steps for the actuator are realized. By providing a mirror on the first conductive portion of the actuator of the present invention as such, it becomes possible to provide a bi-axial pivoting type mirror device through a simple production process.
Abstract translation: 本发明涉及具有第一可移动部分，支撑第一可移动部分的第二可动部分和背衬的双轴向枢转型致动器。 第一可动部分和第二导电部分，用于独立施加驱动电压到第一可移动部分和第二可移动部分中的每一个，在被隔离沟槽分开的状态下设置在第二可动部分上，并且通过背衬 设置在第二可移动部分下方。 通过在电气隔离状态下提供这种背衬，相互稳定的第一导电部分和第二导电部分，并且实现致动器的制造步骤的简化。 通过在本发明的致动器的第一导电部分上设置反射镜，可以通过简单的制造工艺提供双轴向枢转型反射镜装置。
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公开(公告)号：US07535620B2
公开(公告)日：2009-05-19
申请号：US11873771
申请日：2007-10-17
Applicant: Tiansheng Zhou
Inventor： Tiansheng Zhou
CPC classification number: G02B26/0841 , B81B3/0062 , B81B2201/033 , B81B2201/042 , B81B2203/0109 , B81B2203/058
Abstract: A micro-electro-mechanical system (MEMS) micro mirror and a method of making the same. The micro mirror includes a body having a mirror support, opposed anchor s and flexible hinges which connect the mirror support to the anchor s. The mirror support has opposed comb edges with comb fingers. Electrodes, which have comb fingers to interact with the comb fingers of the mirror support, are spaced from the comb edges. The comb fingers along each of the comb edges of the mirror support surface are positioned on different horizontal planes from and the comb fingers on the electrodes so as to maximize electrostatic actuation.
Abstract translation: 微机电系统（MEMS）微镜及其制造方法。 微反射镜包括具有反射镜支撑体，相对的锚杆和将镜子支撑件连接到锚杆的柔性铰链的主体。 镜子支架具有与梳齿相反的梳齿。 具有梳齿与电镜支架的梳指相互作用的电极与梳齿间隔开。 沿着镜支撑表面的每个梳齿边缘的梳齿位于与电极上的梳齿不同的水平平面上，以使静电致动最大化。
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