公开(公告)号：US09583456B2

公开(公告)日：2017-02-28

申请号：US14841381

申请日：2015-08-31

Applicant: Invensas Corporation

Inventor： Cyprian Emeka Uzoh ,  Rajesh Katkar

IPC: H01L23/48 ,  H01L23/00 ,  H01L23/498 ,  H01L21/48 ,  H01L25/065 ,  H01L25/16 ,  H01L25/00

CPC classification number: H01L25/0657 ,  B81B7/0074 ,  H01L21/4853 ,  H01L23/3675 ,  H01L23/42 ,  H01L23/481 ,  H01L23/49811 ,  H01L23/522 ,  H01L23/5383 ,  H01L24/02 ,  H01L24/03 ,  H01L24/05 ,  H01L24/11 ,  H01L24/13 ,  H01L24/14 ,  H01L24/16 ,  H01L24/17 ,  H01L24/24 ,  H01L24/32 ,  H01L24/33 ,  H01L24/45 ,  H01L24/48 ,  H01L24/49 ,  H01L24/73 ,  H01L24/81 ,  H01L24/94 ,  H01L24/97 ,  H01L25/0652 ,  H01L25/16 ,  H01L25/50 ,  H01L28/10 ,  H01L28/20 ,  H01L28/40 ,  H01L2224/0239 ,  H01L2224/0332 ,  H01L2224/0333 ,  H01L2224/0345 ,  H01L2224/03452 ,  H01L2224/03462 ,  H01L2224/03464 ,  H01L2224/0347 ,  H01L2224/03614 ,  H01L2224/0391 ,  H01L2224/03912 ,  H01L2224/03914 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05111 ,  H01L2224/05124 ,  H01L2224/05139 ,  H01L2224/05144 ,  H01L2224/05147 ,  H01L2224/05155 ,  H01L2224/05169 ,  H01L2224/05184 ,  H01L2224/05547 ,  H01L2224/05565 ,  H01L2224/05568 ,  H01L2224/05569 ,  H01L2224/05611 ,  H01L2224/05616 ,  H01L2224/05624 ,  H01L2224/05639 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/05669 ,  H01L2224/05684 ,  H01L2224/1134 ,  H01L2224/11462 ,  H01L2224/11464 ,  H01L2224/1147 ,  H01L2224/11903 ,  H01L2224/1191 ,  H01L2224/13022 ,  H01L2224/13023 ,  H01L2224/13025 ,  H01L2224/13082 ,  H01L2224/131 ,  H01L2224/13111 ,  H01L2224/13113 ,  H01L2224/13116 ,  H01L2224/13124 ,  H01L2224/13139 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/13169 ,  H01L2224/13184 ,  H01L2224/13565 ,  H01L2224/13616 ,  H01L2224/1403 ,  H01L2224/14131 ,  H01L2224/14132 ,  H01L2224/14134 ,  H01L2224/16145 ,  H01L2224/16146 ,  H01L2224/16148 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/16265 ,  H01L2224/17181 ,  H01L2224/24147 ,  H01L2224/24227 ,  H01L2224/244 ,  H01L2224/32145 ,  H01L2224/3303 ,  H01L2224/33181 ,  H01L2224/45015 ,  H01L2224/45147 ,  H01L2224/48091 ,  H01L2224/48149 ,  H01L2224/4903 ,  H01L2224/73201 ,  H01L2224/73253 ,  H01L2224/73265 ,  H01L2224/81192 ,  H01L2224/81193 ,  H01L2224/81825 ,  H01L2224/94 ,  H01L2224/97 ,  H01L2225/0651 ,  H01L2225/06513 ,  H01L2225/06517 ,  H01L2225/06541 ,  H01L2225/06548 ,  H01L2225/06562 ,  H01L2225/06568 ,  H01L2924/00014 ,  H01L2924/01322 ,  H01L2924/12042 ,  H01L2924/1205 ,  H01L2924/1206 ,  H01L2924/1207 ,  H01L2924/1461 ,  H01L2924/15192 ,  H01L2924/15311 ,  H01L2924/15787 ,  H01L2924/15788 ,  H01L2924/16251 ,  H01L2924/181 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/19043 ,  H01L2924/19103 ,  H01L2924/3841 ,  H01L2924/00 ,  H01L2924/01029 ,  H01L2924/014 ,  H01L2924/00012 ,  H01L2924/01074 ,  H01L2924/01028 ,  H01L2924/01082 ,  H01L2224/05 ,  H01L2224/13 ,  H01L2224/81 ,  H01L2924/20751 ,  H01L2924/20752 ,  H01L2924/20753 ,  H01L2924/20754 ,  H01L2924/20755 ,  H01L2924/20756 ,  H01L2924/20757 ,  H01L2924/20758 ,  H01L2924/20759 ,  H01L2924/2076 ,  H01L2224/45099

Abstract: Apparatuses relating generally to a substrate are disclosed. In such an apparatus, first wire bond wires (“first wires”) extend from a surface of the substrate. Second wire bond wires (“second wires”) extend from the surface of the substrate. The first wires and the second wires are external to the substrate. The first wires are disposed at least partially within the second wires. The first wires are of a first height. The second wires are of a second height greater than the first height for coupling of at least one electronic component to the first wires at least partially disposed within the second wires.

Abstract translation: 公开了一般涉及衬底的装置。 在这种装置中，第一线接合线（“第一线”）从衬底的表面延伸。 第二线接合线（“第二线”）从衬底的表面延伸。 第一线和第二线在衬底外部。 第一导线至少部分地设置在第二导线内。 第一根导线是第一个高度。 第二导线的第二高度大于第一高度，用于将至少一个电子部件耦合到至少部分地设置在第二导线内的第一导线。

公开(公告)号：US09583411B2

公开(公告)日：2017-02-28

申请号：US14157790

申请日：2014-01-17

Applicant: Invensas Corporation

Inventor： Rajesh Katkar

IPC: H01L21/00 ,  H01L23/31 ,  H01L21/56 ,  H01L21/78 ,  H01L23/00 ,  H01L23/498 ,  H01L21/48 ,  H01L21/683 ,  H01L25/10

CPC classification number: H01L23/3107 ,  H01L21/4853 ,  H01L21/4857 ,  H01L21/561 ,  H01L21/566 ,  H01L21/568 ,  H01L21/6835 ,  H01L21/78 ,  H01L23/49811 ,  H01L24/11 ,  H01L24/13 ,  H01L24/16 ,  H01L24/32 ,  H01L24/83 ,  H01L24/92 ,  H01L24/94 ,  H01L24/97 ,  H01L25/10 ,  H01L25/105 ,  H01L2221/68327 ,  H01L2221/68372 ,  H01L2224/12105 ,  H01L2224/13024 ,  H01L2224/13025 ,  H01L2224/131 ,  H01L2224/16225 ,  H01L2224/32225 ,  H01L2224/73253 ,  H01L2224/83005 ,  H01L2224/92242 ,  H01L2224/97 ,  H01L2225/1035 ,  H01L2225/1041 ,  H01L2225/1058 ,  H01L2924/15311 ,  H01L2924/15321 ,  H01L2924/181 ,  H01L2924/19107 ,  H01L2224/83 ,  H01L2924/014 ,  H01L2924/00

Abstract: A method for simultaneously making a plurality of microelectronic packages by forming an electrically conductive redistribution structure along with a plurality of microelectronic element attachment regions on a carrier. The attachment regions being spaced apart from one another and overlying the carrier. The method also including the formation of conductive connector elements between adjacent attachment regions. Each connector element having the first or second end adjacent the carrier and the remaining end at a height of the microelectronic element. The method also includes forming an encapsulation over portions of the connector elements and subsequently singulating the assembly, into microelectronic units, each including a microelectronic element. The surface of the microelectronic unit, opposite the redistribution structure, having both the active face of the microelectronic element and the free ends of the connector elements so that both are available for connection with a component external to the microelectronic unit.

Abstract translation: 一种通过与载体上的多个微电子元件附着区一起形成导电再分配结构来同时制造多个微电子封装的方法。 附接区域彼此间隔开并且覆盖在载体上。 该方法还包括在相邻附接区域之间形成导电连接器元件。 每个连接器元件具有与载体相邻的第一端或第二端，并且其余端在微电子元件的高度处。 该方法还包括在连接器元件的部分上形成封装，并随后将组件分成微电子单元，每个微电子单元包括微电子元件。 微电子单元的与再分布结构相对的表面具有微电子元件的有源面和连接器元件的自由端，使得两者可用于与微电子单元外部的部件连接。

公开(公告)号：US20170018485A1

公开(公告)日：2017-01-19

申请号：US15209034

申请日：2016-07-13

Applicant: Invensas Corporation

Inventor： Ashok S. Prabhu ,  Rajesh Katkar ,  Liang Wang ,  Cyprian Emeka Uzoh

IPC: H01L23/495 ,  H01L25/065 ,  H01L21/48 ,  H01L23/498

CPC classification number: H01L25/0657 ,  H01L23/3107 ,  H01L23/3157 ,  H01L23/49541 ,  H01L24/19 ,  H01L24/96 ,  H01L2224/02371 ,  H01L2224/04105 ,  H01L2224/18

Abstract: A microelectronic assembly includes a stack of microelectronic elements, e.g., semiconductor chips, each having a front surface defining a respective plane of a plurality of planes. A leadframe interconnect joined to a contact at a front surface of each chip may extend to a position beyond the edge surface of the respective microelectronic element. The chip stack is mounted to support element at an angle such that edge surfaces of the chips face a major surface of the support element that defines a second plane that is transverse to, i.e., not parallel to the plurality of parallel planes. The leadframe interconnects are electrically coupled at ends thereof to corresponding contacts at a surface of the support element.

Abstract translation: 微电子组件包括一组微电子元件，例如半导体芯片，每个半导体芯片具有限定多个平面的相应平面的前表面。 连接到每个芯片的前表面处的触点的引线框互连可以延伸到超过相应微电子元件的边缘表面的位置。 芯片堆叠以一定角度安装到支撑元件，使得芯片的边缘表​​面面向支撑元件的主表面，该主表面限定横向于，即不平行于多个平行平面的第二平面。 引线框互连在其端部电耦合到支撑元件的表面处的相应触点。

公开(公告)号：US20160365302A1

公开(公告)日：2016-12-15

申请号：US15248726

申请日：2016-08-26

Applicant: Invensas Corporation

Inventor： Liang Wang ,  Rajesh Katkar ,  Hong Shen ,  Cyprian Emeka Uzoh ,  Belgacem Haba

IPC: H01L23/498 ,  H01L23/31 ,  H01L23/04

CPC classification number: H01L23/498 ,  H01L21/4846 ,  H01L21/4853 ,  H01L21/486 ,  H01L21/56 ,  H01L21/563 ,  H01L21/6835 ,  H01L21/78 ,  H01L23/04 ,  H01L23/3121 ,  H01L23/3135 ,  H01L23/3142 ,  H01L23/3675 ,  H01L23/49811 ,  H01L23/49816 ,  H01L23/49822 ,  H01L23/49827 ,  H01L23/49838 ,  H01L24/17 ,  H01L24/81 ,  H01L25/0652 ,  H01L25/0655 ,  H01L25/105 ,  H01L25/16 ,  H01L25/18 ,  H01L25/50 ,  H01L2221/68345 ,  H01L2221/68359 ,  H01L2221/68381 ,  H01L2224/16113 ,  H01L2224/16227 ,  H01L2224/32225 ,  H01L2224/73204 ,  H01L2224/81192 ,  H01L2224/97 ,  H01L2225/06517 ,  H01L2225/0652 ,  H01L2225/06548 ,  H01L2225/06572 ,  H01L2225/06589 ,  H01L2225/1058 ,  H01L2924/1427 ,  H01L2924/15192 ,  H01L2924/15311 ,  H01L2924/19041 ,  H01L2924/19102 ,  H01L2224/81

Abstract: A method of making an assembly can include forming a circuit structure defining front and rear surfaces, and forming a substrate onto the rear surface. The forming of the circuit structure can include forming a first dielectric layer coupled to the carrier. The first dielectric layer can include front contacts configured for joining with contacts of one or more microelectronic elements, and first traces. The forming of the circuit structure can include forming rear conductive elements at the rear surface coupled with the front contacts through the first traces. The forming of the substrate can include forming a dielectric element directly on the rear surface. The dielectric element can have first conductive elements facing the rear conductive elements and joined thereto. The dielectric element can include second traces coupled with the first conductive elements. The forming of the substrate can include forming terminals at a surface of the substrate.

Abstract translation: 制造组件的方法可以包括形成限定前表面和后表面的电路结构，以及在后表面上形成衬底。 电路结构的形成可以包括形成耦合到载体的第一介电层。 第一电介质层可以包括构造成与一个或多个微电子元件的触点和第一迹线接合的前触点。 电路结构的形成可以包括通过第一迹线在与前触点耦合的后表面处形成后导电元件。 基板的形成可以包括直接在后表面上形成电介质元件。 电介质元件可以具有面向后导电元件并与其连接的第一导电元件。 电介质元件可以包括与第一导电元件耦合的第二迹线。 基板的形成可以包括在基板的表面上形成端子。

公开(公告)号：US09508691B1

公开(公告)日：2016-11-29

申请号：US14971384

申请日：2015-12-16

Applicant: Invensas Corporation

Inventor： Javier A. Delacruz ,  Belgacem Haba ,  Tu Tam Vu ,  Rajesh Katkar

IPC: H01L25/065 ,  H01L23/495 ,  H01L23/31 ,  H01L23/00 ,  H01L23/498

CPC classification number: H01L25/0657 ,  H01L23/3107 ,  H01L23/49541 ,  H01L23/49551 ,  H01L23/49555 ,  H01L23/49575 ,  H01L23/49838 ,  H01L24/29 ,  H01L24/32 ,  H01L24/45 ,  H01L24/48 ,  H01L24/49 ,  H01L24/83 ,  H01L24/85 ,  H01L24/97 ,  H01L25/105 ,  H01L2224/2919 ,  H01L2224/29191 ,  H01L2224/32145 ,  H01L2224/32245 ,  H01L2224/33181 ,  H01L2224/48011 ,  H01L2224/48091 ,  H01L2224/48247 ,  H01L2224/48465 ,  H01L2224/48471 ,  H01L2224/49051 ,  H01L2224/4909 ,  H01L2224/49113 ,  H01L2224/49173 ,  H01L2224/73215 ,  H01L2224/73265 ,  H01L2224/8385 ,  H01L2224/85181 ,  H01L2224/85186 ,  H01L2224/97 ,  H01L2225/0651 ,  H01L2225/06555 ,  H01L2225/06562 ,  H01L2225/06582 ,  H01L2924/00014 ,  H01L2924/181 ,  H01L2224/45015 ,  H01L2924/207 ,  H01L2224/45099 ,  H01L2924/00012 ,  H01L2924/0665 ,  H01L2924/07025 ,  H01L2924/06 ,  H01L2224/83 ,  H01L2224/85 ,  H01L2924/00 ,  H01L2224/05599 ,  H01L2224/85399

Abstract: Stacked microelectronic packages comprise microelectronic elements each having a contact-bearing front surface and edge surfaces extending away therefrom, and a dielectric encapsulation region contacting an edge surface. The encapsulation defines first and second major surfaces of the package and a remote surface between the major surfaces. Package contacts at the remote surface include a first set of contacts at positions closer to the first major surface than a second set of contacts, which instead are at positions closer to the second major surface. The packages are configured such that major surfaces of each package can be oriented in a nonparallel direction with the major surface of a substrate, the package contacts electrically coupled to corresponding contacts at the substrate surface. The package stacking and orientation can provide increased packing density.

Abstract translation: 堆叠的微电子封装包括各自具有接触轴承前表面和从其延伸的边缘表面的微电子元件以及与边缘表面接触的电介质封装区域。 该封装限定了封装的第一和第二主表面以及主表面之间的远端表面。 远端表面上的封装触点包括第一组触点，位于比第二组触点更靠近第一主表面的位置，而第二组触点位于更靠近第二主表面的位置。 封装被配置成使得每个封装的主表面可以与基板的主表面非平行方向定向，封装触点电耦合到基板表面处的相应触点。 包装堆叠和取向可以提供增加的包装密度。

公开(公告)号：US09478504B1

公开(公告)日：2016-10-25

申请号：US14745237

申请日：2015-06-19

Applicant: Invensas Corporation

Inventor： Hong Shen ,  Liang Wang ,  Rajesh Katkar ,  Charles G. Woychik ,  Guilian Gao

IPC: H01L21/44 ,  H01L23/00 ,  H01L21/48 ,  H01L23/498 ,  H01L23/31 ,  H01L23/053 ,  H01L25/065

CPC classification number: H01L23/562 ,  H01L21/481 ,  H01L21/4853 ,  H01L21/486 ,  H01L21/561 ,  H01L23/053 ,  H01L23/145 ,  H01L23/147 ,  H01L23/15 ,  H01L23/295 ,  H01L23/3114 ,  H01L23/3128 ,  H01L23/3675 ,  H01L23/49827 ,  H01L23/49838 ,  H01L23/5384 ,  H01L24/13 ,  H01L24/16 ,  H01L24/32 ,  H01L24/48 ,  H01L24/73 ,  H01L24/92 ,  H01L24/97 ,  H01L25/0655 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/13111 ,  H01L2224/16227 ,  H01L2224/32225 ,  H01L2224/32245 ,  H01L2224/48227 ,  H01L2224/73204 ,  H01L2224/73253 ,  H01L2224/92225 ,  H01L2224/97 ,  H01L2924/00014 ,  H01L2924/10253 ,  H01L2924/15192 ,  H01L2924/15311 ,  H01L2924/157 ,  H01L2924/15788 ,  H01L2924/16153 ,  H01L2924/16235 ,  H01L2924/16251 ,  H01L2924/16315 ,  H01L2924/1632 ,  H01L2924/167 ,  H01L2924/16787 ,  H01L2924/16788 ,  H01L2924/3511 ,  H01L2224/81 ,  H01L2224/85 ,  H01L2224/83 ,  H01L2924/01029 ,  H01L2224/45015 ,  H01L2924/207 ,  H01L2224/45099

Abstract: Die (110) are attached to an interposer (420), and the interposer/die assembly is placed into a lid cavity (510). The lid (210) is attached to the top of the assembly, possibly to the encapsulant (474) at the top. The lid's legs (520) surround the cavity and extend down below the top surface of the interposer's substrate (420S), possibly to the level of the bottom surface of the substrate or lower. The legs (520) may or may not be attached to the interposer/die assembly. In fabrication, the interposer wafer (420SW) has trenches (478) which receive the lid's legs during the lid placement. The interposer wafer is later thinned to remove the interposer wafer portion below the legs and to dice the interposer wafer. The thinning process also exposes, on the bottom, conductive vias (450) passing through the interposer substrate. Other features are also provided.

Abstract translation: 模具（110）附接到插入件（420），并且插入器/模具组件被放置在盖腔（510）中。 盖（210）附接到组件的顶部，可能附接到顶部的密封剂（474）。 盖的腿（520）围绕空腔并且向下延伸到插入器的衬底（420S）的顶表面下方，可能地到衬底的底表面的高度或更低。 腿（520）可以或可以不附接到插入件/模具组件。 在制造中，插入器晶片（420SW）具有在盖放置期间接收盖的腿的沟槽（478）。 中间层晶片稍后变薄以去除腿下方的插入片晶片部分并且切割插入片晶片。 薄化工艺还在底部暴露穿过内插衬底的导电通孔（450）。 还提供其他功能。

公开(公告)号：US20160307832A1

公开(公告)日：2016-10-20

申请号：US15191333

申请日：2016-06-23

Applicant: Invensas Corporation

Inventor： Cyprian Emeka Uzoh ,  Rajesh Katkar

IPC: H01L23/498 ,  H01L23/36 ,  H01L25/065

CPC classification number: H01L23/49816 ,  H01L23/36 ,  H01L23/49811 ,  H01L24/10 ,  H01L24/13 ,  H01L24/16 ,  H01L24/17 ,  H01L24/45 ,  H01L24/48 ,  H01L24/73 ,  H01L24/81 ,  H01L24/94 ,  H01L24/97 ,  H01L25/0657 ,  H01L2224/13111 ,  H01L2224/13116 ,  H01L2224/13124 ,  H01L2224/13139 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/13169 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2224/1703 ,  H01L2224/1718 ,  H01L2224/32145 ,  H01L2224/45147 ,  H01L2224/4823 ,  H01L2224/48247 ,  H01L2224/73253 ,  H01L2224/73265 ,  H01L2224/81825 ,  H01L2224/97 ,  H01L2225/06506 ,  H01L2225/06513 ,  H01L2225/06541 ,  H01L2225/06589 ,  H01L2924/00014 ,  H01L2924/01322 ,  H01L2924/15192 ,  H01L2924/15787 ,  H01L2924/15788 ,  H01L2924/16152 ,  H01L2924/181 ,  H01L2924/19107 ,  H01L2924/00 ,  H01L2224/45015 ,  H01L2924/207

Abstract: An apparatus relating generally to a die stack is disclosed. In such an apparatus, a substrate is included. A first bond via array includes first wires each of a first length extending from a first surface of the substrate. An array of bump interconnects is disposed on the first surface. A die is interconnected to the substrate via the array of bump interconnects. A second bond via array includes second wires each of a second length different than the first length extending from a second surface of the die.

Abstract translation: 公开了一种通常涉及管芯堆叠的装置。 在这种装置中，包括基板。 第一接合通孔阵列包括从基板的第一表面延伸的第一长度的第一布线。 凸起互连阵列设置在第一表面上。 模具通过凸块互连阵列与衬底互连。 第二接合通孔阵列包括第二导线，每个第二导线的第二长度不同于从模具的第二表面延伸的第一长度。

公开(公告)号：US20160247778A1

公开(公告)日：2016-08-25

申请号：US15144108

申请日：2016-05-02

Applicant: Invensas Corporation

Inventor： Rajesh Katkar ,  Cyprian Emeka Uzoh ,  Arkalgud R. Sitaram

IPC: H01L23/00

CPC classification number: H01L24/81 ,  H01L21/768 ,  H01L23/49838 ,  H01L23/528 ,  H01L24/11 ,  H01L24/13 ,  H01L24/16 ,  H01L25/0657 ,  H01L25/50 ,  H01L2224/10126 ,  H01L2224/1182 ,  H01L2224/13023 ,  H01L2224/13105 ,  H01L2224/13109 ,  H01L2224/13124 ,  H01L2224/13139 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/13184 ,  H01L2224/13562 ,  H01L2224/1357 ,  H01L2224/1379 ,  H01L2224/13809 ,  H01L2224/13811 ,  H01L2224/13847 ,  H01L2224/13855 ,  H01L2224/1601 ,  H01L2224/16014 ,  H01L2224/16058 ,  H01L2224/16145 ,  H01L2224/16227 ,  H01L2224/16238 ,  H01L2224/16503 ,  H01L2224/16507 ,  H01L2224/81007 ,  H01L2224/81048 ,  H01L2224/81143 ,  H01L2224/81193 ,  H01L2224/8181 ,  H01L2224/8182 ,  H01L2224/81862 ,  H01L2224/81895 ,  H01L2224/81903 ,  H01L2224/81905 ,  H01L2224/94 ,  H01L2924/01029 ,  H01L2924/01051 ,  H01L2924/01327 ,  H01L2924/364 ,  H01L2224/11 ,  H01L2224/81 ,  H01L2924/00014 ,  H01L2924/2064

Abstract: An apparatus relates generally to a microelectronic device. In such an apparatus, a first substrate has a first surface with first interconnects located on the first surface, and a second substrate has a second surface spaced apart from the first surface with a gap between the first surface and the second surface. Second interconnects are located on the second surface. Lower surfaces of the first interconnects and upper surfaces of the second interconnects are coupled to one another for electrical conductivity between the first substrate and the second substrate. A conductive collar is around sidewalls of the first and second interconnects, and a dielectric layer is around the conductive collar.

Abstract translation: 一种装置一般涉及一种微电子装置。 在这样的装置中，第一基板具有第一表面，第一互连位于第一表面上，第二基板具有与第一表面间隔开的第二表面，第一表面与第二表面之间具有间隙。 第二互连位于第二表面上。 第一互连件的下表面和第二互连件的上表面彼此耦合，用于在第一基板和第二基板之间的导电性。 导电套环在第一和第二互连的侧壁周围，并且电介质层围绕导电套环。

公开(公告)号：US09412806B2

公开(公告)日：2016-08-09

申请号：US14304535

申请日：2014-06-13

Applicant: Invensas Corporation

Inventor： Liang Wang ,  Rajesh Katkar ,  Hong Shen ,  Cyprian Emeka Uzoh

IPC: H01L27/01 ,  H01L49/02

CPC classification number: H01L28/65 ,  H01L28/90 ,  H01L28/92 ,  H01L2224/16145 ,  H01L2224/16225 ,  H01L2924/15153 ,  H01L2924/15184 ,  H01L2924/15192 ,  H01L2924/16151 ,  H01L2924/16152 ,  H01L2924/16195 ,  H01L2924/181 ,  H01L2924/00012

Abstract: In one embodiment, a method for making a 3D Metal-Insulator-Metal (MIM) capacitor includes providing a substrate having a surface, forming an array of upstanding rods or ridges on the surface, depositing a first layer of an electroconductor on the surface and the array of rods or ridges, coating the first electroconductive layer with a layer of a dielectric, and depositing a second layer of an electroconductor on the dielectric layer. In some embodiments, the array of rods or ridges can be made of a photoresist material, and in others, can comprise bonded wires.

Abstract translation: 在一个实施例中，制造3D金属 - 绝缘体 - 金属（MIM）电容器的方法包括提供具有表面的基板，在表面上形成直立杆或脊的阵列，在表面上沉积第一层电导体， 所述棒或脊的阵列，用电介质层涂覆所述第一导电层，以及在所述电介质层上沉积第二层电导体。 在一些实施例中，杆或脊的阵列可以由光致抗蚀剂材料制成，并且在另一些实施例中，可以包括接合线。

公开(公告)号：US20160172402A1

公开(公告)日：2016-06-16

申请号：US14945292

申请日：2015-11-18

Applicant: Invensas Corporation

Inventor： Rajesh Katkar

IPC: H01L27/146

CPC classification number: H01L27/14634 ,  H01L21/76898 ,  H01L23/481 ,  H01L24/18 ,  H01L27/14618 ,  H01L27/14636 ,  H01L27/1464 ,  H01L27/14687 ,  H01L27/1469 ,  H01L2224/04105 ,  H01L2224/12105 ,  H01L2224/18 ,  H01L2224/19 ,  H01L2224/32145 ,  H01L2224/73267 ,  H01L2924/15153

Abstract: An image sensor device, as well as methods therefor, is disclosed. This image sensor device includes a substrate having bond pads. The substrate has a through substrate channel defined therein extending between a front side surface and a back side surface thereof. The front side surface is associated with an optically-activatable surface. The bond pads are located at or proximal to the front side surface aligned for access via the through substrate channel. Wire bond wires are bonded to the bond pads at first ends thereof extending away from the bond pads with second ends of the wire bond wires located outside of an opening of the channel at the back side surface. A molding layer is disposed along the back side surface and in the through substrate channel. A redistribution layer is in contact with the molding layer and interconnected to the second ends of the wire bond wires.

Abstract translation: 公开了一种图像传感器装置及其方法。 该图像传感器装置包括具有接合垫的基板。 衬底具有限定在其中的贯穿衬底通道，其在前侧表面和其背侧表面之间延伸。 前侧表面与可光学激活的表面相关联。 接合焊盘位于或靠近前侧表面，以对准通过通过衬底通道的通路。 线接合线在其第一端处接合到接合焊盘，该接合焊盘在位于后侧表面处的通道的开口外侧的引线接合线的第二端延伸远离接合焊盘。 模制层沿着背侧表面和贯通衬底通道设置。 再分配层与成型层接触并与引线接合线的第二端互连。