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    HIGH PURITY SYNTHETIC SILICA AND ITEMS SUCH AS SEMICONDUCTOR JIGS MANUFACTURED THEREFROM
    124.
    发明申请
    HIGH PURITY SYNTHETIC SILICA AND ITEMS SUCH AS SEMICONDUCTOR JIGS MANUFACTURED THEREFROM 有权
    高纯度合成二氧化硅及其制造的半导体夹具

    公开(公告)号：US20130115391A1

    公开(公告)日：2013-05-09

    申请号：US13809231

    申请日：2011-07-08

    Applicant: Richard Benjamin Coapes ,  Alan Mundy ,  Ian George Sayce

    Inventor： Richard Benjamin Coapes ,  Alan Mundy ,  Ian George Sayce

    IPC: C03B19/14

    CPC classification number: C03B19/1492 ,  C03B19/1438 ,  C03B19/1453 ,  C03B19/1484 ,  C03B2201/03 ,  C03B2201/04 ,  C03B2201/20 ,  C03B2201/24 ,  C03B2201/32 ,  C03B2201/34 ,  C03B2201/36 ,  C03B2207/34 ,  C03B2207/52 ,  C03C3/06 ,  C03C2201/11 ,  C03C2201/23 ,  Y02P40/57 ,  Y10T428/131

    Abstract: Hollow ingots of transparent synthetic vitreous silica glass of external diameter greater than 400 mm and internal diameter greater than 300 mm are disclosed. The ingots are substantially free from bubbles or inclusions greater than 100 μm in diameter, have no more than 100 ppB of any individual metallic impurity, and have chlorine concentration less than 5 ppM. Also disclosed are methods for producing such ingots, in which a porous soot body of density greater than 0.4 g/cm3 is deposited on an oxidation resistant mandrel. The soot body is dehydrated on a mandrel comprising graphite, carbon fibre reinforced carbon, silicon carbide, silicon impregnated silicon carbide, silicon carbide-coated graphite or vitreous silica, either under vacuum or in the presence of a reducing gas, and then sintered to transparent pore-free glass under vacuum or in an atmosphere of helium.

    Abstract translation: 公开了外径大于400mm，内径大于300mm的透明合成玻璃石英玻璃的中空铸锭。 锭基本上没有直径大于100um的气泡或夹杂物，具有不超过100ppB的任何单独的金属杂质，并且氯浓度小于5ppM。 还公开了生产这种锭的方法，其中密度大于0.4g / cm 3的多孔烟灰体沉积在抗氧化心轴上。 在真空下或在还原气体存在下，烟灰体在包括石墨，碳纤维增强碳，碳化硅，硅浸渍的碳化硅，碳化硅涂覆的石墨或玻璃状二氧化硅的心轴上脱水，然后烧结成透明 无孔玻璃在真空或氦气氛中。

    Aerosol generator
    126.
    发明授权
    Aerosol generator 有权
    气溶胶发生器

    公开(公告)号：US08167282B2

    公开(公告)日：2012-05-01

    申请号：US13373066

    申请日：2011-11-03

    Applicant: Anthony Michael DeSantolo ,  Robert Scott Windeler

    Inventor： Anthony Michael DeSantolo ,  Robert Scott Windeler

    IPC: B01F3/04

    CPC classification number: C03B19/1438 ,  B01D1/0005 ,  C03B37/01433 ,  C03B37/01838 ,  C03B2201/28 ,  C03B2201/31 ,  C03B2201/34 ,  C03B2201/36 ,  C03B2207/81 ,  C03B2207/87

    Abstract: A method of fabricating a glass body that includes a multiplicity of constituents, at least one of which is a dopant (e.g., a rare-earth element) having a low vapor pressure (LVP) precursor includes the steps of: (a) generating an aerosol from the LVP precursor; (b) separately generating vapors of the other constituents; (c) convecting the aerosol and vapors to deposition system including a substrate; and (d) forming at least one doped layer on a surface of the substrate. In one embodiment, the method also includes filtering the aerosol so as to remove aerosol particles outside of a particular range of sizes. Also described is a unique aerosol generator that is particularly useful in generating aerosols of rare-earth dopants. Particular embodiments directed to the fabrication of Yb-doped optical fibers are described.

    Abstract translation: 一种制造玻璃体的方法，其包括多个成分，其中至少一个是具有低蒸气压（LVP）前体的掺杂剂（例如，稀土元素），其包括以下步骤：（a）产生 来自LVP前体的气溶胶; （b）分别生成其他成分的蒸气; （c）将气溶胶和蒸气对流到包括基底的沉积系统; 和（d）在所述衬底的表面上形成至少一个掺杂层。 在一个实施方案中，该方法还包括过滤气溶胶以除去特定范围的气溶胶颗粒。 还描述了一种独特的气溶胶发生器，其特别用于产生稀土掺杂剂的气溶胶。 描述了涉及制造掺杂Yb的光纤的特定实施例。

    Method for producing quartz glass using a mixed powder
    127.
    发明授权
    Method for producing quartz glass using a mixed powder 有权
    使用混合粉末生产石英玻璃的方法

    公开(公告)号：US08156761B2

    公开(公告)日：2012-04-17

    申请号：US13023262

    申请日：2011-02-08

    Applicant: Tatsuhiro Sato

    Inventor： Tatsuhiro Sato

    IPC: C03B19/00 ,  C03B19/01 ,  C03B19/09 ,  C03B19/06 ,  C03C3/06 ,  C03C3/11 ,  C03C3/112

    CPC classification number: C03C1/00 ,  C03B19/063 ,  C03B32/005 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/24 ,  C03B2201/36 ,  C03C3/06 ,  C03C3/112 ,  C03C4/20 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/26 ,  C03C2201/32 ,  C03C2201/3411 ,  C03C2201/3435 ,  C03C2201/36

    Abstract: A mixed quartz powder contains quartz powder and two or more types of doping element in an amount of from 0.1 to 20 mass %. The aforementioned doped elements include a first dope element selected from the group consisting of N, C and F, and a second dope element selected from the group consisting of Mg, Ca, Sr, Ba, Sc, Y, Ti, Zr, Hf, the lanthanides and the actinides. The “quartz powder” is a powder of crystalline quartz or it is a powder of glassy SiO2 particles. It is made form natural occurring quartz or it is fabricated synthetically. The “quartz powder” may be doped. The compounding ratio of the total amount (M1) of the aforementioned first elements and the total amount (M2) of the aforementioned second elements as the ratio of the number of atoms (M1)/(M2) is preferably from 0.1 to 20. Al as well as the aforementioned doped elements is preferably included in a mixed quartz powder of this invention.

    Abstract translation: 混合石英粉含有0.1〜20质量％的石英粉和2种以上的掺杂元素。 上述掺杂元素包括选自N，C和F的第一掺杂元素和选自Mg，Ca，Sr，Ba，Sc，Y，Ti，Zr，Hf的第二掺杂元素， 镧系元素和锕系元素。 “石英粉”是结晶石英粉，或是玻璃状SiO 2粉末的粉末。 它由天然石英制成，或者由合成制成。 可以掺杂“石英粉”。 上述第一元素的总量（M1）与上述第二元素的总量（M2）的配位比优选为0.1〜20。作为原子数（M1）/（M2）的比例，优选为0.1〜20。 以及上述掺杂元素优选包括在本发明的混合石英粉末中。

    OPTICAL FIBER, IN PARTICULAR A LASER FIBER CONTAINING A DOPED GLASS FIBER CORE AND CLADDING AROUND THE FIBERGLASS CORE
    128.
    发明申请
    OPTICAL FIBER, IN PARTICULAR A LASER FIBER CONTAINING A DOPED GLASS FIBER CORE AND CLADDING AROUND THE FIBERGLASS CORE 有权
    光纤，特别是包含玻璃纤维核心的激光光纤和光纤核心附近的光纤

    公开(公告)号：US20120063733A1

    公开(公告)日：2012-03-15

    申请号：US13320440

    申请日：2010-06-09

    Applicant: Wolfgang Hämmerle ,  Lothar Brehm ,  Matthias Auth ,  Elke Poppotz

    Inventor： Wolfgang Hämmerle ,  Lothar Brehm ,  Matthias Auth ,  Elke Poppotz

    IPC: G02B6/02 ,  C03C17/02

    CPC classification number: C03B37/01861 ,  C03B37/01838 ,  C03B37/01869 ,  C03B2201/10 ,  C03B2201/12 ,  C03B2201/28 ,  C03B2201/36 ,  C03B2201/40 ,  G02B6/03633 ,  G02B6/03638 ,  G02B6/03694 ,  H01S3/06708

    Abstract: The invention relates to an optical fiber, in particular a laser fiber, containing a doped glass fiber core (1) and cladding (2) around the latter with a refraction index profile which decreases outwards from the fiber core. The optical fiber is distinguished by at least one intermediate layer (3, 4, 5) being disposed between the glass fiber core and the cladding to reduce the mechanical tension therebetween. In one advantageous embodiment, the intermediate layer is doped in such a way as to ensure a stepped mechanical tension distribution between the glass fiber core and the cladding, and is co-doped in such a way as to reduce the refractive index and counteract the refraction index-increasing effect of the intermediate layer doping. The invention further relates to an application of at least one doped barrier layer to a core region during preparation of the preform to avoid diffusion of special core dopants from the core during the collapse process, and to allow the diffusion of special dopants between the barrier layer and the core layer.

    Abstract translation: 本发明涉及一种光纤，特别是激光光纤，其中包含掺杂的玻璃纤维芯（1）和包层（2），后者具有从光纤芯向外减小的折射率分布。 光纤的特征在于至少一个中间层（3,4,5）设置在玻璃纤维芯和包层之间以减小它们之间的机械张力。 在一个有利的实施例中，中间层以这样的方式被掺杂，以确保玻璃纤维芯和包层之间的阶梯式机械张力分布，并且以减少折射率并抵消折射的方式共掺杂 指数增加效应的中间层掺杂。 本发明还涉及在制备预制棒期间将至少一个掺杂的阻挡层应用于核心区域，以避免在塌陷过程中特殊的核掺杂剂从核心扩散，并且允许特殊掺杂剂在阻挡层 和核心层。

    QUARTZ GLASS MEMBER FOR PLASMA ETCHING
    129.
    发明申请
    QUARTZ GLASS MEMBER FOR PLASMA ETCHING 审中-公开
    用于等离子体蚀刻的QUARTZ玻璃成员

    公开(公告)号：US20110232847A1

    公开(公告)日：2011-09-29

    申请号：US12671903

    申请日：2008-07-24

    Applicant: Tatsuhiro Sato ,  Kyoichi Inaki

    Inventor： Tatsuhiro Sato ,  Kyoichi Inaki

    IPC: H01L21/683 ,  C23F1/08

    CPC classification number: C03B19/01 ,  C03B2201/30 ,  C03B2201/34 ,  C03B2201/36 ,  C03B2201/40 ,  C03B2201/54 ,  C03C3/06 ,  C03C2201/36 ,  H01L21/67069 ,  H01L21/68757 ,  Y02P40/57

    Abstract: Provided is a doped quartz glass member for plasma etching, which is used in a plasma etching process and is free from any problematic fluoride accumulation during use. The quartz glass member for plasma etching is used as a jig for semiconductor production in a plasma etching process, and includes at least two or more kinds of metal elements in a total amount of 0.01 wt % or more to less than 0.1 wt %, in which the metal elements are formed of at least one kind of a first metal element selected from metal elements belonging to Group 3B of the periodic table and at least one kind of a second metal element selected from the group consisting of Mg, Ca, Sr, Ba, Sc, Y, Ti, Zr, Hf, lanthanoids, and actinoids.

    Abstract translation: 提供了用于等离子体蚀刻的掺杂石英玻璃构件，其用于等离子体蚀刻工艺中，并且在使用期间没有任何有问题的氟化物积聚。 用于等离子体蚀刻的石英玻璃构件用作等离子体蚀刻工艺中的半导体制造的夹具，并且包括总量为0.01重量％以上至小于0.1重量％的至少两种以上的金属元素， 金属元素由选自属于周期表第3B族的金属元素中的至少一种第一金属元素和选自Mg，Ca，Sr等的至少一种第二金属元素形成， Ba，Sc，Y，Ti，Zr，Hf，镧系元素和锕系元素。

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