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公开(公告)号：US06307627B1
公开(公告)日：2001-10-23
申请号：US09441253
申请日：1999-11-16
Applicant: Gerard H. Vurens
Inventor： Gerard H. Vurens
IPC: G01J404
CPC classification number: G01J4/04 , G01N21/211
Abstract: An optical measurement system for evaluating the surface of a substrate or the thickness and optical characteristics of a thin film layer overlying the substrate includes a light source for generating a light beam, a static polarizing element for polarizing the light beam emanating from the light source, and a measurement system for measuring the light reflected from the substrate location. The measurement system includes a static beam splitting element for splitting the light reflected from the substrate into s-polarized light and p-polarized light. The measurement system further includes two optical sensors for separately measuring the amplitude of the s-polarized light and the intensity of the p-polarized light. A control system analyzes the measured amplitude of the s-polarized light and the p-polarized to determine changes in the topography of substrate or changes in the thickness or optical characteristics of the thin film layer.
Abstract translation: 用于评价基板的表面的光学测量系统或覆盖基板的薄膜层的厚度和光学特性包括用于产生光束的光源，用于使从光源发出的光束偏振的静态偏振元件， 以及用于测量从基板位置反射的光的测量系统。 测量系统包括用于将从衬底反射的光分解成s偏振光和p偏振光的静态分束元件。 该测量系统还包括用于分别测量s偏振光的振幅和p偏振光的强度的两个光学传感器。 控制系统分析s偏振光和p偏振的测量幅度，以确定衬底的形貌变化或薄膜层的厚度或光学特性的变化。
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公开(公告)号：US06275291B1
公开(公告)日：2001-08-14
申请号：US09397568
申请日：1999-09-16
Applicant: Michael Abraham , Matthias Eberhardt
Inventor： Michael Abraham , Matthias Eberhardt
IPC: G01J400
CPC classification number: G01N21/211 , G01J4/04 , G01N21/21 , G01N2021/214 , G02B5/1809 , G02B5/3083
Abstract: A micropolarimeter and ellipsometer for obtaining complete optical information of superficially illuminated specimens. A compact construction is designed to facilitate their use. To obtain the simultaneous surface measurement of all optical information from a specimen, the retarder of the micropolarimeter consists of a one-piece retarder array with at least one pixel group, in which the major axis orientations of the individual pixels are distributed over an angular range of 360°. This micropolarimeter can be integrated into the reflected light microscope of an ellipsometer. The result is a compact measurement unit.
Abstract translation: 一种用于获得表面照明样本的完整光学信息的微偏振计和椭偏仪。 设计紧凑的结构使其易于使用。 为了从样本获得所有光学信息的同时表面测量，微型偏振器的延迟器由具有至少一个像素组的单片延迟器阵列组成，其中各个像素的长轴取向分布在角度范围 360°。 该微型偏振计可以集成到椭偏仪的反射光学显微镜中。 结果是一个紧凑的测量单位。
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123.发明授权公开(公告)号：US06266141B1
公开(公告)日：2001-07-24
申请号：US09296129
申请日：1999-04-22
Applicant: Nobuhiro Morita
Inventor： Nobuhiro Morita
IPC: G01J400
CPC classification number: G01N21/23 , G01J4/04 , G01M11/025 , G01M11/0271 , G01M11/0285
Abstract: Transmission light from a detection lens is directed to a polarization element as incident light. The polarization element is rotated, and the light is received and detected by an array-state light-receiving element, and the birefringence of the detection lens is calculated. The distance between a lens for radiating the diffusion light onto the detection lens and the detection lens itself can be optionally set. Observing the transmission image of the detection lens, the distance between the detection lens and the lens is determined. Thereby, it is possible to obtain optical elasticity interference fringes which at most are scarcely affected by optical distortions. In addition, a focusing magnification rate is most suitably set to match states of birefringence occurrence which are different in accordance with the detection lens or the placement thereof. A compensation optical system composed of a lens respectively has different focal distances f1 and f2 in the main scanning direction and in the subscanning direction, and can be added into a space between the radiation optical system and the detection lens. The light from the detection lens is substantially parallel.
Abstract translation: 来自检测透镜的透射光被引导到作为入射光的偏振元件。 旋转偏振元件，并且通过阵列状态的光接收元件接收和检测光，并且计算检测透镜的双折射。 可以可选地设置用于将扩散光照射到检测透镜上的透镜与检测透镜本身之间的距离。 观察检测透镜的透射图像，确定检测透镜与透镜之间的距离。 由此，可以获得光学失真几乎不受光学弹性干涉条纹的影响。 此外，聚焦放大率最适合设定为与根据检测透镜或其放置方式不同的双折射发生状态相匹配。 由透镜组成的补偿光学系统在主扫描方向和副扫描方向上分别具有不同的焦距f1和f2，并且可以添加到辐射光学系统和检测透镜之间的空间中。 来自检测透镜的光基本上平行。
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公开(公告)号：US6075235A
公开(公告)日：2000-06-13
申请号：US4166
申请日：1998-01-02
Applicant: Cornell Seu Lun Chun
Inventor： Cornell Seu Lun Chun
CPC classification number: G01J4/04 , G01N21/211 , H04N3/1587 , H04N5/33
Abstract: An apparatus and method to determine the surface orientation of objects in a field of view is provided by utilizing an array of polarizers and a means for microscanning an image of the objects over the polarizer array. In the preferred embodiment, a sequence of three image frames is captured using a focal plane array of photodetectors. Between frames the image is displaced by a distance equal to a polarizer array element. By combining the signals recorded in the three image frames, the intensity, percent of linear polarization, and angle of the polarization plane can be determined for radiation from each point on the object. The intensity can be used to determine the temperature at a corresponding point on the object. The percent of linear polarization and angle of the polarization plane can be used to determine the surface orientation at a corresponding point on the object. Surface orientation data from different points on the object can be combined to determine the object's shape and pose. Images of the Stokes parameters can be captured and viewed at video frequency. In an alternative embodiment, multi-spectral images can be captured for objects with point source resolution. Potential applications are in robotic vision, machine vision, computer vision, remote sensing, and infrared missile seekers. Other applications are detection and recognition of objects, automatic object recognition, and surveillance. This method of sensing is potentially useful in autonomous navigation and obstacle avoidance systems in automobiles and automated manufacturing and quality control systems.
Abstract translation: 通过利用偏振器阵列和用于在偏振器阵列上显微镜观察物体的装置来提供在视场中确定物体的表面取向的装置和方法。 在优选实施例中，使用光电检测器的焦平面阵列捕获三个图像帧的序列。 在帧之间，图像移位距离等于偏振器阵列元件。 通过组合记录在三个图像帧中的信号，可以确定来自物体上每个点的辐射的强度，线偏振的百分比和偏振面的角度。 强度可用于确定物体上相应点处的温度。 线偏振百分比和偏振面的角度可用于确定物体上相应点处的表面取向。 可以组合对象上来自不同点的表面取向数据，以确定对象的形状和姿态。 可以在视频中捕获和观看斯托克斯参数的图像。 在替代实施例中，可以针对具有点源分辨率的对象捕获多光谱图像。 潜在的应用是机器人视觉，机器视觉，计算机视觉，遥感和红外导弹寻求者。 其他应用是对象的检测和识别，自动对象识别和监视。 这种感测方法在汽车和自动化制造和质量控制系统中的自主导航和障碍物回避系统中潜在有用。
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公开(公告)号：US6043887A
公开(公告)日：2000-03-28
申请号：US200439
申请日：1998-11-27
Applicant: Louis B. Allard , Robert I. MacDonald , Carey M. Garrett
Inventor： Louis B. Allard , Robert I. MacDonald , Carey M. Garrett
CPC classification number: G01J4/04
Abstract: The state of polarization of an input light beam is tested by determining four components of a Stokes vector of the light. These correspond to components of the light in three polarization states, S.sub.1 : linear horizontal, S.sub.2 : linear at 45 degrees, S.sub.3 : right circularly polarized, and S.sub.0 the total power. It is not necessary to filter out these components directly and measure their powers. In accordance with this invention it is more convenient to measure the powers in three arbitrary polarization states that have known relationships to each other, and, also measure the total power. The actual Stokes vector components is calculated from this information. Conveniently, a device having three polarization beam splitting surfaces and a prism provides a novel way in which to obtain the necessary information from an input beam so that a set of equations can be solved to determine the state of polarization the input beam.
Abstract translation: 通过确定光的斯托克斯矢量的四个分量来测试输入光束的偏振状态。 这些对应于三种偏振状态的光分量，S1：线性水平，S2：45度线性，S3：右圆极化，S0为总功率。 没有必要直接过滤掉这些组件并测量其功能。 根据本发明，测量三个具有彼此已知关系的任意偏振态的功率更为方便，并且还测量总功率。 实际的斯托克斯矢量分量是根据这个信息计算的。 方便地，具有三个偏振光束分离表面和棱镜的装置提供了一种从输入光束获得必要信息的新方法，从而可以求解一组方程以确定输入光束的偏振状态。
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Patent Agency Ranking
公开(公告)号：US5519493A
公开(公告)日：1996-05-21
申请号：US219964
申请日：1994-03-30
Applicant: Daniel J. Reiley
Inventor： Daniel J. Reiley
CPC classification number: G01J4/04
Abstract: A polarimeter with a polarization state generator and a polarization state analyzer mounted together on a single rotary mount. This novel structure allows built-in alignment and synchronization of the polarization state analyzer and the polarization state generator. Because of this built-in alignment and synchronization, polarization properties of samples can be measured quickly, accurately, inexpensively, and reliably. The instrument can measure polarization properties of remote samples, without placing the sample inside the instrument. The surrounding lenses and mirrors are designed in such a way that light leaving the instrument will pass through the polarization state generator and light returning into the instrument will pass through the polarization state analyzer and onto a photodetector. Samples can be measured directly in reflection or in small-angle backscatter; or they can be measured in double-pass transmission with the addition of a mirror or retroreflector.
Abstract translation: 具有极化状态发生器和偏振状态分析仪的偏振计安装在单个旋转底座上。 这种新颖的结构允许偏振状态分析仪和偏振状态发生器的内置对准和同步。 由于这种内置的对准和同步，可以快速，准确，低成本，可靠地测量样品的极化特性。 仪器可以测量远程样品的极化特性，而不会将样品置于仪器内部。 周围的镜头和镜子被设计成使得离开仪器的光将通过偏振状态发生器，并且返回到仪器中的光将通过偏振状态分析器并到达光电检测器。 样品可以直接在反射或小角度后向散射中测量; 或者可以通过添加反射镜或后向反射器在双通传输中测量。
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公开(公告)号：US3817634A
公开(公告)日：1974-06-18
申请号：US23040672
申请日：1972-02-29
Applicant: NAT RES DEV
Inventor： BARRON L , BUCKINGHAM A
CPC classification number: G01N21/21 , G01J4/04 , G01N21/65 , G01N2021/4792
Abstract: In testing a sample of an optically active substance, the sample is irradiated with polarized electromagnetic radiation and the intensity of radiation scattered from the sample in a given direction is detected. The state of polarization of the incident radiation from which the detected radiation is derived is modulated, preferably by alternating it between right and left circular polarization, to cause a periodic variation of the detected intensity, and a signal related to this variation is derived.
Abstract translation: 在测试光学活性物质的样品时，用极化电磁辐射照射样品，并且检测从给定方向上从样品散射的辐射强度。 检测出的辐射源的入射辐射的偏振状态优选地通过在右和左圆极化之间进行交替调制，以引起检测强度的周期性变化，导出与该变化有关的信号。
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128.发明授权
公开(公告)号：US3543151A
公开(公告)日：1970-11-24
申请号：US3543151D
申请日：1968-01-08
Applicant: MERLIN GERIN
Inventor： PELENC YVES , BERNARD GEORGES
CPC classification number: G01J4/04 , G01R15/246
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公开(公告)号：US3196739A
公开(公告)日：1965-07-27
申请号：US9700561
申请日：1961-03-20
Applicant: ZEISS CARL
Inventor： HANS WENKING , JOHANNES FLUGGE
IPC: G01J4/04
CPC classification number: G01J4/04
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公开(公告)号：US2974561A
公开(公告)日：1961-03-14
申请号：US63043356
申请日：1956-12-20
Applicant: RESEARCH CORP
Inventor： HARDY ARTHUR C , FOPIANO PAUL J , TRAGESER MILTON B
IPC: G01J4/04
CPC classification number: G01J4/04
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