公开(公告)号：US20120113423A1

公开(公告)日：2012-05-10

申请号：US13319177

申请日：2010-05-06

Applicant: David Groswasser

Inventor： David Groswasser

IPC: G01J4/00

CPC classification number: G01N21/1717 ,  G01J3/447 ,  G01N21/23 ,  G01N2021/1727 ,  G01N2021/218

Abstract: The invention provides spectroscopy apparatuses and methods allowing precise overlapping between circularly polarized pump beam and a counter propagating linearly polarized probe beams in a sample which presents unique advantages for precision spectroscopy. In general, the apparatus comprises a phase retarding element with which by double pass by retro reflection of an incident beam turn linearly polarized light to circular and vice versa. This unique configuration enable to design a compact and miniature apparatus which may be applied for measuring polarization spectroscopy, nonlinear optical rotation and coherent population trapping phenomena with certain advantages resulting from the unique optical arrangement. The design of the apparatus further facilitates integration and scaling to produce arrays of units which may be particularly useful for magnetometry applications. Other important applications of the invention include laser frequency stabilization and atomic clocks.

Abstract translation: 本发明提供了光谱装置和方法，其允许圆形偏振泵浦光束和样品中的反向传播线性偏振探测光束之间的精确重叠，这为精确光谱学提供了独特的优点。 通常，该装置包括一个相位延迟元件，通过入射光束的反射双重反射将线性偏振光转换成圆形，反之亦然。 这种独特的配置使得能够设计一种紧凑的和微型的设备，其可以用于测量偏振光谱，非线性旋光和相干群体捕获现象，具有由独特的光学布置导致的某些优点。 该装置的设计进一步促进了整合和缩放以产生可能对磁力计应用特别有用的单元阵列。 本发明的其它重要应用包括激光频率稳定和原子钟。

公开(公告)号：US08169612B2

公开(公告)日：2012-05-01

申请号：US12474104

申请日：2009-05-28

Applicant: Chao Gao

Inventor： Chao Gao

IPC: G01J4/00

CPC classification number: G01B11/0641 ,  G01N21/211

Abstract: A method for calibrating an apparatus for ellipsometric measurements performed on an arbitrarily large or continuously moving sample, using a visible sample reference frame, and one or more laser sources in order to calibrate the ellipsometer for variations in the distance between the ellipsometer apparatus and the sample of interest. Included are techniques for projecting a first laser beam spot from an incident laser source onto a sample, then analyzing the position of the first laser beam spot relative to the center of the sample reference frame using human-aided measurements and confirmations and/or computer vision techniques. Then adjusting pivot points and/or apparatus-to-sample distance to achieve a first beam spot being located about the center of the sample reference frame, and concurrently intersecting the plane of the sample. Other techniques include changing the incidence and reflectance angle using a semi-circular track arc design with a stepping motor activating each goniometer arm.

Abstract translation: 一种用于校准用于使用可见样本参考系的任意大或连续移动的样本进行椭圆测量的装置的方法和一个或多个激光源，以便校准椭偏仪用于椭圆偏振仪装置和样品之间的距离的变化 出于兴趣。 包括用于将第一激光束点从入射激光源投影到样本上的技术，然后使用人类辅助测量和确认和/或计算机视觉来分析第一激光束点相对于样本参考系的中心的位置 技术 然后调整枢轴点和/或设备到样本的距离，以实现围绕样本参考系的中心位置并且同时与样本平面相交的第一束点。 其他技术包括使用半圆弧轨迹弧设计来改变入射角和反射角，其中步进电机激活每个测角器臂。

公开(公告)号：US08164751B2

公开(公告)日：2012-04-24

申请号：US12415284

申请日：2009-03-31

Applicant: Takashi Murooka ,  Hideyasu Ishibashi

Inventor： Takashi Murooka ,  Hideyasu Ishibashi

IPC: G01J4/00 ,  G01N21/00

CPC classification number: G01B11/0625 ,  A61B1/00009 ,  A61B1/00096 ,  A61B1/018 ,  A61B1/042 ,  A61B5/0084 ,  A61B5/1076 ,  G01J3/02 ,  G01J3/0224 ,  G01J3/36

Abstract: An optical system includes a light sending section that sends light to an object having a scattering medium and a lower medium positioned below the scattering medium, where the scattering medium scatters light and the lower medium feeds back polarized light in response to light incident thereon, a light receiving section that receives (i) light that is sent from the light sending section and then scattered by the scattering medium and (ii) light from the lower medium, and a thickness calculating section that calculates a thickness of the scattering medium, by referring to at least one of a non-polarization component and a polarization component of the light received by the light receiving section.

Abstract translation: 光学系统包括发光部分，其向具有散射介质的物体和位于散射介质下方的下介质发射光，其中散射介质散射光，并且下介质响应于入射到其上的光反馈偏振光， 光接收部，其接收（i）从所述发光部发送的光然后被所述散射介质散射的光，和（ii）来自所述下介质的光;以及厚度计算部，其通过引用来计算所述散射介质的厚度 涉及由光接收部接收的光的非偏振分量和偏振分量中的至少一个。

公开(公告)号：US20120081707A1

公开(公告)日：2012-04-05

申请号：US13175017

申请日：2011-07-01

Applicant: Bengt Norden

Inventor： Bengt Norden

IPC: G01J4/00 ,  G01N21/01

CPC classification number: G01N21/19 ,  G01N11/14 ,  G01N21/05 ,  G01N2021/0346

Abstract: The present invention relates to shear flow device 100 comprising cell 110, wherein the cell is static and comprises stationary plates 110a and 110b, and movable slide 130. The device of the present invention can be used in methods of orienting molecules for LD measurement and in methods for creating an oriented macromolecule or macromolecule complex.

Abstract translation: 本发明涉及包括电池110的剪切流动装置100，其中电池是静态的，并且包括固定板110a和110b以及可移动滑动件130.本发明的装置可用于定向分子用于LD测量的方法和 用于产生定向高分子或大分子复合物的方法。

公开(公告)号：US08139215B2

公开(公告)日：2012-03-20

申请号：US12615140

申请日：2009-11-09

Applicant: Akinori Ohkubo

Inventor： Akinori Ohkubo

IPC: G01J4/00

CPC classification number: G01J4/04

Abstract: In a measurement method for measuring polarization characteristics in which an image of a mask pattern is projected onto an image plane, a first and second slit having a width less than or equal to the wavelength of a light source are displaced on the image plane and light passing through the first and second slit is detected to obtain a first and second light intensity distribution with respect to the direction of displacement of the first and second slit. The positions at which the first light intensity distribution takes a maximum and a minimum value are determined. An index value is calculated using the respective light intensities in the second light intensity distribution at positions corresponding to the determined maximum and minimum positions. Polarization characteristics corresponding to the calculated index value are obtained by using information expressing the relationship between the index value and the polarization characteristics.

Abstract translation: 在将掩模图案的图像投影到图像平面上的偏振特性测量的测量方法中，具有小于或等于光源的波长的宽度的第一和第二狭缝在图像平面上被偏移，并且光 检测穿过第一和第二狭缝以获得关于第一和第二狭缝的位移方向的第一和第二光强分布。 确定第一光强度分布取最大值和最小值的位置。 使用与所确定的最大和最小位置对应的位置处的第二光强度分布中的各个光强度来计算指标值。 通过使用表示指标值与偏振特性之间的关系的信息，获得与计算出的指标值对应的极化特性。

公开(公告)号：US20120057173A1

公开(公告)日：2012-03-08

申请号：US13202206

申请日：2010-01-08

Applicant: Helmut Heidrich ,  Peter Luetzow

Inventor： Helmut Heidrich ,  Peter Luetzow

IPC: G01N21/41 ,  G01J4/00

CPC classification number: G01N21/7703 ,  G01N21/45 ,  G01N2021/458 ,  G01N2021/7779

Abstract: The invention relates to an optical sensor arrangement comprising a measuring optical fiber demonstrating birefringence modifiable as a function of a measurement variable, and to an optical analysis unit having two optical branches implemented as optical fibers forming a Mach-Zehnder interferometer and an optical coupler for bringing together light guided in the two branches, wherein at least one output of the coupler is optically connected to at least one light-sensitive element, and wherein the analysis unit comprises a polarizing beam splitter from which the optical branches originate, wherein the measurement optical fiber is connected upstream of an optical input of the polarizing beam splitter, and wherein a polarization converter is disposed in a course of one of the optical branches. The invention further relates to a detection method that can be performed using said sensor arrangement.

Abstract translation: 本发明涉及一种光学传感器装置，其包括显示可以作为测量变量的函数的双折射的测量光纤，以及具有实现为形成Mach-Zehnder干涉仪的光纤的两个光学分支的光学分析单元和用于带来 一起在两个分支中引导的光，其中所述耦合器的至少一个输出光学连接到至少一个光敏元件，并且其中所述分析单元包括偏振光束分离器，所述光分支从所述偏振光束分离器产生，其中所述测量光纤 连接在偏振分束器的光输入的上游，并且其中偏振转换器设置在一个光分支的过程中。 本发明还涉及可以使用所述传感器装置执行的检测方法。

公开(公告)号：US20120057158A1

公开(公告)日：2012-03-08

申请号：US13373037

申请日：2011-11-03

Applicant: James N. Hilfiker ,  Jianing Sun ,  Ping He ,  Martin M. Liphardt

Inventor： James N. Hilfiker ,  Jianing Sun ,  Ping He ,  Martin M. Liphardt

IPC: G01J4/00

CPC classification number: G01N21/211 ,  G01N2021/213

Abstract: System for, and method of ellipsometric investigation of and analysis of samples which have, for instance, a non-random effectively “regular” textured surface, and/or a surface characterized by an irregular array of faceted structures.

Abstract translation: 具有例如非随机有效的“规则”织构表面的样品的椭圆测量和椭圆曲线研究和分析方法和/或由不规则阵列的小平面结构表征的表面的系统和方法。

公开(公告)号：US08130378B2

公开(公告)日：2012-03-06

申请号：US12367157

申请日：2009-02-06

Applicant: Chun-I Wu ,  Kai-Ping Chuang ,  Wan-Yi Lin ,  Yi-Chen Hsieh ,  Fu-Shiang Yang

Inventor： Chun-I Wu ,  Kai-Ping Chuang ,  Wan-Yi Lin ,  Yi-Chen Hsieh ,  Fu-Shiang Yang

IPC: G01J4/00

CPC classification number: G01N21/21 ,  G01N2021/216

Abstract: A phase retardance inspection instrument, comprising: a light source module for generating a single-wavelength light beam; a circularly polarized light generating module, comprising a polarizer and a first phase retarder, for receiving the single-wavelength light beam as it is guided to pass through the polarizer and the first phase retarder in order; and a detecting module, comprising a second phase retarder, a polarizing beam splitter, a first image sensor and a second image sensor, for receiving and guiding a circularly polarized light beam to travel through the second phase retarder and the polarizing beam splitter in order after it passes through a substrate under inspection, wherein the polarizing beam splitter splits an elliptically polarized light beam into intensity vector components of a left-hand circularly polarized light beam and a right-hand circularly polarized light beam, which are to be emitted into the first image sensor and the second image sensor, respectively.

Abstract translation: 一种相位延迟检查仪器，包括：用于产生单波长光束的光源模块; 圆偏振光产生模块，包括偏振器和第一相位延迟器，用于在被引导时接收单波长光束以依次穿过偏振器和第一相位延迟器; 以及检测模块，包括第二相位延迟器，偏振分束器，第一图像传感器和第二图像传感器，用于接收和引导圆偏振光束以在第二相位延迟器和偏振分束器之后依次行进穿过第二相位延迟器和偏振分束器 它通过检查下的基板，其中偏振分束器将椭圆偏振光束分成左发圆偏振光束和右旋圆偏振光束的强度矢量分量，这些光束矢量将被发射到第一 图像传感器和第二图像传感器。

公开(公告)号：US08125641B2

公开(公告)日：2012-02-28

申请号：US12383864

申请日：2009-03-27

Applicant: Guoguang Li

Inventor： Guoguang Li

IPC: G01J4/00

CPC classification number: G01B11/0641 ,  G01J3/447 ,  G01N21/211 ,  G01N21/8422 ,  G01N2021/213

Abstract: A method and apparatus for convolving spectroscopic data with certain phase information for practicing phase-compensated sensitivity-enhanced spectroscopy (PCSES). PCSES uses a beam of radiation in a polarization state PSp from a source emitting at a plurality of wavelengths, and places in the beam a compensator capable of altering polarization state PSp by applying a delimited phase shift Δ between two orthogonal polarization axes of the radiation to restrict a finely-vibrating spectrum. A sample disposed in the beam after the compensator generates a response beam by reflection, transmission or even both. A polarization state PSa of the response beam is passed to a detector to determine a spectrum of the response beam. A first spectrum is collected when polarization states PSp, PSa and the compensator are in a first polarization-altering configuration and a second spectrum is collected when polarization states PSp, PSa and the compensator are in a second polarization-altering configuration. A phase-compensated spectrum is then derived from just the first and second spectra thereby allowing the user to undertake optical characterization, including the measurement of film thickness t and complex indices of refraction n, k of the sample with as few as just two polarization-altering configurations.

Abstract translation: 一种用于实现相位补偿灵敏度增强光谱（PCSES）的具有某些相位信息的光谱数据卷积的方法和装置。 PCSES使用来自发射多个波长的源的偏振状态PSp的辐射束，并且通过施加限定的相移＆amp; Dgr在光束中放置能够改变偏振状态PSp的补偿器; 在辐射的两个正交偏振轴之间限制细振动光谱。 在补偿器之后设置在光束中的样品通过反射，透射或甚至两者产生响应光束。 响应光束的偏振态PSa被传递到检测器以确定响应光束的光谱。 当极化状态PSp，PSa和补偿器处于第一偏振改变配置时收集第一光谱，并且当偏振态PSp，PSa和补偿器处于第二偏振改变配置时收集第二光谱。 然后，仅从第一和第二光谱导出相位补偿光谱，从而允许用户进行光学表征，包括测量膜厚度t和样品的复数折射率n，k，其中仅具有两个极化 - 改变配置

公开(公告)号：US20120045855A1

公开(公告)日：2012-02-23

申请号：US13212806

申请日：2011-08-18

Applicant: Markus E. Beck ,  Erel Milshtein

Inventor： Markus E. Beck ,  Erel Milshtein

IPC: H01L21/66 ,  G01J3/44 ,  G01R27/08 ,  G01J4/00 ,  G01N21/59 ,  G01J3/28 ,  G01T1/36 ,  G01N21/55

CPC classification number: G01B11/0625 ,  G01B7/06 ,  G01B11/0641 ,  G01N21/211 ,  G01N21/55 ,  G01N21/65 ,  G01N21/8422 ,  G01N21/9501 ,  G01N2021/8416 ,  G01N2021/8438

Abstract: A metrology system for analyzing a semiconductor device on a substrate can include a metrology sensor.

Abstract translation: 用于分析衬底上的半导体器件的计量系统可以包括计量传感器。