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    OPTICAL MEASURING DEVICE AND CALIBRATION DEVICE
    131.
    发明申请
    OPTICAL MEASURING DEVICE AND CALIBRATION DEVICE 审中-公开
    光学测量装置和校准装置

    公开(公告)号：US20110211192A1

    公开(公告)日：2011-09-01

    申请号：US12979138

    申请日：2010-12-27

    Applicant: Takeshi KIMURA ,  Hitoshi Shimizu

    Inventor： Takeshi KIMURA ,  Hitoshi Shimizu

    IPC: G01J1/10

    CPC classification number: G01J1/02 ,  A61B5/0066 ,  A61B2503/40 ,  A61B2560/0233 ,  G01J1/0242 ,  G01N21/274 ,  G01N21/278 ,  G01N21/6456 ,  G01N2201/103

    Abstract: There is provided an optical measuring device including: plural light-receiving units; a frame to which the respective light-receiving units are mounted on a same circumference whose axial center is a predetermined position, with optical axes of the light-receiving units being directed toward the axial center, an object of measurement being disposed at an axially central portion of the circumference; a measuring section that outputs measured values corresponding to received light amounts; a reference sample disposed, instead of the object of measurement, at the axially central portion of the circumference such that a longitudinal direction of the reference sample runs along an axis of the circumference; a reference light source that illuminates light of the predetermined wavelength toward the reference sample; and a calibrating section that calibrates the sensitivities of the plural light-receiving units at a time of measuring the object of measurement.

    Abstract translation: 提供了一种光学测量装置，包括：多个光接收单元; 将各光接收单元安装在轴心为规定位置的同一圆周上的框架，其中光接收单元的光轴朝向轴向中心，测量对象设置在轴向中心 圆周的一部分; 输出与接收到的光量对应的测量值的测量部; 参考样本，而不是测量对象，在圆周的轴向中心部分处，使得参考样本的纵向方向沿着圆周的轴线延伸; 将预定波长的光照射到参考样品的参考光源; 以及校准部，其在测量所述测量对象时校准所述多个光接收单元的灵敏度。

    Laser confocal microarray scanner
    132.
    发明授权
    Laser confocal microarray scanner 有权
    激光共焦微阵列扫描仪

    公开(公告)号：US07615758B2

    公开(公告)日：2009-11-10

    申请号：US11795660

    申请日：2005-06-02

    Applicant: Xianhua Wang ,  Hui Xu ,  Jianxin Ye ,  Yelei Sun ,  Guoliang Huang ,  Jing Cheng

    Inventor： Xianhua Wang ,  Hui Xu ,  Jianxin Ye ,  Yelei Sun ,  Guoliang Huang ,  Jing Cheng

    IPC: F21V9/16

    CPC classification number: G01N21/6458 ,  G01N21/6428 ,  G01N21/6452 ,  G01N2021/6421 ,  G01N2201/10 ,  G01N2201/103

    Abstract: The invention provides a laser microarray scanner for microarray scanning, comprising an optical system, a scanning platform, and a data processing system. During scanning, the optical system remains fixed, and the microarray placed on the scanning platform moves relative to the optical system. The microarray scanner disclosed herein has high scanning speed, high sensitivity, high resolution, and high signal-to-noise ratio, thus is ideal for use in microarray scanning

    Abstract translation: 本发明提供一种用于微阵列扫描的激光微阵列扫描器，包括光学系统，扫描平台和数据处理系统。 在扫描期间，光学系统保持固定，并且放置在扫描平台上的微阵列相对于光学系统移动。 本文公开的微阵列扫描器具有高扫描速度，高灵敏度，高分辨率和高信噪比，因此是理想的用于微阵列扫描

    Apparatus and method for inspecting a substrate
    133.
    发明授权
    Apparatus and method for inspecting a substrate 有权
    用于检查基板的装置和方法

    公开(公告)号：US07289661B2

    公开(公告)日：2007-10-30

    申请号：US10661633

    申请日：2003-09-15

    Applicant: Chung-Sam Jun ,  Sun-Yong Choi ,  Kwang-Soo Kim ,  Joo-Woo Kim ,  Jeong-Hyun Choi ,  Dong-Jin Park

    Inventor： Chung-Sam Jun ,  Sun-Yong Choi ,  Kwang-Soo Kim ,  Joo-Woo Kim ,  Jeong-Hyun Choi ,  Dong-Jin Park

    IPC: G06K9/00

    CPC classification number: H01L21/67253 ,  G01N21/9503 ,  G01N21/95607 ,  G01N2021/0162 ,  G01N2021/0187 ,  G01N2021/1736 ,  G01N2021/1772 ,  G01N2021/8411 ,  G01N2021/8896 ,  G01N2021/95615 ,  G01N2201/103 ,  G01N2201/1087

    Abstract: An automated and integrated substrate inspecting apparatus for performing an EBR/EEW inspection, a defect inspection of patterns and reticle error inspection of a substrate includes a first stage for supporting a substrate; a first image acquisition unit for acquiring a first image of a peripheral portion of the substrate supported by the first stage; a second stage for supporting the substrate; a second image acquisition unit for acquiring a second image of the substrate supported by the second stage; a transfer robot for transferring the substrate between the first stage and the second stage; and a data processing unit, connected to the first image acquisition unit and the second image acquisition unit, for inspecting results of an edge bead removal process and an edge exposure process performed on the substrate using the first image, and for inspecting for defects of patterns formed on the substrate using the second image.

    Abstract translation: 用于执行EBR / EEW检查的自动化和一体化的基板检查装置，对基板的图案和掩模版错误检查的缺陷检查包括用于支撑基板的第一阶段; 第一图像获取单元，用于获取由所述第一平台支撑的所述基板的周边部分的第一图像; 用于支撑衬底的第二阶段; 第二图像获取单元，用于获取由第二平台支撑的基板的第二图像; 用于在第一阶段和第二阶段之间转移衬底的传送机器人; 以及数据处理单元，连接到第一图像获取单元和第二图像获取单元，用于检查使用第一图像在基板上执行的边缘珠去除处理和边缘曝光处理的结果，并且用于检查图案的缺陷 使用第二图像在基板上形成。

    Biological scanner with two dimensional scanning operation
    137.
    发明申请
    Biological scanner with two dimensional scanning operation 审中-公开
    生物扫描仪二维扫描操作

    公开(公告)号：US20040095615A1

    公开(公告)日：2004-05-20

    申请号：US10295084

    申请日：2002-11-14

    Inventor： Chung-Hua Tsai

    IPC: G06K009/00 ,  C12M001/34

    CPC classification number: G01N21/253 ,  G01N2201/10 ,  G01N2201/103

    Abstract: A scanner includes a casing defining an interior space in which an optic module movable in a longitudinal direction by means of a first transmission system is mounted. A carrier is arranged inside the casing below the optic module and is selectively movable out of the casing by means of a second transmission system. A tray supports an array of cells arranged in rows and columns for each receiving and retaining a biological sample to be scanned. The tray is movably mounted on the carrier and movable with respect to the carrier in a transverse direction by a third transmission system. The optic module is movable with respect to the sample cells in a line-by-line manner in the longitudinal direction, the tray being movable with respect to the optic module in a line-by-line manner in the transverse direction for covering a two-dimensional area in which the article is located.

    Abstract translation: 扫描器包括限定内部空间的壳体，其中通过第一传动系统安装可在纵向方向上移动的光学模块。 载体布置在光学模块下面的壳体的内部，并通过第二传输系统选择性地移出壳体。 托盘支持排列成行和列的单元阵列，用于每个接收和保留待扫描的生物样品。 托盘可移动地安装在托架上并且通过第三传动系统在横向方向上相对于托架可移动。 光学模块可相对于样品池在纵向上以一行方式移动，托盘可相对于光学模块在横向方向上以一行方式移动以覆盖两个 文章所在的维度区域。

    Automated capillary scanning system
    138.
    发明授权
    Automated capillary scanning system 失效
    自动毛细管扫描系统

    公开(公告)号：US5009503A

    公开(公告)日：1991-04-23

    申请号：US479959

    申请日：1990-02-14

    Applicant: Martin J. Murphy, Jr. ,  Jack B. Stubbs ,  Thomas A. Leonard

    Inventor： Martin J. Murphy, Jr. ,  Jack B. Stubbs ,  Thomas A. Leonard

    IPC: C12M1/34 ,  G01N15/12 ,  G01N15/14 ,  G01N21/51

    CPC classification number: G01N15/1468 ,  C12M23/16 ,  C12M41/36 ,  G01N15/12 ,  G01N21/51 ,  G01N2201/103 ,  G01N2201/1087

    Abstract: A plurality of parallel spaced cylindrical capillary tubes contain single cells and/or cell colonies in a medium and gel-like agarose, and the tubes are carried by a frame-like holder supported by a motor driven X-Y translation stage of an automated microscope. The microscope also incorporates an electronic optical detector and an object lens located under the tube holder. The entire contents of each tube are internally illuminated by a precision light beam emitted from a helium-neon laser and reflected by a set of precisely positioned mirrors so that the beam extends axially through each tube when the tube extends across the vertical axis of the object lens. The contents of the tubes are sequentially scanned under the control of special softward within a personal computer, and the intensity of the light reflected outwardly from each cell or cell colony is sensed by the detector and recorded in the computer along with the axial location of the reflecting cell or cell colony. Preferably, the laser light is pure red, the optical detector is sensitive to the red light, and the object lens is focused on the wall of the tube to maximize the signal-to-noise ratio and to obtain full field detection across each tube.

    Abstract translation: 多个平行间隔开的​​圆柱形毛细管在培养基和凝胶状琼脂糖中含有单个细胞和/或细胞集落，并且管由由自动显微镜的电机驱动的X-Y平移台支撑的框架状支架承载。 显微镜还包括位于管座下方的电子光学检测器和物镜。 每个管的整个内容物由从氦氖激光器发射并由一组精确定位的反射镜反射的精确光束内部照射，使得当管延伸穿过物体的垂直轴线时，光束轴向延伸穿过每个管 镜片。 在个人计算机内，在特别软的控制下顺序扫描管内容物，并且由每个细胞或细胞集落向外反射的光的强度由检测器检测并记录在计算机中以及 反映细胞或细胞集落。 优选地，激光是纯红色，光学检测器对红光敏感，并且物镜聚焦在管的壁上以最大化信噪比并且跨越每个管获得全场检测。

    Method and device for detecting defects of patterns in microelectronic devices
    139.
    发明授权
    Method and device for detecting defects of patterns in microelectronic devices 失效
    用于检测微电子器件中图案缺陷的方法和装置

    公开(公告)号：US4760265A

    公开(公告)日：1988-07-26

    申请号：US3572

    申请日：1987-01-15

    Applicant: Akihiro Yoshida ,  Takahide Iida ,  Hiroshi Miyake ,  Shuzo Hattori

    Inventor： Akihiro Yoshida ,  Takahide Iida ,  Hiroshi Miyake ,  Shuzo Hattori

    IPC: G01N21/956 ,  G01N23/18

    CPC classification number: G01N21/95607 ,  G01N2201/103

    Abstract: An inspecting method and device for inspecting an object or objects such as photomasks having a plurality of identical patterns, to detect defects of the patterns, wherein the object is placed such that the patterns lie in the same plane, and an inspection mask having a plurality of translucent apertures is placed such that the inspection mask is adjacent and parallel to the object. The inspection mask and the object are moved relative to each other whereby each aperture is positioned opposite to mutually corresponding portions of the patterns. The object and inspection mask are irradiated with rays of light emitted in a direction substantially normal to the plane of relative movements thereof. The rays of light transmitted through the apertures and the object are converted into electric signals, and the electric signals associated with the corresponding portions of the patterns are compared with each other, prior to obtaining the electric signals of all of the plurality of patterns. If the electric signals of the corresponding portions of the patterns differ from each other, these portions are determined to be defective.

    Abstract translation: 一种用于检查具有多个相同图案的物体或诸如光掩模的物体的检查方法和装置，以检测图案的缺陷，其中物体被放置成使得图案位于同一平面中，以及检查掩模具有多个 放置半透明孔使得检查掩模相邻并平行于物体。 检查掩模和物体相对于彼此移动，由此每个孔与图案的相互对应的部分相对定位。 物体和检查掩模被照射在与其相对运动平面基本垂直的方向上发射的光线。 通过孔径和物体传输的光线被转换为电信号，并且在获得所有多个图案的电信号之前将与图案的相应部分相关联的电信号彼此进行比较。 如果图案的相应部分的电信号彼此不同，则这些部分被确定为有缺陷的。

    Line inspection system
    140.
    发明授权
    Line inspection system 失效
    线路检查系统

    公开(公告)号：US4661984A

    公开(公告)日：1987-04-28

    申请号：US70899

    申请日：1979-08-29

    Applicant: William A. Bentley

    Inventor： William A. Bentley

    IPC: G01N21/956 ,  G06T7/00 ,  G06K9/00

    CPC classification number: G01N21/956 ,  G06T7/0008 ,  G01N2021/95638 ,  G01N2201/103 ,  G06T2207/30141

    Abstract: A line inspection system suitable for inspecting printed circuit boards for defects. In a first embodiment disclosed, a plurality of sensors which detect the presence or absence of conductor material on the board are grouped in a preestablished pattern. The area of the circuit board to be inspected is scanned by the sensing pattern and logical sequences of sensor condition which indicate defects are searched for. In a second embodiment disclosed, the area to be inspected is scanned serially, and the resultant data stored. Logical analysis is then performed on the stored data to determine whether the pattern of data is or is not consistent with an acceptable part.

    Abstract translation: 线路检测系统适用于检查印刷电路板的缺陷。 在所公开的第一实施例中，检测板上导体材料的存在或不存在的多个传感器被分组成预先建立的图案。 要检查的电路板的区域由感测图案和表示缺陷被搜索的传感器状态的逻辑顺序扫描。 在所公开的第二实施例中，要检查的区域被连续扫描，并且存储所得到的数据。 然后对存储的数据执行逻辑分析，以确定数据模式是否与可接受部分不一致。

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