SEPARATION TECHNOLOGY METHOD AND IDENTIFICATION OF ERROR
    131.
    发明申请
    SEPARATION TECHNOLOGY METHOD AND IDENTIFICATION OF ERROR 审中-公开
    分离技术方法和错误识别

    公开(公告)号:US20100050737A1

    公开(公告)日:2010-03-04

    申请号:US12548950

    申请日:2009-08-27

    CPC classification number: G01N30/8665

    Abstract: The present invention relates to a method and accompanying device for separating a known or unknown sample into one or more subsamples. By comparing the subsample's measurement profile data to the sample measurement profile data, the performance of the separation can be determined. The separation could be chromatography [such as high-performance liquid chromatography (HPLC), gas chromatography (GC), or the like], electrophoresis [such as capillary electrophoresis (CE) or the like], or another separation technique. The measurement profile data could be ultraviolet/visible (UV/Vis) spectra, mass spectra (MS), or another measurement technique.

    Abstract translation: 本发明涉及用于将已知或未知样品分离成一个或多个子样品的方法和相关装置。 通过将子样本的测量轮廓数据与样本测量轮廓数据进行比较,可以确定分离的性能。 分离可以是色谱法(例如高效液相色谱法(HPLC),气相色谱法(GC)等),电泳(如毛细管电泳(CE)等))或另一种分离技术。 测量轮廓数据可以是紫外/可见(UV / Vis)光谱,质谱(MS)或另一种测量技术。

    ULTRA FINE PARTICLE SENSOR
    132.
    发明申请
    ULTRA FINE PARTICLE SENSOR 有权
    超细颗粒传感器

    公开(公告)号:US20100043527A1

    公开(公告)日:2010-02-25

    申请号:US11993598

    申请日:2006-06-26

    Applicant: Johan Marra

    Inventor: Johan Marra

    Abstract: The invention relates to an ultra fine particle sensor (1) for sensing airborne particles with a diameter in a range of approximately 1-500 nm. The sensor comprises an air inlet (2) for entry of a flow of ultra fine particles and a concentration variation section (4) capable of causing a variation of the concentration of ultra fine particles between at least a first concentration level and a second concentration level during at least one time interval. A particle sensing section (5) is provided capable of producing a measurement signal (I) varying in dependence of said variation between said first concentration level and said second concentration level. An evaluation unit (6) is provided capable of deriving data relating to said ultra fine particles form said varying measurement signal. As a result of the applied variation in the concentration level, data can be obtained from the resulting variation of the measurement signal which relate to the length concentration and number concentration of airborne ultra fine particles per unit volume.

    Abstract translation: 本发明涉及一种用于感测直径在约1-500nm范围内的空气传播颗粒的超细颗粒传感器(1)。 传感器包括用于进入超细颗粒流的空气入口(2)和能够引起至少第一浓度水平和第二浓度水平之间的超细颗粒浓度变化的浓度变化区段(4) 在至少一个时间间隔内。 提供一种能够产生根据所述第一浓度水平和所述第二浓度水平之间的所述变化而变化的测量信号(I)的颗粒感测部分(5)。 提供一种评估单元(6),其能够从所述变化的测量信号中导出与所述超细颗粒相关的数据。 作为浓度水平的应用变化的结果,可以从与每单位体积的空气中超细颗粒的长度浓度和数量浓度相关的测量信号的所得变化获得数据。

    CALIBRATION OF OPTICAL ANALYSIS MAKING USE OF MULTIVARIATE OPTICAL ELEMENTS
    133.
    发明申请
    CALIBRATION OF OPTICAL ANALYSIS MAKING USE OF MULTIVARIATE OPTICAL ELEMENTS 失效
    光学分析的校准制造多光学元件的使用

    公开(公告)号:US20100042348A1

    公开(公告)日:2010-02-18

    申请号:US11721368

    申请日:2005-12-12

    Abstract: The invention provides a method of calibrating an optical analysis system that makes use of multivariate optical signal analysis allowing to realize cost-efficient and robust implementation of a spectral analysis of an optical signal. The calibration method makes use of determining a parameter of a reference sample by means of the optical analysis system and comparing the actually determined parameter with a reference parameter that represents a precise and real property of the reference sample. Based on this comparison a calibration value can be determined that is applicable to perform a calibration of the optical analysis system with respect to at least one compound or analyte of the reference sample. Parameters and reference parameters of a reference sample may refer to a concentration of an analyte dissolved in the sample, or to spectroscopic background signals that have to be taken into account when performing a spectral analysis based on optical signals obtained from the reference sample. Various different reference samples providing a reference with respect to different acquisition conditions and different analyte or compound concentrations can be universally used. Analyte-specific reference data is preferably stored in a calibration unit of the optical analysis system and allows a high degree of automation of the calibration process.

    Abstract translation: 本发明提供了一种校准光学分析系统的方法,其利用多变量光信号分析,从而实现光信号的光谱分析的成本有效且鲁棒的实现。 校准方法利用通过光学分析系统确定参考样本的参数,并将实际确定的参数与表示参考样本的精确和不变性的参考参数进行比较。 基于该比较,可以确定适用于相对于参考样品的至少一种化合物或分析物执行光学分析系统的校准的校准值。 参考样品的参数和参考参数可以指溶解在样品中的分析物的浓度,或者基于从参考样品获得的光学信号进行光谱分析时必须考虑的光谱背景信号。 可以普遍使用提供关于不同采集条件和不同分析物或化合物浓度的参考的各种不同参考样品。 分析物特异性参考数据优选地存储在光学分析系统的校准单元中,并允许校准过程的高度自动化。

    Method of instrument standardization for a spectroscopic device
    134.
    发明授权
    Method of instrument standardization for a spectroscopic device 有权
    光谱仪器标准化方法

    公开(公告)号:US07656521B2

    公开(公告)日:2010-02-02

    申请号:US12119239

    申请日:2008-05-12

    CPC classification number: G01J3/28 G01J3/42

    Abstract: In a spectroscopic process a sample for producing a test spectral line or spectrum of at least one component contained in the sample is stimulated and the transmitted and/or emitted electromagnetic rays are used to create the test spectral line or spectrum. In order to improve such a spectroscopic process to such an extent that variations of certain parameters, which alter the shape and/or occurrence of a spectral line, are compensated, a comparison spectral line or spectrum of a known comparison material is produced under substantially the same parameters as the sample. The comparison spectral line or spectrum is compared with an ideal comparison spectral line or spectrum in order to calculate a transfer function, andthe transfer function is applied to the test spectral line or spectrum in order to calculate a corrected test spectral line or spectrum.

    Abstract translation: 在分光过程中,刺激用于产生测试谱线或样品中包含的至少一种组分的光谱的样品,并且使用透射和/或发射的电磁波来产生测试光谱线或光谱。 为了改进这种光谱过程,使得补偿了改变光谱线的形状和/或出现的某些参数的变化,已知比较材料的比较光谱线或光谱基本上在 与样品相同的参数。 将比较谱线或频谱与理想的比较谱线或频谱进行比较,以计算传递函数,并将传递函数应用于测试谱线或频谱,以便计算校正的测试谱线或频谱。

    SURFACE INSPECTING METHOD AND DEVICE
    135.
    发明申请
    SURFACE INSPECTING METHOD AND DEVICE 失效
    表面检测方法和装置

    公开(公告)号:US20100007872A1

    公开(公告)日:2010-01-14

    申请号:US12442879

    申请日:2007-12-04

    Abstract: A light source section outputs optical flux having two types of wavelength, which are a short wavelength and a long wavelength, while the intensity is made variable. The optical flux is made incident to a detected surface of a body to be detected at a predetermined incident angle simultaneously or alternatively. Based on a type of optical flux outputted from the light source section and an output from a first light intensity detecting section, at least the intensity of the optical flux having a long wavelength outputted from the light source section is adjusted. The output from the first light intensity detecting section in irradiating the optical flux having a short wavelength is compared with the output from the first light intensity detecting section in irradiating the optical flux having a long wavelength. A signal that appears only in the output from the first light intensity detecting section in irradiating the optical flux having a long wavelength is identified as a detected signal from an internal subject. The intensity of optical flux having a long wavelength is adjusted. A disappearance level near a point where the detected signal from the internal subject disappears is calculated. The first intensity of optical flux having a long wavelength is set to level higher than the disappearance level. Based on the output from the first light intensity detecting section obtained by the optical flux having a long wavelength of the first intensity, a subject inside the body to be detected is measured.

    Abstract translation: 光源部分输出具有短波长和长波长的两种波长的光通量,同时强度可变。 光通量以预定的入射角同时或交替地入射到要检测的身体的检测表面。 基于从光源部输出的光通量和第一光强检测部的输出,至少从光源部输出的具有长波长的光通量的强度被调整。 在照射长波长的光通量时,将照射具有短波长的光束的来自第一光强度检测部的输出与来自第一光强检测部的输出进行比较。 作为来自内部被检体的检测信号,识别仅在来自第一光强检测部的输出中出现的长波长的光束的信号。 调整长波长的光通量的强度。 计算来自内部对象的检测信号消失的点附近的消失水平。 具有长波长的光通量的第一强度被设置为高于消失水平的水平。 基于通过具有第一强度的长波长的光通量获得的来自第一光强检测部的输出,测量被检体内的被检体。

    METHOD AND INSTRUMENTATION FOR DETERMINING A PHYSICAL PROPERTY OF A PARTICLE
    137.
    发明申请
    METHOD AND INSTRUMENTATION FOR DETERMINING A PHYSICAL PROPERTY OF A PARTICLE 有权
    用于确定颗粒物理性质的方法和仪器

    公开(公告)号:US20090316138A1

    公开(公告)日:2009-12-24

    申请号:US12124767

    申请日:2008-05-21

    Abstract: Physical property determination of a particle or classification of the particle as a function of the physical property by evaluating scattered light profile from a single particle is disclosed. The particle may include chemical structures that vibrate as a function of a physical property of the particle. The physical property may include an absorptive property of the particle or a chemical composition. From a detected scattered light spectrum, at least two anomalous dispersive regions may be identified. The physical property of the particle may be determined as a function of the at least two regions. A system employing the physical property determination can achieve sensitivities useful for low particle density applications such as detection for biological and chemical agents.

    Abstract translation: 公开了通过从单个颗粒评估散射光轮廓,粒子的物理性质或颗粒的分类作为物理性质的函数。 颗粒可以包括作为颗粒的物理性质的函数振动的化学结构。 物理性质可以包括颗粒的吸收性质或化学组成。 从检测到的散射光谱中,可以识别至少两个异常色散区域。 颗粒的物理性质可以确定为至少两个区域的函数。 采用物理性质测定的系统可以实现用于低颗粒密度应用的灵敏度,例如生物和化学试剂的检测。

    Apparatus and method for monitoring processing of a substrate
    138.
    发明授权
    Apparatus and method for monitoring processing of a substrate 有权
    用于监测基板的处理的装置和方法

    公开(公告)号:US07632419B1

    公开(公告)日:2009-12-15

    申请号:US09595778

    申请日:2000-06-16

    CPC classification number: H01J37/32458 H01J37/32935

    Abstract: Apparatus for in-situ monitoring of a process in a semiconductor wafer processing system consists of a process chamber having a dome, an enclosure disposed above the chamber, a process monitoring assembly positioned proximate the dome, an opening in the dome, and a window covering the opening. A portion of the apparatus supports the process monitoring assembly to establish a line-of-sight propagation path of monitoring beams from above the dome, through the window to the substrate to facilitate etch depth measurement without encountering interference from high power energy sources proximate the chamber. A method of fabricating a process monitoring apparatus consists of the steps of boring an opening into a dome, positioning the process monitoring assembly in proximity to the dome so as to allow a line-of-sight propagation path of monitoring beams from the process monitoring assembly to a wafer, and covering the opening with a window. The window is permanent or removable dependent upon the type of process monitoring assembly being used in the system.

    Abstract translation: 用于在半导体晶片处理系统中对工艺进行现场监测的装置包括具有圆顶的处理室,设置在室上方的外壳,位于圆顶附近定位的过程监控组件,穹顶中的开口,以及窗盖 开幕。 该装置的一部分支持过程监控组件,以建立监视来自穹顶上方的通过窗口到基板的光束的视线传播路径,以便于蚀刻深度测量,以便不会受到靠近腔室的高功率能源的干扰 。 一种制造过程监控装置的方法包括将开口钻入圆顶的步骤,将过程监控组件定位在靠近圆顶的位置,以便允许来自过程监控组件的监视光束的视距传播路径 到晶片,并用窗口覆盖开口。 窗口是永久的或可移动的,取决于系统中使用的过程监视组件的类型。

    Illumination sources and customizable spectral profiles
    139.
    发明授权
    Illumination sources and customizable spectral profiles 失效
    照明光源和可定制的光谱分布

    公开(公告)号:US07626693B1

    公开(公告)日:2009-12-01

    申请号:US11232442

    申请日:2005-09-21

    Applicant: Carl W. Dirk

    Inventor: Carl W. Dirk

    Abstract: Methods for generating a customized spectral profile, which can be used to generate a corresponding filter, lamp or other type of illuminant. A trial spectrum is generated. A reference spectrum is determined or otherwise obtained. A SOURCE spectrum is determined or otherwise obtained. One or more optical indices are calculated using the trial spectrum and one or more of the optical indices are optimized by varying the trial spectrum to generate the customized spectral profile. A radiation force parameter can be used to minimize unsafe build-up of light in spectral regions. Adaptations of color rendering parameters can be used in the optimization process. Smoothing parameters can be used to enable easier design of filter structures. A reflectance camera can be used to measure reflectance data at one or more pixels of a digital representation of an object to be illuminated.

    Abstract translation: 用于产生可用于生成相应的过滤器,灯或其他类型的光源的定制光谱轮廓的方法。 产生试验光谱。 确定或以其他方式获得参考光谱。 确定或以其他方式获得SOURCE光谱。 使用试验光谱计算一个或多个光学指数,并且通过改变试验光谱来优化一个或多个光学指数以产生定制的光谱分布。 可以使用辐射力参数来最小化在光谱区域内的光的不安全积累。 显色参数的适应可以在优化过程中使用。 平滑参数可用于实现滤波器结构的简化设计。 可以使用反射相机来测量被照射物体的数字表示的一个或多个像素处的反射率数据。

    Solid state intra-cavity absorption spectrometer
    140.
    发明授权
    Solid state intra-cavity absorption spectrometer 失效
    固态腔内吸收光谱仪

    公开(公告)号:US07622998B2

    公开(公告)日:2009-11-24

    申请号:US11562455

    申请日:2006-11-22

    Applicant: Robert Amantea

    Inventor: Robert Amantea

    CPC classification number: H01Q21/064 H01Q3/46

    Abstract: The present invention provides a solid state intra-cavity absorption spectrometer comprising a solid-state gain device interspersed in an array of oscillators in a chamber to produce a wide area coherent high power source of Terahertz radiation. The source is then partitioned into two separate regions, one having a gain medium and one having a sample chamber that can be held a different pressure and is chemically isolated from the gain region thereby forming an intra-cavity absorption spectrometer.

    Abstract translation: 本发明提供了一种固态腔内吸收光谱仪,其包括散布在室中的振荡器阵列中的固态增益器件,以产生广域相干的太赫兹辐射的高功率源。 然后将源分隔成两个分开的区域,一个具有增益介质,一个具有可以保持不同压力并且与增益区域化学隔离的样品室,从而形成腔内吸收光谱仪。

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