公开(公告)号：US20060244958A1

公开(公告)日：2006-11-02

申请号：US11476358

申请日：2006-06-28

Applicant: Dov Furman ,  Gad Neumann ,  Mark Wagner ,  Noam Dotan ,  Ram Segal ,  Shai Silberstein

Inventor： Dov Furman ,  Gad Neumann ,  Mark Wagner ,  Noam Dotan ,  Ram Segal ,  Shai Silberstein

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2201/0697 ,  G01N2201/0826

Abstract: Fast on-line electro-optical detection of wafer defects by illuminating with a short light pulse from a repetitively pulsed laser, a section of the wafer while it is moved across the field of view of an imaging system, and imaging the moving wafer onto a focal plane assembly, optically forming a continuous surface of photo-detectors at the focal plane of the optical imaging system. The continuously shorter than the pixel dwell time, such that there is effectively no image smear during the wafer motion. The laser pulse has sufficient energy and brightness to impart the necessary illumination to each sequentially inspected field of view required for creating an image of the inspected wafer die. A novel fiber optical illumination delivery system, which is effective in reducing the effects of source coherence is described. Other novel aspects of the system include a system for compensating for variations in the pulse energy of a Q-switched laser output, methods for autofocussing of the wafer imaging system, and novel methods for removal of repetitive features of the image by means of Fourier plane filtering, to enable easier detection of wafer defects.

Abstract translation: 通过用来自重复脉冲激光器的短光脉冲照射晶片缺陷的快速在线电光检测，晶片的一部分在成像系统的视场内移动，并将移动的晶片成像到 焦平面组件，在光学成像系统的焦平面处光学地形成光电检测器的连续表面。 连续地比像素停留时间短，从而在晶片运动期间实际上没有图像污迹。 激光脉冲具有足够的能量和亮度，以对于产生被检查的晶片管芯的图像所需的每个顺序检查的视场赋予必要的照明。 描述了一种有效减少源相干效应的新型光纤照明传输系统。 该系统的其他新颖的方面包括用于补偿Q开关激光输出的脉冲能量变化的系统，用于晶片成像系统的自动聚焦的方法，以及通过傅立叶平面去除图像的重复特征的新颖方法 过滤，以便更容易地检测晶片缺陷。

公开(公告)号：US06324298B1

公开(公告)日：2001-11-27

申请号：US09352564

申请日：1999-07-13

Applicant: Jeffrey O'Dell ,  Mark Harless ,  Thomas Verburgt

Inventor： Jeffrey O'Dell ,  Mark Harless ,  Thomas Verburgt

IPC: G06K962

CPC classification number: G01N21/9501 ,  G01N21/8803 ,  G01N21/8806 ,  G01N2021/8838 ,  G01N2201/06113 ,  G01N2201/0696 ,  G01N2201/0697 ,  G01N2201/12 ,  G06T7/0004 ,  G06T2207/30148 ,  H01L21/67242 ,  H01L21/67271 ,  H01L21/67288 ,  H01L22/12 ,  H01L2924/0002 ,  H04N5/2256 ,  H01L2924/00

Abstract: An automated defect inspection system has been invented and is used on patterned wafers, whole wafers, broken wafers, partial wafers, sawn wafers such as on film frames, JEDEC trays, Auer boats, die in gel or waffle packs, MCMs, etc. and is specifically intended and designed for second optical wafer inspection for such defects as metalization defects (such as scratches, voids, corrosion, and bridging), diffusion defects, passivation layer defects, scribing defects, glassivation defects, chips and cracks from sawing, solder bump defects, and bond pad area defects.

Abstract translation: 已经发明了一种自动化缺陷检测系统，用于图案化的晶片，整个晶片，破碎的晶片，部分晶片，锯片，如胶片框架，JEDEC托盘，Auer船，凝胶或华夫饼包，MCM等，以及 专门用于第二光学晶片检查，用于诸如金属化缺陷（例如划痕，空隙，腐蚀和桥接），扩散缺陷，钝化层缺陷，划线缺陷，玻璃化缺陷，切屑和锯切裂纹等缺陷，焊料凸块 缺陷和焊盘区域缺陷。

公开(公告)号：US4855930A

公开(公告)日：1989-08-08

申请号：US31288

申请日：1987-03-27

Applicant: Yong-Sheng Chao ,  Salvador M. Fernandez ,  Ernest F. Guignon

Inventor： Yong-Sheng Chao ,  Salvador M. Fernandez ,  Ernest F. Guignon

IPC: G01N21/64 ,  G01N33/53

CPC classification number: G01N33/5302 ,  G01N21/6408 ,  G01N21/6428 ,  G01N2201/0697

Abstract: A method and apparatus for time-resolved fluorescence spectroscopy is described in which laser light from a single pulse is used to excite fluorescent photons in a sample, which fluorescence is detected by a PMT optimized for linearity and response time to produce photoelectrons which generate a current at the PMT anode. This current is discharged through an R/C network to produce a voltage amplitude waveform which is converted to an optical image, intensified, stored and digitized. The digitized version of the optical image is processed in a data processor to calculate the true fluorescence impulse response.

Abstract translation: 描述了用于时间分辨荧光光谱的方法和装置，其中使用来自单个脉冲的激光来激发样品中的荧光光子，该荧光由针对线性和响应时间优化的PMT检测以产生产生电流的光电子 在PMT阳极。 该电流通过R / C网络放电，产生电压幅度波形，转换为光学图像，增强，存储和数字化。 数字化版本的光学图像在数据处理器中进行处理，以计算真实的荧光脉冲响应。

公开(公告)号：US20240201085A1

公开(公告)日：2024-06-20

申请号：US18554145

申请日：2022-03-15

Applicant: Ushio Denki Kabushiki Kaisha

Inventor： Toshikazu NAGASHIMA

IPC: G01N21/49 ,  G01N21/25 ,  G01N21/84

CPC classification number: G01N21/49 ,  G01N21/255 ,  G01N21/84 ,  G01N2021/845 ,  G01N2201/0636 ,  G01N2201/0638 ,  G01N2201/0697 ,  G01N2201/1042

Abstract: A conveyance device supports and conveys an object. The conveyance device has a support portion in which an opening narrower than the object is provided at a position where the object is supported. A lighting device irradiates a first surface of the object with measurement light having a wavelength changing over time through the opening of the support portion. A light receiving device detects object light that is diffusely transmitted light emitted from a second surface of the object.

公开(公告)号：US11944448B2

公开(公告)日：2024-04-02

申请号：US17960805

申请日：2022-10-05

Applicant: Cornell University

Inventor： Chris Xu ,  Kriti Charan ,  Bo Li ,  Michael Buttolph

IPC: A61B5/00 ,  G02B21/00 ,  H01S3/067

CPC classification number: A61B5/40 ,  A61B5/0071 ,  G02B21/0032 ,  H01S3/06754 ,  G01N2201/0697

Abstract: A system and method for adaptive illumination, the imaging system comprising an excitation source having a modulator, which generates a pulse intensity pattern having a first wavelength when the excitation source receives a modulation pattern. The modulation pattern is a data sequence of a structural image of a sample. An amplifier of the imaging system is configured to receive and amplify the pulse intensity pattern from the modulator. A frequency shift mechanism of the imaging system shifts the first wavelength of the pulse intensity pattern to a second wavelength. A laser scanning microscope of the imaging system receives the pulse intensity pattern having the second wavelength.

公开(公告)号：US11921070B2

公开(公告)日：2024-03-05

申请号：US17771308

申请日：2020-10-19

Applicant: Carl Zeiss AG

Inventor： Nils Trautmann ,  Ulrich Vogl ,  Jörg Wrachtrup ,  Rainer Stöhr

IPC: G01V3/00 ,  G01N21/64 ,  G01N24/10 ,  G01R33/00 ,  G01R33/26 ,  G01R33/60

CPC classification number: G01N24/10 ,  G01N21/6408 ,  G01R33/0041 ,  G01R33/26 ,  G01R33/60 ,  G01N2201/0697

Abstract: It is an object of the invention to improve processes, apparatuses and systems for measuring a measured variable. To this end, a measured variable is measured in a measuring process on the basis of an NV center as a quantum sensor. The NV center has a plurality of quantum states and is optically excitable on the basis of an occupancy of one of the quantum states into at least one excited state of the quantum states by means of an excitation light. The at least one excited state can decay at least with emission of emission light of the NV center. In the measuring process, the NV center is irradiated by the excitation light, the excitation light having a time periodic modulation, and a respective occupancy probability and/or a respective lifetime of the quantum states depending on the measured variable and the excitation light. A phase shift is determined between the emission light of the NV center and the modulation of the excitation light and a measurement value for the measured variable is determined on the basis thereof.

公开(公告)号：US11821840B2

公开(公告)日：2023-11-21

申请号：US17522380

申请日：2021-11-09

Applicant: UltraFast Innovations GmbH

Inventor： Daniel Cardenas ,  Minjie Zhan ,  Asger Kreiner ,  Alexander Guggenmos

IPC: G01N21/55 ,  G01N21/21 ,  G01M11/00

CPC classification number: G01N21/55 ,  G01M11/005 ,  G01N21/21 ,  G01N2021/558 ,  G01N2201/0697

Abstract: An apparatus and a method measure a reflectivity and/or transmittivity of an optical surface. The apparatus includes a pulsed coherent white light source for generating pulsed coherent white light, wherein the apparatus is adapted to irradiate the optical surface with at least a part of the generated pulsed coherent white light.

公开(公告)号：US20230194421A1

公开(公告)日：2023-06-22

申请号：US18171910

申请日：2023-02-21

Applicant: Purdue Research Foundation

Inventor： Delong Zhang ,  Ji-Xin Cheng

IPC: G01N21/3563 ,  G01N21/17 ,  G01J5/22 ,  C12Q1/02 ,  G02B21/18 ,  G01J5/00 ,  G02B21/02 ,  H01S5/34 ,  G02B21/06

CPC classification number: G01N21/3563 ,  G01N21/171 ,  G01J5/22 ,  C12Q1/02 ,  G02B21/18 ,  G01N2201/0612 ,  G01J2005/0077 ,  G02B21/02 ,  G01N2201/0697 ,  H01S5/3401 ,  G01N2021/1712 ,  G02B21/06

Abstract: Systems and methods for sensing vibrational absorption induced photothermal effect via a visible light source. A Mid-infrared photothermal probe (MI-PTP, or MIP) approach achieves 10 mM detection sensitivity and sub-micron lateral spatial resolution. Such performance exceeds the diffraction limit of infrared microscopy and allows label-free three-dimensional chemical imaging of live cells and organisms. Distributions of endogenous lipid and exogenous drug inside single cells can be visualized. MIP imaging technology may enable applications from monitoring metabolic activities to high-resolution mapping of drug molecules in living systems, which are beyond the reach of current infrared microscopy.

公开(公告)号：US20180236448A1

公开(公告)日：2018-08-23

申请号：US15957023

申请日：2018-04-19

Applicant: OPKO Diagnostics, LLC

Inventor： Vincent Linder ,  David Steinmiller

IPC: B01L3/00 ,  G01N33/543 ,  G01N33/574 ,  G01N21/59

CPC classification number: B01L3/502746 ,  B01L3/5027 ,  B01L3/502715 ,  B01L3/50273 ,  B01L3/502738 ,  B01L7/52 ,  B01L2200/025 ,  B01L2200/026 ,  B01L2200/027 ,  B01L2200/028 ,  B01L2200/0673 ,  B01L2200/0684 ,  B01L2200/143 ,  B01L2200/146 ,  B01L2200/147 ,  B01L2300/021 ,  B01L2300/023 ,  B01L2300/027 ,  B01L2300/04 ,  B01L2300/0654 ,  B01L2300/0816 ,  B01L2300/0867 ,  B01L2300/12 ,  B01L2300/14 ,  B01L2300/16 ,  B01L2300/168 ,  B01L2300/1827 ,  B01L2300/1894 ,  B01L2400/0475 ,  B01L2400/049 ,  B01L2400/0666 ,  B01L2400/082 ,  G01N21/05 ,  G01N21/59 ,  G01N21/64 ,  G01N21/76 ,  G01N33/54313 ,  G01N33/54366 ,  G01N33/57434 ,  G01N2201/02 ,  G01N2201/0612 ,  G01N2201/062 ,  G01N2201/0621 ,  G01N2201/0697 ,  G01N2333/96433 ,  Y10T137/0324 ,  Y10T436/12

Abstract: Systems and methods for controlling fluids in microfluidic systems are generally described. In some embodiments, control of fluids involves the use of feedback from one or more processes or events taking place in the microfluidic system. For instance, a detector may detect one or more fluids at a measurement zone of a microfluidic system and one or more signals, or a pattern of signals, may be generated corresponding to the fluid(s). In some cases, the signal or pattern of signals may correspond to an intensity, a duration, a position in time relative to a second position in time or relative to another process, and/or an average time period between events. Using this data, a control system may determine whether to modulate subsequent fluid flow in the microfluidic system. In some embodiments, these and other methods can be used to conduct quality control to determine abnormalities in operation of the microfluidic system.

公开(公告)号：US10054545B2

公开(公告)日：2018-08-21

申请号：US15276397

申请日：2016-09-26

Applicant: NIKON CORPORATION

Inventor： Fumihiro Dake ,  Hiroki Yazawa

IPC: G01N21/64 ,  G02B21/00 ,  G01N21/63 ,  G02B21/08 ,  G02B21/16 ,  G02B21/36 ,  G02F1/11

CPC classification number: G01N21/6458 ,  G01N21/636 ,  G01N2201/0675 ,  G01N2201/0697 ,  G02B21/0076 ,  G02B21/0084 ,  G02B21/086 ,  G02B21/16 ,  G02B21/367 ,  G02B27/58 ,  G02F1/11

Abstract: A super-resolution observation device includes an illumination optical system that focus a first illuminating light at optical frequency ω1 and a second illuminating light at optical frequency ω2 on a region of an observation object plane; a modulation unit that modulates a property of the first illuminating light heading toward the region at a modulation frequency fm; and an extraction unit that extracts a component at the optical frequency ω1 or ω2 from a light generated in the region according to the first illuminating light and the second illuminating light, the component of which the property changes at a frequency higher than the modulation frequency fm.