Microelectromechanical systems microphone with electrostatic force feedback to measure sound pressure

    公开(公告)号:US09813831B1

    公开(公告)日:2017-11-07

    申请号:US15363863

    申请日:2016-11-29

    Inventor: Axel Thomsen

    Abstract: A MEMS may include a backplate comprising first and second electrodes electrically isolated from one another and mechanically coupled to the backplate in a fixed relationship relative to the backplate, and a diaphragm configured to mechanically displace relative to the backplate as a function of sound pressure incident upon the diaphragm. The diaphragm may comprise third and fourth electrodes electrically isolated from one another and mechanically coupled to the diaphragm in a fixed relationship relative to the diaphragm such that the third and fourth electrodes mechanically displace relative to the backplate as the function of the sound pressure. The first and third electrodes may form a first capacitor, the second and fourth electrodes may form a second capacitor, and the first capacitor may be configured to sense a displacement of the diaphragm responsive to which the second capacitor may be configured to apply an electrostatic force to the diaphragm to return the diaphragm to an original position.

    MEMS microphone package
    146.
    发明授权

    公开(公告)号:US09807516B2

    公开(公告)日:2017-10-31

    申请号:US14832913

    申请日:2015-08-21

    Applicant: Chao Wang Bin Xu

    Inventor: Chao Wang Bin Xu

    Abstract: A micro-electro-mechanical system (MEMS) microphone package is provided in the present disclosure. The MEMS microphone package includes a circuit board, an electromagnetic shielding cover mounted on the circuit board to define an accommodating space, electronic components received in the accommodating space and electrically connected to the circuit board, and a shielding ring covering a joint between the electromagnetic shielding cover and the circuit board. The shielding ring is configured for preventing electromagnetic waves from entering the accommodating space via the joint between the electromagnetic shielding cover and the circuit board.

    Acoustic apparatus with side port
    150.
    发明授权

    公开(公告)号:US09800971B2

    公开(公告)日:2017-10-24

    申请号:US15064277

    申请日:2016-03-08

    Abstract: An apparatus includes a microphone and a gasket. The microphone includes a base having an inner surface and an outer surface. The inner surface is generally parallel with the outer surface. The base has a port extending from the outer surface to the inner surface. The microphone includes a micro electro mechanical system (MEMS) transducer coupled to the inner surface of the base over the port. The microphone has a cover coupled to the base and the cover encloses the MEMS transducer. The gasket is coupled to the outer surface of the base and forms a channel. The channel has a first end and a second end. The first end communicates with the port of the microphone, and the second end of the channel is generally aligned with an edge of the base.

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