公开(公告)号：US20120212731A1

公开(公告)日：2012-08-23

申请号：US13402207

申请日：2012-02-22

Applicant: Hans-Peter Loock ,  Helen Waechter

Inventor： Hans-Peter Loock ,  Helen Waechter

IPC: G01J3/42 ,  G01J3/45

CPC classification number: G01J3/42 ,  G01J3/427 ,  G01J3/433 ,  G01N21/7746 ,  G01N2021/7776 ,  G01N2021/7779 ,  G01N2021/7783

Abstract: Described are methods for multi-wavelength cavity ring-down spectroscopy; comprising simultaneously and continuously irradiating an optical cavity with light at two or more different wavelengths, each light being intensity-modulated at a different modulation frequency, detecting the light of two or more wavelengths after the light has travelled through the optical cavity; measuring an optical loss of each detected light; and determining a characteristic of the optical cavity from the optical loss of each detected light. Also described are apparatus and systems for multi-wavelength cavity ring-down spectroscopy.

Abstract translation: 描述了多波长腔体衰减光谱法的方法; 包括以两个或更多个不同波长的光同时且持续地照射光腔，每个光以不同的调制频率进行强度调制，在光已经穿过光腔之后检测两个或更多个波长的光; 测量每个检测到的光的光学损耗; 以及从每个检测到的光的光损失确定光腔的特性。 还描述了用于多波长腔体衰减光谱的装置和系统。

公开(公告)号：US08223339B1

公开(公告)日：2012-07-17

申请号：US12544071

申请日：2009-08-19

Applicant: Mark Fralick ,  Richard Waters

Inventor： Mark Fralick ,  Richard Waters

IPC: G01B9/02 ,  G01J3/45

CPC classification number: G01J3/4338 ,  G01J3/26 ,  G01J2003/1247 ,  G01J2003/2886

Abstract: A method for analyzing an optical signal comprising: directing the optical signal into a scanning spectrometer system comprising a variable-wavelength filter and a detector; continuously modulating the variable-wavelength filter at a given modulation frequency to produce a time-based waveform; measuring the time-based waveform with the detector; converting the time-based waveform into a frequency spectrum comprising harmonics of the modulation frequency; and comparing the harmonics of the modulation frequency to premeasured harmonic spectra in a reference database.

Abstract translation: 一种用于分析光信号的方法，包括：将光信号引导到包括可变波长滤波器和检测器的扫描光谱仪系统中; 以给定的调制频率连续调制可变波长滤波器以产生基于时间的波形; 用检测器测量基于时间的波形; 将基于时间的波形转换成包括调制频率的谐波的频谱; 并将参考数据库中调制频率的谐波与预测的谐波谱进行比较。

公开(公告)号：US08210690B2

公开(公告)日：2012-07-03

申请号：US12568074

申请日：2009-09-28

Applicant: Peter M. Gulvin ,  Lalit K. Mestha ,  Yao Rong Wang ,  Pinyen Lin

Inventor： Peter M. Gulvin ,  Lalit K. Mestha ,  Yao Rong Wang ,  Pinyen Lin

IPC: G03B21/14 ,  G03B21/60 ,  G02B5/22 ,  G01J3/45 ,  G01B9/02

CPC classification number: G02B26/001 ,  G02B3/0062 ,  G03B21/005 ,  G03B21/14 ,  G09G3/001 ,  G09G3/2018 ,  G09G3/3466

Abstract: A projection system includes a display apparatus comprising a plurality of tunable Fabry-Perot filters, each of the filters being configured for shifting between a state in which the filter transmits radiation in a bandwidth in the visible range of the electromagnetic spectrum and a state in which the filter transmits radiation in a bandwidth outside the visible range of the electromagnetic spectrum. An illuminator provides light to the plurality of Fabry-Perot filters. A control system receives image data and controls the display apparatus to project an image onto an associated display surface. The control system includes a modulator which provides wavelength modulation signals to the plurality of Fabry-Perot filters to modulate a color of pixels in the image and causes selected ones of the Fabry-Perot filters to shift into the bandwidth outside the visible range to modulate the brightness of pixels in the image.

Abstract translation: 投影系统包括：显示装置，包括多个可调的法布里 - 珀罗滤光器，每个滤光器被配置为在滤光器在电磁光谱的可见光范围内的带宽中透射辐射的状态和 滤波器在电磁光谱的可见范围之外的带宽内传输辐射。 照明器向多个法布里 - 珀罗滤光器提供光。 控制系统接收图像数据并控制显示装置将图像投影到相关联的显示表面上。 该控制系统包括调制器，该调制器向多个法布里 - 珀罗滤波器提供波长调制信号，以调制图像中的像素的颜色，并使选定的法布里 - 珀罗滤波器转移到可见光范围之外的带宽中，以调制 图像中像素的亮度。

公开(公告)号：US20120140236A1

公开(公告)日：2012-06-07

申请号：US13160207

申请日：2011-06-14

Applicant: William R. Babbitt ,  Zeb Barber ,  Calvin Harrington ,  Kristian D. Merkel ,  Krishna Mohan Rupavatharam ,  Charles W. Thiel

Inventor： William R. Babbitt ,  Zeb Barber ,  Calvin Harrington ,  Kristian D. Merkel ,  Krishna Mohan Rupavatharam ,  Charles W. Thiel

IPC: G01J3/45

CPC classification number: G01S3/46 ,  G01S3/043

Abstract: An apparatus includes a single or dual output port, dual-drive Mach-Zehnder Interferometer configured to generate a first optical signal in one path, and to generate a second optical signal in a different path. The apparatus also includes an optical spectrum analyzer configured to receive output from at least one port of the dual-drive Mach-Zehnder Interferometer. A method includes causing radio frequency signals from two different antennae to modulate an optical carrier at a corresponding drive of a dual-drive Mach-Zehnder Interferometer, and causing output from at least one port of the Mach-Zehnder Interferometer to be directed to an optical spectrum analyzer. The method further comprises determining arrival angle at each of a plurality of frequencies in the radio frequency signals based on output from the optical spectrum analyzer.

Abstract translation: 一种装置包括单输出端口或双输出端口，双驱动马赫 - 曾德干涉仪，其被配置为在一个路径中产生第一光信号，并在不同路径中产生第二光信号。 该装置还包括配置成从双驱动马赫 - 曾德干涉仪的至少一个端口接收输出的光谱分析仪。 一种方法包括使来自两个不同天线的射频信号在双驱动马赫 - 曾德干涉仪的相应驱动下调制光学载体，并且使来自马赫 - 曾德干涉仪的至少一个端口的输出被引导到光学 频谱分析仪 该方法还包括基于来自光谱分析仪的输出来确定射频信号中的多个频率中的每个频率处的到达角度。

公开(公告)号：US20120133948A1

公开(公告)日：2012-05-31

申请号：US13227758

申请日：2011-09-08

Applicant: Tatsuaki FUNAMOTO

Inventor： Tatsuaki FUNAMOTO

IPC: G01J3/45

CPC classification number: G01J3/0229 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/027 ,  G01J3/0291 ,  G01J3/10 ,  G01J3/26 ,  G01J3/32

Abstract: A spectrometer includes: a tungsten lamp which emits light with no peak wavelength within a wavelength range of visible light and having a light amount increasing as the wavelength becomes longer; a violet LED which emits light having a peak wavelength within the wavelength range of visible light; a light mixer which mixes light emitted from the tungsten lamp and the violet LED; an etalon which receives light mixed by the light mixer and transmits light contained in the received mixed light and having a particular wavelength; a light receiving unit which receives light transmitted by the etalon; and a measurement control unit which changes the wavelength of light that can pass through the etalon and measures spectral characteristics of the light having passed through the etalon based on the light received by the light receiving unit.

Abstract translation: 光谱仪包括：在可见光的波长范围内发射没有峰值波长的光并随着波长变长而光量增加的钨灯; 发出在可见光的波长范围内具有峰值波长的光的紫色LED; 将来自钨灯发出的光与紫色LED混合的光混合器; 接收由所述光混合器混合并发射包含在所述混合光中并具有特定波长的光的标准准则; 接收由标准具传输的光的光接收单元; 以及测量控制单元，其改变可以通过标准具的光的波长，并且基于由光接收单元接收的光来测量已经通过标准具的光的光谱特性。

公开(公告)号：US20120044479A1

公开(公告)日：2012-02-23

申请号：US13212231

申请日：2011-08-18

Applicant: John F. Roulston ,  Daniel Mandelik

Inventor： John F. Roulston ,  Daniel Mandelik

IPC: G01J3/45 ,  G01J3/00

CPC classification number: G01J3/108 ,  G01J3/42 ,  G01J3/433 ,  G01J3/4338 ,  G01J2003/4332 ,  G01N21/3581

Abstract: A terahertz spectrometer includes: a terahertz-wave emitter and a terahertz receiver elements. The terahertz wave generated by means of generating beat frequency corresponding to the difference between two rapidly tunable continuous wave lasers. Having a difference in time between the interrogating signal and the reference signal at the receiver end side, which corresponds to intermediate frequency (IF), not centered around the baseband, i.e. zero Hertz. The offset step size of the intermediate frequency from zero Hertz is linearly correlated to the position of the interrogated object position.

Abstract translation: 太赫兹光谱仪包括：太赫波发射器和太赫兹接收器元件。 通过产生对应于两个快速可调连续波激光器之间的差异的拍频产生的太赫兹波。 在询问信号和对应于中频（IF）的接收机端侧的参考信号之间的时间差不以基带为中心，即零赫兹。 中间频率从零赫兹的偏移步长与询问对象位置的位置线性相关。

公开(公告)号：US20110261363A1

公开(公告)日：2011-10-27

申请号：US13055898

申请日：2009-07-20

Applicant: Nathalie Picqué ,  Guy Guelachvili ,  Julien Mandon

Inventor： Nathalie Picqué ,  Guy Guelachvili ,  Julien Mandon

IPC: G01J3/45

CPC classification number: G01J3/453

Abstract: An embodiment relates to a Fourier transform spectrometer comprising: a coherent light source; an interferometer adapted to separate the coherent light source into two or more parts in order to generate through frequency or phase-induced effects, interferences between the two or more parts; detection means adapted to detect the interferences, wherein the coherent light source comprises a frequency comb generator having a frequency repetition rate, and the detection means are adapted to detect the beating of pairs of frequencies of the frequency comb separated by the frequency repetition rate or a multiple of the frequency repetition rate.

Abstract translation: 一个实施例涉及一种傅里叶变换光谱仪，包括：相干光源; 干涉仪，其适于将相干光源分离成两个或更多个部分，以便产生通过频率或相位诱导的效应，两个或更多个部分之间的干扰; 检测装置，其适于检测干扰，其中所述相干光源包括具有频率重复率的频率梳发生器，并且所述检测装置适于检测由频率重复率分离的频率梳对频率的跳动，或者 频率重复率的倍数。

公开(公告)号：US20110235046A1

公开(公告)日：2011-09-29

申请号：US13070024

申请日：2011-03-23

Applicant: Kazunori MARUYAMA ,  Shinya HASEGAWA ,  Akinori MIYAMOTO ,  Norihiko ITANI

Inventor： Kazunori MARUYAMA ,  Shinya HASEGAWA ,  Akinori MIYAMOTO ,  Norihiko ITANI

IPC: G01J3/45

CPC classification number: G02B21/14 ,  G02B21/0004

Abstract: An imaging apparatus includes an optical source configured to emit an electromagnetic wave, a wave dividing unit configured to divide the wave from the optical source into a first and a second wave beam, a probe optical source configured to emit a probe beam, a probe-beam dividing unit configured to divide the probe beam into a first and a second probe beam, a first crystal on which the first crystal is irradiated through an object and the first probe beam is incident, a second crystal on which the second crystal is irradiated through an object and the second probe beam is incident, an interference unit configured to allow the first probe beam from the first crystal to interfere with the second probe beam from the second crystal, and an image pickup device configured to capture an interference figure between the first and the second probe beam.

Abstract translation: 一种成像装置，包括：被配置为发射电磁波的光源;波分割部，被配置为将来自光源的波分成第一和第二波束;被配置为发射探测光束的探测光源; 光束分割单元，被配置为将探测光束分成第一和第二探测光束，第一晶体，其上通过物体照射第一晶体，并且第一探测光束入射;第二晶体，其上照射第二晶体的第二晶体 物体和第二探测光束入射;干涉单元，被配置为允许来自第一晶体的第一探测光束与来自第二晶体的第二探测光束干涉;以及图像拾取器件，被配置为捕获第一 和第二探测光束。

公开(公告)号：US20110235045A1

公开(公告)日：2011-09-29

申请号：US13123546

申请日：2009-10-12

Applicant: Klaus Koerner ,  Wolfgang Osten

Inventor： Klaus Koerner ,  Wolfgang Osten

IPC: G01J3/45

CPC classification number: G01B9/02004 ,  G01B9/02008 ,  G01B9/02036 ,  G01B9/02042 ,  G01B9/02057 ,  G01B9/02091 ,  G01B2210/50 ,  G01B2290/25 ,  G01B2290/30 ,  G02B21/0056

Abstract: A method and an arrangement are provided for scalable confocal interferometry for distance measurement, for 3-D detection of an object, for OC tomography with an object imaging interferometer and at least one light source. The interferometer has an optical path difference not equal to zero at each optically detected object element. Thus, the maxima of a sinusoidal frequency wavelet, associated with each detected object element, each have a frequency difference Δf_Objekt. At least one spectrally integrally detecting, rastered detector is arranged to record the object. The light source preferably has a frequency comb, and the frequency comb differences Δf_Quelle are changed in a predefined manner over time in a scan during measuring. In the process, the frequency differences Δf_Quelle are made equal to the frequency difference Δf_Objekt or equal to an integer multiple of the frequency differences Δf_Objekt at least once for each object element.

Abstract translation: 提供了一种用于距离测量的可缩放共焦干涉测量的方法和装置，用于物体的三维检测，用于物体成像干涉仪和至少一个光源的OC断层摄影。 干涉仪在每个光学检测的物体元件处具有不等于零的光程差。 因此，与每个检测到的对象元素相关联的正弦频率小波的最大值各自具有频率差Dgr; f_Objekt。 至少一个光谱整体检测，被检测器被配置成记录物体。 光源优选地具有频率梳，并且在测量期间的扫描中，频率梳差异和Dgr; f_Quelle以预定的方式随时间改变。 在此过程中，使频率差Dgr; f_Quelle等于频率差Dgr; f_Objekt或者等于每个对象元素至少一次的频率差Dgr; f_Objekt的整数倍。

公开(公告)号：US08009938B2

公开(公告)日：2011-08-30

申请号：US12040698

申请日：2008-02-29

Applicant: Matthew Fenton Davis ,  Lei Lian

Inventor： Matthew Fenton Davis ,  Lei Lian

IPC: G02B6/00 ,  G02B6/04 ,  C23F1/00 ,  G01J3/45 ,  C03B37/023

CPC classification number: H01L21/67253 ,  G01N21/73 ,  G02B6/04 ,  G02B6/40 ,  H01J37/32935 ,  H01J37/32972

Abstract: Embodiments described herein provide a method and apparatus for obtaining process information in a substrate manufacturing process using plasma. In one embodiment, a chamber is provided having one or more optical metrology modules that are positioned such that optical energy from the plasma process is detected at substantially orthogonal angles. Metrics derived from detected optical energy may be used for endpoint determination, substrate temperature, and monitoring of critical dimensions on the substrate.

Abstract translation: 本文描述的实施例提供了一种在使用等离子体的基板制造工艺中获得工艺信息的方法和装置。 在一个实施例中，提供具有一个或多个光学测量模块的腔室，其被定位成使得来自等离子体处理的光能以基本上正交的角度被检测。 从检测到的光能导出的指标可用于终点测定，基板温度和基板上临界尺寸的监测。