公开(公告)号：US07609386B2

公开(公告)日：2009-10-27

申请号：US12277032

申请日：2008-11-24

Applicant: Takaaki Hirata ,  Minoru Maeda

Inventor： Takaaki Hirata ,  Minoru Maeda

IPC: G01B11/02

CPC classification number: G01J4/04 ,  G01B9/02003 ,  G01B9/02004 ,  G01B9/02007 ,  G01B2290/45 ,  G01B2290/70 ,  G01J3/10 ,  G01J3/4338 ,  G01J3/453 ,  G01M11/0235 ,  G01M11/0292 ,  G01N21/21 ,  G02B27/283 ,  H04J14/0227 ,  H04J14/0246 ,  H04J14/0279 ,  H04J14/06

Abstract: An optical characteristic measuring apparatus includes: a light source section which sweeps wavelengths of a first input light and a second input light respectively, frequencies of the first and second input lights being different from each other and polarized states of the first and second input lights being perpendicular to each other, and outputs the first and second input light; an interference section which inputs one branched light of the first and second input lights to a measuring object, makes output light from the measuring object interfere with other branched light of the first and second input lights, and outputs a plurality of interference lights; a plurality of light receiving sections which are respectively provided for the interference lights, receives the interference lights respectively, and outputs signals in accordance with optical powers of the interference lights respectively; and a low-pass filter for filtering the outputted signals.

Abstract translation: 光学特性测量装置包括：分别扫描第一输入光和第二输入光的波长的光源部，第一和第二输入光的频率彼此不同，第一和第二输入光的偏振状态为 彼此垂直并输出第一和第二输入光; 将第一和第二输入光的一个分支光输入到测量对象的干涉部分，使得来自测量对象的输出光与第一和第二输入光的其他分支光干涉，并输出多个干涉光; 分别设置用于干涉光的多个光接收部分分别接收干涉光，并分别根据干涉光的光功率输出信号; 以及用于对输出信号进行滤波的低通滤波器。

公开(公告)号：US07538872B1

公开(公告)日：2009-05-26

申请号：US11498397

申请日：2006-08-02

Applicant: Eugene W. Butler ,  L. John Otten, III ,  Gavin R. G. Erry

Inventor： Eugene W. Butler ,  L. John Otten, III ,  Gavin R. G. Erry

IPC: G01J1/00 ,  G01J3/28 ,  G01J3/45 ,  G01N21/00 ,  G01B9/02

CPC classification number: G01J3/453 ,  G01B11/002 ,  G01J1/4257 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/027 ,  G01J3/2823 ,  G01J3/42

Abstract: Determining relationships between one laser beam and an object onto which such beam is directed including: directing such beam onto the object; collecting radiation from the beam that is reflected back; spectrally discriminating the collected, reflected radiation from other collected radiation; generating an image of the collected beam radiation; and analyzing this image to determine the value of at least one parameter selected from: the diameter of the beam on the object; the position of the beam on the object; and beam quality on the object. The determined value(s) may be used to adjust parameter(s) of the beam. Additional steps include directing a second beam onto the object and collecting, spectrally discriminating, generating an image and analyzing it to determine the value of at least one parameter related to the second beam. The forgoing may also include utilizing the determined second value to adjust parameter(s) of the second beam.

Abstract translation: 确定一个激光束和这样的光束被引导到的物体之间的关系包括：将这种光束引导到物体上; 收集反射回来的光束的辐射; 对来自其他收集辐射的收集的反射辐射进行光谱鉴别; 产生收集的束辐射的图像; 并分析该图像以确定选自以下的至少一个参数的值：物体上的光束的直径; 光束在物体上的位置; 和物体上的光束质量。 确定的值可以用于调整波束的参数。 附加步骤包括将第二光束引导到物体上并收集，光谱鉴别，生成图像并对其进行分析，以确定与第二光束相关的至少一个参数的值。 前述还可以包括利用确定的第二值来调整第二波束的参数。

公开(公告)号：US20090079991A1

公开(公告)日：2009-03-26

申请号：US12277032

申请日：2008-11-24

Applicant: Takaaki HIRATA ,  Minoru MAEDA

Inventor： Takaaki HIRATA ,  Minoru MAEDA

IPC: G01B9/02

CPC classification number: G01J4/04 ,  G01B9/02003 ,  G01B9/02004 ,  G01B9/02007 ,  G01B2290/45 ,  G01B2290/70 ,  G01J3/10 ,  G01J3/4338 ,  G01J3/453 ,  G01M11/0235 ,  G01M11/0292 ,  G01N21/21 ,  G02B27/283 ,  H04J14/0227 ,  H04J14/0246 ,  H04J14/0279 ,  H04J14/06

Abstract: An optical characteristic measuring apparatus includes: a light source section which sweeps wavelengths of a first input light and a second input light respectively, frequencies of the first and second input lights being different from each other and polarized states of the first and second input lights being perpendicular to each other, and outputs the first and second input light; an interference section which inputs one branched light of the first and second input lights to a measuring object, makes output light from the measuring object interfere with other branched light of the first and second input lights, and outputs a plurality of interference lights; a plurality of light receiving sections which are respectively provided for the interference lights, receives the interference lights respectively, and outputs signals in accordance with optical powers of the interference lights respectively; and a low-pass filter for filtering the outputted signals.

Abstract translation: 光学特性测量装置包括：分别扫描第一输入光和第二输入光的波长的光源部，第一和第二输入光的频率彼此不同，第一和第二输入光的偏振状态为 彼此垂直并输出第一和第二输入光; 将第一和第二输入光的一个分支光输入到测量对象的干涉部分，使得来自测量对象的输出光与第一和第二输入光的其他分支光干涉，并输出多个干涉光; 分别设置用于干涉光的多个光接收部分分别接收干涉光，并分别根据干涉光的光功率输出信号; 以及用于对输出信号进行滤波的低通滤波器。

公开(公告)号：US07492462B2

公开(公告)日：2009-02-17

申请号：US11332398

申请日：2006-01-17

Applicant: Manoj Haridas

Inventor： Manoj Haridas

IPC: G01B9/02 ,  G01J3/44 ,  G01N21/00

CPC classification number: G01J3/02 ,  G01J3/0218 ,  G01J3/0224 ,  G01J3/0229 ,  G01J3/0256 ,  G01J3/10 ,  G01J3/44 ,  G01J3/453 ,  G01J2003/1213 ,  G01N21/65

Abstract: A sensor containing a beam emitter that emits a first beam having laser, a beam-splitting interferometer and an array detector, wherein the first beam is to strike a sample that produces a second beam comprising a Raman signal, the beam-splitting interferometer is to create a phase delay in the second beam, and the array detector comprises a plurality of detectors is disclosed. The sensor could be used for spectroscopic detection of a sample by generating a first beam comprising laser, striking the first beam to a sample to produce a second beam comprising a Raman signal, creating a phase delay in the second beam and detecting the Raman signal of the second beam. The uses of the sensor include detection of biological and chemical warfare agents, narcotics, among others for homeland security.

Abstract translation: 一种传感器，其包含发射具有激光器的第一光束的射束发射器，分束干涉仪和阵列检测器，其中所述第一光束将对产生包括拉曼信号的第二光束的样品进行击穿，所述光束分裂干涉仪为 在第二光束中产生相位延迟，并且阵列检测器包括多个检测器。 该传感器可以用于对样品进行光谱检测，该方法是通过产生包括激光的第一光束，将第一光束撞击到样品以产生包含拉曼信号的第二光束，从而在第二光束中产生相位延迟并检测第二光束的拉曼信号 第二束。 传感器的使用包括检测生物和化学战剂，麻醉剂等，以便国土安全。

公开(公告)号：US20080294032A1

公开(公告)日：2008-11-27

申请号：US10573242

申请日：2004-09-23

Applicant: Richard Levenson ,  Paul J. Cronin ,  Kirk William Gossage ,  Clifford C. Hoyt

Inventor： Richard Levenson ,  Paul J. Cronin ,  Kirk William Gossage ,  Clifford C. Hoyt

IPC: A61B6/00

CPC classification number: G01N33/5091 ,  A61B5/0059 ,  A61B2562/0242 ,  B82Y5/00 ,  B82Y10/00 ,  G01J3/32 ,  G01J3/4406 ,  G01J3/453 ,  G01N21/6428 ,  G01N21/6456

Abstract: The invention features a method including: (i) providing spectrally resolved information about light coming from different spatial locations in a sample comprising deep tissue in response to an illumination of the sample, wherein the light includes contributions from different components in the sample; (ii) decomposing the spectrally resolved information for each of at least some of the different spatial locations into contributions from spectral estimates associated with at least some of the components in the sample; and (iii) constructing a deep tissue image of the sample based on the decomposition to preferentially show a selected one of the components.

Abstract translation: 本发明的特征在于一种方法，包括：（i）响应于样品的照明，提供关于来自包含深层组织的样品中的不同空间位置的光的光谱解析信息，其中所述光包括来自样品中不同组分的贡献; （ii）将所述不同空间位置中的至少一些中的每一个的所述光谱解析信息分解为与所述样本中的至少一些组件相关联的频谱估计的贡献; 和（iii）基于分解构建样品的深层组织图像，以优先显示所选择的组分之一。

公开(公告)号：US20080204759A1

公开(公告)日：2008-08-28

申请号：US11678135

申请日：2007-02-23

Applicant: Han-Sun Choi

Inventor： Han-Sun Choi

IPC: G01B9/02 ,  G01B11/02

CPC classification number: G01B9/0209 ,  E21B47/123 ,  G01B9/02044 ,  G01B9/02083 ,  G01B2290/25 ,  G01J3/453

Abstract: A method for demodulating signals from a dispersive, white light interferometer includes generating test interferometry spectra from an interferometer forming part of a sensor for various values of interferometer sensor optical path length. The various test spectra are correlated to a measured spectrum from the sensor to generate a correlation function. The sensor optical path length resulting in the correlation function value reaching a maximum is selected as the optical path length

Abstract translation: 用于解调来自色散白光干涉仪的信号的方法包括从形成干涉仪传感器光路长度的各种值的传感器的一部分的干涉仪产生测试干涉光谱。 各种测试光谱与来自传感器的测量光谱相关，以产生相关函数。 导致相关函数值达到最大的传感器光路长度被选择为光路长度

公开(公告)号：US07385693B2

公开(公告)日：2008-06-10

申请号：US11153361

申请日：2005-06-16

Applicant: Mitsuru Namiki

Inventor： Mitsuru Namiki

IPC: G01J3/28

CPC classification number: G01J3/2889 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/453 ,  G02B21/16

Abstract: A microscope apparatus includes a microscope, and a time-resolved spectroscopy unit, a first light-guiding unit for guiding light from the speetroscopy unit into the microscope, a second light-guiding unit for guiding the light from the microscope into the spectroscopy unit. The microscope includes an illuminating optical system and an observing optical system. The time-resolved spectroscopy unit includes an ultrashort optical pulse source, a beam splitter for splitting the ultrashort optical pulse into a reference beam and another beam, an optical system for generating a pump beam and a probe beam from the beam other than the reference beam, and an imaging device for time-resolved spectroscopy for capturing an interference pattern formed by the light guided by the second light-guiding unit and the reference beam. A two-dimensional lightwave conversion optical system is interposed between the second light-guiding unit and the imaging device.

Abstract translation: 显微镜装置包括显微镜和时间分辨光谱单元，用于将来自光刻单元的光引导到显微镜中的第一导光单元，用于将来自显微镜的光引导到光谱单元中的第二导光单元。 显微镜包括照明光学系统和观察光学系统。 时间分辨光谱单元包括超短光脉冲源，用于将超短光脉冲分裂成参考光束的分束器和另一光束，用于从除了参考光束之外的光束产生泵浦光束和探测光束的光学系统 以及用于捕获由第二导光单元和参考光束引导的光形成的干涉图案的用于时间分辨光谱的成像装置。 二维光波转换光学系统介于第二导光单元和成像装置之间。

公开(公告)号：US20070165216A1

公开(公告)日：2007-07-19

申请号：US11332264

申请日：2006-01-17

Applicant: Manoj Haridas

Inventor： Manoj Haridas

IPC: G01J3/44 ,  G01N21/65 ,  G01B9/02 ,  G01J3/45

CPC classification number: G01N21/65 ,  G01J3/44 ,  G01J3/453 ,  G01N21/658

Abstract: A sensor having a beam emitter that emits a first beam comprising laser, a spectrometer and an array detector, wherein the first beam is to strike a fluid that produces a second beam comprising a Raman signal and the array detector comprises a plurality of detectors, further wherein the sensor is capable of detecting the presence or absence of the fluid in a given space without contacting the fluid is disclosed. The sensor could be used for spectroscopic detection of a fluid by generating a first beam comprising laser, striking the first beam to the fluid to produce a second beam having a Raman signal, passing the second beam through a spectrometer and analyzing the Raman signal of the second beam to the detect the presence or absence of the fluid. The uses of the sensor include detecting of fuel in a pipeline during midair refueling.

Abstract translation: 一种传感器，其具有发射包括激光的第一光束，光谱仪和阵列检测器的射束发射器，其中第一光束将产生产生包括拉曼信号的第二光束的流体，并且阵列检测器包括多个检测器， 其中所述传感器能够检测在给定空间中流体的存在或不存在而不接触流体。 传感器可以用于通过产生包括激光的第一光束来对流体进行光谱检测，将第一光束撞击到流体以产生具有拉曼信号的第二光束，使第二光束通过光谱仪并分析其中的拉曼信号 第二束以检测流体的存在或不存在。 传感器的用途包括在空中加油期间检测管道中的燃料。

公开(公告)号：US07236250B2

公开(公告)日：2007-06-26

申请号：US10968331

申请日：2004-10-20

Applicant: Toshiaki Iwai ,  Katsuhiro Ishii

Inventor： Toshiaki Iwai ,  Katsuhiro Ishii

IPC: G01B9/02

CPC classification number: G01J3/4412 ,  G01J3/453 ,  G01N15/0211 ,  G01N2015/0222

Abstract: A dynamic light scattering measurement apparatus using a phase modulation type interference method includes an optical coupler for dividing light from a low coherent light source, a converging lens for irradiating one of the divided lights to a sample 9, phase modulators for modulating the phase of the other divided lights, a spectrum measurement means for measuring a spectrum of the interference light of the phase-modulated reference light and the scattered light outgoing from the sample, and an analyzing means for measuring the dynamic light scattering of particles of the sample based on the first order spectrum corresponding to the basic frequency of the phase-modulating signal or a higher order spectrum corresponding to a frequency equal to two, three or the like times the basic frequency appearing in the interference light spectrum measured by the spectrum measurement means. An amount s/L obtained by normalizing the light path length s within the sample by the mean free path L of the particles is set to be not more than 3. Dynamic properties of a high concentration medium can be measured with high precision based on the scattered light from such medium.

Abstract translation: 使用相位调制型干涉法的动态光散射测量装置包括用于分离来自低相干光源的光的光耦合器，用于将划分的光之一照射到样品9的会聚透镜，用于调制相位调制 其他分光，用于测量相位调制参考光的干涉光的光谱和从样本出射的散射光的光谱测量装置，以及用于基于样品的粒子测量动态光散射的分析装置 对应于相位调制信号的基本频率的第一阶频谱或与由频谱测量装置测量的干涉光谱中出现的基本频率等于二，三次等的频率相对应的较高阶频谱。 通过将样品中的光路长度s通过颗粒的平均自由程L标准化而获得的量s / L被设定为不大于3.可以基于以下方式高精度地测量高浓度介质的动态特性 这种介质的散射光。

公开(公告)号：US20060164649A1

公开(公告)日：2006-07-27

申请号：US11227720

申请日：2005-09-15

Applicant: Eliezer Rosengaus

Inventor： Eliezer Rosengaus

IPC: G01B9/02

CPC classification number: G01J3/453 ,  G01J3/02 ,  G01J3/0224 ,  G01J3/2823 ,  G01N21/211 ,  G01N21/9501 ,  G01N2021/213

Abstract: A method and apparatus for improved defocus detection on wafers. The use of hyperspectral imaging provides increased sensitivity for local defocus defects, and the use of Fourier Space analysis provides increased sensitivity for extended defocus defects. A combination of the two provides improved overall sensitivity to local and extended defocus defects.

Abstract translation: 一种用于改善晶片上散焦检测的方法和装置。 使用高光谱成像可以提高局部散焦缺陷的灵敏度，并且使用傅立叶空间分析可以提供延长散焦缺陷的灵敏度。 两者的组合提供了对局部和扩展的散焦缺陷的总体灵敏度的改善。