公开(公告)号：US20140218733A1

公开(公告)日：2014-08-07

申请号：US14236826

申请日：2012-08-03

Applicant: Vitaly Mikhailov ,  Paul S Westbrook

Inventor： Vitaly Mikhailov ,  Paul S Westbrook

IPC: G01J4/04

CPC classification number: G01J4/04 ,  G01J1/0425 ,  G01M11/337 ,  G01M11/35 ,  G02B6/02076 ,  G02B6/024

Abstract: An in-line polarization extinction ratio (PER) monitor that generates a value of an optical signal's PER from a single measurement, without requiring the optical transmission signal path of the system to be directly coupled into a separate measurement device. The polarization extinction ratio may be defined as: 10 log(PEx/PEy), where PEx is the power of the optical signal propagating along the “x axis” and PEy is the power propagating along the orthogonal “y axis” (with the z-axis defined as a longitudinal optical axis of the system and the x-y plane orthogonal to this direction of propagation). The PER monitor comprises a section of optical fiber (preferably birefringent or with induced birefringency), with a pair of gratings formed along the fiber and oriented to out-couple orthogonal components of the propagating signal. Photodetectors are used to convert the scattered light into electrical signal equivalents and then processed to yield the PER value. By properly aligning the axes of the monitor and the optical system, the two measurements are sufficient to provide a one-shot, real-time calculation of the PER of the optical signal propagating through the system.

Abstract translation: 线性偏振消光比（PER）监视器，其从单个测量产生光信号的PER值，而不需要将系统的光传输信号路径直接耦合到单独的测量装置中。 偏振消光比可以定义为：10 log（PEx / PEy），其中PEx是沿着“x轴”传播的光信号的功率，PEy是沿着正交“y轴”传播的功率（z 轴被定义为系统的纵向光轴和与该传播方向正交的xy平面）。 PER监测器包括一段光纤（优选双折射或具有诱导双折射），一对光栅沿着光纤形成并且定向成输出传播信号的正交分量。 光检测器用于将散射光转换为电信号等效物，然后进行处理以产生PER值。 通过适当地对准监视器和光学系统的轴，这两个测量足以提供通过系统传播的光信号的PER的单次实时计算。

公开(公告)号：US20140152988A1

公开(公告)日：2014-06-05

申请号：US13784947

申请日：2013-03-05

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： CHIH-SHANG LIU ,  FU-CHENG YANG

IPC: G01B9/00

CPC classification number: G01B9/00 ,  A61B3/10 ,  A61B5/14532 ,  A61B5/14558 ,  A61B5/6821 ,  G01J4/04 ,  G01N21/21

Abstract: A system for measuring the rotation angle of optical active substances has a light source, a polarization generation unit; a polarization analyzing unit; a signal generating unit, respectively and electrically coupled to the polarization generation unit and the polarization analyzing unit; a signal processing unit, electrically coupled to the electric signal generating unit; wherein the light source is enabled to emit a beam toward the polarization generation unit for enabling the beam to be polarized into an incident polarized beam while being projected and traveled in an optical path passing through an optical active substance so as to be converted into a emerging beam; and the polarization analyzing unit is positioned to receive and analyze the emerging beam so as to generate a signal to be received and processed by the signal processing unit.

Abstract translation: 用于测量光学活性物质的旋转角度的系统具有光源，极化发生单元; 极化分析单元; 信号产生单元，分别电耦合到偏振产生单元和偏振分析单元; 信号处理单元，电耦合到所述电信号产生单元; 其中所述光源能够向所述偏振产生单元发射光束，用于使所述光束能够在通过光学活性物质的光路中被投射和行进时被偏振成入射偏振光束，以便被转换为新兴的 光束; 并且偏振分析单元被定位成接收和分析出射的光束，以便产生要由信号处理单元接收和处理的信号。

公开(公告)号：US08679708B2

公开(公告)日：2014-03-25

申请号：US13659236

申请日：2012-10-24

Applicant: International Business Machines Corporation

Inventor： Timothy A. Brunner ,  Gregory R. McIntyre

IPC: G03F7/00 ,  G01J4/00

CPC classification number: G06F17/50 ,  G01J4/04 ,  G03F1/44 ,  G03F7/70466 ,  G03F7/70566

Abstract: This invention relates to the manufacture of semiconductor substrates such as wafers and to a method for monitoring the state of polarization incident on a photomask in projection printing using a specially designed polarization monitoring reticle for high numerical aperture lithographic scanners. The reticle measures 25 locations across the slit and is designed for numerical apertures above 0.85. The monitors provide a large polarization dependent signal which is more sensitive to polarization. A double exposure method is also provided using two reticles where the first reticle contains the polarization monitors, clear field reference regions and low dose alignment marks. The second reticle contains the standard alignment marks and labels. For a single exposure method, a tri-PSF low dose alignment mark is used. The reticles also provide for electromagnetic bias wherein each edge is biased depending on that edge's etch depth.

Abstract translation: 本发明涉及诸如晶片的半导体衬底的制造以及用于在使用专门设计的用于高数值孔径光刻扫描仪的偏振监测掩模版的投影印刷中监视入射到光掩模上的偏振状态的方法。 标线测量穿过狭缝的25个位置，并设计为高于0.85的数值孔径。 监视器提供对极化更敏感的大偏振相关信号。 使用两个掩模版也提供双曝光方法，其中第一掩模版包含偏振监视器，清晰的场参考区域和低剂量对准标记。 第二个掩模版包含标准对准标记和标签。 对于单次曝光方法，使用三PSF低剂量对准标记。 标线还提供电磁偏压，其中每个边缘根据该边缘的蚀刻深度而偏置。

公开(公告)号：US20140027644A1

公开(公告)日：2014-01-30

申请号：US13815487

申请日：2013-03-07

Applicant: Craig M. Herzinger ,  Mathias M. Schubert ,  Tino Hofmann ,  Martin M. Liphardt ,  John A. Woollam

Inventor： Craig M. Herzinger ,  Mathias M. Schubert ,  Tino Hofmann ,  Martin M. Liphardt ,  John A. Woollam

IPC: G01J4/04

CPC classification number: G01J4/04 ,  G01J5/20 ,  G01J5/42 ,  G01N21/211 ,  G01N21/3581 ,  G01N2021/3595 ,  G01N2201/06113

Abstract: The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including: a source such as a backward wave oscillator; a Smith-Purcell cell; a free electron laser, or an FTIR source and a solid state device; and a detector such as a Golay cell; a bolometer or a solid state detector; and preferably including a polarization state generator comprising: an odd bounce image rotating system and a polarizer, or two polarizers; and optionally including least one compensator and/or modulator, in addition to an analyzer.

Abstract translation: 本发明涉及椭偏仪和偏振计系统，更具体地说，涉及在300GHz以下的频率范围内并延伸至高于至少1Tera-Hz（THz）的椭偏仪或偏振计等。 通过红外（IR）范围，高达100THz，包括：诸如反向波振荡器的源; 史密斯 - 珀塞尔细胞; 自由电子激光器或FTIR源和固态器件; 和诸如Golay细胞的检测器; 测辐射热计或固态检测器; 并且优选地包括偏振态发生器，其包括：奇数反弹图像旋转系统和偏振器，或两个偏振器; 以及可选地包括至少一个补偿器和/或调制器。

公开(公告)号：US08576405B2

公开(公告)日：2013-11-05

申请号：US13120211

申请日：2009-09-23

Applicant: Doron Goldberg ,  Zeev Weissman ,  Yaniv Yacov

Inventor： Doron Goldberg ,  Zeev Weissman ,  Yaniv Yacov

IPC: G01N21/21

CPC classification number: G01J4/04

Abstract: A polarimeter based on coherent detection and a method for measuring the optical rotation of a polarized light beam by an optically active substance, while enabling the subtraction of background signals, are provided.

Abstract translation: 提供了一种基于相干检测的偏振计和用于通过光学活性物质测量偏振光束的旋转旋转的方法，同时能够减去背景信号。

公开(公告)号：US08525970B2

公开(公告)日：2013-09-03

申请号：US12784355

申请日：2010-05-20

Applicant: Xiaojin Zhao ,  Amine Bermak ,  Vladimir Grigorievich Chigrinov

Inventor： Xiaojin Zhao ,  Amine Bermak ,  Vladimir Grigorievich Chigrinov

IPC: G02F1/13

CPC classification number: G01J4/04 ,  G02F1/133753

Abstract: A micropolarimeter is described for simultaneously extracting all Stokes parameters from incident light. The micropolarimeter includes at least one superpixel, which further includes three or more subpixels, each exact a different polarization components from the incident light. The micropolarimeter includes a first and second alignment layers and a liquid crystal layer disposed between the first and second alignment layers. The liquid crystal molecules of the liquid crystal layer are aligned in accordance with the first and second alignment layers to form the superpixel. A method is provided for manufacturing the photo-aligned liquid-crystal micropolarimeter array.

Abstract translation: 描述了一种用于从入射光中提取所有斯托克斯参数的微量计。 所述微偏振计包括至少一个超像素，其还包括三个或更多个子像素，每个子像素精确地与入射光不同的偏振分量。 该微波偏振器包括第一和第二对准层和设置在第一和第二对准层之间的液晶层。 液晶层的液晶分子根据第一和第二取向层排列，形成超像素。 提供了一种用于制造光取向液晶微偏振计阵列的方法。

公开(公告)号：US20130026368A1

公开(公告)日：2013-01-31

申请号：US13506848

申请日：2012-05-21

Applicant: Craig M. Herzinger

Inventor： Craig M. Herzinger

IPC: G01J4/04 ,  G01J5/10

CPC classification number: G01J4/04 ,  G01J5/20 ,  G01J5/42 ,  G01N21/211 ,  G01N21/3581 ,  G01N2021/3595

Abstract: A terahertz ellipsometer, the basic preferred embodiment being a sequential system having a backward wave oscillator (BWO); a first rotatable polarizer that includes a wire grid (WGP1); a rotating polarizer that includes a wire grid (RWGP); a stage (STG) for supporting a sample (S); a rotating retarder (RRET) comprising first (RP), second (RM1), third (RM2) and fourth (RM3) elements; a second rotatable polarizer that includes a wire grid (WGP2); and a Golay cell detector (DET).

公开(公告)号：US08269169B1

公开(公告)日：2012-09-18

申请号：US12764524

申请日：2010-04-21

Applicant: Steven W. Sinton ,  Carey L. Cates

Inventor： Steven W. Sinton ,  Carey L. Cates

IPC: G01J5/00

CPC classification number: G01J4/04

Abstract: A polarimetric sensor includes a substrate and a plurality of aligned nanotube film patches arranged on the substrate. Each of the plurality of aligned nanotube film patches is oriented on the substrate to sense a different orientational component of electromagnetic radiation. For each of the plurality of aligned nanotube film patches, at least two contacts are arranged in electrical communication with the respective aligned nanotube film patch. The at least two electrodes are configured to conduct to an external circuit an electric signal generated in the respective aligned nanotube film patch when exposed to a respective orientational component of electromagnetic radiation.

Abstract translation: 偏振传感器包括衬底和布置在衬底上的多个排列的纳米管膜片。 多个排列的纳米管膜贴片中的每一个在基板上取向以感测电磁辐射的不同取向分量。 对于多个排列的纳米管膜贴片中的每一个，至少两个触点被布置成与相应的排列的纳米管膜贴片电连通。 至少两个电极被配置为当暴露于电磁辐射的相应取向分量时，在外部电路中传导在各自取向的纳米管薄膜贴片中产生的电信号。

公开(公告)号：US20120182551A1

公开(公告)日：2012-07-19

申请号：US13149208

申请日：2011-05-31

Applicant: Yu-Lung Lo ,  Ren-Young Liu ,  Chih-Chung Yen ,  Yi-Fan Chung

Inventor： Yu-Lung Lo ,  Ren-Young Liu ,  Chih-Chung Yen ,  Yi-Fan Chung

IPC: G01J4/00 ,  G02F1/01 ,  G02B27/28

CPC classification number: G01J4/00 ,  G01C19/72 ,  G01J4/04 ,  G02B6/2793

Abstract: This invention revealed and demonstrated a method of measuring and deriving a Jones Matrix of a fiber or fiber component, and to compensate the fiber or fiber component such that the fiber or fiber component plus the compensated optical circuit act as if an Unitary Matrix free space condition. In this way, all compensated fibers or fiber components act the same no matter what their original conditions are. It greatly enhances the fiber or fiber component repeatability and stability throughout the fiber or fiber component production line. The compensated circuit for Unitary Matrix can be applied externally or internally.For the external approach, for example, compensators such as variable retarder and half-wave plate may be added, or equivalently polarization controllers may be employed. For the internal approach, no component is added, and the compensation is realized through fiber bending, twisting or other means at either or both ends of a fiber or fiber component.The disclosed free space single-mode fiber invention not only greatly enhances repeatability in the fiber and fiber component production line, it also can be employed to accelerate the design simulation for optical circuit optimization of optical fiber sensors employed fiber and fiber coil such as fiber optic gyros.

Abstract translation: 本发明揭示并演示了一种测量和导出光纤或光纤部件的琼斯矩阵的方法，并且补偿光纤或光纤部件，使得光纤或光纤部件加上经补偿的光电路起到如同单一矩阵自由空间条件 。 以这种方式，所有补偿的纤维或纤维组分的作用相同，无论其原始条件如何。 它大大提高纤维或纤维组分生产线上纤维或纤维组分的重复性和稳定性。 单位矩阵的补偿电路可以在外部或内部应用。 对于外部方法，例如，可以添加诸如可变延迟器和半波片的补偿器，或者可以采用等效的偏振控制器。 对于内部方法，不添加组件，并且通过纤维或纤维组件的两端或两端的纤维弯曲，扭曲或其它方式实现补偿。 所公开的自由空间单模光纤发明不仅大大提高了光纤和光纤部件生产线的重复性，还可用于加速光纤传感器的光电路优化设计仿真，采用光纤和光纤线圈如光纤 陀螺仪。

公开(公告)号：US20120175496A1

公开(公告)日：2012-07-12

申请号：US13421530

申请日：2012-03-15

Applicant: Shlomo VOROVITCHIK

Inventor： Shlomo VOROVITCHIK

IPC: G01C21/02

CPC classification number: G01J4/04 ,  G01C17/34 ,  G01C21/02 ,  G01J2004/005

Abstract: An apparatus and system for use in determining location of a celestial body are presented. The apparatus comprises: a polarizer comprising an array of polarized light filter cells and a light sensor array. The array of polarized light filter cells comprises at least a first polarization direction and a second polarization direction different from said first polarization direction. And the polarizer thereby produces polarized light of at least first and second different polarizations. The light sensor array is configured to receive the polarized light from the polarizer and produce data indicative of a pattern of at least one of light polarization intensity and direction. The pattern is indicative of at least one of azimuth and elevation of the celestial body to be located.

Abstract translation: 提出了一种用于确定天体位置的装置和系统。 该装置包括：偏振器，包括偏振光滤波器单元阵列和光传感器阵列。 偏振光滤波器单元的阵列至少包括与所述第一偏振方向不同的第一偏振方向和第二偏振方向。 并且偏振器由此产生至少第一和第二不同偏振的偏振光。 光传感器阵列被配置为接收来自偏振器的偏振光，并且产生指示光偏振强度和方向中的至少一个的图案的数据。 该图案表示要定位的天体的方位角和仰角中的至少一个。