APPARATUS AND METHOD FOR MEASURING FILM THICKNESS
    171.
    发明申请
    APPARATUS AND METHOD FOR MEASURING FILM THICKNESS 有权
    测量薄膜厚度的装置和方法

    公开(公告)号:US20080266550A1

    公开(公告)日:2008-10-30

    申请号:US12108235

    申请日:2008-04-23

    CPC classification number: G01N21/8422 G01B11/0625 G01N21/31

    Abstract: A film thickness measuring apparatus of the present invention includes: a light source that emits white light to be irradiated onto a multilayer thin film; a spectroscope that disperses reflected light obtained as a result of irradiating the white light onto the multilayer thin film in order to obtain reflectance spectrums; and a computation section, said computation section including: a setting section that sets a plurality of wavelength ranges for the reflectance spectrums; a first conversion section that obtains wavenumber range reflectance spectrums by re-sequencing, among the reflectance spectrums, reflectance spectrums in the plurality of wavelength ranges set in said setting section at equal intervals, respectively; a second conversion section that converts the wavenumber range reflectance spectrums in the plurality of wavelength ranges obtained in said first conversion section into power spectrums, respectively; and a calculation section that obtains a film thickness of the multilayer thin film based on the power spectrums.

    Abstract translation: 本发明的膜厚测量装置包括:发射白光以照射到多层薄膜上的光源; 将由于将白光照射而得到的反射光分散到多层薄膜上以获得反射光谱的分光镜; 和计算部分,所述计算部分包括:设置部分,其设置所述反射光谱的多个波长范围; 第一转换部分,通过重新排列在反射光谱中分别以等间隔设置在所述设置部分中的多个波长范围内的反射光谱,获得波数范围反射光谱; 第二转换部分,其将在所述第一转换部分中获得的多个波长范围内的波数范围反射光谱分别转换成功率谱; 以及基于功率谱获得多层薄膜的膜厚的计算部。

    Inspection Device
    172.
    发明申请
    Inspection Device 有权
    检验装置

    公开(公告)号:US20080259314A1

    公开(公告)日:2008-10-23

    申请号:US10597632

    申请日:2005-02-03

    Applicant: Hideaki Kamijo

    Inventor: Hideaki Kamijo

    CPC classification number: G07D7/12 G01N21/35 G01N21/3563 G01N21/64 G07D7/121

    Abstract: An inspection device includes a light source emitting ultraviolet light onto a banknote conveyed on a conveyance path, a light source emitting infrared light onto the banknote, a photosensor for detecting light from the banknote, a light source control processing portion for controlling the light sources while individually switching the light sources at high speed, and a discrimination processing portion. The discrimination processing portion first imports each of two detection signals (output signals) from the photosensor, which are obtained by detecting light substantially within an identical period of time when the banknote is illuminated with the light through sequential lighting of the light sources and calculates an output ratio of the photosensor. Then the calculated output ratio of the photosensor is compared and collated with reference data preliminarily stored in a memory determining authenticity and denomination of the banknote.

    Abstract translation: 检查装置包括:向输送路径上输送的纸币上发出紫外线的光源,将红外光发射到纸币上的光源,用于检测来自纸币的光的光传感器,用于控制光源的光源控制处理部, 高速地单独切换光源,以及判别处理部。 鉴别处理部分首先从光电传感器输入两个检测信号(输出信号)中的每一个,这些检测信号是通过基于在通过光源的顺序点亮利用光照射钞票的同一时间段内的大部分时间来检测光而获得的, 光传感器的输出比。 然后将光电传感器的计算输出比率与预先存储在确定纸币的真实性和面额的存储器的存储器中的参考数据进行比较并整理。

    Light-mediated micro-chemical reactors
    174.
    发明授权
    Light-mediated micro-chemical reactors 有权
    光介导微量化学反应堆

    公开(公告)号:US07435391B2

    公开(公告)日:2008-10-14

    申请号:US10444578

    申请日:2003-05-23

    Abstract: A chemical reactor includes two substrates that are joined along a surface and a chemical reaction chamber formed between the substrates. The chemical reaction chamber has a hollow interior and one or more light reflectors located along walls of the hollow interior. The chemical reaction chamber has one or more inputs to transport fluid into the hollow interior and an output to transport fluid out of the hollow interior. The one or more light reflectors cause light rays to make multiple crossings of the hollow interior as a result of reflections off the one or more reflectors.

    Abstract translation: 化学反应器包括沿表面连接的两个基板和形成在基板之间的化学反应室。 化学反应室具有中空的内部和沿着中空内部的壁定位的一个或多个光反射器。 化学反应室具有一个或多个输入,用于将流体输送到中空内部,以及将流体输送出中空内部的输出。 由于一个或多个反射器的反射,一个或多个光反射器引起光线使中空内部的多个交叉。

    Thin-Layer Porous Optical Sensors for Gases and Other Fluids
    175.
    发明申请
    Thin-Layer Porous Optical Sensors for Gases and Other Fluids 有权
    用于气体和其他流体的薄层多孔光学传感器

    公开(公告)号:US20080231849A1

    公开(公告)日:2008-09-25

    申请号:US10581407

    申请日:2004-12-23

    CPC classification number: G01N21/45 G01N21/55

    Abstract: A gas sensor uses optical interferents in a porous thin film cell to measure the refractive index of the pore medium. As the medium within the pores changes, spectral variations can be detected. For example, as the pores are filled with a solution, the characteristic peaks exhibit a spectral shift in one direction. Conversely, when tiny amounts of gas are produced, the peaks shift in the opposite direction. This can be used to measure gas evolution, humidity and for applications for other interferometric-based sensing devices.

    Abstract translation: 气体传感器在多孔薄膜电池中使用光学干涉仪来测量孔隙介质的折射率。 随着孔内的介质变化,可以检测到光谱变化。 例如,当孔被填充溶液时,特征峰在一个方向上表现出光谱偏移。 相反,当产生微量的气体时,峰在相反方向上移动。 这可以用于测量气体演变,湿度和其他基于干涉测量的感测装置的应用。

    Optical Measurement Apparatus and Method
    176.
    发明申请
    Optical Measurement Apparatus and Method 失效
    光学测量装置及方法

    公开(公告)号:US20080225267A1

    公开(公告)日:2008-09-18

    申请号:US12061624

    申请日:2008-04-02

    CPC classification number: G01N21/1717

    Abstract: An optical measurement apparatus and method a method for performing modulation spectroscopy measurement of a sample comprising: delivering an incident probe beam to a sample at a known spot; modulating reflectance of the probe beam with a pump beam which periodically forms a pump beam spot on the sample coincident with the probe beam spot; and monitoring a reflected probe beam with a detector: wherein the incident probe and pump beams are collinear; and wherein the incident beams are directed to be collinear by reflecting a beam from a facet of an optical waveguide transmitting the other beam.

    Abstract translation: 一种光学测量装置和方法,用于对样品进行调制光谱测量的方法,包括:将已知点的入射探测光束传送到样品; 用泵浦光束调制探测光束的反射率,周期性地在样品上形成与探头光束斑点重合的泵浦光斑; 以及用检测器监测反射的探测光束;其中入射探测器和泵浦光束是共线的; 并且其中入射光束通过反射来自传输另一光束的光波导的小平面的光束而被引导为共线。

    Attenuated total reflection probe and spectrometer therewith
    177.
    发明申请
    Attenuated total reflection probe and spectrometer therewith 有权
    衰减全反射探头和光谱仪

    公开(公告)号:US20080218734A1

    公开(公告)日:2008-09-11

    申请号:US12073532

    申请日:2008-03-06

    CPC classification number: G01N21/552 G01N21/33

    Abstract: An attenuated total reflection probe has a prism and a supporter. The prism is made of an optical material which transmits light in far ultraviolet region, and has a contact plane to be in contact with a sample, and an incoming plane and an outgoing plane both not to be in contact with the sample. The supporter has an opening and is connected hermetically with the prism around the opening and eventually exposes the contact plane facing the opening. The contact plane, the incoming plane and the outgoing plane of the prism are formed such that light transmitting the incoming plane enters the contact plane at an incident angle larger than critical angle and that the light totally reflected by the contact plane goes out through the outgoing plane.

    Abstract translation: 衰减的全反射探头具有棱镜和支撑。 棱镜由透射远紫外区域的光并且具有与样品接触的接触面以及不与样品接触的入射面和出射面的光学材料制成。 支撑件具有开口并且围绕开口与棱镜气密地连接,并且最终暴露面向开口的接触平面。 形成棱镜的接触平面,入射平面和出射平面,使得透射入射平面的光以大于临界角的入射角进入接触平面,并且由接触平面全反射的光通过出射 飞机

    Hand-Held, Self-Contained Optical Emission Spectroscopy (OES) Analyzer
    178.
    发明申请
    Hand-Held, Self-Contained Optical Emission Spectroscopy (OES) Analyzer 有权
    手持式自含光发射光谱(OES)分析仪

    公开(公告)号:US20080212074A1

    公开(公告)日:2008-09-04

    申请号:US12036039

    申请日:2008-02-22

    Abstract: A hand-held, self-contained, battery-powered test instrument for analyzing composition of a sample includes an exciter for exciting at least a portion of the sample, a compact cross-dispersed spectrometer for receiving an optical signal from the excited portion of the sample and a processor for processing spectral data about the optical signal from the spectrometer. The exciter may include a spark generator and a counter electrode, a laser or other device for generating the optical signal from the sample portion. The spectrometer has a wavelength range broad enough to enable the test instrument to detect and determine relative quantities of carbon, phosphorous, sulfur, manganese, silicon, iron and other elements necessary to identify common alloys. The spectrometer includes a structural member made of a light-weight material having a small coefficient of thermal expansion (CTE). The spectrometer is dimensionally stable over a range of expected ambient temperatures, without controlling the temperature of the spectrometer.

    Abstract translation: 用于分析样品组成的手持式独立的,电池供电的测试仪器包括用于激发至少一部分样品的激发器,用于从所述样品的激发部分接收光信号的紧凑型交叉分散光谱仪 样品和用于处理来自光谱仪的光信号的光谱数据的处理器。 励磁机可以包括火花发生器和对电极,用于从样品部分产生光信号的激光器或其它装置。 光谱仪具有足够宽的波长范围,使得测试仪器可以检测和确定识别普通合金所需的碳,磷,硫,锰,硅,铁和其他元素的相对数量。 光谱仪包括由具有小的热膨胀系数(CTE)的轻质材料制成的结构件。 光谱仪在一定范围的预期环境温度下尺寸稳定,而不需要控制光谱仪的温度。

    Method for determining a radiation power and an exposure apparatus

    公开(公告)号:US07417736B2

    公开(公告)日:2008-08-26

    申请号:US10599428

    申请日:2005-03-31

    CPC classification number: G03F7/70558 G03F7/7085

    Abstract: Method for determining a mean radiation power P rad 0 _ of electromagnetic radiation of a radiation source, the radiation being intensity-modulated with modulation frequency ω0, in a predetermined time interval. The method provides a reflector designed to reflect electromagnetic radiation of the radiation source and electromagnetic radiation of a test radiation source, irradiates a predetermined area of the reflector with the source electromagnetic radiation, at least partially irradiates the predetermined area of the reflector with electromagnetic radiation of the test radiation source, measures a ω0-modulated power component Ptest,ω0(t) of a reflected test radiation power Ptest(t) of an electromagnetic radiation of the test radiation source, the radiation being reflected from the area, in the predetermined time interval, determines a mean value P test , ω 0 0 _ of the measured ω0-modulated power component Ptest,ω0(t) of the reflected test radiation power Ptest(t) in the predetermined time interval, and determines the mean radiation power P rad 0 _ from the relationship P rad 0 _ = a · P test , ω 0 0 _ , where a is a predetermined constant.

    Method and apparatus for standoff detection of liveness
    180.
    发明授权
    Method and apparatus for standoff detection of liveness 失效
    方法和装置,用于检测活力

    公开(公告)号:US07417727B2

    公开(公告)日:2008-08-26

    申请号:US11296804

    申请日:2005-12-07

    Abstract: A method for remotely detecting whether a subject is alive, comprising the steps of determining a calibration spectral signature for light reflectance from living skin, normalizing the calibration spectral signature values to the calibration reflectance value at a reference wavelength, storing the normalized calibration spectral signature, determining a subject spectral signature of the light reflectance of a region of skin of the subject whose liveness is to be determined, normalizing the subject spectral signature values to the subject reflectance value at the reference wavelength, comparing the normalized subject spectral signature with the normalized calibration spectral signature for at least one wavelength, generating a subject liveness signal based on the comparison of the normalized subject spectral signature with the normalized calibration spectral signature, and emitting the subject liveness signal.

    Abstract translation: 一种用于远程检测被摄体是否存在的方法,包括以下步骤:确定来自活体皮肤的光反射率的校准光谱特征,将校准光谱特征值归一化为参考波长的校准反射率值,存储标准化校准光谱特征, 确定要确定其活性的对象的皮肤区域的光反射率的对象光谱特征,将所述对象光谱特征值归一化为参考波长处的目标反射值,将归一化的对象光谱特征与归一化校准 用于至少一个波长的光谱特征,基于归一化的主题光谱特征与归一化的校准光谱特征的比较,产生目标活跃度信号,以及发射主体活动信号。

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