公开(公告)号：US20130200789A1

公开(公告)日：2013-08-08

申请号：US13560541

申请日：2012-07-27

Applicant: Chan-wook BAIK ,  Ho-young AHN ,  Yong-sung KIM

Inventor： Chan-wook BAIK ,  Ho-young AHN ,  Yong-sung KIM

IPC: H01J25/34

CPC classification number: H01J25/34 ,  B81B2201/0271 ,  B81C1/00063 ,  B81C1/00619 ,  B81C2201/019 ,  H01J25/40 ,  H01J25/48

Abstract: Electromagnetic wave oscillators each having a multi-tunnel and electromagnetic wave generating apparatuses including the electromagnetic wave oscillators are provided. The electromagnetic wave oscillator includes: a first waveguide which has a folded structure such that a path traveled by an electromagnetic wave through the first waveguide crosses an axial direction a plurality of times; an electron beam tunnel through which an electron beam passes, wherein the electron beam tunnel extends along the axial direction and crosses the first waveguide a plurality of times; and at least one auxiliary tunnel which extends parallel to the electron beam tunnel and which crosses the first waveguide a plurality of times.

Abstract translation: 提供了具有包括电磁波振荡器的多通道和电磁波发生装置的电磁波振荡器。 电磁波振荡器包括：具有折叠结构的第一波导，使得通过第一波导的电磁波行进的路径多次穿过轴向方向; 电子束通过的电子束隧道，其中电子束隧道沿着轴向延伸并与第一波导交叉多次; 以及至少一个平行于电子束通道延伸并且与第一波导跨越多次的辅助通道。

公开(公告)号：US20130146995A1

公开(公告)日：2013-06-13

申请号：US13764558

申请日：2013-02-11

Applicant: STC.UNM

Inventor： Jingkuang Chen

IPC: B06B1/06

CPC classification number: B06B1/06 ,  A61B1/041 ,  A61B8/12 ,  A61B8/4472 ,  A61B8/4488 ,  A61B8/4494 ,  B06B1/0292 ,  B81B2201/0271 ,  B81C1/00095 ,  B81C3/008 ,  G01S15/8929 ,  Y10T29/42

Abstract: Systems, apparatus, and associated methods of forming the systems and/or apparatus may include imaging devices that may comprise multiple arrays of ultrasonic transducer elements for use in a variety of applications. These multiple arrays of ultrasonic transducer elements can be arranged to form a three-dimensional imaging device. Non-coplanar arrays of ultrasonic transducer elements can be coupled together. These imaging devices may be used as medical imaging devices. Additional apparatus, systems, and methods are disclosed.

Abstract translation: 形成系统和/或装置的系统，装置和相关联的方法可以包括可以包括用于各种应用的超声换能器元件的多个阵列的成像装置。 这些多个超声波换能器阵列阵列可被布置成形成三维成像装置。 非共面阵列的超声换能器元件可以耦合在一起。 这些成像装置可以用作医疗成像装置。 公开了附加装置，系统和方法。

公开(公告)号：US08395227B2

公开(公告)日：2013-03-12

申请号：US13344964

申请日：2012-01-06

Applicant: Toru Watanabe ,  Akira Sato ,  Shogo Inaba ,  Takeshi Mori

Inventor： Toru Watanabe ,  Akira Sato ,  Shogo Inaba ,  Takeshi Mori

IPC: H01L29/84 ,  H01L21/00

CPC classification number: B81B3/0086 ,  B81B2201/0271

Abstract: A microelectromechanical system (MEMS) device includes a semiconductor substrate, a MEMS including a fixed electrode and a movable electrode formed on the semiconductor substrate through an insulating layer, and a well formed in the semiconductor substrate below the fixed electrode. The well is one of an n-type well and a p-type well. The p-type well applies a positive voltage to the fixed electrode while the n-type well applies a negative voltage to the fixed electrode.

Abstract translation: 微机电系统（MEMS）器件包括半导体衬底，包括固定电极的MEMS和通过绝缘层形成在半导体衬底上的可移动电极，以及形成在固定电极下方的半导体衬底中的阱。 井是n型井和p型井之一。 p型阱对固定电极施加正电压，而n型阱对固定电极施加负电压。

公开(公告)号：US08269291B2

公开(公告)日：2012-09-18

申请号：US13007130

申请日：2011-01-14

Applicant: Leena Paivikki Buchwalter ,  Kevin Kok Chan ,  Timothy Joseph Dalton ,  Christopher Vincent Jahnes ,  Jennifer Louise Lund ,  Kevin Shawn Petraraca ,  James Louis Speidell ,  James Francis Ziegler

Inventor： Leena Paivikki Buchwalter ,  Kevin Kok Chan ,  Timothy Joseph Dalton ,  Christopher Vincent Jahnes ,  Jennifer Louise Lund ,  Kevin Shawn Petraraca ,  James Louis Speidell ,  James Francis Ziegler

IPC: G01L9/00 ,  H01L29/84

CPC classification number: B81C1/00246 ,  B81B2201/0271 ,  B81C1/0023 ,  B81C2203/0735 ,  H03H3/0072 ,  H03H9/2405

Abstract: A microelectromechanical system (MEMS) resonator or filter including a first conductive layer, one or more electrodes patterned in the first conductive layer which serve the function of signal input, signal output, or DC biasing, or some combination of these functions, an evacuated cavity, a resonating member comprised of a lower conductive layer and an upper structural layer, a first air gap between the resonating member and one or more of the electrodes, an upper membrane covering the cavity, and a second air gap between the resonating member and the upper membrane.

Abstract translation: 一种微机电系统（MEMS）谐振器或滤波器，其包括第一导电层，在第一导电层中图案化的一个或多个电极，其用于信号输入，信号输出或DC偏置的功能，或这些功能的某些组合;抽真空腔 ，由下导电层和上结构层构成的谐振构件，在谐振构件和一个或多个电极之间的第一气隙，覆盖空腔的上膜，以及谐振构件和第二气隙之间的第二气隙 上膜。

公开(公告)号：US20120194286A1

公开(公告)日：2012-08-02

申请号：US13364149

申请日：2012-02-01

Applicant: Josep Montanya Silvestre

Inventor： Josep Montanya Silvestre

IPC: H03L7/00 ,  H01L29/84 ,  H01L21/02

CPC classification number: B81C1/00246 ,  B81B2201/0242 ,  B81B2201/0271 ,  B81C2203/0714 ,  H01L28/40

Abstract: Systems and methods for manufacturing a chip comprising a plurality of MEMS devices arranged in an integrated circuit are provided. In one aspect, the systems and methods provide for a chip including electronic elements formed on a semiconductor material substrate. The chip further includes a stack of interconnection layers including layers of conductor material separated by layers of dielectric material. MEMS devices are formed within the stack of interconnection layers by applying gaseous HF to a first layer of dielectric material positioned highest in the stack of interconnection layers. The stack of interconnection layers includes at least one unetched layer of dielectric material, and at least one layer of conductor material for routing connections to and from the electronic elements.

Abstract translation: 提供了用于制造包括布置在集成电路中的多个MEMS器件的芯片的系统和方法。 在一个方面，所述系统和方法提供了包括形成在半导体材料基板上的电子元件的芯片。 该芯片还包括一叠互连层，包括由电介质材料层隔开的导体材料层。 通过将气态HF施加到位于互连层堆叠中最高位置的第一介电材料层，在互连层的堆叠内形成MEMS器件。 互连层的堆叠包括至少一个介电材料的未蚀刻层，以及至少一层用于将电缆连接到电子元件的导体材料层。

公开(公告)号：US20120133449A1

公开(公告)日：2012-05-31

申请号：US13297692

申请日：2011-11-16

Applicant: Yoko KANEMOTO

Inventor： Yoko KANEMOTO

IPC: H03B5/30 ,  H05K13/00

CPC classification number: H03H9/2457 ,  B81B3/0013 ,  B81B2201/0271 ,  B81B2203/0118 ,  B81C1/00968 ,  H03H2009/02511

Abstract: A movable section located in a hollow portion covered with a wall and a first sealing layer which are on a substrate and the first sealing layer located in an area facing the movable section are provided, the movable section is located between the substrate and the first sealing layer, and at least part of the movable section and the first sealing layer is an electric conductor.

Abstract translation: 设置在位于衬底上的覆盖有中空部分的空心部分和位于与可动部分相对的区域中的第一密封层的可移动部分位于衬底和第一密封件之间 层，并且可动部的至少一部分和第一密封层是电导体。

公开(公告)号：US20120112603A1

公开(公告)日：2012-05-10

申请号：US13280269

申请日：2011-10-24

Applicant: Yuichi Masaki

Inventor： Yuichi Masaki

IPC: H02N1/00 ,  H01L21/28 ,  H01L21/306

CPC classification number: B81C1/00047 ,  B06B1/0292 ,  B81B2201/0271

Abstract: There is provided an electromechanical transducer capable of improving yield and obtaining a cavity having a good internal flatness, and a method of fabricating the same. The electromechanical transducer is fabricated in such a manner that an SOI substrate 209 having an active layer 210 whose surface is planarized on a supporting substrate 201 with a thermal oxide insulating layer 205 interposed therebetween is provided; the active layer is patterned into a cavity shape; insulating films 206 and 207 are formed on the patterned active layer; an etching hole 203 passing through the insulating films and communicating with the active layer is formed; and a cavity 202 is formed by etching away the active layer using the etching hole.

Abstract translation: 提供了能够提高产量并获得具有良好的内部平坦度的空腔的机电换能器及其制造方法。 制造机电换能器，使得具有其表面在其上插入有热氧化物绝缘层205的支撑基板201上被平坦化的有源层210的SOI衬底209被提供; 有源层被图案化成空腔形状; 绝缘膜206和207形成在图案化的有源层上; 形成穿过绝缘膜并与有源层连通的蚀刻孔203; 并且通过使用蚀刻孔蚀刻掉有源层来形成空腔202。

公开(公告)号：US20120058587A1

公开(公告)日：2012-03-08

申请号：US13319970

申请日：2010-05-13

Applicant: Chienliu Chang

Inventor： Chienliu Chang

IPC: H01L21/02

CPC classification number: B06B1/0292 ,  B81B2201/0271 ,  B81B2203/0127 ,  B81C1/00476 ,  B81C2201/0139

Abstract: A capacitive electromechanical transducer includes a substrate, a cavity formed by a vibrating membrane held above the substrate with a certain distance between the vibrating membrane and the substrate by supporting portions arranged on the substrate, a first electrode whose surface is exposed to the cavity, and a second electrode whose surface facing the cavity is covered with an insulating film, wherein the first electrode is provided on a surface of the substrate or a lower surface of the vibrating membrane and the second electrode is provided on a surface of the vibrating membrane or a surface of the substrate so as to face the first electrode. In this transducer, fine particles composed of an oxide film of a substance constituting the first electrode are arranged on the surface of the first electrode, and the diameter of the fine particles is 2 to 200 nm.

Abstract translation: 一种电容式机电换能器，包括基板，由振动膜形成的空腔，该振动膜通过支撑布置在基板上的部分而在振动膜和基板之间具有一定距离而保持在基板上方，其表面暴露于空腔中的第一电极， 面向空腔的表面的第二电极被绝缘膜覆盖，其中第一电极设置在基板的表面或振动膜的下表面上，第二电极设置在振动膜的表面上或 基板的表面以面对第一电极。 在该换能器中，由构成第一电极的物质的氧化物膜构成的微粒子配置在第一电极的表面上，微粒的直径为2〜200nm。

公开(公告)号：US08111108B2

公开(公告)日：2012-02-07

申请号：US12181531

申请日：2008-07-29

Applicant: Alexei Gaidarzhy ,  Pritiraj Mohanty

Inventor： Alexei Gaidarzhy ,  Pritiraj Mohanty

IPC: H03B5/30

CPC classification number: H03H9/02259 ,  B81B3/0086 ,  B81B2201/0271 ,  H03H9/02275 ,  H03H9/02338 ,  H03H9/02417 ,  H03H9/2405 ,  H03H9/2431 ,  H03H9/2463 ,  H03H2009/02354 ,  H03H2009/02464 ,  H03H2009/02496

Abstract: Micromechanical resonating devices, as well as related methods, are described herein. The resonating devices can include a micromechanical resonating structure, an actuation structure that actuates the resonating structure, and a detection structure that detects motion of the resonating structure.

Abstract translation: 本文描述了微机械谐振装置以及相关方法。 谐振装置可以包括微机械谐振结构，致动谐振结构的致动结构以及检测谐振结构的运动的检测结构。

公开(公告)号：US20110271757A1

公开(公告)日：2011-11-10

申请号：US13083806

申请日：2011-04-11

Applicant: Tsuyoshi YODA

Inventor： Tsuyoshi YODA

IPC: H05K1/11 ,  H05K3/32 ,  G01P15/14

CPC classification number: H01L21/76898 ,  B81B7/0006 ,  B81B2201/0242 ,  B81B2201/0271 ,  G01C19/56 ,  G01C19/5776 ,  H01L21/76877 ,  H01L23/481 ,  H01L2924/00 ,  H01L2924/0002 ,  H05K3/225 ,  H05K3/321 ,  H05K3/4038 ,  H05K3/429 ,  H05K3/462 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/49139

Abstract: A wiring substrate includes: a substrate having a first surface and a second surface; a first insulating layer stacked on the first surface; a pad electrode stacked on the first insulating layer; a through electrode connected to the pad electrode; and a second insulating layer disposed between the substrate and the through electrode and between the first insulating layer and the through electrode, wherein a diameter of the through electrode in a connection section between the pad electrode and the through electrode is smaller than a diameter of the through electrode on the second surface side, the first insulating layer, the second insulating layer and the through electrode overlap with each other in a peripheral area of the connection section, when seen from a plan view, and the thickness of the first insulating layer in the area is thinner than the thickness of the first insulating layer in other areas.

Abstract translation: 布线基板包括：具有第一表面和第二表面的基板; 堆叠在第一表面上的第一绝缘层; 堆叠在所述第一绝缘层上的焊盘电极; 连接到焊盘电极的贯通电极; 以及设置在所述基板和所述贯通电极之间并且位于所述第一绝缘层与所述贯通电极之间的第二绝缘层，其中，所述焊盘电极和贯通电极之间的连接部中的贯通电极的直径小于 在第二表面侧的贯通电极，第一绝缘层，第二绝缘层和贯通电极在连接部的周边区域彼此重叠，从平面图看，第一绝缘层的厚度 该区域比其它区域的第一绝缘层的厚度薄。