公开(公告)号：US20100072057A1

公开(公告)日：2010-03-25

申请号：US12564854

申请日：2009-09-22

Applicant: Xiaohong Zhu ,  Emmanuel Defay ,  Eric Fribourg-Blanc

Inventor： Xiaohong Zhu ,  Emmanuel Defay ,  Eric Fribourg-Blanc

IPC: H01G9/00 ,  B05D3/02 ,  C23C16/44 ,  C23C14/34 ,  C23C14/35

CPC classification number: H01G4/12 ,  C23C14/088 ,  C23C14/56 ,  C23C14/5806 ,  C23C14/584

Abstract: The invention relates to a process for forming a lead-based ceramic oxide dielectric material comprising at least one pyrochlore crystalline phase, which process comprises the following steps: a) a step of depositing at least one amorphous layer of said lead-based ceramic oxide material on a substrate; and b) a crystallization annealing step carried out on said amorphous layer at a temperature not exceeding 550° C., by means of which a lead-based ceramic oxide dielectric material comprising at least one pyrochlore phase is obtained. Application to the fabrication of capacitors on integrated circuits.

Abstract translation: 本发明涉及一种用于形成包含至少一个烧绿石结晶相的铅基陶瓷氧化物介电材料的方法，该方法包括以下步骤：a）沉积所述铅基陶瓷氧化物材料的至少一个非晶层的步骤 在基材上 和b）在不超过550℃的温度下对所述非晶层进行结晶退火步骤，通过该步骤获得包含至少一个烧绿石相的铅基陶瓷氧化物电介质材料。 应用于集成电路上电容器的制造。

公开(公告)号：US20100002358A1

公开(公告)日：2010-01-07

申请号：US12311529

申请日：2007-10-16

Applicant: Emmanuel Defay ,  Julie Guillan ,  Serge Blonkowski

Inventor： Emmanuel Defay ,  Julie Guillan ,  Serge Blonkowski

IPC: H01G4/00 ,  B05D5/12 ,  G01R27/26

CPC classification number: H01G4/1218 ,  H01G4/1254 ,  H01G4/33 ,  H01L27/016 ,  H01L28/40 ,  H01L28/56

Abstract: The dielectric of a capacitor is formed by superposition of at least two thin layers made from the same metal oxide, respectively in crystalline and amorphous form and respectively presenting quadratic voltage coefficients of capacitance of opposite signs. The respective thicknesses da and dc of the amorphous and crystalline thin layers comply with the following general formulas: d a = ɛ 0  ɛ a C s   0  ( 1 1 - ( ɛ c ɛ a ) 2  γ a γ c )   and   d c = ɛ 0  ɛ c C s   0  ( 1 1 - ( ɛ a ɛ c ) 2  γ c γ a ) in which ε0 corresponds to the electric constant, εc and εa correspond to the relative permittivity of the metal oxide respectively in crystalline form and in amorphous form, Cs0 corresponds to the total surface capacitance at zero field, and γc and γa correspond to the quadratic coefficient of capacitance with respect to the electric field of the metal oxide respectively in crystalline form and in amorphous form.

Abstract translation: 电容器的电介质通过分别由相同金属氧化物制成的至少两个薄层分别以结晶和非晶形式叠加并且分别呈现相反符号的电容的二次电压系数而形成。 无定形和结晶薄层的各自的厚度da和dc符合以下通式：da =εεεa C s（0）（1 1 - （εcεa）2γ伽马c） 其中epsilon对应于电常数，epsilon和epsilona对应于 金属氧化物的结晶形式和无定形形式的相对介电常数Cs0对应于零场的总表面电容，并且gammac和γa分别对应于分别在金属氧化物中的金属氧化物的电场的二次系数 形式和非晶形式。

公开(公告)号：US09406439B2

公开(公告)日：2016-08-02

申请号：US12564854

申请日：2009-09-22

Applicant: Xiaohong Zhu ,  Emmanuel Defay ,  Eric Fribourg-Blanc

Inventor： Xiaohong Zhu ,  Emmanuel Defay ,  Eric Fribourg-Blanc

IPC: C23C14/24 ,  H01G4/12 ,  C23C14/08 ,  C23C14/56 ,  C23C14/58

CPC classification number: H01G4/12 ,  C23C14/088 ,  C23C14/56 ,  C23C14/5806 ,  C23C14/584

Abstract: The invention relates to a process for forming a lead-based ceramic oxide dielectric material comprising at least one pyrochlore crystalline phase, which process comprises the following steps: a) a step of depositing at least one amorphous layer of said lead-based ceramic oxide material on a substrate; and b) a crystallization annealing step carried out on said amorphous layer at a temperature not exceeding 550° C., by means of which a lead-based ceramic oxide dielectric material comprising at least one pyrochlore phase is obtained. Application to the fabrication of capacitors on integrated circuits.

Abstract translation: 本发明涉及一种用于形成包含至少一个烧绿石结晶相的铅基陶瓷氧化物介电材料的方法，该方法包括以下步骤：a）沉积所述铅基陶瓷氧化物材料的至少一个非晶层的步骤 在基材上 和b）在不超过550℃的温度下对所述非晶层进行结晶退火步骤，通过该步骤获得包含至少一个烧绿石相的铅基陶瓷氧化物电介质材料。 应用于集成电路上电容器的制造。

公开(公告)号：US09281798B2

公开(公告)日：2016-03-08

申请号：US13173219

申请日：2011-06-30

Applicant: Jean-Baptiste David ,  Christophe Billard ,  Emmanuel Defay

Inventor： Jean-Baptiste David ,  Christophe Billard ,  Emmanuel Defay

IPC: H04B1/10 ,  H03H7/40 ,  H03H9/02

CPC classification number: H03H9/02031 ,  H03H7/40

Abstract: A device comprises at the input a first component (PA) having a first output impedance (Z1), at the output a second component (ANT) having a second input impedance (Z2), and an impedance-matching network between said first and second components. Because the first and/or the second impedance vary/varies, said impedance-matching network comprises a filter (Fadp), with an impedance that is matchable to the first and second impedances, located between said first and second components and comprising at least two acoustic wave coupled resonators. At least one of the resonators comprises a perovskite type material and means for applying a voltage to said resonator, which enable the permittivity and the impedance thereof to be varied.

Abstract translation: 一种装置包括在输入端具有第一输出阻抗（Z1）的第一分量（PA），在输出处包括具有第二输入阻抗（Z2）的第二分量（ANT）和在所述第一和第二输出阻抗之间的阻抗匹配网络 组件。 由于第一和/或第二阻抗变化/变化，所述阻抗匹配网络包括滤波器（Fadp），其阻抗与第一和第二阻抗匹配，位于所述第一和第二组件之间，并且包括至少两个 声波耦合谐振器。 谐振器中的至少一个包括钙钛矿型材料和用于向所述谐振器施加电压的装置，其能够改变介电常数和阻抗。

公开(公告)号：US20130342075A1

公开(公告)日：2013-12-26

申请号：US13984542

申请日：2012-01-31

Applicant: Bouhadjar Ahmed Seddik ,  Emmanuel Defay ,  Ghislain Despesse

Inventor： Bouhadjar Ahmed Seddik ,  Emmanuel Defay ,  Ghislain Despesse

IPC: H02N2/18

CPC classification number: H02N2/188 ,  H01L41/113 ,  H01L41/1136

Abstract: An apparatus for converting vibratory mechanical energy into electrical energy includes a mobile mass, a support, first and second beams, the second being piezoelectric, and a junction element. The first beam extends longitudinally between the support and the mass, each of which has a beam end embedded therein. The second beam links the support and the mobile mass. Its elongation stiffness is lower than that of the first beam. The junction element extends between the beams. A first assembly, with a first bending stiffness, comprises the first beam, the second beam, and the junction element. A second assembly consists of the first assembly minus the second beam. Its bending stiffness is less than or equal to half of that of the first assembly.

Abstract translation: 用于将振动机械能转换成电能的装置包括移动质量块，支撑体，第一和第二梁，第二是压电元件和接合元件。 第一梁在支撑件和质量块之间纵向延伸，每个梁具有嵌入其中的梁端。 第二个梁连接支架和移动块。 其伸长刚度低于第一梁的伸长刚度。 连接元件在梁之间延伸。 具有第一弯曲刚度的第一组件包括第一梁，第二梁和接合元件。 第二组件由第一组件减去第二梁组成。 其弯曲刚度小于或等于第一组件的一半。

公开(公告)号：US20120273904A1

公开(公告)日：2012-11-01

申请号：US13518056

申请日：2010-12-21

Applicant: Emmanuel Defay ,  Sebastien Boisseau ,  Ghislain Despesse

Inventor： Emmanuel Defay ,  Sebastien Boisseau ,  Ghislain Despesse

IPC: H01L29/84 ,  H01L21/02

CPC classification number: H03H9/02015 ,  H03H3/04 ,  H03H9/02031 ,  H03H9/173 ,  H03H9/174 ,  H03H9/175

Abstract: This device includes a dielectric stack including at least one electret layer (2E), and two electrodes (16, 20) on two opposite faces (18, 22) of the stack. The electret is mineral. The device notably applies to the field of telecommunications.

Abstract translation: 该装置包括一个包括至少一个驻极体层（2E）和两个电极（16,20）的电介质堆叠，该两个电极位于堆叠的两个相对面（18,22）上。 驻极体是矿物质的。 该设备特别适用于电信领域。

公开(公告)号：US08004154B2

公开(公告)日：2011-08-23

申请号：US12898292

申请日：2010-10-05

Applicant: Matthieu Cueff ,  Emmanuel Defay ,  François Perruchot ,  Patrice Rey

Inventor： Matthieu Cueff ,  Emmanuel Defay ,  François Perruchot ,  Patrice Rey

IPC: H01L41/08

CPC classification number: H01L41/094 ,  H01L41/0825 ,  H01L41/29 ,  H01L41/318 ,  H01L41/332 ,  Y10T29/42

Abstract: The invention relates to a piezoelectric actuation structure including at least one strain gauge and at least one actuator produced from a stack on the surface of a substrate of at least one layer of piezoelectric material arranged between a bottom electrode layer and a top electrode layer, at least a portion of the stack forming the actuator being arranged above a cavity produced in the substrate, characterized in that the strain gauge is a piezoresistive gauge located in the top electrode layer and/or the bottom electrode layer, the layer or layers including electrode discontinuities making it possible to produce said piezoresistive gauge. The invention also relates to a method for producing such a structure.

Abstract translation: 本发明涉及一种压电致动结构，其包括至少一个应变计和至少一个致动器，其由布置在底部电极层和顶部电极层之间的至少一层压电材料层的衬底的表面上的堆叠产生， 形成致动器的堆的至少一部分被布置在衬底中产生的腔的上方，其特征在于应变计是位于顶电极层和/或底电极层中的压阻计，所述层包括电极不连续 使得可以制造所述压阻计。 本发明还涉及这种结构的制造方法。

公开(公告)号：US20110080069A1

公开(公告)日：2011-04-07

申请号：US12898292

申请日：2010-10-05

Applicant: Matthieu CUEFF ,  Emmanuel DEFAY ,  François PERRUCHOT ,  Patrice REY

Inventor： Matthieu CUEFF ,  Emmanuel DEFAY ,  François PERRUCHOT ,  Patrice REY

IPC: H02N2/00 ,  H01L41/22

CPC classification number: H01L41/094 ,  H01L41/0825 ,  H01L41/29 ,  H01L41/318 ,  H01L41/332 ,  Y10T29/42

Abstract: The invention relates to a piezoelectric actuation structure including at least one strain gauge and at least one actuator produced from a stack on the surface of a substrate of at least one layer of piezoelectric material arranged between a bottom electrode layer and a top electrode layer, at least a portion of the stack forming the actuator being arranged above a cavity produced in the substrate, characterized in that the strain gauge is a piezoresistive gauge located in the top electrode layer and/or the bottom electrode layer, the layer or layers including electrode discontinuities making it possible to produce said piezoresistive gauge. The invention also relates to a method for producing such a structure.

Abstract translation: 本发明涉及一种压电致动结构，其包括至少一个应变计和至少一个致动器，其由布置在底部电极层和顶部电极层之间的至少一层压电材料层的衬底的表面上的堆叠产生， 形成致动器的堆的至少一部分被布置在衬底中产生的腔的上方，其特征在于应变计是位于顶电极层和/或底电极层中的压阻计，所述层包括电极不连续 使得可以制造所述压阻计。 本发明还涉及这种结构的制造方法。

公开(公告)号：US20110072901A1

公开(公告)日：2011-03-31

申请号：US12937856

申请日：2009-04-14

Applicant: Emmanuel Defay ,  Marc Aid ,  Pierre-Patrick Lassagne ,  Nicolas Sarrut-Rio

Inventor： Emmanuel Defay ,  Marc Aid ,  Pierre-Patrick Lassagne ,  Nicolas Sarrut-Rio

IPC: G01N29/036

CPC classification number: G01N29/022 ,  G01N2291/014 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0427

Abstract: The device for detecting elements in a fluidic medium comprises at least one acoustic resonator having a surface intended for fixing the elements. The resonator includes means for generating and measuring Lamb waves, favouring the generation of symmetrical Lamb waves. The device analyses the resonant frequency of the resonator in order to determine the variation in the resonant frequency of the symmetrical Lamb waves representative of the presence of the elements.

Abstract translation: 用于检测流体介质中的元件的装置包括至少一个具有用于固定元件的表面的声谐振器。 谐振器包括用于产生和测量兰姆波的装置，有利于产生对称的兰姆波。 器件分析谐振器的谐振频率，以便确定代表元件存在的对称兰姆波的谐振频率的变化。

公开(公告)号：US20060170073A1

公开(公告)日：2006-08-03

申请号：US11336763

申请日：2006-01-23

Applicant: Emmanuel Defay

Inventor： Emmanuel Defay

IPC: H01L29/94

CPC classification number: H01G4/12 ,  H01G4/20 ,  H01G4/33

Abstract: The capacitor is a thin-film capacitor comprising two metal electrodes separated by a dielectric. The dielectric is formed by superposition of at least two sub-layers of preferably perovskite-based dielectric material. Two adjacent superposed dielectric sub-layers are separated by an electrically insulated metal intermediate layer, for example made of platinum. Using very thin dielectric sub-layers, preferably with a thickness of less than 20 nm, separated from one another by metal intermediate layers enables the increase of the breakdown field and the reduction of the leakage currents linked to a reduction of the thickness of the dielectric to be transposed to the level of the capacitor, while preserving a reasonable working field.

Abstract translation: 电容器是包括由电介质隔开的两个金属电极的薄膜电容器。 电介质通过至少两个优选基于钙钛矿的介电材料的子层的叠加而形成。 两个相邻叠加的介电子层由例如由铂制成的电绝缘金属中间层分开。 使用非常薄的电介质子层，优选地具有小于20nm的厚度，通过金属中间层彼此分离，使得能够增加击穿场的增加和与电介质的厚度减小相关的漏电流的减少 被转置到电容器的电平，同时保持合理的工作场。