公开(公告)号：US20230358696A1

公开(公告)日：2023-11-09

申请号：US18347918

申请日：2023-07-06

Applicant: FIBICS INCORPORATED

Inventor： Michael William PHANEUF ,  Ken Guillaume LAGAREC ,  Andrew John MURRAY

IPC: G01N23/2255 ,  G01N1/28 ,  H01J37/20 ,  G01N23/20025

CPC classification number: G01N23/2255 ,  G01N1/286 ,  H01J37/20 ,  G01N23/20025 ,  H01J2237/006 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A method for attaching a prepared sample to a carrier in a focused ion beam chamber. The method includes reducing a temperature within the chamber to substantially below room temperature followed by moving the prepared sample adjacent to a substrate carrier surface. The temperature can be lowered sufficiently to establish a cryogenic condition in the chamber. Attachment of the prepared sample to the substrate carrier is done by controlling the focused ion beam to raster a target area of the surface in the absence of a gas deposition precursor, to sputter material onto the base of the sample and the substrate carrier surface, thereby binding the prepared sample to the substrate carrier.

公开(公告)号：US20200176218A1

公开(公告)日：2020-06-04

申请号：US16784708

申请日：2020-02-07

Applicant: Fibics Incorporated

Inventor： Michael William Phaneuf ,  Ken Guillaume Lagarec

IPC: H01J37/26 ,  H01J37/22 ,  H01J37/28 ,  H01J37/30 ,  H01J37/304 ,  H01J37/305

Abstract: Linear fiducials including notches or chevrons with known angles relative to each other are formed such that each branch of a chevron appears in a cross-sectional face of the sample as a distinct structure. Therefore, when imaging the cross-section face during the cross-sectioning operation, the distance between the identified structures allows unique identification of the position of the cross-section plane along the Z axis. Then a direct measurement of the actual position of each slice can be calculated, allowing for dynamic repositioning to account for drift in the plane of the sample and also dynamic adjustment of the forward advancement rate of the FIB to account for variations in the sample, microscope, microscope environment, etc. that contributes to drift. An additional result of this approach is the ability to dynamically calculate the actual thickness of each acquired slice as it is acquired.

公开(公告)号：US20170140897A1

公开(公告)日：2017-05-18

申请号：US15420844

申请日：2017-01-31

Applicant: Fibics Incorporated

Inventor： Michael William Phaneuf ,  Ken Guillaume Lagarec

IPC: H01J37/305 ,  H01J37/304

CPC classification number: H01J37/26 ,  H01J37/222 ,  H01J37/28 ,  H01J37/3005 ,  H01J37/304 ,  H01J37/3056 ,  H01J2237/226 ,  H01J2237/3174 ,  H01J2237/31749

Abstract: Notches or chevrons with known angles relative to each other are formed on a surface of the sample, where each branch of a chevron appears in a cross-sectional face of the sample as a distinct structure. Therefore, when imaging the cross-section face during the cross-sectioning operation, the distance between the identified structures allows unique identification of the position of the cross-section plane along the Z axis. Then a direct measurement of the actual position of each slice can be calculated, allowing for dynamic repositioning to account for drift in the plane of the sample and also dynamic adjustment of the forward advancement rate of the FIB to account for variations in the sample, microscope, microscope environment, etc. that contributes to drift. An additional result of this approach is the ability to dynamically calculate the actual thickness of each acquired slice as it is acquired.

公开(公告)号：US20250166961A1

公开(公告)日：2025-05-22

申请号：US19029225

申请日：2025-01-17

Applicant: FIBICS INCORPORATED

Inventor： Michael William PHANEUF ,  Ken Guillaume LAGAREC

IPC: H01J37/26 ,  H01J37/22 ,  H01J37/28 ,  H01J37/30 ,  H01J37/304 ,  H01J37/305

Abstract: A method to compensate for drift while controlling a charged particle beam (CPB) system having at least one charged particle beam controllable in position. Sources of drift include mechanical variations in the stage supporting the sample, beam deflection shifts, and environmental impacts, such as temperature. The method includes positioning a sample supported by a stage in the CPB system, monitoring a reference fiducial on a surface of the sample from a start time to an end time, determining a drift compensation to compensate for a drift that causes an unintended change in the position of a first charged particle beam relative to the sample by a known amount over a period of time based on a change in the position of the reference fiducial between the start time and the end time, and adjusting positions of the first charged particle beam by applying the determined drift compensation during an operation of the CPB system.

公开(公告)号：US12007344B2

公开(公告)日：2024-06-11

申请号：US18347918

申请日：2023-07-06

Applicant: FIBICS INCORPORATED

Inventor： Michael William Phaneuf ,  Ken Guillaume Lagarec ,  Andrew John Murray

IPC: G01N23/2255 ,  G01N1/28 ,  G01N23/20025 ,  H01J37/20

CPC classification number: G01N23/2255 ,  G01N1/286 ,  G01N23/20025 ,  H01J37/20 ,  H01J2237/006 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A method for attaching a prepared sample to a carrier in a focused ion beam chamber. The method includes reducing a temperature within the chamber to substantially below room temperature followed by moving the prepared sample adjacent to a substrate carrier surface. The temperature can be lowered sufficiently to establish a cryogenic condition in the chamber. Attachment of the prepared sample to the substrate carrier is done by controlling the focused ion beam to raster a target area of the surface in the absence of a gas deposition precursor, to sputter material onto the base of the sample and the substrate carrier surface, thereby binding the prepared sample to the substrate carrier.

公开(公告)号：US11726050B2

公开(公告)日：2023-08-15

申请号：US17843329

申请日：2022-06-17

Applicant: FIBICS INCORPORATED

Inventor： Michael William Phaneuf ,  Ken Guillaume Lagarec ,  Andrew John Murray

IPC: G01N23/2255 ,  G01N23/20025 ,  G01N1/28 ,  H01J37/20

CPC classification number: G01N23/2255 ,  G01N1/286 ,  G01N23/20025 ,  H01J37/20 ,  H01J2237/006 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A carrier grid with integrated gas delivery system for use in a charged particle beam system (CPB). The carrier grid has a body with an internal reservoir for storing a gas. A post extends from the body with an end for supporting a sample to be operated upon, and an outlet tip extends from the end of the post. A channel extends from the reservoir, through the post and ends in the outlet tip, where the outlet tip seals the stored gas in the body. Cutting the outlet tip near its base, with a focused ion beam (FIB) by example, will open the channel to the CPB chamber, allowing the prestored gas within the reservoir to escape. A FIB or electron beam directed at the junction of the sample positioned near the post will cause deposition and subsequent attachment of the sample to the post in presence of the gas.

公开(公告)号：US20230044598A1

公开(公告)日：2023-02-09

申请号：US17937510

申请日：2022-10-03

Applicant: FIBICS INCORPORATED

Inventor： Michael William PHANEUF ,  Ken Guillaume LAGAREC

IPC: H01J37/26 ,  H01J37/22 ,  H01J37/28 ,  H01J37/30 ,  H01J37/304 ,  H01J37/305

Abstract: A method to compensate for drift while controlling a charged particle beam (CPB) system having at least one charged particle beam controllable in position. Sources of drift include mechanical variations in the stage supporting the sample, beam deflection shifts, and environmental impacts, such as temperature. The method includes positioning a sample supported by a stage in the CPB system, monitoring a reference fiducial on a surface of the sample from a start time to an end time, determining a drift compensation to compensate for a drift that causes an unintended change in the position of a first charged particle beam relative to the sample by a known amount over a period of time based on a change in the position of the reference fiducial between the start time and the end time, and adjusting positions of the first charged particle beam by applying the determined drift compensation during an operation of the CPB system.

公开(公告)号：US20220317072A1

公开(公告)日：2022-10-06

申请号：US17843329

申请日：2022-06-17

Applicant: FIBICS INCORPORATED

Inventor： Michael William PHANEUF ,  Ken Guillaume LAGAREC ,  Andrew John MURRAY

IPC: G01N23/2255 ,  G01N1/28 ,  H01J37/20 ,  G01N23/2202

Abstract: A carrier grid with integrated gas delivery system for use in a charged particle beam system (CPB). The carrier grid has a body with an internal reservoir for storing a gas. A post extends from the body with an end for supporting a sample to be operated upon, and an outlet tip extends from the end of the post. A channel extends from the reservoir, through the post and ends in the outlet tip, where the outlet tip seals the stored gas in the body. Cutting the outlet tip near its base, with a focused ion beam (FIB) by example, will open the channel to the CPB chamber, allowing the prestored gas within the reservoir to escape. A FIB or electron beam directed at the junction of the sample positioned near the post will cause deposition and subsequent attachment of the sample to the post in presence of the gas.

公开(公告)号：US10586680B2

公开(公告)日：2020-03-10

申请号：US15783054

申请日：2017-10-13

Applicant: Fibics Incorporated

Inventor： Michael William Phaneuf ,  Ken Guillaume Lagarec

IPC: H01J37/26 ,  H01J37/304 ,  H01J37/22 ,  H01J37/28 ,  H01J37/30 ,  H01J37/305

Abstract: Notches or chevrons with known angles relative to each other are formed on a surface of the sample, where each branch of a chevron appears in a cross-sectional face of the sample as a distinct structure. Therefore, when imaging the cross-section face during the cross-sectioning operation, the distance between the identified structures allows unique identification of the position of the cross-section plane along the Z axis. Then a direct measurement of the actual position of each slice can be calculated, allowing for dynamic repositioning to account for drift in the plane of the sample and also dynamic adjustment of the forward advancement rate of the FIB to account for variations in the sample, microscope, microscope environment, etc. that contributes to drift. An additional result of this approach is the ability to dynamically calculate the actual thickness of each acquired slice as it is acquired.

公开(公告)号：US20180053627A1

公开(公告)日：2018-02-22

申请号：US15783054

申请日：2017-10-13

Applicant: Fibics Incorporated

Inventor： Michael William Phaneuf ,  Ken Guillaume Lagarec

IPC: H01J37/305 ,  H01J37/304

CPC classification number: H01J37/26 ,  G06T2207/10061 ,  H01J37/222 ,  H01J37/28 ,  H01J37/3005 ,  H01J37/304 ,  H01J37/3045 ,  H01J37/3056 ,  H01J2237/226 ,  H01J2237/2811 ,  H01J2237/3174 ,  H01J2237/31749

Abstract: Notches or chevrons with known angles relative to each other are formed on a surface of the sample, where each branch of a chevron appears in a cross-sectional face of the sample as a distinct structure. Therefore, when imaging the cross-section face during the cross-sectioning operation, the distance between the identified structures allows unique identification of the position of the cross-section plane along the Z axis. Then a direct measurement of the actual position of each slice can be calculated, allowing for dynamic repositioning to account for drift in the plane of the sample and also dynamic adjustment of the forward advancement rate of the FIB to account for variations in the sample, microscope, microscope environment, etc. that contributes to drift. An additional result of this approach is the ability to dynamically calculate the actual thickness of each acquired slice as it is acquired.