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    METHOD FOR CROSS-SECTION SAMPLE PREPARATION
    2.
    发明申请
    METHOD FOR CROSS-SECTION SAMPLE PREPARATION 审中-公开

    公开(公告)号：US20200264115A1

    公开(公告)日：2020-08-20

    申请号：US16754925

    申请日：2018-10-12

    Applicant: Fibics Incorporated

    Inventor： Michael William PHANEUF ,  Ken Guillaume LAGAREC ,  Andrew John MURRAY

    IPC: G01N23/2255 ,  G01N1/28 ,  H01J37/20

    Abstract: A novel method for cross-section sample preparation has a sample oriented normal to an SEM/GFIS or other imaging column via a stage, and is operated upon by an FIB to form the cross-section pre-lamella within the sample, followed by an approximate 90° rotation with no tilt of the stage for cut out by the FIB. Asymmetric trenches are milled to have a three-dimensional depth profile to ensure that the FIB has clear line of sight to a face of the resulting pre-lamella when the sample has been rotated. The three-dimensional depth profile further minimizes overall milling time required for the preparation of the pre-lamella.

    Microscopy imaging method and system
    3.
    发明授权
    Microscopy imaging method and system 有权

    公开(公告)号：US09812290B2

    公开(公告)日：2017-11-07

    申请号：US15420844

    申请日：2017-01-31

    Applicant: Fibics Incorporated

    Inventor： Michael William Phaneuf ,  Ken Guillaume Lagarec

    IPC: H01J37/304 ,  H01J37/305

    CPC classification number: H01J37/26 ,  H01J37/222 ,  H01J37/28 ,  H01J37/3005 ,  H01J37/304 ,  H01J37/3056 ,  H01J2237/226 ,  H01J2237/3174 ,  H01J2237/31749

    Abstract: Notches or chevrons with known angles relative to each other are formed on a surface of the sample, where each branch of a chevron appears in a cross-sectional face of the sample as a distinct structure. Therefore, when imaging the cross-section face during the cross-sectioning operation, the distance between the identified structures allows unique identification of the position of the cross-section plane along the Z axis. Then a direct measurement of the actual position of each slice can be calculated, allowing for dynamic repositioning to account for drift in the plane of the sample and also dynamic adjustment of the forward advancement rate of the FIB to account for variations in the sample, microscope, microscope environment, etc. that contributes to drift. An additional result of this approach is the ability to dynamically calculate the actual thickness of each acquired slice as it is acquired.

    Fiducial guided cross-sectioning and lamella preparation with tomographic data collection
    4.
    发明授权
    Fiducial guided cross-sectioning and lamella preparation with tomographic data collection 有权

    公开(公告)号：US12255044B2

    公开(公告)日：2025-03-18

    申请号：US18432838

    申请日：2024-02-05

    Applicant: FIBICS INCORPORATED

    Inventor： Michael William Phaneuf ,  Ken Guillaume Lagarec

    IPC: H01J37/26 ,  H01J37/22 ,  H01J37/28 ,  H01J37/30 ,  H01J37/304 ,  H01J37/305

    Abstract: Linear fiducials with known angles relative to each other are formed such that their structures appear in a cross-sectional face of the sample as a distinct structure. Therefore, when imaging the cross-section face during the cross-sectioning operation, the distance between the identified structures allows unique identification of the position of the cross-section plane along the Z axis. Then a direct measurement of the actual position of each slice can be calculated, allowing for dynamic repositioning to account for drift in the plane of the sample and also dynamic adjustment of the forward advancement rate of the FIB to account for variations in the sample, microscope, microscope environment, etc. that contributes to drift. An additional result of this approach is the ability to dynamically calculate the actual thickness of each acquired slice as it is acquired.

    Method and system for cross-sectioning a sample with a preset thickness or to a target site
    5.
    再颁专利
    Method and system for cross-sectioning a sample with a preset thickness or to a target site 有权

    公开(公告)号：USRE50001E1

    公开(公告)日：2024-06-04

    申请号：US17465076

    申请日：2021-09-02

    Applicant: FIBICS INCORPORATED

    Inventor： Michael William Phaneuf ,  Ken Guillaume Lagarec

    IPC: H01J37/22 ,  H01J37/26 ,  H01J37/28 ,  H01J37/30 ,  H01J37/304 ,  H01J37/305

    CPC classification number: H01J37/26 ,  H01J37/222 ,  H01J37/28 ,  H01J37/3005 ,  H01J37/304 ,  H01J37/3045 ,  H01J37/3056 ,  G06T2207/10061 ,  H01J2237/226 ,  H01J2237/2811 ,  H01J2237/3174 ,  H01J2237/31749

    Abstract: Linear fiducials including notches or chevrons with known angles relative to each other are formed such that each branch of a chevron appears in a cross-sectional face of the sample as a distinct structure. Therefore, when imaging the cross-section face during the cross-sectioning operation, the distance between the identified structures allows unique identification of the position of the cross-section plane along the Z axis. Then a direct measurement of the actual position of each slice can be calculated, allowing for dynamic repositioning to account for drift in the plane of the sample and also dynamic adjustment of the forward advancement rate of the FIB to account for variations in the sample, microscope, microscope environment, etc. that contributes to drift. An additional result of this approach is the ability to dynamically calculate the actual thickness of each acquired slice as it is acquired. Linear fiducials including notches or chevrons with known angles relative to each other are formed such that each branch of a chevron appears in a cross-sectional face of the sample as a distinct structure. Therefore, when imaging the cross-section face during the cross-sectioning operation, the distance between the identified structures allows unique identification of the position of the cross-section plane along the Z axis. Then a direct measurement of the actual position of each slice can be calculated, allowing for dynamic repositioning to account for drift in the plane of the sample and also dynamic adjustment of the forward advancement rate of the FIB to account for variations in the sample, microscope, microscope environment, etc. that contributes to drift. An additional result of this approach is the ability to dynamically calculate the actual thickness of each acquired slice as it is acquired.

    MICROSCOPY IMAGING METHOD AND SYSTEM
    6.
    发明申请
    MICROSCOPY IMAGING METHOD AND SYSTEM 有权

    公开(公告)号：US20210159046A1

    公开(公告)日：2021-05-27

    申请号：US17138329

    申请日：2020-12-30

    Applicant: FIBICS INCORPORATED

    Inventor： Michael William PHANEUF ,  Ken Guillaume LAGAREC

    IPC: H01J37/26 ,  H01J37/22 ,  H01J37/28 ,  H01J37/30 ,  H01J37/304 ,  H01J37/305

    Abstract: Linear fiducials including notches or chevrons with known angles relative to each other are formed such that each branch of a chevron appears in a cross-sectional face of the sample as a distinct structure. Therefore, when imaging the cross-section face during the cross-sectioning operation, the distance between the identified structures allows unique identification of the position of the cross-section plane along the Z axis. Then a direct measurement of the actual position of each slice can be calculated, allowing for dynamic repositioning to account for drift in the plane of the sample and also dynamic adjustment of the forward advancement rate of the FIB to account for variations in the sample, microscope, microscope environment, etc. that contributes to drift. An additional result of this approach is the ability to dynamically calculate the actual thickness of each acquired slice as it is acquired.

    Method and system for iteratively cross-sectioning a sample to correlatively targeted sites
    7.
    发明授权
    Method and system for iteratively cross-sectioning a sample to correlatively targeted sites 有权

    公开(公告)号：US11462383B2

    公开(公告)日：2022-10-04

    申请号：US17138329

    申请日：2020-12-30

    Applicant: FIBICS INCORPORATED

    Inventor： Michael William Phaneuf ,  Ken Guillaume Lagarec

    IPC: H01J37/26 ,  H01J37/28 ,  H01J37/30 ,  H01J37/304 ,  H01J37/22 ,  H01J37/305

    Abstract: Linear fiducials including notches or chevrons with known angles relative to each other are formed such that each branch of a chevron appears in a cross-sectional face of the sample as a distinct structure. Therefore, when imaging the cross-section face during the cross-sectioning operation, the distance between the identified structures allows unique identification of the position of the cross-section plane along the Z axis. Then a direct measurement of the actual position of each slice can be calculated, allowing for dynamic repositioning to account for drift in the plane of the sample and also dynamic adjustment of the forward advancement rate of the FIB to account for variations in the sample, microscope, microscope environment, etc. that contributes to drift. An additional result of this approach is the ability to dynamically calculate the actual thickness of each acquired slice as it is acquired.

    Method for cross-section sample preparation
    8.
    发明授权
    Method for cross-section sample preparation 有权

    公开(公告)号：US11366074B2

    公开(公告)日：2022-06-21

    申请号：US16754925

    申请日：2018-10-12

    Applicant: Fibics Incorporated

    Inventor： Michael William Phaneuf ,  Ken Guillaume Lagarec ,  Andrew John Murray

    IPC: G01N23/2255 ,  G01N1/28 ,  H01J37/20 ,  G01N23/2202

    Abstract: A novel method for cross-section sample preparation has a sample oriented normal to an SEM/GFIS or other imaging column via a stage, and is operated upon by an FIB to form the cross-section pre-lamella within the sample, followed by an approximate 90° rotation with no tilt of the stage for cut out by the FIB. Asymmetric trenches are milled to have a three-dimensional depth profile to ensure that the FIB has clear line of sight to a face of the resulting pre-lamella when the sample has been rotated. The three-dimensional depth profile further minimizes overall milling time required for the preparation of the pre-lamella.

    Method and system for cross-sectioning a sample with a preset thickness or to a target site
    9.
    发明授权
    Method and system for cross-sectioning a sample with a preset thickness or to a target site 有权

    公开(公告)号：US10886100B2

    公开(公告)日：2021-01-05

    申请号：US16784708

    申请日：2020-02-07

    Applicant: Fibics Incorporated

    Inventor： Michael William Phaneuf ,  Ken Guillaume Lagarec

    IPC: H01J37/22 ,  H01J37/30 ,  H01J37/26 ,  H01J37/28 ,  H01J37/304 ,  H01J37/305

    Abstract: Linear fiducials including notches or chevrons with known angles relative to each other are formed such that each branch of a chevron appears in a cross-sectional face of the sample as a distinct structure. Therefore, when imaging the cross-section face during the cross-sectioning operation, the distance between the identified structures allows unique identification of the position of the cross-section plane along the Z axis. Then a direct measurement of the actual position of each slice can be calculated, allowing for dynamic repositioning to account for drift in the plane of the sample and also dynamic adjustment of the forward advancement rate of the FIB to account for variations in the sample, microscope, microscope environment, etc. that contributes to drift. An additional result of this approach is the ability to dynamically calculate the actual thickness of each acquired slice as it is acquired.

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