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公开(公告)号：US20240290640A1
公开(公告)日：2024-08-29
申请号：US18659343
申请日：2024-05-09
Applicant: Applied Materials, Inc.
Inventor： Chuang-Chia Lin , Wenwei Qiao
IPC: H01L21/67 , C23C16/52 , G01F15/063 , G01F15/14 , G01L15/00 , G01L19/08 , G01L19/14 , G01N25/18 , H01J37/32
CPC classification number: H01L21/67253 , C23C16/52 , G01F15/063 , G01F15/14 , G01L15/00 , G01L19/086 , G01L19/14 , G01N25/18 , H01J37/32715 , H01J37/32935 , H01J37/32082 , H01J2237/2007 , H01J2237/3343 , H01L21/67069
Abstract: A sensor system includes a processing chamber and a sensor assembly disposed within the processing chamber. The sensor assembly includes a substrate and a plurality of sensors including at least one of pressure sensors or flow sensors disposed across a surface of the substrate. Each respective sensor is adapted to measure a respective pressure or a respective flow of an environment proximate the respective sensor. The sensor system further includes a processing device communicatively coupled to the sensor assembly. The processing device is adapted to receive at least one of the measured respective pressures or the measured respective flows and determine a pressure distribution or a flow distribution of the processing chamber.
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12.发明公开公开(公告)号：US20240112885A1
公开(公告)日：2024-04-04
申请号：US18220020
申请日：2023-07-10
Applicant: Applied Materials, Inc.
Inventor： Chuang-Chia Lin
IPC: H01J37/32
CPC classification number: H01J37/3211 , H01J37/32091 , H01J37/32926
Abstract: Embodiments disclosed herein include a diagnostic substrate. In an embodiment, the diagnostic substrate comprises a substrate and a sensor on the substrate. In an embodiment, the diagnostic substrate further comprises a communication module on the substrate that is communicatively coupled to the sensor. In an embodiment, the communication module comprises an output antenna, a switch coupled to the output antenna, and a signal source coupled to the switch.
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公开(公告)号：US11499869B2
公开(公告)日：2022-11-15
申请号：US16682616
申请日：2019-11-13
Applicant: Applied Materials, Inc.
Inventor： Chuang-Chia Lin , Upendra Ummethala
Abstract: Embodiments disclosed herein include an optical sensor system for use in plasma processing tools. In an embodiment, the optical sensor system, comprises an optically clear body with a first surface and a second surface facing away from the first surface. In an embodiment, the optically clear body further comprises a third surface that is recessed from the second surface. In an embodiment, the optical sensor system further comprises a target over the third surface and a first reflector to optically couple the first surface to the target.
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公开(公告)号：US10901021B2
公开(公告)日：2021-01-26
申请号：US16283369
申请日：2019-02-22
Applicant: APPLIED MATERIALS, INC.
Inventor： Chuang-Chia Lin , Upendra Ummethala
Abstract: Embodiments include systems and methods for determining a processing parameter of a processing operation. Some embodiments include a diagnostic substrate that comprises a substrate, a circuit layer over the substrate, a capping layer over the circuit layer, and a sensing region across the capping layer. In an embodiment, the sensing region comprises, an array of first micro resonators and a second micro resonator. In an embodiment, the array of first micro resonators surround the second micro resonator.
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公开(公告)号：US20190265286A1
公开(公告)日：2019-08-29
申请号：US16283364
申请日：2019-02-22
Applicant: APPLIED MATERIALS, INC.
Inventor： Chuang-Chia Lin , Upendra Ummethala
Abstract: Embodiments include systems and methods for determining a processing parameter of a processing operation. Embodiments include a diagnostic substrate for determining processing parameters of a processing operation. In an embodiment, the diagnostic substrate comprises a substrate, a circuit layer over the substrate, and a capping layer over the circuit layer. In an embodiment, a micro resonator sensor is in the circuit layer and the capping layer. In an embodiment, the micro resonator sensor comprises, a resonating body and one or more electrodes for inducing resonance in the resonating body.
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Patent Agency Ranking
公开(公告)号：US12216015B2
公开(公告)日：2025-02-04
申请号：US18531478
申请日：2023-12-06
Applicant: Applied Materials, Inc.
Inventor： Chuang-Chia Lin , David Peterson , Philip Allan Kraus , Amir Bayati
Abstract: Embodiments disclosed herein include diagnostic substrates and methods of using the diagnostic substrates to extract plasma parameters. In an embodiment, a diagnostic substrate comprises a substrate and an array of resonators across the substrate. In an embodiment, the array of resonators comprises at least a first resonator with a first structure and a second resonator with a second structure. In an embodiment, the first structure is different than the second structure.
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公开(公告)号：US12176188B2
公开(公告)日：2024-12-24
申请号：US17715866
申请日：2022-04-07
Applicant: Applied Materials, Inc.
Inventor： Chuang-Chia Lin , Wenwei Qiao
Abstract: Embodiments disclosed herein include a diagnostic substrate. In an embodiment, the diagnostic substrate comprises a substrate, a circuit board on the substrate, and a spectrometer coupled to the circuit board. In an embodiment, the diagnostic substrate further comprises a processor on the circuit board and communicatively coupled to the spectrometer.
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18.发明公开公开(公告)号：US20240331989A1
公开(公告)日：2024-10-03
申请号：US18128032
申请日：2023-03-29
Applicant: Applied Materials, Inc.
Inventor： Chuang-Chia Lin
CPC classification number: H01J37/3299 , G01B11/06 , G01N21/31 , H01L22/26 , H01J37/3244
Abstract: Embodiments disclosed herein include a semiconductor processing tool. In an embodiment, the semiconductor processing tool comprises a chamber, and a diagnostic device integrated with the chamber. In an embodiment, the diagnostic device comprises a board, a spectrometer on the board, and a housing around the board.
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公开(公告)号：US12009235B2
公开(公告)日：2024-06-11
申请号：US17109019
申请日：2020-12-01
Applicant: Applied Materials, Inc.
Inventor： Chuang-Chia Lin , Wenwei Qiao
IPC: H01L21/67 , C23C16/52 , G01F15/06 , G01F15/063 , G01F15/14 , G01L15/00 , G01L19/08 , G01L19/14 , G01N25/18 , H01J37/32
CPC classification number: H01L21/67253 , C23C16/52 , G01F15/063 , G01F15/14 , G01L15/00 , G01L19/086 , G01L19/14 , G01N25/18 , H01J37/32715 , H01J37/32935 , H01J37/32082 , H01J2237/2007 , H01J2237/3343 , H01L21/67069
Abstract: A sensor assembly that includes a substrate and a set of sensors. The set of sensor includes pressure sensor and/or flow sensors located across a surface of the substrate. Each respective sensor of the plurality of sensor is adapted to measure a respective pressure or a respective flow of an environment proximate the respective sensor. Each respective sensor of the plurality of sensor may further be adapted to output a respective signal associated with the measured respective pressure or the measured respective flow. The respective signals associated with the measured respective pressure or the measured respective flows measured by the plurality of sensor together provide a pressure distribution across the surface of the substrate and/or a flow distribution across the surface of the substrate.
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公开(公告)号：US11920994B2
公开(公告)日：2024-03-05
申请号：US17068733
申请日：2020-10-12
Applicant: Applied Materials, Inc.
Inventor： Chuang-Chia Lin
CPC classification number: G01L11/04 , G01K1/024 , G01K11/265 , G01L19/086
Abstract: A sensor assembly that includes a surface acoustic wave (SAW) sensor. The SAW sensor is adapted to measure a first environmental condition in response to receiving an RF signal. The SAW sensor includes a substrate having a layer of piezoelectric material. The SAW sensor further includes a interdigitated transducer (IDT) formed on the piezoelectric material. The IDT includes two comb-shaped electrodes having interlocking conducting digits in a first arrangement. The interlocking conducting digits in the first arrangement generates a first signal modulation of an RF signal received by the first IDT. The first signal modulation identifies the first SAW sensor.
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