-
公开(公告)号：US20220064794A1
公开(公告)日：2022-03-03
申请号：US17522869
申请日：2021-11-09
Applicant: Applied Materials, Inc.
Inventor： Colin C. Neikirk , Pravin K. Narwankar , Kaushal Gangakhedkar , Visweswaren Sivaramakrishnan , Jonathan Frankel , David Masayuki Ishikawa , Quoc Truong , Joseph Yudovsky
IPC: C23C16/455 , C23C16/44 , C23C16/442
Abstract: A reactor for coating particles includes one or more motors, a rotary vacuum chamber configured to hold particles to be coated, wherein the rotary vacuum chamber is coupled to the motors, a controller configured to cause the motors to rotate the rotary vacuum chamber about an axial axis of the rotary vacuum chamber such that the particles undergo tumbling agitation, a vacuum port to exhaust gas from the rotary vacuum chamber, a paddle assembly including a rotatable drive shaft extending through the rotary vacuum chamber and coupled to the motors and at least one paddle extending radially from the drive shaft, such that rotation of the drive shaft by the motors orbits the paddle about the drive shaft in a second direction, and a chemical delivery system including a gas outlet on the paddle configured inject process gas into the particles.
-
公开(公告)号：US12071685B2
公开(公告)日：2024-08-27
申请号：US18205273
申请日：2023-06-02
Applicant: Applied Materials, Inc.
Inventor： Jonathan Frankel , Quoc Truong , Sekar Krishnasamy , Govindraj Desai , Sandip S. Desai
IPC: C23C16/44 , B01F27/051 , B01F27/07 , B01F27/072 , B01F27/112 , B01F27/70 , B01J19/00 , B01J19/18 , C23C16/455
CPC classification number: C23C16/4417 , B01F27/051 , B01F27/0726 , B01F27/074 , B01F27/112 , B01F27/70 , B01J19/0066 , B01J19/18 , C23C16/45555
Abstract: A method of coating particles includes dispensing particles into a vacuum chamber to form a particle bed in at least a lower portion of the chamber that forms a half-cylinder, evacuating the chamber through a vacuum port in an upper portion of the chamber, rotating a paddle assembly such that a plurality of paddles orbit a drive shaft to stir the particles in the particle bed, injecting a reactant or precursor gas through a plurality of channels into the lower portion of the chamber as the paddle assembly rotates to coat the particles, and injecting the reactant or precursor gas or a purge gas through the plurality of channels at a sufficiently high velocity such that the reactant or precursor a purge gas de-agglomerates particles in the particle bed.
-
公开(公告)号：US20230313368A1
公开(公告)日：2023-10-05
申请号：US18205273
申请日：2023-06-02
Applicant: Applied Materials, Inc.
Inventor： Jonathan Frankel , Quoc Truong , Sekar Krishnasamy , Govindraj Desai , Sandip S. Desai
IPC: C23C16/44 , C23C16/455 , B01J19/00 , B01J19/18 , B01F27/051 , B01F27/70 , B01F27/07 , B01F27/112 , B01F27/072
CPC classification number: C23C16/4417 , C23C16/45555 , B01J19/0066 , B01J19/18 , B01F27/051 , B01F27/70 , B01F27/074 , B01F27/112 , B01F27/0726
Abstract: A method of coating particles includes dispensing particles into a vacuum chamber to form a particle bed in at least a lower portion of the chamber that forms a half-cylinder, evacuating the chamber through a vacuum port in an upper portion of the chamber, rotating a paddle assembly such that a plurality of paddles orbit a drive shaft to stir the particles in the particle bed, injecting a reactant or precursor gas through a plurality of channels into the lower portion of the chamber as the paddle assembly rotates to coat the particles, and injecting the reactant or precursor gas or a purge gas through the plurality of channels at a sufficiently high velocity such that the reactant or precursor a purge gas de-agglomerates particles in the particle bed.
-
公开(公告)号：US20220032258A1
公开(公告)日：2022-02-03
申请号：US17073111
申请日：2020-10-16
Applicant: Applied Materials, Inc
Inventor： Govindraj Desai , Sekar Krishnasamy , Sumedh Acharya , Dakshalkumar Patel , Jonathan Frankel , Quoc Truong , Mario Cambron , Ravindra Patil
Abstract: A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a chemical delivery system, and a paddle assembly. The paddle assembly includes a rotatable drive shaft and a first plurality of paddles and a second plurality of paddles that extend radially from the drive shaft. The spacing, cross-sections, and oblique angles of the paddles are such that orbiting of the paddles causes the first plurality of paddles and the second plurality of paddles to displace substantially equal volumes in opposite directions in the lower portion of the stationary vacuum chamber.
-
公开(公告)号：US11180851B2
公开(公告)日：2021-11-23
申请号：US16438382
申请日：2019-06-11
Applicant: Applied Materials, Inc.
Inventor： Colin C. Neikirk , Pravin K. Narwankar , Kaushal Gangakhedkar , Visweswaren Sivaramakrishnan , Jonathan Frankel , David Masayuki Ishikawa , Quoc Truong , Joseph Yudovsky
IPC: C23C16/455 , C23C16/44 , C23C16/442
Abstract: A reactor for coating particles includes one or more motors, a rotary vacuum chamber configured to hold particles to be coated and coupled to the motors, a controller configured to cause the motors to rotate the chamber in a first direction about an axial axis at a rotation speed sufficient to force the particles to be centrifuged against an inner diameter of the chamber, a vacuum port to exhaust gas from the rotary vacuum chamber, a paddle assembly including a rotatable drive shaft extending through the chamber and coupled to the motors and at least one paddle extending radially from the drive shaft, such that rotation of the drive shaft by the motors orbits the paddle about the drive shaft in a second direction, and a chemical delivery system including a gas outlet on the paddle configured inject process gas into the particles.
-
Patent Agency Ranking
公开(公告)号：US11174552B2
公开(公告)日：2021-11-16
申请号：US16438371
申请日：2019-06-11
Applicant: Applied Materials, Inc.
Inventor： Colin C. Neikirk , Pravin K. Narwankar , Kaushal Gangakhedkar , Visweswaren Sivaramakrishnan , Jonathan Frankel , David Masayuki Ishikawa , Quoc Truong , Joseph Yudovsky
IPC: C23C16/455 , C23C16/44 , C23C16/442
Abstract: A reactor for coating particles includes one or more motors, a rotary vacuum chamber configured to hold particles to be coated, wherein the rotary vacuum chamber is coupled to the motors, a controller configured to cause the motors to rotate the rotary vacuum chamber about an axial axis of the rotary vacuum chamber such that the particles undergo tumbling agitation, a vacuum port to exhaust gas from the rotary vacuum chamber, a paddle assembly including a rotatable drive shaft extending through the rotary vacuum chamber and coupled to the motors and at least one paddle extending radially from the drive shaft, such that rotation of the drive shaft by the motors orbits the paddle about the drive shaft in a second direction, and a chemical delivery system including a gas outlet on the paddle configured inject process gas into the particles.
-
公开(公告)号：US12134091B2
公开(公告)日：2024-11-05
申请号：US18212599
申请日：2023-06-21
Applicant: Applied Materials, Inc.
Inventor： Jonathan Frankel , Colin C. Neikirk , Pravin K. Narwankar , Quoc Truong , Govindraj Desai , Sekar Krishnasamy
IPC: C23C16/44 , B01F27/112 , B01F27/70 , B01J8/10 , B05D1/00 , B01F101/22
Abstract: A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a vacuum port in an upper portion of the chamber, a chemical delivery system configured to inject a reactant or precursor gas into a lower portion of the chamber, a paddle assembly, and a motor to rotate a drive shaft of the paddle assembly. The lower portion of the chamber forms a half-cylinder. The paddle assembly includes a rotatable drive shaft extending through the chamber along the axial axis of the half cylinder, and a plurality of paddles extending radially from the drive shaft such that rotation of the drive shaft by the motor orbits the plurality of paddles about the drive shaft.
-
公开(公告)号：US11717800B2
公开(公告)日：2023-08-08
申请号：US16855860
申请日：2020-04-22
Applicant: Applied Materials, Inc.
Inventor： Jonathan Frankel , Colin C. Neikirk , Pravin K. Narwankar , Quoc Truong , Govindraj Desai , Sekar Krishnasamy
IPC: B01J8/10 , C23C16/44 , B05D1/00 , B01F27/70 , B01F27/112 , B01F101/22
CPC classification number: B01J8/10 , B01F27/112 , B01F27/70 , B05D1/60 , C23C16/4417 , B01F2101/22 , B01J2208/00867
Abstract: A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a vacuum port in an upper portion of the chamber, a chemical delivery system configured to inject a reactant or precursor gas into a lower portion of the chamber, a paddle assembly, and a motor to rotate a drive shaft of the paddle assembly. The lower portion of the chamber forms a half-cylinder. The paddle assembly includes a rotatable drive shaft extending through the chamber along the axial axis of the half cylinder, and a plurality of paddles extending radially from the drive shaft such that rotation of the drive shaft by the motor orbits the plurality of paddles about the drive shaft.
-
公开(公告)号：US11692265B2
公开(公告)日：2023-07-04
申请号：US17697845
申请日：2022-03-17
Applicant: Applied Materials, Inc.
Inventor： Jonathan Frankel , Quoc Truong , Sekar Krishnasamy , Govindraj Desai , Sandip S. Desai
IPC: C23C16/44 , C23C16/455 , B01J19/00 , B01J19/18 , B01F27/051 , B01F27/70 , B01F27/07 , B01F27/112 , B01F27/072
CPC classification number: C23C16/4417 , B01F27/051 , B01F27/074 , B01F27/0726 , B01F27/112 , B01F27/70 , B01J19/0066 , B01J19/18 , C23C16/45555
Abstract: A method of coating particles includes dispensing particles into a vacuum chamber to form a particle bed in at least a lower portion of the chamber that forms a half-cylinder, evacuating the chamber through a vacuum port in an upper portion of the chamber, rotating a paddle assembly such that a plurality of paddles orbit a drive shaft to stir the particles in the particle bed, injecting a reactant or precursor gas through a plurality of channels into the lower portion of the chamber as the paddle assembly rotates to coat the particles, and injecting the reactant or precursor gas or a purge gas through the plurality of channels at a sufficiently high velocity such that the reactant or precursor a purge gas de-agglomerates particles in the particle bed.
-
公开(公告)号：US11299806B2
公开(公告)日：2022-04-12
申请号：US16855887
申请日：2020-04-22
Applicant: Applied Materials, Inc.
Inventor： Jonathan Frankel , Quoc Truong , Sekar Krishnasamy , Govindraj Desai , Sandip S. Desai
IPC: C23C16/44 , C23C16/455 , B01J19/00 , B01J19/18 , B01F27/051 , B01F27/70 , B01F27/07 , B01F27/112 , B01F27/072
Abstract: A method of coating particles includes dispensing particles into a vacuum chamber to form a particle bed in at least a lower portion of the chamber that forms a half-cylinder, evacuating the chamber through a vacuum port in an upper portion of the chamber, rotating a paddle assembly such that a plurality of paddles orbit a drive shaft to stir the particles in the particle bed, injecting a reactant or precursor gas through a plurality of channels into the lower portion of the chamber as the paddle assembly rotates to coat the particles, and injecting the reactant or precursor gas or a purge gas through the plurality of channels at a sufficiently high velocity such that the reactant or precursor a purge gas de-agglomerates particles in the particle bed.
-
-
-
-
-
-
-
-
-
Search Results
22
records
(took 0.018 seconds)
