Silicon Photonics Device for LIDAR Sensor and Method for Fabrication

    公开(公告)号:US20230161105A1

    公开(公告)日:2023-05-25

    申请号:US18051337

    申请日:2022-10-31

    CPC classification number: G02B6/136 G01S7/4816 G02B2006/12107

    Abstract: A structure of a silicon photonics device for LIDAR includes a first insulating structure and a second insulating structure disposed above one or more etched silicon structures overlying a substrate member. A metal layer is disposed above the first insulating structure without a prior deposition of a diffusion barrier and adhesion layer. A thin insulating structure is disposed above the second insulating structure. A first configuration of the metal layer, the first insulating structure and the one or more etched silicon structures forms a free-space coupler. A second configuration of the thin insulating structure above the second insulating structure forms an edge coupler.

    Silicon Photonics Device for LIDAR Sensor and Method for Fabrication

    公开(公告)号:US20230161006A1

    公开(公告)日:2023-05-25

    申请号:US17853674

    申请日:2022-06-29

    CPC classification number: G01S7/4813 G01S17/931

    Abstract: A structure of a silicon photonics device for LIDAR includes a first insulating structure and a second insulating structure disposed above one or more etched silicon structures overlying a substrate member. A metal layer is disposed above the first insulating structure without a prior deposition of a diffusion barrier and adhesion layer. A thin insulating structure is disposed above the second insulating structure. A first configuration of the metal layer, the first insulating structure and the one or more etched silicon structures forms a free-space coupler. A second configuration of the thin insulating structure above the second insulating structure forms an edge coupler.

    Solid-State Light Detection and Ranging (LIDAR) System with Real-Time Self-Calibration

    公开(公告)号:US20250130321A1

    公开(公告)日:2025-04-24

    申请号:US18990658

    申请日:2024-12-20

    Inventor: Sen Lin

    Abstract: A light detection and ranging system. The system includes a solid-state optical antenna array, a phase monitor array, a phase controller, a plurality of phase shifters and a global phase shifter. The phase monitor array is configured to output a first mixed signal associated with one of the optical antenna subarrays, and a second mixed signal associated with two of the optical antenna subarrays. The phase controller is configured to output a first phase coefficient based on the first mixed signal and a second phase coefficient based on the second mixed signal. One of the phase shifters is configured to apply the first phase coefficient to compensate for temperature variation within one of the optical antenna subarrays. The global phase shifter is configured to apply the second phase coefficient to compensate for temperature variation between two of the optical antenna subarrays.

    Heat dissipation for LIDAR sensors
    15.
    发明授权

    公开(公告)号:US12222451B2

    公开(公告)日:2025-02-11

    申请号:US18184260

    申请日:2023-03-15

    Inventor: Sen Lin Lei Wang

    Abstract: A light detection and ranging (LIDAR) device includes a substrate layer, a cladding layer, a waveguide, and an ohmic element. The cladding layer is disposed with the substrate layer. The waveguide runs through the cladding layer. The ohmic element runs through the cladding layer. The ohmic element is arranged to impart heat to the waveguide when an electrical current is driven through the ohmic element.

    LIDAR sensor system including integrated modulator

    公开(公告)号:US12222448B1

    公开(公告)日:2025-02-11

    申请号:US18516671

    申请日:2023-11-21

    Abstract: A light detection and ranging (LIDAR) sensor system for a vehicle can include: a light source configured to output a beam; a photonics integrated circuit (PIC) including a semiconductor die, the semiconductor die including a substrate having two or more semiconductor stacks respectively associated with two or more semiconductor devices formed on the substrate, the two or more semiconductor devices respectively configured to receive the beam from the light source and modify one or more features of the beam; a transmitter configured to receive the beam from the semiconductor die; and one or more optics configured to receive the beam from the transmitter and emit the beam towards an object.

    Light Detection and Ranging (LIDAR) Sensor System Including Integrated Chip

    公开(公告)号:US20250035869A1

    公开(公告)日:2025-01-30

    申请号:US18359127

    申请日:2023-07-26

    Abstract: Manufacturing an integrated chip packaging for a LIDAR sensor mounted to a vehicle includes obtaining a metallic housing including a cutout on a side of the metallic housing, obtaining a ceramic radio frequency (RF) circuit board including a flange, coupling the flange of the ceramic RF circuit board to the cutout on the side of the metallic housing, applying a sealing material to an interface between the flange of the ceramic RF circuit board and the cutout on the side of the metallic housing, and locally heating the flange of the ceramic RF circuit board to bond the flange of the ceramic RF circuit board to the cutout on the side of the metallic housing thereby forming a seal at the interface.

    Silicon-assisted packaging of high power integrated SOA array

    公开(公告)号:US12199411B2

    公开(公告)日:2025-01-14

    申请号:US18486208

    申请日:2023-10-13

    Abstract: A photonic integrated circuit (PIC) assembly comprising a semiconductor optical amplifier (SOA) array and a U-turn chip. The SOA array includes an input SOA and a plurality of SOAs. The input SOA and the plurality of SOAs are arranged parallel to one another. The U-turn chip includes an optical splitter and a waveguide assembly. The optical splitter is configured to receive amplified input light propagating in a first direction from the input SOA, and divide the amplified light into beams. The waveguide assembly guides the beams to a corresponding SOA of the plurality of SOAs, and adjusts a direction of prorogation of each of the guided beams to be substantially parallel to a second direction that is substantially opposite the first direction.

    LIDAR sensor system for vehicles including integrated LIDAR chip

    公开(公告)号:US12199401B1

    公开(公告)日:2025-01-14

    申请号:US18511387

    申请日:2023-11-16

    Abstract: A LIDAR sensor system for a vehicle includes a silicon photonics substrate. The silicon photonics substrate includes: a semiconductor wafer; one or more surface features on a first surface of the semiconductor wafer; and a photoresist layer formed on the first surface of the semiconductor wafer, wherein the photoresist layer includes a laminated dry film. The silicon photonics substrate can be manufactured by obtaining a semiconductor wafer having one or more surface features; applying a dry film photoresist layer to a first surface of the semiconductor wafer; performing an adhesion bake process on the semiconductor wafer; developing the dry film photoresist layer to produce one or more developed regions in the dry film photoresist layer; and forming one or more solder bumps in the one or more developed regions.

    LIDAR pixel with active polarization control

    公开(公告)号:US12181606B2

    公开(公告)日:2024-12-31

    申请号:US17870493

    申请日:2022-07-21

    Abstract: A light detection and ranging (LIDAR) pixel includes a splitter, a grating coupler, and a phase shifter. The grating coupler is configured to emit a transmit beam that is based on a combination of a first portion of light and a second portion of light received from a laser. One or more first interconnects and one or more second interconnects couple the splitter to the grating coupler. The phase shifter is coupled to the one or more first interconnects and configured to vary a phase of the first portion of the light relative to a phase of the second portion of the light.

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