公开(公告)号：US11726050B2

公开(公告)日：2023-08-15

申请号：US17843329

申请日：2022-06-17

Applicant: FIBICS INCORPORATED

Inventor： Michael William Phaneuf ,  Ken Guillaume Lagarec ,  Andrew John Murray

IPC: G01N23/2255 ,  G01N23/20025 ,  G01N1/28 ,  H01J37/20

CPC classification number: G01N23/2255 ,  G01N1/286 ,  G01N23/20025 ,  H01J37/20 ,  H01J2237/006 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A carrier grid with integrated gas delivery system for use in a charged particle beam system (CPB). The carrier grid has a body with an internal reservoir for storing a gas. A post extends from the body with an end for supporting a sample to be operated upon, and an outlet tip extends from the end of the post. A channel extends from the reservoir, through the post and ends in the outlet tip, where the outlet tip seals the stored gas in the body. Cutting the outlet tip near its base, with a focused ion beam (FIB) by example, will open the channel to the CPB chamber, allowing the prestored gas within the reservoir to escape. A FIB or electron beam directed at the junction of the sample positioned near the post will cause deposition and subsequent attachment of the sample to the post in presence of the gas.

公开(公告)号：US10586680B2

公开(公告)日：2020-03-10

申请号：US15783054

申请日：2017-10-13

Applicant: Fibics Incorporated

Inventor： Michael William Phaneuf ,  Ken Guillaume Lagarec

IPC: H01J37/26 ,  H01J37/304 ,  H01J37/22 ,  H01J37/28 ,  H01J37/30 ,  H01J37/305

Abstract: Notches or chevrons with known angles relative to each other are formed on a surface of the sample, where each branch of a chevron appears in a cross-sectional face of the sample as a distinct structure. Therefore, when imaging the cross-section face during the cross-sectioning operation, the distance between the identified structures allows unique identification of the position of the cross-section plane along the Z axis. Then a direct measurement of the actual position of each slice can be calculated, allowing for dynamic repositioning to account for drift in the plane of the sample and also dynamic adjustment of the forward advancement rate of the FIB to account for variations in the sample, microscope, microscope environment, etc. that contributes to drift. An additional result of this approach is the ability to dynamically calculate the actual thickness of each acquired slice as it is acquired.

公开(公告)号：US20180053627A1

公开(公告)日：2018-02-22

申请号：US15783054

申请日：2017-10-13

Applicant: Fibics Incorporated

Inventor： Michael William Phaneuf ,  Ken Guillaume Lagarec

IPC: H01J37/305 ,  H01J37/304

CPC classification number: H01J37/26 ,  G06T2207/10061 ,  H01J37/222 ,  H01J37/28 ,  H01J37/3005 ,  H01J37/304 ,  H01J37/3045 ,  H01J37/3056 ,  H01J2237/226 ,  H01J2237/2811 ,  H01J2237/3174 ,  H01J2237/31749

Abstract: Notches or chevrons with known angles relative to each other are formed on a surface of the sample, where each branch of a chevron appears in a cross-sectional face of the sample as a distinct structure. Therefore, when imaging the cross-section face during the cross-sectioning operation, the distance between the identified structures allows unique identification of the position of the cross-section plane along the Z axis. Then a direct measurement of the actual position of each slice can be calculated, allowing for dynamic repositioning to account for drift in the plane of the sample and also dynamic adjustment of the forward advancement rate of the FIB to account for variations in the sample, microscope, microscope environment, etc. that contributes to drift. An additional result of this approach is the ability to dynamically calculate the actual thickness of each acquired slice as it is acquired.